KR100651260B1 - Substrate loading method for organic material depositing apparatus and Organic material depositing apparatus - Google Patents

Abstract

The present invention relates to an organic material deposition apparatus and a method for loading a substrate of the organic material deposition apparatus, and more particularly, to prevent sagging of a substrate carried therein in the process of performing organic material deposition on a large area substrate. It relates to an organic material deposition apparatus having a.

That is, the present invention provides an organic material deposition apparatus, comprising: an deposition chamber having an interior space separated from the outside and having an entrance and exit gate in which one side of the substrate is brought in or taken out, and a gate opening and closing the entrance; It is provided on the upper side of the chamber to support both sides of the substrate by the pressing force provided by the substrate fixing portion, respectively, the tension fixing portion is provided on the substrate fixing portion provided on one side by moving the substrate fixing portion by the tension providing portion A substrate mounting table to provide a tensile force to the substrate; And a control unit for controlling the pressing force provided by the substrate fixing unit and the tensile force provided by the tensile force providing unit.

Organic Material Deposition Equipment, Substrate, Sag, Substrate Loading Table, Substrate Fixing Part, Tensile Force Provisioning Part

Description

Substrate loading method for organic material depositing apparatus and Organic material depositing apparatus}

Figure 1 is a side cross-sectional view showing a schematic overall configuration of an organic material steaming equipment of one embodiment according to the present invention.

Figure 2 is a perspective view showing a substrate mounting table of the organic material deposition apparatus of the present invention.

3 is a cross-sectional view of FIG. 2.

4A to 4C are schematic views illustrating a process of fixing a substrate to a substrate mounting table of the organic material deposition apparatus of the present invention.

5A and 5B are graphs showing a deflection length and a substrate holding length in a state in which the left and right sides of the substrate are gripped when the substrate is fixed to the substrate mounting table of the organic material deposition apparatus of the present invention.

6A and 6B are graphs showing a deflection length and a substrate holding length in a state in which the upper and lower sides of the substrate are gripped when the substrate is fixed to the substrate mounting table of the organic material deposition apparatus of the present invention.

7 is a flowchart illustrating a process of loading a substrate in the organic material deposition apparatus of the present invention.

<Description of Symbols for Major Parts of Drawings>

100: organic material deposition equipment 110: chamber

200: substrate loading table 210, 310: substrate fixing part

216, 316: fixed holders 222, 322: pressing portion

224, 324: moving plate 226, 326: pressure holder

228, 328: vertical drive unit 340: base

342: horizontal movement guide C: control unit

D: Display window L ₁ , L ₂ : 1st, 2nd pressure measuring part

The present invention relates to an organic material deposition apparatus and a method for loading a substrate of the organic material deposition apparatus, and more particularly, to prevent sagging of a substrate carried therein in the process of performing organic material deposition on a large area substrate. It relates to an organic material deposition apparatus having a substrate loading method of the organic material deposition equipment.

Recently, with the rapid development of information and communication technology and the expansion of the market, a flat panel display has been spotlighted as a display device. Such flat panel displays include liquid crystal displays, plasma display panels, organic light emitting diodes, and the like.

 Among them, organic light emitting diodes have very good advantages such as fast response speed, lower power consumption than conventional liquid crystal display devices, light weight, and no need for a separate back light device, making them ultra thin and high brightness. As a result, it is attracting attention as a next generation display device.

The organic light emitting device is a principle that self-luminescence is formed by applying a voltage difference between the anode and the cathode by applying an anode film, an organic thin film, and a cathode film on a substrate to form an organic energy thin film. That is, the excitation energy left by recombination of injected electrons and holes is generated as light. In this case, since the wavelength of light generated according to the amount of the dopant of the organic material may be adjusted, full color may be realized. In addition, glass substrates used for manufacturing displays are gradually increasing in size due to productivity improvement and enlargement of displays.

