KR100592917B1 - Organic material depositing apparatus for substrate deflects prevention means - Google Patents

Abstract

The present invention relates to an organic material deposition apparatus having a substrate deflection prevention means, and more particularly, an organic material having a substrate deflection prevention means to prevent the deflection of a substrate carried therein in the process of performing organic material deposition on the substrate. It relates to a deposition apparatus.

That is, the present invention provides an organic material deposition apparatus, comprising: a deposition chamber having an internal space isolated from the outside; A substrate fixing holder provided inside the substrate mount in the chamber, on which a substrate on which a deposition process is to be performed is mounted; A pressing holder provided on an upper side of the substrate fixing holder and configured to press and fix an upper edge of the substrate; Substrate alignment means provided at an outer side of the substrate fixing holder to align the substrate; A first driving part provided upward and downward to reciprocate the upper and lower edges of the pressure holder to fix and separate the edge of the substrate according to inflow or exhaust of air; The substrate fixing holder and the pressure holder are moved from side to side in order to prevent the deflection by tensioning one side of the substrate having both ends fixed by reciprocating left and right according to inflow or discharge of air provided in a state perpendicular to the first driving unit. It provides an organic vapor deposition apparatus having a substrate sag prevention means comprising a;

Organic matter, deposition apparatus, substrate, deflection, first, second drive

Description

Organic material depositing apparatus for substrate deflects prevention means

1 is a side cross-sectional view showing the overall configuration of an organic vapor deposition apparatus having a substrate sagging prevention means according to an embodiment of the present invention.

FIG. 2 is a plan view illustrating an alignment portion of an organic material deposition apparatus including a substrate deflection prevention means according to an embodiment of the present invention.

3A and 3B are a plan view and a cross-sectional side view showing a drive portion of the substrate deflection prevention means of the organic vapor deposition apparatus provided with the substrate deflection prevention means of the present invention.

<Description of Symbols for Major Parts of Drawings>

100: organic material deposition apparatus 110: chamber

120: plate 122: fixed side plate

124: moving side plate 126: substrate fixing holder

128: pressure holder 130: delivery unit

140: substrate mount 142: mask holder

144: magnet holder 146: mask

150: position fixing cylinder 152: alignment cylinder

200, 200 ': first and second drive unit 204: fixed plate

206: moving plate 208: axis

212: bellows 300: rotating lifting unit

310: air injection unit

The present invention relates to an organic material deposition apparatus having a substrate deflection prevention means, and more particularly, an organic material having a substrate deflection prevention means to prevent the deflection of a substrate carried therein in the process of performing organic material deposition on the substrate. It relates to a deposition apparatus.

In general, the EL (Electro luminecence) display device, which is an organic display device, is one of the semiconductor flat display devices. Unlike other flat display devices, the EL display device is composed of a completely solid film and has an ideal structure in which heat generation is limited. In addition, the EL display device is a flat display device having an increasing demand in the industry due to its advantages of cold light emitting type.

Therefore, the competition for development of EL display devices is fiercely developed not only in academia but also in research and development in general industry. In general, organic materials have many advantages, such as small driving voltage and high luminance, as display devices, compared to inorganic materials. Therefore, the organic materials have a globally recognized potential and application potential as next-generation display devices.

Meanwhile, organic thin film formation methods developed to date include vacuum deposition method, sputtering method, ion-beam deposition method, pulsed-laser deposition method, molecular beam deposition method, chemical vapor deposition method, and spin coater. coater). Among them, currently commercially available technology is vacuum deposition.

