JPH1161379A - Vapor deposition device for glass substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vapor deposition device for a glass substrate capable of stably and surely executing the vapor deposition of thin coating on a glass substrate without breaking the glass substrate. SOLUTION: Since a vapor deposition mask is formed by combining at least four band-shaped sheets 31 to 35 having flexibility in a frame shape in such a manner that they are independently supported, even in the case deflection occurs on a glass substrate 100, in accordance with the deformation caused by the deflection, the band-shaped sheets 31 to 35 also deflect, and, by the band-shaped sheets 31 to 34, stress can not be applied to the glass substrate 100, so that the breaking of the glass substrate can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrode for a glass substrate used for an electrode support substrate of a flat display panel, and the like.
The present invention relates to a vapor deposition apparatus for a glass substrate which deposits and forms a thin film such as a protective film, and more particularly to a vapor deposition apparatus for a glass substrate having an improved support of a vapor deposition mask disposed to face the glass substrate.

A flat display panel is required to have a large display screen and to reduce the weight of the device itself. With the increase in the size of the display screen, the area of the glass substrate used for the flat display panel is also increased, and the thickness of the glass substrate itself is required to be reduced in order to reduce the weight of the flat display panel. It is necessary to form a uniform film without damaging the substrate in a predetermined area of the glass substrate which is made large or thin in this way.

[0003]

2. Description of the Related Art Japanese Patent Publication No. 63-15714 discloses an example of a conventional vapor deposition apparatus for a glass substrate applied to the formation of a light emitting layer of an EL (Electroluminescence) panel. And FIG. 7B. In each of the drawings, the conventional glass substrate vapor deposition apparatus places a glass substrate 100 on a vapor deposition mask 80 having a vapor deposition window 81 with a predetermined gap 85 therebetween, and heats the glass substrate 100 to cover the surface. In this configuration, a material having a large temperature dependency is attached by heating and evaporating to form a light emitting layer. The vapor deposition mask 80 is formed of a rectangular plate, and a vapor deposition window 81 is formed as a rectangular opening substantially at the center of the plate, and a stepped concave portion 82 is formed around the vapor deposition window 81. Is formed, and a convex substrate fixing portion 83 is formed in a square portion of the concave portion 82.

Next, an operation of forming an EL panel of the vapor deposition apparatus for a glass substrate based on the above configuration will be described. First, the evaporation source 84 is heated to generate steam 84a.
4a is adhered on the glass substrate 100 through the vapor deposition window 81 of the vapor deposition mask 80. By the attachment of the vapor 84a, a light emitting layer film can be formed on the glass substrate 100. In the film of the light emitting layer, a light emitting layer made of ZnS; Mn is placed on the evaporation source 84, so that a light emitting layer of ZnS; Mn is formed.

A gap 8 is formed between the deposition mask 80 and the glass substrate 100 by the substrate fixing portion 83 of the deposition mask 80.
5, the deposition mask 80 and the glass substrate 1
Even if a temperature difference occurs due to a difference in thermal conductivity or heat capacity from the temperature of 00, heat transfer from the evaporation mask 80 to the glass substrate 100 does not occur near the evaporation window 81. Although heat is slightly conducted from the substrate fixing portion 83 to the glass substrate 100, the substrate fixing portion 83 is sufficiently separated from the vapor deposition surface of the glass substrate 100 and has a small contact area, so that heat conduction to the vapor deposition surface is small. It is suppressed as much as possible.

Accordingly, the temperature distribution on the deposition surface of the glass substrate 100 becomes uniform, so that ZnS;
It is stated that a uniform light-emitting layer can be formed without causing nonuniformity of the formed film thickness due to the property that the film formation speed is reduced at the high temperature.