The detailed structure of the organic light emitting device is an anode, a hole injection layer, a hole transfer layer, an emitting layer, an electron transfer layer, an electron injection on the substrate A layer (eletron injection layer), a cathode (cathode) is formed by stacking in order. In this case, ITO (Indium Tin Oxide) having a small sheet resistance and good permeability is mainly used as the anode. And an organic thin film is composed of a hole injection layer, a hole transport layer, light emitting layer, an electron transport layer, the electron injection layer, the multi-layer to increase the light emitting efficiency, an organic material used for the light emitting layer is Alq _3, TPD, PBD, m-MTDATA, TCTA. As the cathode, a LiF-Al metal film is used. In addition, since the organic thin film is very weak to moisture and oxygen in the air, an encapsulation film is formed at the top to increase the life time of the device.

However, the organic light emitting device does not have a firm position as a next-generation display device because the mass production equipment for the large-area organic light emitting device is not yet standardized despite the above-mentioned advantages. In other words, as liquid crystal display devices and plasma display devices are rapidly becoming large areas, mass production equipment for producing large area panels has been developed and standardized. Therefore, organic light emitting devices have a large area of organic light that can solidify their position as next generation display devices. There is a strong demand for the development of light emitting device mass production equipment.

On the other hand, when manufacturing a flat panel display such as an organic light emitting device, a display element is made on a glass substrate using a glass substrate. When the deposition process is performed in the display manufacturing process, the glass substrate is placed downward in a vacuum. Must be held by a holding device, ie a glass chuck.

A widely used method of the glass chuck is a method of physically supporting four sides of the glass substrate by a clipping method, and another method is a vacuum chuck using an air pressure difference and an electric field and electrostatic induction. There is an electrostatic chuck.

When the clipping method is applied, the center portion of the glass substrate sags downward due to its own weight. At this time, when the thickness of the glass substrate is 0.7 mm, the substrate of 370 × 470 mm is sag down about 1 mm, and 600 × 720 mm The substrate sag about 5 mm below. In addition, the vacuum chuck method cannot be used in a deposition process made in a vacuum, and the electrostatic chuck method requires a very strong electric field when used in a large area glass substrate, and it is difficult to process a wire during substrate transfer.

A conventional organic material deposition apparatus includes a chamber in which a deposition process is performed inside, a substrate mounting table provided on an upper side of the chamber to load a substrate, a magnet holder provided on an upper side of the substrate located on the substrate mounting table, and the substrate. A mask holder provided with a mask at a lower side thereof, and a heating unit and an organic boat provided at a lower portion of the chamber to vaporize an organic material and evaporate to a substrate.

Here, an appropriate amount of organic material to be deposited on the organic material boat is predicted and put up, and then the pressure inside the vacuum chamber is lowered to about 10-6 torr using a vacuum pump. The organic boat is then generally made of molybdenum. After that, power is applied to the heating unit, and the heat is raised to near the melting point of the deposition material by using a temperature controller, and then the temperature is increased until it is vaporized while finely adjusting again. At this time, when the material on the organic boat begins to evaporate, the previously mounted shutter is opened to deposit the vaporized material molecules on the substrate. At this time, the shutter serves to prevent impurities remaining on the substrate immediately before vaporizing the organic material on the organic material boat.

The conventional organic material deposition apparatus has a problem that it is difficult to perform a uniform deposition operation as the large-area substrate sags downward due to its own weight in the process of loading the substrate on the substrate mounting table.

The present invention has been made to solve the above problems, the object of the present invention is to stretch the tension in one side in the fixed state of both sides of the substrate to prevent the center of the substrate from sagging downward due to its own weight during the deposition process of the substrate According to the present invention, there is provided an organic material deposition apparatus and a method of loading a substrate of the organic material deposition apparatus, which can prevent sagging of a substrate.

In order to achieve the above object, the present invention provides an organic material deposition apparatus, comprising: an deposition chamber having an interior space separated from the outside and having an entrance and exit gate to which a substrate is brought in or taken out from one side; It is provided on the upper side of the chamber to support both sides of the substrate by the pressing force provided by the substrate fixing portion, respectively, the tension fixing portion is provided on the substrate fixing portion provided on one side by moving the substrate fixing portion by the tension providing portion A substrate mounting table to provide a tensile force to the substrate; And a control unit for controlling the pressing force provided by the substrate fixing unit and the tensile force provided by the tensile force providing unit. The substrate fixing unit is fixed to the substrate fixing units provided on both sides of the substrate, and fixed to both ends of the substrate. Moving the outward direction by the tensile force providing unit is preferable because it generates a tensile force on one side of the loaded substrate to prevent sagging of the substrate.