Here, the vacuum deposition method is to form a thin film by installing a thermal evaporation source in the lower portion of the vacuum chamber and a substrate for film formation on the upper portion thereof. Looking at the schematic configuration of the organic thin film forming apparatus using a vacuum deposition method as follows. First, there is a vacuum exhaust machine connected to the vacuum chamber, by using it to maintain a constant vacuum of the vacuum chamber, and then evaporate the organic material of the organic thin film material from one or more organic thin film material thermal evaporation source disposed under the vacuum chamber. The thermal evaporation source of the organic thin film material is a cylindrical or rectangular container in which an organic material for film formation is placed. As a container material, quartz, ceramics, etc. are used, and a heater for a certain pattern is wound around the container part. When a certain amount of electric power is applied, the ambient temperature of the container increases and the container also heats. It begins to be. The temperature is detected by a thermocouple for temperature control installed at the bottom or top of the vessel to maintain the organic evaporation material at a constant concentration to achieve the desired evaporation rate. The evaporated organic matter is solidified on the substrate through a continuous process such as adsorption, vapor deposition, re-evaporation, etc. on the surface of the substrate made of glass or wafer material placed a certain distance away from the top of the vessel to form a thin film.

In general, the organic compound of the organic thin film material has a high vapor pressure vaporization, the pyrolysis temperature by heating is close to the evaporation temperature, so that it is difficult to control the stable organic evaporation rate for a long time, it is difficult to high-speed thin film deposition. In addition, the vaporized organic thin film material released from the thermal evaporation source in the vacuum chamber has a directivity corresponding to the shape of the opening of the upper part of the thermal evaporation source, and this characteristic is limited to a narrow range in which the vaporized organic thin film material is limited in the substrate. It is difficult to obtain a uniform thin film formed on a large-area substrate because it is to be reached.

In addition, in the case where film formation is performed while rotating the substrate at a constant speed by the directional correction means to form a uniform thin film of the organic thin film, the deposition equipment is enlarged to a corresponding size due to the rotation radius of the substrate. Therefore, since the organic thin film is formed up to the unnecessary effective area of the vacuum equipment, the use efficiency of expensive organic materials is very low, and the performance of the vacuum equipment must be increased, resulting in reduced productivity and higher unit cost.

As described above, in the conventional vacuum deposition technique, in forming a product using an organic light emitting device and a functional thin film using an organic thin film, a low film forming speed, low organic material use efficiency, non-uniformity of the organic thin film layer, a main material (host material) and a coloring material (Dopant) It is difficult to manufacture and produce high quality devices at low cost due to various problems such as difficulty in fine-tuning the mixing amount of the material), controlling the temperature of the thermal evaporation source, and difficulty in forming a uniform organic thin film due to the enlargement of the substrate.

A conventional organic material deposition apparatus includes a chamber in which a deposition process is performed, a substrate mounting table provided on an upper side of the chamber to mount a substrate, a magnet holder provided on an upper side of the substrate located on the substrate mounting table, and the substrate. The mask holder is provided with a mask on the lower side, and a heating part and an organic boat provided in the lower portion of the chamber to evaporate the organic material to the substrate.

Here, an appropriate amount of organic material to be deposited on the organic material boat is predicted and put up, and then the pressure inside the vacuum chamber is lowered to about 10-6 torr using a vacuum pump. The organic boat is then generally made of molybdenum. After that, power is applied to the heating unit, and the heat is raised to near the melting point of the deposition material by using a temperature controller, and then the temperature is increased until it is vaporized while finely adjusting again. At this time, when the material on the organic boat begins to evaporate, the previously mounted shutter is opened to deposit the vaporized material molecules on the substrate. At this time, the shutter serves to prevent impurities remaining on the substrate immediately before vaporizing the organic material on the organic material boat.

The conventional organic material deposition apparatus has a problem that it is difficult to perform the deposition operation as the large-sized substrate sags downward due to its own weight in the process of loading the substrate on the substrate mounting table.

The present invention has been made to solve the above problems, the object of the present invention is to tension the one side in the fixed state on both sides of the substrate in order to prevent the central portion of the substrate from sagging downward due to its own weight during the deposition process of the substrate According to an aspect of the present invention, there is provided an organic vapor deposition apparatus including a substrate deflection prevention means capable of preventing a substrate deflection.

