KR100699128B1 - A vacuum apparatus for drying substrate - Google Patents

Abstract

A vacuum apparatus for drying a substrate is provided to minimize an installation area by using a conveyer type substrate transfer unit and a conveyer type chamber transfer unit. A vacuum apparatus for drying a substrate comprises one or more vacuum chamber(100) having a chamber door and a vacuum pump(130). The vacuum apparatus further includes a substrate transfer unit(200) and a chamber transfer unit. The substrate transfer unit includes a transfer substrate contactor(210) for transferring a substrate with respect to the vacuum chamber, a transfer driver(220) for providing transfer force to the transfer substrate contactor, and a transfer device(230) for applying the transfer force to the transfer substrate contactor. The chamber transfer unit includes a chamber substrate contactor for transferring the substrate, a chamber driver for providing the transfer force to the chamber substrate contactor, and a chamber transfer device for applying the transfer force to the chamber substrate contactor.

Description

Substrate vacuum drying device {A VACUUM APPARATUS FOR DRYING SUBSTRATE}

1A is a schematic perspective view of a substrate vacuum drying apparatus according to an embodiment of the present invention.

FIG. 1B is a schematic side cross-sectional view of the substrate vacuum drying apparatus of FIG. 1A.

2 is a front sectional view schematically illustrating another modification of the transfer substrate contactor and / or the chamber substrate contactor of the substrate vacuum drying apparatus according to the present invention.

3 is a partially enlarged cross-sectional view showing an example of the heating heater of the substrate vacuum drying apparatus according to the present invention.

4A is a schematic side cross-sectional view of a substrate vacuum drying apparatus according to another embodiment of the present invention.

4B is a schematic front sectional view of the substrate vacuum drying apparatus of FIG. 4A.

5A and 5B are schematic front views showing a modification to the lifting unit and the like according to the present invention.

* Explanation of symbols for main parts of drawings *

100 ... vacuum chamber 110 ... chamber window

120 ... chamber door 130 ... vacuum pump

140.Heating heater 200 ... Substrate transfer part

210 ... feed board contactor 220 ... feed driver

230 Feed conveyor 300 Chamber feed unit

310 ... chamber substrate contactor 320 ... chamber driver

330 chamber transmitter 400 lift

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate drying apparatus for evaporating and drying a solvent loaded on a substrate in a process of processing a substrate used in manufacturing a substrate for a flat panel display device such as an LCD, and more particularly, to a substrate vacuum drying apparatus. will be.

In general, the LCD realizes a display by changing the arrangement of liquid crystals injected between two substrates by an electrical signal applied to an electrode formed on each substrate, thereby controlling the amount of light emitted from the backlight unit disposed on the rear surface. As a flat panel display device, a thin film transistor layer having a multilayer structure is stacked on one substrate, and a color filter and a common electrode are stacked on another substrate. Such a thin film transistor layer is patterned by a patterning process, and a photolithography process using a photoresist is mainly used for the patterning process.

In such a photolithography process, the photoresist used contains a large amount of solvent. The photoresist contains approximately 85% of highly volatile solvents. To remove this, the drying process is performed in a vacuum drying apparatus.

Typically, the transfer of the substrate loaded in the vacuum chamber during the drying process in such a vacuum drying apparatus is transferred and loaded through the robot arm. That is, the substrate is placed on a plurality of fins arranged in the chamber using the multi-axis robot arm and a vacuum drying process is performed to remove the solvent remaining on the substrate.

However, in the case of the vacuum drying apparatus using the robot arm according to the prior art, even if the path of the robot arm is optimized in the process of transporting the substrate, a fairly large foot print, that is, the surface area of the facility is required, In particular, the multi-axis robot arm is accompanied by problems such as expensive equipment, a considerable installation cost, and the substrate transfer process using the robot arm is quite complicated.

An object of the present invention is to provide a substrate vacuum drying apparatus that solves the above-mentioned problems.

