KR100671744B1 - 균일한 부상력을 갖는 lcd 유리기판용 다공성 부상패드 - Google Patents
균일한 부상력을 갖는 lcd 유리기판용 다공성 부상패드 Download PDFInfo
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- KR100671744B1 KR100671744B1 KR1020050087721A KR20050087721A KR100671744B1 KR 100671744 B1 KR100671744 B1 KR 100671744B1 KR 1020050087721 A KR1020050087721 A KR 1020050087721A KR 20050087721 A KR20050087721 A KR 20050087721A KR 100671744 B1 KR100671744 B1 KR 100671744B1
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- Prior art keywords
- floating pad
- glass substrate
- floating
- pad
- porous
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G53/00—Conveying materials in bulk through troughs, pipes or tubes by floating the materials or by flow of gas, liquid or foam
- B65G53/34—Details
- B65G53/66—Use of indicator or control devices, e.g. for controlling gas pressure, for controlling proportions of material and gas, for indicating or preventing jamming of material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
- B65G49/069—Means for avoiding damage to stacked plate glass, e.g. by interposing paper or powder spacers in the stack
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G53/00—Conveying materials in bulk through troughs, pipes or tubes by floating the materials or by flow of gas, liquid or foam
- B65G53/04—Conveying materials in bulk pneumatically through pipes or tubes; Air slides
- B65G53/16—Gas pressure systems operating with fluidisation of the materials
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G53/00—Conveying materials in bulk through troughs, pipes or tubes by floating the materials or by flow of gas, liquid or foam
- B65G53/34—Details
- B65G53/58—Devices for accelerating or decelerating flow of the materials; Use of pressure generators
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Nonlinear Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (6)
- 복수개의 포아가 내포되어 있으며, 상면에 올려 놓여지는 유리기판을 상기 포아를 통하여 위로 올라오는 공기의 압력으로 부상시키는 다공성 LCD 유리기판 부상패드로서, 상부가 하부에 비하여 공극율이 더 작은 것을 특징으로 하는 LCD 유리기판용 다공성 부상패드.
- 제1항에 있어서, 상기 부상패드의 하부의 공극율은 35 ~ 45%이고 상기 부상패드의 상부의 공극율은 31 ~ 41%인 것을 특징으로 하는 LCD 유리기판용 다공성 부상패드.
- 제1항에 있어서, 상기 포아 사이즈가 5~25㎛인 것을 특징으로 하는 LCD 유리기판용 다공성 부상패드.
- 제1항에 있어서, 상기 부상패드의 상부가 하부에 비하여 포아의 개수가 더 많은 것을 특징으로 하는 LCD 유리기판용 다공성 부상패드.
- 제1항에 있어서, 상기 부상패드가 중량 평균 분자량이 최소 106 g/mol 이상인 폴리에틸렌으로서, 미국재료시험협회 규격분류집 ASTM 4020을 만족하는 UHMW-PE 재질로 이루어지는 것을 특징으로 하는 LCD 유리기판용 다공성 부상패드.
- 제5항에 있어서, 상기 부상패드의 두께가 2 ~ 4mm 인 것을 특징으로 하는 LCD 유리기판용 다공성 부상패드.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020050087721A KR100671744B1 (ko) | 2005-09-21 | 2005-09-21 | 균일한 부상력을 갖는 lcd 유리기판용 다공성 부상패드 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020050087721A KR100671744B1 (ko) | 2005-09-21 | 2005-09-21 | 균일한 부상력을 갖는 lcd 유리기판용 다공성 부상패드 |
Publications (1)
Publication Number | Publication Date |
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KR100671744B1 true KR100671744B1 (ko) | 2007-01-22 |
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KR1020050087721A KR100671744B1 (ko) | 2005-09-21 | 2005-09-21 | 균일한 부상력을 갖는 lcd 유리기판용 다공성 부상패드 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101157200B1 (ko) * | 2010-08-03 | 2012-06-20 | 주식회사 에스에프에이 | 비접촉 반송장치 |
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2005
- 2005-09-21 KR KR1020050087721A patent/KR100671744B1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101157200B1 (ko) * | 2010-08-03 | 2012-06-20 | 주식회사 에스에프에이 | 비접촉 반송장치 |
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