In order to achieve the above object, the present invention provides an organic material deposition apparatus, comprising: a deposition chamber having an internal space isolated from the outside; A substrate fixing holder provided inside the substrate mount in the chamber, on which a substrate on which a deposition process is to be performed is mounted; A pressing holder provided on an upper side of the substrate fixing holder and configured to press and fix an upper edge of the substrate; Substrate alignment means provided at an outer side of the substrate fixing holder to align the substrate; A first driving part provided upward and downward to reciprocate the upper and lower edges of the pressure holder to fix and separate the edge of the substrate according to inflow or exhaust of air; The substrate fixing holder and the pressure holder are moved from side to side in order to prevent the deflection by tensioning one side of the substrate having both ends fixed by reciprocating left and right according to inflow or discharge of air provided in a state perpendicular to the first driving unit. By including a reciprocating second drive unit, by fixing the both sides of the substrate mounted on the substrate mount in the process of the substrate deposition is carried out by the pressure holder to move up and down by the first drive unit one side moved by the second drive unit in the outward direction It is preferable because the substrate is tensioned by moving to and thus sagging due to its own weight is prevented from occurring.

In addition, the first driving unit and the second driving unit in the present invention plate-shaped base; Fixing plate upright upright on both sides of the upper surface of the base; A moving plate interposed in the fixing plate and reciprocating but having a shaft provided at the leading end portion thereof protruding through the front fixing plate; A bellows provided at both ends of the rear fixed plate and the movable plate in a fixed state and having a bellows shape, when air is filled in the bellows, the volume is increased to move the shaft forward as the volume increases; An air injection nozzle for injecting air introduced from the outside into the bellows; Spring is provided in the middle of the shaft provided between the moving plate and the fixed plate to provide a restoring force to the bellows in the process of air is discharged to the bellows, and the high-pressure air supplied from the external compressor inside the bellows Injecting imparts straightness to the moving plate provided with the shaft as the volume increases, and when air is discharged, it is preferably restored by the spring provided on the shaft.

In addition, the first drive unit and the second drive unit in the present invention is preferable because the pneumatic cylinder imparts a driving force as a linear reciprocating motion in a simple structure.

In addition, the substrate fixing holder of the present invention is further preferably provided with substrate alignment means for aligning the substrate, so that a separate alignment device is not required and the substrate is seated and aligned at the same time.

In addition, the substrate aligning means in the present invention is provided on each side of each side of the substrate, each of which is located on the two sides adjacent to the reciprocating motion is a positioning cylinder that is a reference point at a predetermined position, the other opposite the four located on both sides The four are reciprocating and positioning cylinders that serve as reference points, and are alignment cylinders that align the substrates by providing pressure to the substrate. The front ends of the four positioning cylinders are reference points, and two sides of the substrate can contact the reference points. It is preferable to align the cylinder so that the alignment cylinder is pushed toward the positioning cylinder.

In addition, the positioning cylinder and the alignment cylinder in the present invention are pneumatic.

Hereinafter, with reference to the accompanying drawings, an organic vapor deposition apparatus having a substrate sagging prevention means of the present invention will be described with reference to the embodiment as follows.

The organic vapor deposition apparatus having a substrate sagging prevention means of the preferred embodiment of the present invention, as shown in Figure 1 is equipped with a substrate (S) inside the chamber 110, the deposition is performed on the substrate (S), The first driving unit 200 provided inside the chamber 110 to fix the side surface of the substrate S, and provided in an upper portion orthogonal to the first driving unit 200 to provide a tensile force by pneumatic pressure so that sag does not occur. The second driving unit 200 ′ and the upper surface of the chamber 110 are provided on the substrate S provided in the chamber 110. It consists of a rotating lifting unit 300 to rotate so as to be distributed.

Here, the chamber 110 has an internal space that is isolated from the outside, the entrance (not shown) is formed on one side so that the substrate (S) can be carried in and out of the gate and the gate (opening and closing) Not shown in the figure), the substrate S is disposed therein, and the organic thin film is deposited on the substrate S.