[0007]

However, since the conventional vapor deposition apparatus for a glass substrate is constructed as described above, the glass substrate 100 is bent by the heat generated from the evaporation source 84 to generate the vapor 84a. In addition, there is a problem that the bent glass substrate 100 comes into contact with the vapor deposition mask 80 and the glass substrate 100 is damaged. That is, since the thermal conductivity of the glass substrate 100 is different from the thermal conductivity of the deposition mask 80, when heat is applied from the evaporation source 84, a difference occurs in the bending, and the glass substrate 100 comes into contact with the deposition mask 80 and is broken. Will be done.

Further, the glass substrate 1 is
00, the entire outer periphery is shielded, so that a large difference in temperature distribution occurs between the central portion of the glass substrate 100 and the shielded outer peripheral portion, and the difference in the temperature distribution damages the glass substrate 100. Have the task of doing

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to provide a vapor deposition apparatus for a glass substrate capable of stably and reliably depositing a thin film on a glass substrate without damaging the glass substrate.

[0010]

According to the present invention, there is provided a glass substrate vapor deposition apparatus for defining a predetermined area of a glass substrate as a vapor deposition area by using a vapor deposition mask and depositing a thin film on the vapor deposition area. , The vapor deposition mask is formed by combining at least four flexible band-shaped plates in a frame shape, and supporting each of the band-shaped plates individually and independently. Thus, in the present invention,
Since the vapor deposition mask is formed by separately supporting and combining flexible strips, even if the glass substrate is bent, the strip is bent in response to the deformation caused by the bending. As a result, no stress is applied to the glass substrate from the strip-shaped plate, and the glass substrate can be prevented from being damaged.

Further, the glass substrate deposition apparatus according to the present invention may include a frame-shaped seal joint region facing a seal portion of another glass substrate integrated with the glass substrate, if necessary, by combining the combined band-shaped plate. Is to be masked. As described above, in the present invention, since the frame-shaped seal bonding area is masked by the combined belt-like plate, a thin film can be deposited on the display area inside the seal bonding area, and the outer peripheral area of the seal bonding area can be formed. Thin film can be deposited on the glass substrate, thereby making the temperature distribution of the glass substrate more uniform and cracking the glass substrate,
Damage can be prevented as much as possible.

Further, the glass substrate vapor deposition apparatus according to the present invention, if necessary, when the glass substrate or the band-shaped plate changes its shape due to thermal expansion, the band-shaped plate is movably supported with the shape change. Things. As described above, in the present invention, since the strip-shaped plate is movably supported, the deformation caused by thermal expansion of the glass substrate or the strip-shaped plate itself is absorbed, so that stress is not applied from the strip-shaped plate to the glass substrate. In addition, damage to the glass substrate can be prevented.

Further, the vapor deposition apparatus for a glass substrate according to the present invention has one end or both ends of the strip-shaped plate supported by a long hole or an elastic body as required. As described above, in the present invention, the pressing force against the band-shaped plate and the deformation of the band-shaped plate itself can be absorbed by the support by the elongated holes or the support by the elastic body, and the stress on the glass substrate can be further attenuated to prevent the glass substrate from being damaged. .

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION

(First Embodiment of the Present Invention) Hereinafter, a case where a vapor deposition apparatus for a glass substrate according to a first embodiment of the present invention forms an MgO protective film of a plasma display (PDP) by vapor deposition will be described with reference to FIGS. 1 and 2. Will be explained. 1 is a plan view of the glass substrate deposition apparatus according to the first embodiment viewed from below and a cross-sectional view taken along line AA. FIG. 2 is an operation explanatory diagram of the glass substrate deposition apparatus shown in FIG. FIG. 3 is a partially detailed explanatory view of FIG. Note that the evaporation source and the like are omitted.