Moreover, the board | substrate fixing part in this invention is a plate-shaped lower board extended in a longitudinal direction; A plate-shaped holder positioned on an upper side of the same shape as the lower plate and on which a substrate is placed; A position fixing plate provided on one side edge of the fixing holder and extending in the longitudinal direction and having a cross-sectional shape of the letter “a”; A plate-shaped driving part fixing plate provided in a state spaced apart from the upper center portion of the position fixing plate; A pressure holder configured to move up and down in a space between the driving unit fixing plate and the fixed holder, press a top surface of the substrate positioned in the fixed holder, and extend in a longitudinal direction; It is provided in the central portion of the upper surface of the drive unit fixing plate vertical drive unit for elevating the pressure holder to provide a pressing force to the substrate; by being provided in the upper portion of the substrate holder vertical direction drive unit for lifting the pressure holder in a simple structure It is preferable because both ends of the substrate are fixed by the vertical direction driving portion.

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Moreover, in this invention, since the 1st pressure measuring part is further provided on the moving shaft of a vertical direction drive part, it is preferable because it measures and outputs the load value of a vertical direction.

In addition, the first pressure measuring unit in the present invention is preferably a load cell.

Moreover, since the vertical direction drive part in this invention is a pneumatic or hydraulic cylinder, and applies a load in a vertical direction with a simple structure, it is preferable.

In addition, the tension providing unit in the present invention, the plate-shaped fixing side plate coupled to the lower plate and the outer wall of the fixing holder of the substrate fixing portion; A plate-shaped driving part fixing side plate provided at a position spaced apart from the fixing side plate and provided at one edge portion of the base; A horizontal direction driving part installed on an outer wall of the driving part fixing side plate to move the substrate fixing part in a horizontal direction, and provided on an outer wall of any one of the substrate fixing parts to operate outwardly while fixing both ends of the substrate. It is preferable to provide a tensile force, thereby preventing sagging of the substrate by the tensile force.

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In addition, the vertical driving unit and the horizontal driving unit according to the present invention vary the pressing force and tensile force applied to the substrate according to the thickness of the substrate, thereby applying the optimum pressing force and tensile force to the substrate even if the substrate state such as the thickness and size of the substrate is changed. desirable.

In addition, the present invention is further provided with a display window that is electrically connected to the control unit and outputs the result values detected by the first and second pressure measuring units in numerical values, so that the operator can perceive the pressing force and the tensile force numerically. Do.

Hereinafter, with reference to the accompanying drawings, the organic material deposition equipment and the substrate loading method of the organic material deposition equipment of the present invention will be described with reference to the embodiment as follows.

In the organic material deposition apparatus of the preferred embodiment of the present invention, as shown in FIG. 1, the substrate 110 is loaded with the substrate S therein to perform deposition on the substrate S, and the upper side inside the chamber 110. The plate 112 provided in the housing and the lower portion of the housing 120 is open to the lower side of the plate 112, and the substrate mounting table for fixing the side of the substrate (S) carried in the interior of the housing 120 And a rotating part 400 provided below the substrate mounting table 200 to rotate to distribute the organic material as a whole on the substrate S in the process of evaporating and evaporating the organic material.

In addition, the control unit (C) for controlling the pressing force and the tensile force is provided when both ends of the substrate (S) loaded on the substrate mounting table 200 to prevent the deflection by applying the pressing force and the tensile force and the control unit (C) Is connected to the display (Display: D) window for outputting the output value of the pressing force and tensile force numerically.