In addition, a vacuum pump P is provided at each of the bottom edges of the chamber 110, and the vacuum pump P is a component that lowers the internal pressure of the chamber 110. That is, in order to deposit pure organic material on the surface of the substrate S, the organic material should be deposited in a state in which impurities in the chamber 110 are removed. Thus, by inhaling and removing the gas inside the deposition chamber 110 before the organic material is deposited. Play a role.

The chamber 110 includes a plate 120 provided on an upper side of the inside, a fixed side plate 122 provided on one side of the plate 120, and a moving side plate 124 provided on the other side of the plate 120 to move horizontally. And a pressure holder 128 provided horizontally with the substrate fixing holder 126 provided horizontally at the lower ends of the fixed side plate 122 and the moving side plate 124 and the substrate fixed holder 126. ) And a substrate mounting table 140 on which the substrate S is mounted.

Here, the substrate mounting table 140 is provided with a mask holder 142 in the transverse direction at the lower end of both sides in the cross-section "C" shape of the lower side and the magnet holder 144 for providing a magnetic force in the upper plate on the inside and A mask 146 mounted on the mask holder 142, a magnet holder 126 provided on the upper side of the substrate mounting table 140, and a mask provided on both bottom edges of the substrate mounting table 140. And a mask 130 mounted on the mask holder 128.

The pressing holder 128 provided above the substrate fixing holder 126 and lifted by the first driving unit 200 fixes the upper edge portion of the substrate S seated on the substrate fixing holder 126.

As shown in FIG. 2, the substrate fixing holder 126 has a step formed at a portion where the upper surface and the inner surface contact each other, and the substrate fixing holder 126 is seated with the edge of the substrate S contacted with the step. In addition, the substrate fixing holder 126 has a positioning cylinder 150 and the positioning cylinder 150 on both sides of four sides of the substrate S so as to align the substrate S to be seated. The alignment cylinder 152 is provided at a position opposite to the.

The positioning cylinder 150 is driven by pneumatic and gives a reference point to the substrate (S) to be loaded for deposition.

The alignment cylinder 152 is driven by pneumatic pressure and moves to the position fixing cylinder 150 which becomes a reference point when the substrate S is aligned.

Here, the four positioned on the two sides of the substrate (S) in contact with each other is a position fixing cylinder 150 that is a reference point at a predetermined position, and the other four positioned on the other two sides opposite the four are fixed positioning cylinders (which become a reference point ( 150 is an alignment cylinder 152 that provides a pressing force on the side of the substrate S to align the substrate S.

The pressure holder 128 is formed in the shape of a plate through which the center portion is penetrated, and a step is formed on the bottom and the inner surface to press the edge portion of the substrate S seated on the substrate fixing holder 126 so as not to flow.

Here, the first driving unit 200 for elevating the pressure holder 128 is reciprocated by the transmission unit 130 provided between the first driving unit 200 and the pressure holder 128. In addition, the transmission unit 130 is bent outward again in a state of being bent inwardly.

The movable side plate 124 is freely moved outwardly by a guide on one side surface of the plate 120 and allows the second driving unit 200 ′ installed in the lateral direction to adjust the distance of the linear reciprocating operation.

The magnet holder 144 provides a magnetic force to the mask 146 to bring the mask 146 into close contact with the bottom surface of the substrate S, that is, the pattern formation surface.

As shown in FIGS. 3A and 3B, the first driving unit 200 includes a plate-shaped base 202, a fixing plate 204 installed upwardly on both sides of an upper surface of the base 202, and the fixing plate 204. A moving plate 206 interposed to reciprocate and having a shaft 208 formed at the front end portion of the shaft 208 projecting outwardly through the fixing plate 204 positioned at the front, and moving with the fixed plate 204 provided at the rear ( 206 is provided with both ends fixed, and when air provided from an external compressor (not shown) is filled in the volume, the volume increases and the shaft of the moving plate 206 increases according to the increase of the volume. A bellows 212 for going straight forward 208, an air injection nozzle 214 for injecting air from the outside into the bellows 212, and the restoring force in the process of the air is discharged and contracted by the bellows 212 To provide the bellows 212 The spring 216 is provided on a shaft 208 which is exposed between the copper plate 206 and fixed plate 204 provided at the rear. Here, the buffer force adjusting plate 218 for adjusting the buffering force of the spring 216 is further provided.