According to an aspect of the present invention, there is provided a substrate vacuum drying apparatus including at least one vacuum chamber having a chamber door for inflow and outflow of a substrate, and a vacuum pump providing a vacuum state in the vacuum chamber. A transfer substrate contactor for supporting and transferring a substrate to the vacuum chamber, a transfer driver for providing a transfer force to the transfer substrate contactor, and a transfer transfer unit for transferring the transfer force generated by the transfer driver to the transfer substrate contactor, A substrate transfer part disposed outside the vacuum chamber; And a chamber substrate contactor capable of seating or conveying a substrate and placing the substrate on the same extension line as the transfer substrate contactor, a chamber driver providing a transfer force to the chamber substrate contactor, and transferring the transfer force generated by the chamber driver to the chamber substrate contactor. And a chamber transfer unit disposed in the vacuum chamber to provide a substrate vacuum drying apparatus.

In the substrate vacuum drying apparatus, at least one of the transfer substrate contactor and the chamber substrate contactor is composed of a conveyor belt, and at least one of the transfer transmitter and the chamber transmitter is in close contact with the conveyor belt. It may be configured as.

In the substrate vacuum drying apparatus, at least one of the transfer substrate contactor and the chamber substrate contactor may be constituted by a drive roller, and at least one of the transfer transmitter and the chamber transfer unit may be configured by the drive roller drive shaft.

In the substrate vacuum drying apparatus, the drive roller may include an elastic member on at least an outer circumferential surface.

In the substrate vacuum drying apparatus, the vacuum chamber may further include a heating heater.

In the substrate vacuum drying apparatus, a plurality of vacuum chambers are provided, the lift actuators which are disposed on the substrate transfer unit and stretchable to lift and lower the substrate transfer unit, and the lift driver that provides the stretch drive force for stretching the lift actuators. And, it may further include a lifting unit including a lifting controller for controlling the transmission of the stretching drive force to the lifting actuator. The lift driver may include a lift motor configured to generate a lift driving force according to a lift control signal of the lift controller, and the lift driver is provided to correspond to a lift drive pulley connected to the lift driver, and a lift drive pulley. And a lift drive belt connecting a driven pulley and the lift drive pulley and the lift driven pulley, wherein the substrate transfer part may be connected to the lift drive belt through a substrate transfer part connecting rod extending from one side of the substrate transfer part. In addition, the lifting actuator includes a lifting hydraulic actuator having a lifting hydraulic pneumatic piston and a lifting hydraulic pneumatic cylinder mounted to the substrate transfer, the lifting driver includes a lifting hydraulic pump for pressurizing the working fluid provided to the lifting hydraulic actuator In addition, the lifting controller may include a lifting hydraulic control valve for controlling the flow of the working fluid between the lifting hydraulic actuator and the lifting hydraulic pump.

Hereinafter, a substrate vacuum drying apparatus according to the present invention will be described with reference to the drawings.

1A is a schematic perspective view of a substrate vacuum drying apparatus according to an embodiment of the present invention, and FIG. 1B is a schematic cross-sectional view of the substrate vacuum drying apparatus 10 of FIG. 1A. The substrate vacuum drying apparatus 10 includes a vacuum chamber 100, a substrate transfer part 200, and a chamber transfer part 300.

The vacuum chamber 100 includes a chamber window 110 and a chamber door 120 that opens and closes the chamber window 110. The chamber window 110 is opened and closed by the chamber door 120 as an opening to allow the substrate 1 to flow into or out of the vacuum chamber 100, which chamber door 120 is connected to the chamber window 120. It can be transported along the chamber door guide groove 121 disposed at the side edge of the 110. The conveying force of the chamber door 120 may be operated by a chamber door driver (not shown), and in a range capable of sealing the chamber window, such as a protruding rail may be disposed instead of the chamber door guide groove. Various configurations are possible.

The upper end of the vacuum chamber 100 is provided with an exhaust port 107 for discharging the air inside the vacuum chamber 100 in order to maintain a vacuum in the interior space of the vacuum chamber 100, the exhaust port 107 is an exhaust duct ( 131 is in fluid communication with the vacuum pump 130.