Here, the chamber 110 has an internal space that is isolated from the outside, the entrance (not shown) is formed on one side so that the substrate (S) can be carried in and out of the gate and the gate (opening and closing) Not shown in the drawing), the substrate S is disposed therein, and the organic thin film can be deposited on the substrate S.

In addition, a vacuum pump P is provided at each of the bottom edges of the chamber 110, and the vacuum pump P is a component that lowers the internal pressure of the chamber 110. That is, in order to deposit pure organic material on the surface of the substrate S, the organic material should be deposited in a state in which impurities in the chamber 110 are removed. Thus, by inhaling and removing the gas inside the deposition chamber 110 before the organic material is deposited. Play a role.

In addition, a separate rotating device (not shown) is further provided on the upper portion of the chamber 110 to rotate the substrate mounting table 200 on which the substrate S is loaded.

In addition, a heating unit 160 and an organic boat 162 are provided below the chamber 110 to vaporize the organic material and to evaporate the substrate S.

Here, the housing 120 is provided with a mask holder 124 in the transverse direction at the lower end of both sides in a cross-section having a bottom opening in a "c" shape, and a magnet holder (not shown in the drawing) that provides magnetic force in a plate shape on the upper side of the housing 120. And a mask 126 mounted on the mask holder.

Although not shown in the drawings, an unline apparatus for aligning the substrate S is provided on the substrate mounting table 200.

As illustrated in FIGS. 2 and 3, the substrate mounting table 200 includes substrate fixing parts 210 and 310 and base 340 provided at both ends of the plate-shaped base 340 and the base 340, respectively. A pair of horizontal horizontal movement guides 342 are provided on an upper surface of the substrate fixing parts 210 and 310, respectively, at both ends of the horizontal movement guides 342.

In addition, driving fixture fixing side plates 344 and side plates 336 respectively provided in a state of being upright on both sides of the base 340 are installed.

The substrate fixing parts 210 and 310 may be moved in the horizontal direction on the horizontal movement guide 342 to be positioned by adjusting the interval according to the size of the substrate S, and the substrate fixing part 210 provided at one side thereof. Is fixed and the substrate fixing part 310 provided on the other side is movable.

The substrate fixing parts 210 and 310 have the same shape and function, and the substrate fixing part 210 is fixed on one side, and the other substrate fixing part 310 is movable on the other side. And the movable substrate fixing parts 210 and 310 are both movable, and the deposition is performed on the substrate S having different sizes by adjusting the interval according to the size of the large-sized substrate S. FIG.

In addition, the structure of the substrate fixing parts 210 and 310 is in contact with a pair of horizontal movement guides 242 and 342 provided in the transverse direction on the bases 240 and 340 so that one side may be fixed or the other side may be horizontally moved. Fixed plate 212 or moving member 312 is provided and installed on the upper surface of the pair of holding member 212 or a pair of moving member 312, the plate-like lower plate (214, 314) extending in the longitudinal direction And, in the same shape as the lower plate (214, 314) is located on the upper side, but the upright pin is interposed so as to maintain a gap with the lower plate (214, 314) and the plate-shaped fixing holder on which the substrate (S) is placed on the upper surface ( 216 and 316, position fixing plates 218 and 318 which are provided at one edge of the fixing holders 216 and 316 and extend in the longitudinal direction and whose cross-sectional shape is "a", and the positioning plates 218 and 318 Plate-shaped driving unit fixing plates (220, 320) provided in a state spaced apart from the upper center portion of the), The pressing holders 226 and 326 may move upward and downward in a space between the driving unit fixing plates 220 and 320 and the fixing holders 216 and 316 and press the upper surface of the substrate positioned in the fixing holder and extend in the longitudinal direction. And vertical driving parts 228 and 328 provided at the centers of the upper surfaces of the driving part fixing plates 220 and 320 to elevate the pressure holders 226 and 326 so as to provide a pressing force to the substrate S. In addition, the pressing portions 222 and 322 made up of the pressing holders 226 and 326 and the moving plates 224 and 324 provided on the pressing holders 226 and 326 have a plurality of vertical axes in order to maintain the separation space. Dogs are prepared.