In each of the drawings, the glass substrate deposition apparatus according to the first embodiment has a PDP glass substrate 1 substantially at the center.
Substrate support frame 1 having mounting opening 10 for housing 00
And a support piece 21 protruding from the substrate support frame 1 into the mounting opening 10 and attached to the protruding side end.
a,..., and 24 a are brought into contact with the glass substrate 100 to hold the vapor deposition state, and are combined with each other in a cross-shaped (frame) shape that is vertically and horizontally laid over the mounting opening 10. , Strip-shaped plates 31 to 34 disposed so as to mask the sealing joint area around the glass substrate 100.
The belt-like plate 31 is disposed so as to protrude from the substrate support frame 1 into the mounting opening 10, and has the protruding tip portion.
, 34 for supporting the mask from below.
41b, 41c,..., 44a, 44b, 44c form an evaporation mask.

The support pieces 2 of the substrate holders 21,.
For 1a to 24a, for example, a polyimide-based material having a spherical tip at the tip and having heat insulation and flexibility can be used. By making the tips of the support pieces 21a to 24a spherical, even if the glass substrate 100 is bent (thermally deformed) due to thermal stress applied at the time of vapor deposition, the substrate surface of the glass substrate 100 is always maintained. , And can be stably supported vertically.

Each of the strip-shaped plates 31, 34 is formed so as to have a width corresponding to the sealing joint area, and is formed as a vapor deposition mask by combining four pieces as a rectangular frame. In the vicinity of both ends of the band-shaped plates 31, ..., 34, long holes 31a, 31b, ..., 34a, 34b are respectively formed. Protrusions 31c, 31d are formed in the respective long holes 31a, 31b, ..., 34a, 34b. , 34c and 34d are inserted. The projections 31c and 31d,.
Reference numeral 4d supports the strip-shaped plates 31, to 34 so as to be slidable with respect to the longitudinal direction, and regulates movement in a direction perpendicular to the longitudinal direction. This band-like plate 31,
, 34 can also be formed of a nickel-iron alloy material, and when formed of this alloy, the coefficient of thermal expansion of the glass substrate 100 can be made closer to that.

The mask receiving leaf springs 41a, 41b, 4
1c,..., 44a, 44b, and 44c have an elastic force that absorbs all or a part of the maximum width (the maximum width of deformation) of the glass substrate 100. For example, the glass substrate 100 used for a 42-inch PDP has a substrate holder 21,.
4, the maximum deflection width is about 3
mm, and the mask receiving leaf springs 41a, 41b, 41c,..., 44a, 44b capable of absorbing the bending width of 3 mm.
-An elastic force of 44c is required.

Next, the operation of depositing a protective film on a glass substrate of a PDP by the glass substrate deposition apparatus according to the present embodiment based on the above configuration will be described. First, the glass substrate 100 on which a plurality of electrodes and a dielectric layer covering them are formed in advance is accommodated in the mounting opening 10 of the substrate support frame 1 and placed on the substrate holding units 21 to 24. In a state where the glass substrate 100 is placed on the substrate holders 21 to 24,
Magnesium oxide (MgO) is evaporated by heating an evaporation source (not shown) to generate a vapor stream of magnesium oxide. The vaporized magnesium oxide is crystal-grown on the surface of a dielectric layer (not shown) covering the electrodes on the glass substrate 100, and film formation is started.

After the start of the film formation, heat generated by the evaporation source is applied to the glass substrate 100 as thermal stress,
This thermal stress causes the glass substrate 100 to bend. Due to the bending of the glass substrate 100, the glass substrate 100 is deformed from an initial shape shown by a broken line to a shape shown by a solid line as shown in FIG. The deformation of the glass substrate 100 causes the belt-like plate 3
A pressing force is applied to 1, to 34 in the direction of arrow A shown in FIG. The pressing force deforms the band-shaped plates 31, to 34 into a substantially arcuate shape.
31b, ..., 34a and 34b are protruding pieces 31c and 31d,
, Slides while being restricted by 34c and 34d.
Due to the regulation of the protruding pieces 31c and 31d,..., And 34c and 34d, as shown in FIG. 3A, the belt-like plates 31,. And does not move in any other direction (the direction indicated by the arrow X in the figure). Thus, the strip-shaped plate 31,
By moving..., 34 only in the longitudinal direction and below this, the masking operation can always be performed accurately without displacement from the seal bonding area (non-deposition area) of the glass substrate 100.