The substrate transfer part 200 is disposed outside the vacuum chamber 100, more specifically, outside the vacuum chamber 100, in the vicinity of the chamber door 120. The substrate transfer unit 200 includes a transfer contactor 210, a transfer driver 220, and a transfer transfer unit 230 disposed on the substrate transfer unit base 201.

The transfer contactor 210 supports one surface of the substrate 1 to transfer the substrate 1 to the vacuum chamber 100. The transfer contactor 210 may be configured as a conveyor belt, but the transfer contactor 210 formed as a conveyor belt may be configured as an endless belt type having flexibility, but is not limited thereto.

The transfer driver 220 is formed to extend in a direction perpendicular to the traveling direction of the transfer motor 221 and the transfer contactor 210 to generate a transfer force provided to the transfer contactor to generate the driving force generated from the transfer motor 221. And a feed motor shaft 223 for discharging. In this embodiment, the feed motor 221 and the feed motor shaft 223 are disposed at the end of the substrate transfer part 200, and are disposed in both directions of the axis perpendicular to the traveling direction of the transfer contactor 210 at the end side, Although two feed motors and two feed motor shafts (not shown) are shown to be provided, only one feed motor / feed motor shaft may be disposed on either side, or on either side or on both sides of the substrate transfer portion. Various modifications are possible, depending on the design specifications. The feed motor 221 has a configuration capable of forward rotation and reverse rotation.

The transfer transmitter 230 transfers the transfer force generated from the transfer driver 200 to the transfer substrate contactor. The transfer transmitter 230 includes the transfer transmitter housing 231, the transfer drive pulley 233, and the transfer driven pulley. 235, transfer drive belt 236, transfer transfer belt 237, transfer conveyor drive shaft 238, transfer conveyor driven shaft 239. The transfer transmitter housing 231 is disposed at both sides of the transfer driver 200 in a direction perpendicular to the substrate transfer direction of the transfer contactor 210 of the transfer driver 200. The transfer drive pulley 233 is disposed inside the transfer transmitter housing 231, and one side of the transfer drive pulley 233 is connected to the transfer motor shaft 223 to form a coaxial shaft. The feed drive pulley 233 and the feed motor shaft 223 are shown as overlapping in FIG. 1B, but they are only coaxially arranged without actually overlapping. The transfer drive pulley 233 is connected to the transfer driven pulley 235 disposed inside the transfer transmitter housing 231 through the transfer drive belt 236, so that the transfer force input through the transfer motor shaft 223 is transferred. It is transmitted through the transfer driven pulley 235 through the drive pulley 233 and the transfer drive belt 236. On the other hand, the substrate transfer part end side transfer transmitter housing 231 of the side on which the vacuum chamber is disposed opposite the substrate transfer part end side on which the transfer drive pulley 233 disposed coaxially with the transfer motor shaft 223 is disposed. The transfer transfer pulley 234 may be further provided therein. The transfer drive pulley 233 and the transfer transfer pulley 234 are connected by the transfer transfer belt 237, and like the transfer drive pulley 233, the transfer transfer pulley 234 is transferred through the transfer drive belt 236. It is connected to the driven pulley 235. The transfer driven pulley 235 is connected with the transfer conveyor drive shaft 238.

A transfer shaft opening 232 is provided inside the transfer transmitter housing 231, and a transfer conveyor drive shaft 238 connected to the transfer driven pulley 235 is disposed through the transfer shaft opening 232. In the present exemplary embodiment, two transfer conveyor drive shafts 238 are illustrated, but the number of transfer conveyor drive shafts 238 is not limited thereto. Several conveying conveyor driven shafts 239 are arranged through the conveying shaft openings 232 alongside the conveying conveyor drive shaft 238, the conveying conveyor driven shaft 239 being a journal inside the conveying transmitter housing 231. It may take the structure rotatably supported by a bearing.