The pressing parts 222 and 322 are composed of pressure holders 226 and 326 and moving plates 224 and 324.

In this case, the vertical driving units 228 and 328 may be hydraulic or pneumatic cylinders, and apply a pressing force to the substrate S by receiving fluid or gas from the outside.

The first pressure measuring unit L ₁ is provided on the moving shafts of the vertical driving units 228 and 328. Here, the first pressure measuring unit (L ₁ ) is a load cell, which is compressed or stretched when a load is applied to the load cell, and the deformation amount is converted into a digital signal after the deformation measuring device detects the electrical signal. The pressing force is numerically output on the display window D of the controller C.

The connecting plates 230 and 330 are interposed between the first pressure measuring part L _{1 of} the vertical driving holes 210 and 310 and the pressure holders 226 and 326.

That is, the vertical driving units 228 and 328 descend downward to press the substrate S. At this time, a pressing force that presses the substrate S to the load cell is applied, that is, a load is applied to change the load from an electrical signal to a digital signal. This value is output.

 The tension providing unit 350 is a lower plate 314 of the movable substrate fixing part 310 in an upright state, a plate-shaped fixing side plate 352 coupled to an outer wall of the fixing holder 316, and the fixing side plate 352. And a plate-shaped driving part fixing side plate 344 provided at one side edge portion of the base 340 and an outer wall of the driving part fixing side plate 344 to be provided at a position spaced apart from the base 340. It consists of a horizontal drive part 354 which moves.

Here, the horizontal axis is interposed to maintain the gap between the fixed side plate 352 and the driving unit fixed side plate 344.

Here, the horizontal driving unit 354 is made of a hydraulic or pneumatic cylinder and is moved to the substrate (S) by moving the substrate fixing part 310 fixed to the substrate (S) fixed to the substrate (S) by receiving fluid or gas from the outside. Add.

In addition, a second pressure measuring unit L ₂ is provided on the moving shaft of the horizontal driving unit 354. Here, the second pressure measuring unit (L ₂ ) is a load cell (Load Cell) is applied to the load cell (Load Cell) is deformed, such as compression or elongation, this strain amount is detected by the strain measuring device as an electrical signal and then converted into a digital signal to the tensile force The numerical value is output to the display window D of this control part C.

That is, the horizontal driving unit 354 is a moving shaft moving in the horizontal direction to move to the outer direction to tension one side of the substrate (S) is fixed on both sides, at this time the tension force to press the substrate (S) to the load cell, As the tensile load is applied, the load is changed from an electrical signal to a digital signal, and the pressing force is numerically output to the display window D.

Here, at least one load cell, which is the first and second pressure measuring units L ₁ and L ₂ , may be installed, and a plurality of load cells may be installed to measure a more uniform and accurate load. The vertical driving units 228 and 328 and the horizontal driving unit 354 have different pressing force and tensile force applied to the substrate S according to the thickness of the substrate S. FIG.

Therefore, the first and second pressure measuring units (L ₁ , L ₂ ) to measure the pressing force and the tensile force applied to the substrate (S) in advance, and then the measured value is converted into a feedback (Feed Back) circuit as a large amount It can be mass-produced by automating the deposition process on the substrate (S).

The pivot lifting unit 400 is installed on the upper surface of the chamber 110 and rotates so as to distribute the organic material on the substrate S when the organic material is vaporized by evaporating the substrate S to be deposited. The first hollow shaft 408 extending downward from the inside of the 402 and installed on the upper surface of the substrate mounting table 200 provided in the chamber 110, and the outside of the first hollow shaft 408. The second hollow shaft 406 is provided in the upper surface of the magnet holder, and the vertical drive unit 228, 328 and horizontal direction drive unit 354 provided in the substrate fixing unit 210, 310, respectively, An air inlet 404 is provided for providing pneumatic pressure from the compressor.

In the process of loading the substrate S onto the substrate mounting table 200, the generation of the sag of the substrate S is divided into three stages, the stage of which is illustrated in FIGS. 4A to 4C. The amount of deflection of the substrate S, which is placed in a state where no load is applied because the pressure holders 226, 326 are not pressed against the 216, 316, is (a), and the substrate ( The most sag occurs in the center of S).