When the belt-like plates 31, 34 are bent downwardly in a substantially arcuate shape, the mask receiving leaf springs 41a, 41b, 41c, 44a, 44b for supporting them from below.
44c is pushed down in the direction of arrow A shown in FIG. 2, and the band-shaped plate 31 (32,..., 34) and the mask receiving plate spring 41b (41a, 42b,.
Displaced from d) to the position shown by the solid line. As described above, the strip-shaped plates 31 to 34 and the mask receiving plate springs 41a, 41b, and 4 supporting the strip-shaped plates 31 to 34 in accordance with the thermal deformation of the glass substrate 100.
Since 1c,..., 44a, 44b, 44c are displaced, fixed stress is not applied to the glass substrate 100 even when the vapor deposition mask formed of the strip-shaped plates 31,. , Glass substrate 100
Cracks and breakage can be prevented.

Further, even if the belt-shaped plates 31, 34 are bent into a substantially arc shape, the glass substrate 100 is abutted and supported by the supporting pieces 21a, 24a, 24a each having a spherical tip. Therefore, as shown in FIG. 3C, the support pieces 21a,
And 24a are in contact, so that more stable and reliable support can be achieved.

As described above, since the four strip-shaped plates 31,..., 34 are combined in a grid pattern to form a vapor deposition mask, FIG.
As shown in (A), only the seal bonding region 101 of the glass substrate 100 can be masked as a non-deposition region. Accordingly, a protective layer of magnesium oxide can be formed on the display region 102 corresponding to the display surface inside the seal bonding region 101, and the outer peripheral portion 10 of the seal bonding region 101 can be formed.
3 can also form a magnesium oxide film. In addition,
Magnesium oxide deposited on the outer peripheral part, especially on the electrode terminal area, needs to be removed thereafter. As described above, the inside and outside of the seal bonding region 101 (the display region 102 and the outer peripheral portion 103) are simultaneously vapor-deposited so that the glass substrate 10
By making the temperature distribution of 0 more uniform, cracking and breakage can be prevented as much as possible.

In the above-described embodiment, the four band-shaped plates 31,...
As shown in FIG. 4B, the seal bonding area 1
Alternatively, the test terminal area 104 may be formed by masking the test terminal area 104 in addition to the area 01. The test terminal area 104 is cut after the test process is completed.

(Second Embodiment of the Present Invention) FIG. 5 is a sectional view of a glass substrate evaporation apparatus and a detailed view of a supporting structure of a strip-shaped plate according to a second embodiment. In the same figure, the vapor deposition apparatus for a glass substrate according to the present embodiment includes a substrate support frame 1 and substrate holding portions 21 to 24 similarly to the vapor deposition apparatus shown in FIG.
, Strip-shaped plates 31 to 34, and mask receiving leaf spring 41a
41b, 41c, ..., 44a, 44b, 44c, and in addition to this configuration, coil springs 51a, 51b, ..., 54a, 54b are connected to both ends of the strips 31, 34, 34, respectively. Guide 5 near both ends of 31, 34
1c, 51d,..., 54c, 54d. This coil spring 51a / 5
1b, ..., 54a and 54b, one end of the band-shaped plate 31, ...,
Mounting holes 311a and 311b formed at the end of
, 314a and 314b, and the other end is engaged and fixed to the mounting pins 11a and 11b of the substrate support frame 1.