Here, since the second driving unit 200 ′ has the same shape and the same function as the first driving unit 200, detailed description thereof will be omitted. However, the first driving unit 200 is fixed to the fixed side plate 122 and the moving side plate 124 in the longitudinal direction to lift the pressure holder 128, the second driving unit 200 'is the first driving unit It is installed near the moving side plate 124 of the plate 120 in a state orthogonal to the 200, and moves to the outside of the moving side plate 124 by pneumatic in a state fixed to the upper end of the moving side plate 124 and returns. do.

The rotating lifting unit 300 is installed on the upper surface of the chamber 110 and rotates so that the organic material is distributed on the substrate S when the organic material is vaporized by evaporating the substrate S to be deposited. A first hollow shaft 330 extending downward from the inside of the 320 and installed on an upper surface of the substrate mounting table 140 provided in the chamber 110, and an outside of the first hollow shaft 330. Aligned with the second hollow shaft 340 is provided on the upper surface of the magnet holder 144, the first and second driving parts (200, 200 ') and the position fixing cylinder 150, which is a substrate sagging prevention means at the top The cylinder 152 is provided with an air injection unit 310 for providing air pressure from an external compressor.

The mask holder 142 of the substrate mounting table 140 provided at the lower end of the first hollow shaft 330 is moved up and down by driving a servo motor (not shown), and the second hollow shaft 340 The magnet holder 144 provided at the bottom is moved up and down by a cylinder (not shown).

In addition, a separate rotating device (not shown) is further provided to rotate the substrate mounting table 140 on which the substrate S is loaded.

In addition, a heating unit 160 and an organic boat 162 are provided below the chamber 110 to vaporize the organic material and to evaporate the substrate S.

Therefore, the operating state of the organic vapor deposition apparatus having the substrate sagging prevention means according to the present invention is as shown in Figures 1 and 3a, 3b of the chamber 110 by an external transport means (not shown) It is seated on the substrate fixing holder 126 of the substrate mounting table 140 through the entrance formed on one side. Then, the entrance and exit of the chamber 110 is closed by a gate, and the gas inside the chamber 110 is sucked out by the plurality of vacuum pumps P provided in the inner bottom corner and discharged to the outside.

Thereafter, the first driving part 200 provided on the fixed side plate 122 and the moving side plate 124 to lower the pressure holder 128 provided on the upper side in order to fix the substrate S seated on the substrate fixing holder 126. When the volume is increased by injecting air into the bellows 212 of), the volume of the moving plate 206 is advanced, and the clamp 210 provided at the end of the advanced shaft 208 is transferred. By lowering the unit 130, the pressure holder 128 installed in the transfer unit 130 also descends and presses and fixes the upper edge of the substrate S. When the substrate S is firmly fixed, the moving side plate 124 is fixed. Air is injected into the second driving unit 200 ′ to move the shaft 208 of the second driving unit 200 ′ in the same manner as the first driving unit 200, and the moving side plate 124 is moved horizontally outward. Let's do it.

Here, the substrate S interposed between the substrate fixing holder 126 and the pressure holder 128 is firmly fixed. At this time, the second driving part 200 ′ provided on the moving side plate 124 operates to operate the substrate S. When the moving side plate 124 is moved outward, the substrate S is stretched by pulling one side of the substrate S to position the substrate S horizontally without sagging caused by its own weight.

Then, applying power to the heating unit 160 provided on the bottom surface of the chamber 110, and heat up to the melting point of the deposition material using a temperature control device (not shown), and then finely adjusted again Raise the temperature until it evaporates. At this time, when the material on the organic boat 162 gradually begins to evaporate, a previously mounted shutter (not shown) is opened to deposit evaporated material molecules on the substrate S. In this case, the shutter serves to prevent impurities remaining immediately before the organic material on the organic material boat 162 is vaporized onto the substrate S.