In the second step, the pressure holders 226 and 326 provided on the upper side of the fixing holders 216 and 316 are lowered while the substrate S is positioned in the fixing holders 216 and 316. The amount of deflection of the substrate S in which both ends are fixed in the state where the pressing force is applied is (b), and the substrate S is deflected in the center due to its own weight, but both ends are fixed, so the deflection is smaller than the seated state. Is generated.

In the third step, the fixing holder 316 and the pressure holder 326 provided on one side of the fixing holders 216 and 316 and the pressure holders 226 and 326 are fixed in an outward direction. A state in which the tensile force is provided to the substrate S by moving, and the amount of deflection of the substrate S is hardly generated. That is, in the process of fixing both ends of the substrate (S) and pulling one side, the substrate (S) is tensioned by applying a tensile load so that sagging due to its own weight does not occur.

Here, FIGS. 5A and 5B show sag lengths that sag along the length of gripping both ends of the substrate S when the pressing force and the tensile force are simultaneously applied to the substrate S while both sides of the substrate S are fixed at both sides. As shown in the graph, the deflection of the substrate (S) fixed at both ends to the fixed holder (216, 316) and the pressure holder (226, 326) is decreased as the substrate holding length increases, and the fixed holder (216) The state in which the substrate S is seated on the 316 is a graph located at the top of the graph, and the state in which both ends of the substrate S are fixed by the pressure holders 226 and 326 is a graph located at the middle part. Both ends of the (S) are fixed by the pressure holders 226 and 326, and the fixed holder 316 and the pressure holder 326 provided on one side of the fixed substrate S are moved outward to tension the substrate S. The state shown is the graph located at the bottom.

Therefore, according to the graph showing the inspection value, it can be seen that the amount of deflection of the substrate S is the smallest in the state in which the tensile force is provided to one side while both ends of the substrate S are fixed.

In addition, it is understood that the longer the substrate holding length is, the less the amount of deflection of the substrate S is.

6A and 6B show sag lengths that sag along the lengths of both ends of the substrate S when the pressing force and the tensile force are simultaneously applied to the substrate S while both sides of the substrate S have fixed short sides. As shown in the graph, the deflection of the substrate (S) fixed at both ends to the fixed holder (216, 316) and the pressure holder (226, 326) is decreased as the substrate holding length increases, and the fixed holder (216) The state in which the substrate S is seated on the 316 is a graph located at the top of the graph, and the state in which both ends of the substrate S are fixed by the pressure holders 226 and 326 is a graph located at the middle part. Both ends of the (S) are fixed by the pressure holders 226 and 326, and the fixed holder 316 and the pressure holder 326 provided on one side of the fixed substrate S are moved outward to tension the substrate S. The state shown is the graph located at the bottom.

Therefore, according to the graph showing the inspection value, it can be seen that the amount of deflection of the substrate S is the smallest in the state in which the tensile force is provided to one side while both ends of the substrate S are fixed.

In addition, it is understood that the longer the substrate holding length is, the less the amount of deflection of the substrate S is.

Here, the state where only the board | substrate S was fixed in the state which fixed two sides of the long side of the four sides of the board | substrate S is fixed, the state which fixed both ends of the board | substrate S, and hold | maintains one side of the board | substrate S which fixed both ends. In the state in which the pull force is provided, the substrate sagging occurs in the state in which the tensile force is applied to one side while the substrate S is fixed, and the longer the substrate holding length, the less sagging occurs.

Then, the substrate S is held in the state where only two sides of the four sides of the substrate S are fixed, the both ends of the substrate S are fixed, and one side of the substrate S is fixed. In the state where the tension is applied to the substrate S while the pull force is applied, the substrate sagging occurs with the least tensile force on one side. The longer the substrate holding length, the less sag occurs and the longer the length of the substrate S. It can be seen that the amount of deflection in the fixed state of the shorter portion than the fixed state is relatively small.

