KR100741142B1 - 복수의 테이블을 가진 리니어 가이드 장치 - Google Patents
복수의 테이블을 가진 리니어 가이드 장치 Download PDFInfo
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- KR100741142B1 KR100741142B1 KR1020050114620A KR20050114620A KR100741142B1 KR 100741142 B1 KR100741142 B1 KR 100741142B1 KR 1020050114620 A KR1020050114620 A KR 1020050114620A KR 20050114620 A KR20050114620 A KR 20050114620A KR 100741142 B1 KR100741142 B1 KR 100741142B1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/30—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members controlled in conjunction with the feed mechanism
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/28—Electric drives
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Abstract
Description
Claims (4)
- 메인 베이스(2)의 상하측에 각각 테이블(3)(3‘)을 설치하되, 상기 메인 베이스(2)와 테이블(3)(3‘)에는 각각 LM레일(4)과 LM블록(5)을 결합하고, 서로 대응하는 이송수단(6)을 설치한 복수의 테이블(3)(3’)을 가진 리니어 가이드 장치(1)에 있어서,상기 메인 베이스(2)의 상측 혹은 하측에는 2개의 테이블(3)을 설치하되,상기 메인 베이스(2)와 2개의 테이블(3)에는 각각 LM레일(4)과 LM블록(5)을 결합하고, 서로 대응하는 이송수단(6)을 설치한 것을 특징으로 하는 복수의 테이블을 가진 리니어 가이드 장치.
- 제 1항에 있어서,상기 이송수단(6)은 메인 베이스(2)에 설치되는 리니어모터 고정자(6a)와, 테이블(3)(3‘)에 설치되는 리니어모터 가동자(6b)를 포함하는 리니어모터타입 혹은 메인 베이스(2)의 길이방향으로 설치되는 볼 스크루 축(6c)과, 볼 스크루 축(6c)을 구동하도록 메인 베이스(2)에 설치한 모터(6d)와, 볼 스크루 축(6c)에 나사 결합되도록 테이블(3)(3‘)에 마련한 볼 스크루 너트(6e)를 포함하는 볼 스크루타입으로 구성된 것을 특징으로 하는 복수의 테이블을 가진 리니어 가이드 장치.
- 제 2항에 있어서,상기 이송수단(6)이 리니어모터타입인 경우 메인 베이스(2)에 고정되는 리니어모터 고정자와 대응하는 리니어모터 가동자가 결합된 테이블(3)(3’)을 2개 이상 복수로 설치한 것을 특징으로 하는 복수의 테이블을 가진 리니어 가이드 장치.
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KR1020050114620A KR100741142B1 (ko) | 2005-11-29 | 2005-11-29 | 복수의 테이블을 가진 리니어 가이드 장치 |
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KR1020050114620A KR100741142B1 (ko) | 2005-11-29 | 2005-11-29 | 복수의 테이블을 가진 리니어 가이드 장치 |
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KR2020050033683U Division KR200408239Y1 (ko) | 2005-11-29 | 2005-11-29 | 복수의 테이블을 가진 리니어 가이드 장치 |
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KR100741142B1 true KR100741142B1 (ko) | 2007-07-23 |
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Cited By (29)
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US8137466B2 (en) | 2009-08-24 | 2012-03-20 | Samsung Mobile Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8852687B2 (en) | 2010-12-13 | 2014-10-07 | Samsung Display Co., Ltd. | Organic layer deposition apparatus |
US8859043B2 (en) | 2011-05-25 | 2014-10-14 | Samsung Display Co., Ltd. | Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8859325B2 (en) | 2010-01-14 | 2014-10-14 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US8865252B2 (en) | 2010-04-06 | 2014-10-21 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8871542B2 (en) | 2010-10-22 | 2014-10-28 | Samsung Display Co., Ltd. | Method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus manufactured by using the method |
US8876975B2 (en) | 2009-10-19 | 2014-11-04 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US8882922B2 (en) | 2010-11-01 | 2014-11-11 | Samsung Display Co., Ltd. | Organic layer deposition apparatus |
US8882556B2 (en) | 2010-02-01 | 2014-11-11 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US8894458B2 (en) | 2010-04-28 | 2014-11-25 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US8906731B2 (en) | 2011-05-27 | 2014-12-09 | Samsung Display Co., Ltd. | Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus |
US8945974B2 (en) | 2012-09-20 | 2015-02-03 | Samsung Display Co., Ltd. | Method of manufacturing organic light-emitting display device using an organic layer deposition apparatus |
US8951610B2 (en) | 2011-07-04 | 2015-02-10 | Samsung Display Co., Ltd. | Organic layer deposition apparatus |
US8968829B2 (en) | 2009-08-25 | 2015-03-03 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8973525B2 (en) | 2010-03-11 | 2015-03-10 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US9018647B2 (en) | 2010-09-16 | 2015-04-28 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US9051636B2 (en) | 2011-12-16 | 2015-06-09 | Samsung Display Co., Ltd. | Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus |
US9234270B2 (en) | 2011-05-11 | 2016-01-12 | Samsung Display Co., Ltd. | Electrostatic chuck, thin film deposition apparatus including the electrostatic chuck, and method of manufacturing organic light emitting display apparatus by using the thin film deposition apparatus |
US9249493B2 (en) | 2011-05-25 | 2016-02-02 | Samsung Display Co., Ltd. | Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus by using the same |
US9257649B2 (en) | 2012-07-10 | 2016-02-09 | Samsung Display Co., Ltd. | Method of manufacturing organic layer on a substrate while fixed to electrostatic chuck and charging carrier using contactless power supply module |
US9279177B2 (en) | 2010-07-07 | 2016-03-08 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US9347886B2 (en) | 2013-06-24 | 2016-05-24 | Samsung Display Co., Ltd. | Apparatus for monitoring deposition rate, apparatus provided with the same for depositing organic layer, method of monitoring deposition rate, and method of manufacturing organic light emitting display apparatus using the same |
US9388488B2 (en) | 2010-10-22 | 2016-07-12 | Samsung Display Co., Ltd. | Organic film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US9450140B2 (en) | 2009-08-27 | 2016-09-20 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same |
US9496317B2 (en) | 2013-12-23 | 2016-11-15 | Samsung Display Co., Ltd. | Method of manufacturing organic light emitting display apparatus |
US9496524B2 (en) | 2012-07-10 | 2016-11-15 | Samsung Display Co., Ltd. | Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus manufactured using the method |
US9512515B2 (en) | 2011-07-04 | 2016-12-06 | Samsung Display Co., Ltd. | Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US9748483B2 (en) | 2011-01-12 | 2017-08-29 | Samsung Display Co., Ltd. | Deposition source and organic layer deposition apparatus including the same |
US10246769B2 (en) | 2010-01-11 | 2019-04-02 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH08322233A (ja) * | 1995-05-29 | 1996-12-03 | Fanuc Ltd | 2軸共用リニアモータ |
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- 2005-11-29 KR KR1020050114620A patent/KR100741142B1/ko active IP Right Grant
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JPH08322233A (ja) * | 1995-05-29 | 1996-12-03 | Fanuc Ltd | 2軸共用リニアモータ |
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US8137466B2 (en) | 2009-08-24 | 2012-03-20 | Samsung Mobile Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8968829B2 (en) | 2009-08-25 | 2015-03-03 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
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