Based on the above configuration, the glass substrate deposition apparatus according to the present embodiment, as in the first embodiment, undergoes a shape change due to bending due to thermal stress during deposition of the glass substrate 100, and this shape change occurs. Even if the coil springs 51a, 51b are pressed into contact with the band-shaped plates 31,
, 54a and 54b extend to absorb the stress caused by this pressing contact. These coil springs 51a and 51b,.
The strips 31 to 34 are slid in the longitudinal direction (the direction of arrow D in the drawing) with the extension of 4a and 54b, but the sliding movement of the strips 31 to 34 is limited to the direction of arrow D only. Guides 51c / 51d, ..., 54c / 54
d restricts the swing and displacement in the X direction perpendicular to the longitudinal direction.

As described above, the band-shaped plate 3 accompanying the deformation of the glass substrate 100 or the thermal expansion of the band-shaped plates 31 to 34 themselves.
The stresses from 1, 34 are applied to the coil springs 51a and 51b,
By absorbing the light from the strips 54a and 54b, the stress from the strips 31 to 34 is not applied to the glass substrate 100, so that the glass substrate 100 can be prevented from being broken or damaged.

In the above embodiment, the strip-shaped plates 31,.
34, the glass substrate 100 is slid.
6A, the stress from the band-shaped plates 31 to 34 is absorbed. However, as shown in FIGS. 6A and 6B, the structure is opposed to the glass substrate 100 of the band-shaped plates 31 to 34. A configuration in which an intermediate support member 6 having elasticity or plasticity is provided on the surface can also be adopted. The intermediate support member 6 can be formed of, for example, a polyimide resin or a silicone resin.

By arranging the intermediate supporting members 6 on the strips 31 to 34 as described above, the glass substrate 100 is deformed in the direction of arrow A shown in FIG. Even if a pressing force is generated on the sides 31 to 34, the pressing force accompanying the deformation of the glass substrate 100 can be absorbed by the intermediate support member 6 being elastically or plastically deformed. Due to the absorption of the pressing force, the stress from the strip-shaped plates 31 to 34 is not applied to the glass substrate 100 side, so that the glass substrate 100 can be prevented from being cracked or damaged.

In each of the above embodiments, the PDP protective film is formed by depositing a thin film of magnesium oxide. However, the protective film may be formed by depositing a protective film with another material. Can be formed by vapor deposition of an ITO film or the like.

Although the above embodiment has been described with reference to a PDP, other LCDs (Liquid Crystal Dispersers) may be used.
play), and can also be applied to the case where a thin film is deposited on a glass substrate used for a flat display panel such as an EL display.

[0032]

As described above, in the present invention, since the vapor deposition mask is formed by individually supporting and combining flexible belt-shaped plates, even if the glass substrate is bent. In addition, the belt-like plate also bends in response to the deformation due to this bending, so that no stress is applied to the glass substrate from this belt-like plate, and the effect of preventing the glass substrate from being damaged can be obtained.

Further, the vapor deposition apparatus for a glass substrate according to the present invention, if necessary, masks the frame-shaped seal joint area with the combined strip-shaped plate, so that the display area inside the seal joint area can be masked. Since the thin film can be deposited on the outer peripheral region, the temperature distribution of the glass substrate can be made more uniform, and the glass substrate can be prevented from being broken or damaged as much as possible.

In the present invention, since the strip is movably supported, it absorbs the deformation of the glass substrate or the strip itself due to thermal expansion, and applies stress from the strip to the glass substrate. And the glass substrate can be prevented from being damaged. Further, in the present invention, the pressing force against the band-shaped plate and the deformation of the band-shaped plate itself can be absorbed by the support by the elongated holes or the support by the elastic body, and the stress on the glass substrate can be further attenuated to prevent the breakage of the glass substrate. Has an effect.

[Brief description of the drawings]

FIG. 1A is a plan view of a glass substrate evaporation apparatus according to a first embodiment of the present invention, as viewed from below. FIG. 2B is a cross-sectional view taken along line II in FIG.

FIG. 2 is an explanatory plan view of the glass substrate deposition apparatus shown in FIG. 1 as viewed from below.