The process of performing organic material deposition on the substrate by the organic material deposition apparatus of the present invention through the doorway formed on one side of the chamber 110 by an external vehicle (not shown) as shown in FIGS. 1 and 3. Both substrate fixing portions 210 and 310 of the substrate mounting table 200 are seated on the holders 216 and 316. Then, the entrance and exit of the chamber 110 is closed by a gate, and the gas inside the chamber 110 is sucked out by the plurality of vacuum pumps P provided in the inner bottom corner and discharged to the outside.

Thereafter, in order to lower the pressure holders 226 and 326 provided on the upper side in order to fix the substrate S seated on the fixing holders 216 and 316, the vertical directions provided in the substrate fixing parts 210 and 310, respectively. By injecting air into the driving units 228 and 328, the moving shaft is lowered, the both sides of the substrate S are fixed, and the horizontal driving unit 354 installed to move the substrate fixing unit 310 provided on one side is operated to operate the substrate. One side of (S) is tensioned.

Here, the substrate S interposed between the fixed holders 216 and 316 and the pressure holders 226 and 326 is firmly fixed and one side of the substrate S is operated by the horizontal driving unit 354. Pull outward to position the substrate S horizontally without sagging caused by its own weight.

Next, the shadow mask 126 is positioned in the mask holder 124 below the substrate S loaded on the substrate mounting table 200. At this time, the position of the shadow mask 126 and the substrate (S) must be exactly matched. Therefore, it is preferable to proceed by the shadow mask alignment apparatus which precisely adjusts the position of the shadow mask 126. FIG.

Further, it is preferable that the shadow mask adhesion step of bringing the aligned shadow mask 126 into close contact with the substrate S is further performed.

Then, applying power to the heating unit 130 provided on the bottom surface of the chamber 110 and using a temperature control device (not shown) to heat up to near the melting point of the deposition material, while finely adjusting again Raise the temperature until it evaporates. At this time, when the material on the organic material boat 132 gradually begins to evaporate, a previously mounted shutter (not shown) is opened to deposit evaporated material molecules on the substrate S. In this case, the shutter serves to prevent impurities remaining immediately before the organic material on the organic material boat 132 is vaporized from being deposited on the substrate S.

Then, the substrate S is rotated by the pivoting unit 400 to rotate the organic material as a whole to be distributed on the substrate S. FIG. Then, when the deposition of the substrate S is completed, the air present in the horizontal driving unit 354 is discharged to remove the tensile force applied to the substrate S, and the air of the vertical driving units 228 and 328 is discharged. 226 and 326 are raised to release the pressing force and the tensile force applied to the substrate S and to carry the substrate S out by an external vehicle.

Therefore, when the deposition operation is performed in the chamber 110 of the organic material deposition apparatus 100, the substrate may be prevented from sagging downward due to its own weight due to the enlargement of the substrate S when the substrate S is loaded. (S) is tensioned in the horizontal direction to prevent sagging.

Substrate loading method of the organic material deposition apparatus of the present invention as shown in Figure 7 the substrate loading step (S500); Fixing both sides of the substrate (S510); One side tension step (S520) of the substrate; Substrate deposition step (S530); Substrate carrying out step (S540);

In the substrate loading step S500, the substrate S is loaded into the substrate holders 216 and 316 of the substrate holders 210 and 310 provided in the chamber 110 as an external transport means. In the step S510 of fixing both sides of the substrate, the substrate S is seated on both substrate fixing parts 210 and 310 to fix both sides of the substrate S by the vertical driving parts 228 and 328. The substrate tensioning step (S520) is a horizontal driving part of the tension providing part 350 provided in any one of the substrate fixing parts 310 of the substrate fixing parts 210 and 310 fixing both sides of the substrate S. At step 354, one side of the substrate S is stretched outward, and the substrate deposition step S530 is performed by heating the vapor deposition material with heat provided from the heating unit 130 to the loaded substrate S. Vaporizing the prepared material and depositing the substrate (S). A step for carrying the (S) to the outside.

