KR100654409B1 - 엑시머 레이저장치 - Google Patents

엑시머 레이저장치 Download PDF

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Publication number
KR100654409B1
KR100654409B1 KR1020000021029A KR20000021029A KR100654409B1 KR 100654409 B1 KR100654409 B1 KR 100654409B1 KR 1020000021029 A KR1020000021029 A KR 1020000021029A KR 20000021029 A KR20000021029 A KR 20000021029A KR 100654409 B1 KR100654409 B1 KR 100654409B1
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KR
South Korea
Prior art keywords
fan
rotation speed
casing
laser gas
excimer laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020000021029A
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English (en)
Korean (ko)
Other versions
KR20000077056A (ko
Inventor
세키구치신이치
시노자키히로유키
바라다도시미츠
나카자와도시하루
Original Assignee
가부시키가이샤 에바라 세이사꾸쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 가부시키가이샤 에바라 세이사꾸쇼 filed Critical 가부시키가이샤 에바라 세이사꾸쇼
Publication of KR20000077056A publication Critical patent/KR20000077056A/ko
Application granted granted Critical
Publication of KR100654409B1 publication Critical patent/KR100654409B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/047—Details of housings; Mounting of active magnetic bearings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0388—Compositions, materials or coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Lasers (AREA)
KR1020000021029A 1999-04-21 2000-04-20 엑시머 레이저장치 Expired - Lifetime KR100654409B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11397299A JP3766230B2 (ja) 1999-04-21 1999-04-21 エキシマレーザ装置
JP11-113972 1999-04-21

Publications (2)

Publication Number Publication Date
KR20000077056A KR20000077056A (ko) 2000-12-26
KR100654409B1 true KR100654409B1 (ko) 2006-12-05

Family

ID=14625839

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000021029A Expired - Lifetime KR100654409B1 (ko) 1999-04-21 2000-04-20 엑시머 레이저장치

Country Status (6)

Country Link
US (1) US6366039B1 (OSRAM)
EP (1) EP1047162B1 (OSRAM)
JP (1) JP3766230B2 (OSRAM)
KR (1) KR100654409B1 (OSRAM)
DE (1) DE60040256D1 (OSRAM)
TW (1) TW444423B (OSRAM)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001111138A (ja) * 1999-10-04 2001-04-20 Ebara Corp エキシマレーザ装置
EP1119082A3 (en) * 2000-01-18 2004-05-26 Ushiodenki Kabushiki Kaisha Cross-flow fan for discharge excited gas laser
JP2001234929A (ja) * 2000-02-21 2001-08-31 Ebara Corp 磁気軸受及び循環ファン装置
JP2001352114A (ja) * 2000-06-08 2001-12-21 Ebara Corp エキシマレーザ装置用磁気軸受装置
EP1188932A3 (en) * 2000-09-19 2003-05-02 Ntn Corporation Bearing structure for laser fan
JP2002345210A (ja) * 2001-05-11 2002-11-29 Ebara Corp 電動機装置及びエキシマレーザ装置
WO2005104308A1 (ja) * 2004-04-21 2005-11-03 Mitsubishi Denki Kabushiki Kaisha ガスレーザ発振器およびガスレーザ加工機
JP4146867B2 (ja) * 2006-06-22 2008-09-10 ファナック株式会社 ガスレーザ発振器
JP6063199B2 (ja) * 2012-10-15 2017-01-18 ギガフォトン株式会社 放電励起式ガスレーザ装置
JP6650921B2 (ja) 2015-03-12 2020-02-19 ギガフォトン株式会社 放電励起式ガスレーザ装置
WO2017094099A1 (ja) 2015-12-01 2017-06-08 ギガフォトン株式会社 エキシマレーザ装置
CN114183468B (zh) * 2021-12-08 2022-11-15 珠海格力电器股份有限公司 压缩机、空调器
CN114183932A (zh) * 2021-12-17 2022-03-15 珠海格力电器股份有限公司 一种燃气热水器、风机转速检测方法及装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5377215A (en) * 1992-11-13 1994-12-27 Cymer Laser Technologies Excimer laser
CA2190697C (en) 1996-01-31 2000-07-25 Donald Glenn Larson Blower motor with adjustable timing
US6026103A (en) * 1999-04-13 2000-02-15 Cymer, Inc. Gas discharge laser with roller bearings and stable magnetic axial positioning

Also Published As

Publication number Publication date
DE60040256D1 (de) 2008-10-30
US6366039B1 (en) 2002-04-02
KR20000077056A (ko) 2000-12-26
EP1047162B1 (en) 2008-09-17
TW444423B (en) 2001-07-01
EP1047162A2 (en) 2000-10-25
JP2000307175A (ja) 2000-11-02
JP3766230B2 (ja) 2006-04-12
EP1047162A3 (en) 2003-10-01

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