FIG. 3A is a detailed view of an end portion of the belt-like plate in FIG. 2; (B) is a sectional view taken along the line II-II in FIG. 2. (C)
FIG. 3 is a detailed view of the substrate holding unit in FIG. 2.

FIG. 4A is a plan view of a glass substrate on which a protective film is formed by the glass substrate vapor deposition apparatus shown in FIG.
(B) is a plan view of a glass substrate on which a protective film is formed by a glass substrate evaporation apparatus according to another embodiment.

FIG. 5A is a cross-sectional view of a glass substrate vapor deposition apparatus according to a second embodiment of the present invention. (B) is a detailed view of the end support structure of the band-shaped plate in FIG.

FIG. 6A is a cross-sectional view in which an intermediate support member is provided in a glass substrate evaporation apparatus according to a second embodiment of the present invention. FIG. 2B is a cross-sectional view illustrating a state in which the glass substrate illustrated in FIG. 1A is bent and supported by an intermediate support member.

FIG. 7A is a perspective view of a deposition mask in a conventional glass substrate deposition apparatus. (B) is an explanatory view of vapor deposition of a vapor deposition mask in a conventional glass substrate vapor deposition apparatus.

[Explanation of symbols]

Reference Signs List 10 mounting openings 11a, 11b,-, 14a, 14b mounting pins 21,-, 24 substrate holding parts 21a,-, 24a support pieces 31,-, 34 strip-shaped plates 31a, 31b,-, 34a, 34b long holes 31c- 31d, ~, 34c, 34d Projection 41a, 41b, 41c, ~, 44a, 44b, 44c
Mask receiving plate springs 51a / 51b, ..., 54a / 54b Coil springs 51c / 51d, ..., 54c / 54d Guide 80 Evaporation mask 81 Evaporation window 82 Concave part 83 Substrate fixing part 84 Evaporation source 84a Vapor 85 Gap 100 Glass substrate 102 Display area 103 outer peripheral portion 104 test terminal area 311a / 311b, to 314a / 314b mounting hole

Claims (7)

[Claims] 1. A deposition apparatus for a glass substrate, wherein a predetermined area of a glass substrate is defined as a deposition area by a deposition mask, and a thin film is deposited on the deposition area. A vapor deposition apparatus for a glass substrate, wherein at least four frames are combined to form and support each of the strips individually and independently. 2. The deposition apparatus for a glass substrate according to claim 1, wherein the frame-shaped mask is disposed so as to simultaneously form a deposition film in each of a central portion and a peripheral portion of the glass substrate. An evaporation apparatus for a glass substrate, comprising: 3. The glass substrate deposition apparatus according to claim 1, wherein, when the glass substrate or the band-shaped plate changes shape due to thermal expansion, the band-shaped plate is movable along with the shape change. An evaporation apparatus for a glass substrate, which is supported. 4. The glass substrate vapor deposition apparatus according to claim 1, wherein one or both ends of the strip-shaped plate are supported by a long hole or an elastic body. . 5. The vapor deposition apparatus for a glass substrate according to claim 1, wherein a tip of a holding member for holding the glass substrate has a spherical shape and is made of a material having heat insulation and plasticity. An evaporation apparatus for a glass substrate, which is formed. 6. The vapor deposition apparatus for a glass substrate according to claim 1, wherein an elastic or plastic material film is formed on a plate surface facing the band-shaped glass substrate. Glass substrate deposition equipment. 7. A protective film deposition method for a plasma display panel, wherein a protective film made of magnesium oxide for a plasma display panel is formed by a vapor deposition method, wherein a peripheral portion of a glass substrate on which a plurality of electrodes and a dielectric layer covering the electrodes are formed. A frame-shaped vapor deposition mask for shielding only the frame-shaped seal bonding area is disposed, and the magnesium oxide film is vapor-deposited to a predetermined thickness on the surface of the dielectric layer formed inside and outside the seal bonding area. A method for depositing a protective film on a plasma display panel.