The outer circumferential surfaces of the transfer conveyor drive shaft 238 and the transfer conveyor driven shaft 239 have a structure in contact with the inner circumferential surface of the transfer conveyor belt, which is the transfer contactor 210, to be generated by the transfer driver 220, and to transfer the transfer transmitter 230. The transfer force transmitted through the transfer conveyor drive shaft 238 is transferred to the transfer contactor 210, the transfer contactor 210 forms a transfer movement, the transfer conveyor driven shaft 239 in contact with the transfer of the transfer contactor 210 By performing the degree of conveying movement, a smooth conveying on the conveying contactor 210 surface is enabled.

The chamber transfer unit 300 is disposed inside the vacuum chamber 100 and includes a chamber substrate contactor 310, a chamber driver 320, and a chamber transfer unit 330. The chamber transfer unit 300 also has a structure similar to that of the substrate transfer unit. Take it. The chamber substrate contactor 310 may be constructed of an endless conveyor belt type. Here, the chamber substrate contactor 310 should be coplanar with the transfer substrate contactor 210 to enable smooth transfer of the substrate 1. The chamber driver 320 includes a chamber motor 321 and a chamber motor shaft 323. The chamber motor 321 has a structure capable of forward rotation and reverse rotation. The chamber transmitter 330 includes a chamber transmitter housing 331, a chamber shaft opening 332, a chamber drive pulley 333, a chamber driven pulley 335, a chamber drive belt 336, a chamber conveyor drive shaft 338, Chamber conveyor driven shaft 339.

The chamber transmitter housing 331 is disposed on both sides in a longitudinal direction parallel to the substrate transfer direction, similar to the substrate transfer housing, and has a chamber shaft opening 332 for discharging the chamber conveyor drive shaft / drive shaft which will be described later inward. ) Is placed. The chamber driver 320 is disposed between the chamber transmitter housing 331. The transfer force generated from the chamber motor 321 is transmitted to the chamber transmitter 330 through the chamber motor shaft 323. The chamber drive pulley 333 of the chamber transmitter 330 is connected to the chamber motor shaft 323, and rotates together as the chamber motor shaft 323 rotates. The chamber drive pulley 333 is connected to the chamber driven pulley 335 through the chamber drive belt 336, and the transfer force transmitted from the chamber motor shaft 323 is transferred to the chamber driven pulley 335 through the chamber drive belt 336. Is delivered. Here, the chamber transmitter 330 is shown in a configuration that does not include a transfer transfer pulley / transfer transfer belt, unlike the substrate transfer unit, but is not limited thereto.

A chamber conveyor driving shaft 338 is connected to one side of the chamber driven pulley 335, and a chamber conveyor driven shaft 339 is disposed in parallel with the chamber conveyor driving shaft 338, and the chamber conveyor driven shaft 339 is a chamber transmitter. A chamber shaft opening 332 formed inside the housing 331 is rotatably supported through an element such as a journal bearing. The outer circumferential surfaces of the chamber conveyor drive shaft 338 and the chamber conveyor driven shaft 339 are in contact with the inner circumferential surface of the chamber substrate contactor 310 of the endless conveyor belt type.

In the above embodiment, the various actuators may be operated individually through individual controllers (not shown), or may be integrated through one controller (not shown).

The operating procedure for this embodiment is as follows. When the substrate 1 is brought into contact with the transfer substrate contactor 210 of the substrate transfer part 200, the chamber door 120 of the vacuum chamber 100 moves upward to move the chamber window of the vacuum chamber 100 ( Open 110).

Thereafter, the power generated from the transfer driver 220 rotates the transfer conveyor drive shaft 238 via the transfer transmitter 230, and the transfer driver 220 rotates forward. As the transfer conveyor drive shaft 238 rotates, the transfer substrate contactor 210 rotates.

The transfer substrate contactor 210 of the endless conveyor belt type transfers the substrate 1 to the vacuum chamber 100 side. When the substrate 1 reaches a predetermined position, the position of the substrate 1 is detected by a pre-installed detector (not shown), and when the substrate 1 is transferred into the vacuum chamber 100, the chamber transfer part ( By operating the chamber driver 320 of 300, the transfer force for transferring the substrate within the chamber is transmitted to the chamber substrate contactor 310 via the chamber transmitter 330. The substrate seated in the chamber substrate contactor 310 from the transfer substrate contactor 210 is stably transferred into the vacuum chamber 100, and when the predetermined position within the vacuum chamber 100 is reached, the chamber driver 320 is reached. Stops.