In addition, the substrate S is rotated by the lifting pivot 300 to rotate the organic material as a whole so as to be distributed on the substrate S. FIG. Then, when the deposition of the substrate S is completed, the air present in the second driving part 200 ′ is discharged, and the moving side plate 124 is returned by the restoring force of the spring 216 provided on the shaft 208 to return the substrate ( The tension holder is removed to S) and the pressure holder 128 is lifted by the first driving part 200 through which air is discharged, and the substrate S is carried out to the outside by an external vehicle.

Therefore, when the deposition operation is performed in the chamber 110 of the organic material deposition apparatus 100, the substrate may be prevented from sagging downward due to its own weight due to the enlargement of the substrate S when the substrate S is loaded. (S) is tensioned in the horizontal direction to prevent sagging.

The organic vapor deposition apparatus including the substrate sagging prevention means of the present invention is seated on the substrate holding holder provided in the chamber and fixed to both sides of the edge of the substrate by a pressure holder which is lifted by the pneumatic first drive unit, There is an effect of preventing the deflection by stretching the substrate drooping downward by its own weight in one direction by the second driving part which moves the substrate holding holder and the pressure holder moved outward in one direction.

 In addition, the alignment cylinder provides a reference point and the alignment cylinder provides a reference point by a plurality of positioning cylinders and alignment cylinders provided for each side to align the substrate seated on the substrate fixing holder. There is an effect to align the substrate by moving.

Claims (6)

In the organic material deposition apparatus, A deposition chamber 110 having an inner space isolated from the outside; A substrate fixing holder 126 provided inside the substrate mounting table 140 in the chamber 110 to seat the substrate S on which the deposition process is to be performed; A pressure holder 128 provided on the upper side of the substrate fixing holder 126 and being elevated to press and fix the upper edge of the substrate S; Substrate alignment means provided at an outer side of the substrate fixing holder 126 to align the substrate S; A first driving part 200 provided downward to an upper edge portion of the pressure holder 128 to vertically reciprocate to fix and separate an edge portion of the substrate S according to inflow or discharge of air; The substrate fixing holder which is provided in a state orthogonal to the first driving unit 200 and is moved to one side of the substrate S to which both ends are fixed by reciprocating left and right according to the inflow or discharge of air to prevent sagging. And a second driving part (200 ′) which 126 and the pressure holder 128 reciprocate from side to side. The method of claim 1, wherein the first driving unit 200 and the second driving unit 200 ', Plate-shaped base 202; A fixing plate 204 vertically upright on both sides of the upper surface of the base 202; A moving plate 206 interposed between the fixed plate 204 and a reciprocating motion, wherein a shaft 208 provided at the leading end portion thereof protrudes through the front fixed plate 204; Both ends of the rear fixing plate 204 and the moving plate 206 are provided in a fixed state, and when air is filled in the bellows shape, the volume increases, and the shaft 208 moves forward in accordance with the increase of the volume. Straight bellows 212; An air injection nozzle 214 for injecting air introduced into the bellows 212 from the outside; Spring 216 provided in the middle of the shaft 208 provided between the moving plate 206 and the fixed plate 204 to provide the restoring force to the bellows 212 in the process of air is discharged and contracted to the bellows 212 Organic material deposition apparatus having a substrate deflection prevention means, characterized in that consisting of. The method according to claim 1 or 2, And the first driving part (200) and the second driving part (200 ') are pneumatic cylinders. delete The method of claim 1, wherein the substrate aligning means, Each of the four sides provided on each side of each side of the substrate (S), but located on the two sides adjacent to each other is a position fixed cylinder 150 reciprocating and the reference point at a predetermined position, the other four opposite to the four are located on both sides And an alignment cylinder (152) for aligning the substrate (S) by providing a pressing force to the substrate (S) with a position fixing cylinder that is a reference point that moves and is a reference point. The method of claim 5, And the positioning cylinder (150) and the alignment cylinder (152) are pneumatic type.

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