 Such an organic material deposition apparatus of the present invention and a substrate loading method of the organic material deposition apparatus is mounted on a fixed holder provided in the chamber and the substrate holding portion provided with a hydraulic or pneumatic vertical drive unit on both sides of the edge of the substrate After fixing, the tension force is applied to one side of the substrate by the horizontal force driving unit provided in the substrate fixing unit on one side, thereby tensioning the substrate drooping downward by its own weight in one direction to prevent sagging.

 In addition, the load cell is mounted on the axis of the vertical drive unit and the horizontal drive unit, and data is applied to the substrate according to the thickness and the fixed distance of the substrate by the load cell, and the data is used according to the thickness of the substrate. By varying the pressing force and the tensile force according to the situation of the substrate (Feed Back) circuit has the effect of automation of the deposition equipment.

Claims (14)

In organic material deposition equipment, A deposition chamber having an interior space separated from the outside and having an entrance to which the substrate is brought in or taken out from one side and a gate that opens and closes the entrance; It is provided on the upper side of the chamber to support both sides of the substrate by the pressing force provided by the substrate fixing portion, respectively, the tension fixing portion is provided on the substrate fixing portion provided on one side by moving the substrate fixing portion by the tension providing portion A substrate mounting table to provide a tensile force to the substrate; And a control unit for controlling the pressing force provided by the substrate fixing unit and the tensile force provided by the tensile force providing unit. The method of claim 1, wherein the substrate fixing portion, A plate-shaped lower plate extending in the longitudinal direction; A plate-shaped holder positioned on an upper side of the same shape as the lower plate and on which a substrate is placed; A position fixing plate provided on one side edge of the fixing holder and extending in the longitudinal direction and having a cross-sectional shape of the letter “a”; A plate-shaped driving part fixing plate provided in a state spaced apart from the upper center portion of the position fixing plate; A pressure holder configured to move up and down in a space between the driving unit fixing plate and the fixed holder, press a top surface of the substrate positioned in the fixed holder, and extend in a longitudinal direction; And a vertical driving unit provided in the center of the upper surface of the driving unit fixing plate to vertically move the pressure holder so as to provide a pressing force to the substrate. The method of claim 1, Wherein the substrate fixing portion of the substrate mounting table is the position of the organic material deposition equipment, characterized in that the horizontal movement guide is further provided to adjust the position according to the size of the substrate. The method of claim 2, And a first pressure measuring part is further provided on a moving shaft of the vertical driving part. The method of claim 4, wherein And the first pressure measuring unit is a load cell. The method of claim 4, wherein And the vertical direction driving unit is a pneumatic or hydraulic cylinder. The method of claim 1, wherein the tension providing unit, A plate-shaped fixing side plate coupled to the lower plate of the substrate fixing part and the outer wall of the fixing holder; A plate-shaped driving part fixing side plate provided at a position spaced apart from the fixing side plate and provided at one edge portion of the base; And a horizontal driving unit installed on an outer wall of the driving unit fixing side plate to move the substrate fixing unit in a horizontal direction. The method of claim 7, wherein And a second pressure measuring part is further provided on a moving shaft of the horizontal driving part. The method of claim 8, And the second pressure measuring unit is a load cell. The method of claim 8, The horizontal driving unit is an organic material deposition equipment, characterized in that the pneumatic or hydraulic cylinder. delete The method according to claim 2 or 7, And the pressing force and tensile force applied to the substrate vary according to the thickness of the substrate. The method of claim 1, And a display window electrically connected to the control unit and outputting numerical values of the result values detected by the first and second pressure measuring units. A substrate loading step of bringing the substrate into the fixed holder of the substrate mounting table provided in the chamber; Fixing both sides of the substrate to fix the both sides of the substrate by a vertical driving part, the substrate being mounted on both substrate fixing parts; A substrate tensioning step of tensioning one side of the substrate in an outward direction by a horizontal driving unit provided in one of the substrate fixing parts fixing the both sides of the substrate; A substrate deposition step of depositing organic material on the loaded substrate; A substrate loading method of an organic material deposition apparatus, characterized in that consisting of; substrate carrying step of carrying out the substrate is completed.

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