Thereafter, the chamber door 120 of the vacuum chamber 100 descends to close the chamber window 110, and the vacuum pump 130 operates to form a vacuum state in the vacuum chamber 100.

After a certain working time in the vacuum chamber 100 has elapsed, the operation of the vacuum pump 130 is stopped, and in order to prevent a sudden pressure change due to the opening of the chamber door 120 of the vacuum chamber 100, an exhaust port Incremental negative pressure removal is carried out, for example.

Then, when the chamber door 120 is opened and the chamber driver 320 of the chamber transfer part 300 moves in the reverse direction to discharge the substrate 1 through the chamber window 110, and reaches a predetermined position, The substrate transfer part 200 also operates to enable smooth substrate transfer from the chamber transfer part 300 to the substrate transfer part 200, thereby taking out the substrate from the vacuum chamber.

Meanwhile, in the above embodiment, the transfer substrate contactor and the chamber substrate contactor are configured as an endless belt conveyor belt type, but the present invention is not limited thereto. That is, a modification of the substrate transfer part is shown in FIG. 2, wherein the same components as those shown in FIGS. 1A and 1B use the same reference numerals. The transfer force generated from the transfer motor 221 of the substrate transfer part 200 is transmitted to the transfer drive pulley 233 through the transfer motor shaft 223, and the transfer force is transferred to the transfer drive pulley 233 and the transfer drive belt 336. Is transferred to the transfer driven pulley 235. One side of the driven driven pulley 235 is connected to the drive roller drive shaft 238-1, and a plurality of drive rollers 210-1 as the transfer substrate contactor are disposed on the outer circumferential surface of the drive roller drive shaft 238-1. The at least one outer peripheral surface of the driving roller 210-1 may be provided as an elastic member, thereby preventing the sliding movement between the driving roller 210-1 and the substrate 1 to be substantially excluded. Of course, several roller driven shafts (not shown) disposed in parallel with the drive roller drive shaft 238-1 may be further provided, and a plurality of rollers disposed on the outer circumferential surface of the roller driven shaft may also take the same configuration as the drive rollers. It is also possible to apply the same to not only the substrate transfer part but also the chamber transfer part disposed inside the vacuum chamber.

In addition, a heating heater for forcibly heating the substrate may be further provided inside the vacuum chamber. That is, as shown in Figure 3, the wall of the vacuum chamber 100 may be formed of a double structure (101, 103) having an interspace 105, a heating heater 140 is disposed in the interspace. have.

On the other hand, the vacuum chamber in the above embodiment has been described with respect to the example composed of a single chamber, the present invention is not limited to this, but may be composed of a substrate vacuum drying apparatus of a multiple chamber type. That is, as shown in Figures 4a and 4b, the substrate vacuum drying apparatus according to another embodiment of the present invention is provided with a plurality of vacuum chamber (100a-1, 100a-2), each vacuum chamber (100a) The chamber transfer parts 300a-1 and 300a-2 are disposed at the -1,100a-2, and the vacuum pump 130a and the exhaust port 107a-1, 107a-2 and the exhaust duct 131a are formed in the respective vacuum chambers. In the exhaust duct 131a, exhaust valves 135a-1 and 135a-2 for controlling the atmosphere of each of the vacuum chambers 100a-1 and 100a-2 are disposed. Here, the vacuum pump 130a has a structure connected through the exhaust valves 135a-1 and 135a-2, but various configurations are possible, such as the vacuum pump may be individually disposed for each vacuum chamber.

In the present exemplary embodiment, the substrate transfer part and the chamber transfer part perform only the same functions as the same elements as the reference numerals, and the detailed description thereof will be omitted.

In order to smoothly transfer the substrate to the chamber transfer units 300a-1 and 300a-2 of the first vacuum chamber 100a-1 and the second vacuum chamber 100a-2, the substrate transfer unit 200a needs a lifting movement. This is achieved by the lifting unit 400a. That is, as shown in FIGS. 4A and 4B, the lift unit 400a includes a lift actuator 410a, a lift driver 420a, and a lift controller 430a.

The lift controller 430a transmits a lift control signal to the lift driver 420a for the lift to the corresponding vacuum chamber through the lift control line 431a when the vacuum chamber to be interacted with the substrate transfer unit is selected. The lift driver 420a operates according to the lift control signal.

The lift driver 420a may take the form of an electric motor that operates according to an electrical signal. The lift driving force generated from the lift driver 420a is transmitted to the lift actuator 410a through the lift drive shaft 421a of the lift driver 420a. The lift actuator 410a includes a lift drive pulley 411a, a lift driven pulley 413a, and a lift drive belt 415a. In FIG. 4B, the lift drive pulley 411a and the lift drive shaft 421a overlap each other. This is because the lift drive pulley 411a and the lift drive shaft 421a are coaxially arranged. The outer side of the elevating drive belt 415a is connected to the transfer transmitter housing of the substrate transfer part through the substrate transfer part connection 471a. Therefore, when the lift driver 420a operates, the lift drive pulley 411a / lift drive belt 415a / lift driven pulley 413a connected to the lift drive shaft 421a interact with each other to move the lift drive belt 415a. The substrate transfer part connecting member 471a mounted on one side of the substrate transfer part 471a also moves up and down, and the substrate transfer part 200a connected to the substrate transfer part connecting member 471a moves up and down. When the substrate transfer part 200a is disposed at a preset position with respect to the vacuum chamber, the subsequent process is the same as in the previous embodiment.

In the embodiment of FIGS. 4A and 4B, the lifting portions are shown to be disposed with respect to the front and rear ends on both sides of the substrate transfer portion, but the present invention is not limited thereto.

In the above embodiment, the lifting portion is configured as a pulley / belt type, but when a large amount of power is required for the lifting and lowering of the substrate transfer portion, the lifting portion may be configured as a pneumatic device. That is, as shown in FIG. 5A, the lifting unit 400b includes a lifting actuator 410a, a lifting mechanism 420a, and a lifting controller 430b, and the lifting actuator 410a includes a substrate transfer unit connecting rod. It is mounted to one end of the elevating hydraulic pneumatic piston 413b of the elevating actuator 410b via 471b, and includes an elevating hydraulic cylinder 411b and an elevating hydraulic pneumatic piston 413b, and the elevating actuator 420b is a working fluid (air). A lift hydraulic pneumatic pump for pressurizing and pumping oil, and the lift controller 430b includes a lift hydraulic control valve for controlling the flow of a working fluid between the lift hydraulic pump and the lift hydraulic actuator. The substrate transfer part is mounted to one end of the lifting hydraulic pneumatic piston 413b of the lifting actuator 410b through the substrate transfer part connecting rod 471b.

FIG. 5B is a schematic front view of the lifting unit and the like in which the lifting driving force by the lifting driver raises the substrate transfer unit by operating the lifting actuator in accordance with the lifting signal of the lifting control unit. That is, the elevating controller 430b configured as the hydraulic controller provides the working fluid pressurized by the elevating driver 420a to the elevating actuator 410b through the elevating hydraulic pressure line 415b, or from the elevating actuator 410b. Discharge it. Accordingly, the lifting cylinder 411b and the lifting piston 413b of the lifting actuator 410b can raise and lower the substrate transfer part 200b by performing relative movement. Here, the lifting piston 413b is composed of a two-stage hydraulic pneumatic piston, but is not limited thereto, and may be formed in one to a plurality of stages, and the lifting actuator may be configured only by hydraulic pressure or pneumatically or in combination. Various modifications are possible depending on the design specification, such as the number of the lift controller and the lift driver constituted by the hydraulic controller may vary depending on the design specification.

The above embodiments are examples for describing the present invention, but the present invention is not limited thereto. That is, the heating heater may be configured in a plate type and disposed at the top / bottom of the chamber substrate contactor, or may take a hot plate structure disposed directly inside the chamber substrate contactor. In addition, various modifications are possible, such as control units for controlling the operation of the respective components may be integrated into one.

The substrate vacuum drying apparatus according to the present invention having the configuration as described above has the following effects.

First, the substrate vacuum drying apparatus according to the present invention can minimize the installation area of the apparatus by providing a substrate conveying unit and a chamber conveying unit of a simple conveyor type.

Second, the substrate vacuum drying apparatus according to the present invention may have an advantage that the process is simplified and the process efficiency is improved by providing a substrate transfer part and a chamber transfer part of a simple structure.

Third, the substrate vacuum drying apparatus according to the present invention has an advantage of shortening the process time and minimizing the process equipment cost by providing the conveyor type substrate transfer part and the chamber transfer part.

Fourth, the substrate vacuum drying apparatus according to the present invention has an advantage of maximizing productivity by providing a plurality of vacuum chambers and lifting portions.

Although the present invention has been described with reference to one embodiment shown in the drawings, this is merely exemplary, and it will be understood by those skilled in the art that various modifications and equivalent other embodiments are possible. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

Claims (8)

A substrate vacuum drying apparatus comprising at least one vacuum chamber having a chamber door for inflow and outflow of a substrate and a vacuum pump providing a vacuum state in the vacuum chamber, A transfer substrate contactor supporting one surface of a substrate to transfer the substrate to the vacuum chamber, a transfer driver providing a transfer force to the transfer substrate contactor, and a transfer transfer transferring the transfer force generated by the transfer driver to the transfer substrate contactor A substrate transfer part including a device and disposed outside the vacuum chamber; And A chamber substrate contactor capable of seating or transporting a substrate and placing the substrate on the same extension line as the transfer substrate contactor, a chamber driver providing a transfer force to the chamber substrate contactor, and transferring the transfer force generated by the chamber driver to the chamber substrate contactor And a chamber transfer unit including a chamber transfer unit and disposed in the vacuum chamber. The method of claim 1, At least one of the transfer substrate contactor and the chamber substrate contactor is composed of a conveyor belt, and at least one of the transfer transmitter and the chamber transmitter is composed of a conveyor belt drive shaft disposed in close contact with the conveyor belt. Vacuum drying device. The method of claim 1, And at least one of said transfer substrate contactor and said chamber substrate contactor is comprised of a drive roller, and at least one of said transfer transmitter and said chamber transmitter is comprised of said drive roller drive shaft. The method of claim 3, And said drive roller comprises an elastic member on at least an outer circumferential surface. The method of claim 1, And said vacuum chamber further comprises a heating heater. The method of claim 1, The vacuum chamber is provided with a plurality, An elevating actuator capable of elevating the substrate conveying portion connected to the substrate conveying portion, an elevating driver for providing an extensible driving force for stretching the elevating actuator, and an elevating controller for controlling the transfer of the extruding driving force to the elevating actuator. Further comprising a lifting unit including a substrate vacuum drying apparatus. The method of claim 6, The lift driver includes a lift motor that generates a lift driving force in accordance with a lift control signal of the lift controller, The lift actuator includes a lift drive pulley connected to the lift driver, a lift driven pulley disposed to correspond to the lift drive pulley, a lift drive belt connecting the lift drive pulley and the lift driven pulley, And the substrate transfer part is connected to the lifting drive belt through a substrate transfer part connecting rod extending from one side of the substrate transfer part. The method of claim 6, The lift actuator includes a lift hydraulic actuator mounted on the substrate transfer unit and having a lift hydraulic pneumatic piston and a lift hydraulic pneumatic cylinder, The lift driver includes a lift hydraulic pump for pressurizing a working fluid provided to the lift hydraulic actuator, And the lift controller includes a lift hydraulic control valve for controlling a flow of a working fluid between the lift hydraulic actuator and the lift hydraulic pump.

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