KR100617854B1 - Alkali cleaner - Google Patents
Alkali cleaner Download PDFInfo
- Publication number
- KR100617854B1 KR100617854B1 KR1020050027180A KR20050027180A KR100617854B1 KR 100617854 B1 KR100617854 B1 KR 100617854B1 KR 1020050027180 A KR1020050027180 A KR 1020050027180A KR 20050027180 A KR20050027180 A KR 20050027180A KR 100617854 B1 KR100617854 B1 KR 100617854B1
- Authority
- KR
- South Korea
- Prior art keywords
- cleaning
- group
- formula
- cation
- cleaning agent
- Prior art date
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- 239000003513 alkali Substances 0.000 title claims abstract description 16
- 238000004140 cleaning Methods 0.000 claims abstract description 35
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 30
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 30
- 238000005260 corrosion Methods 0.000 claims abstract description 25
- 230000007797 corrosion Effects 0.000 claims abstract description 25
- 239000012459 cleaning agent Substances 0.000 claims abstract description 24
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 18
- 238000005406 washing Methods 0.000 claims abstract description 18
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000003599 detergent Substances 0.000 claims abstract description 11
- 238000007598 dipping method Methods 0.000 claims abstract description 7
- 235000011187 glycerol Nutrition 0.000 claims abstract description 6
- 238000001035 drying Methods 0.000 claims abstract description 4
- 239000007921 spray Substances 0.000 claims abstract description 4
- 238000004506 ultrasonic cleaning Methods 0.000 claims abstract description 4
- 125000004432 carbon atom Chemical group C* 0.000 claims description 40
- 125000000217 alkyl group Chemical group 0.000 claims description 21
- 125000001183 hydrocarbyl group Chemical group 0.000 claims description 17
- 125000002947 alkylene group Chemical group 0.000 claims description 12
- 239000004973 liquid crystal related substance Substances 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 239000002904 solvent Substances 0.000 claims description 6
- 239000000654 additive Substances 0.000 claims description 4
- 125000003368 amide group Chemical group 0.000 claims description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 3
- 239000004094 surface-active agent Substances 0.000 claims description 3
- 230000000996 additive effect Effects 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 125000005207 tetraalkylammonium group Chemical group 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 8
- 125000004433 nitrogen atom Chemical group N* 0.000 abstract description 8
- 239000004566 building material Substances 0.000 abstract description 7
- -1 aluminum Chemical class 0.000 description 90
- 239000010408 film Substances 0.000 description 26
- 239000011521 glass Substances 0.000 description 23
- 239000000758 substrate Substances 0.000 description 23
- 150000003839 salts Chemical class 0.000 description 20
- 150000004665 fatty acids Chemical class 0.000 description 13
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 11
- 150000001768 cations Chemical class 0.000 description 11
- 235000014113 dietary fatty acids Nutrition 0.000 description 11
- 239000000194 fatty acid Substances 0.000 description 11
- 229930195729 fatty acid Natural products 0.000 description 11
- 229920001721 polyimide Polymers 0.000 description 11
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 150000005846 sugar alcohols Polymers 0.000 description 9
- 229910019142 PO4 Inorganic materials 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 235000021317 phosphate Nutrition 0.000 description 7
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 239000004642 Polyimide Substances 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 239000002280 amphoteric surfactant Substances 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000003921 oil Substances 0.000 description 6
- 235000019198 oils Nutrition 0.000 description 6
- 239000010452 phosphate Substances 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 5
- 238000007792 addition Methods 0.000 description 5
- 150000001298 alcohols Chemical class 0.000 description 5
- 150000001412 amines Chemical class 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 5
- 235000019832 sodium triphosphate Nutrition 0.000 description 5
- UNXRWKVEANCORM-UHFFFAOYSA-I triphosphate(5-) Chemical compound [O-]P([O-])(=O)OP([O-])(=O)OP([O-])([O-])=O UNXRWKVEANCORM-UHFFFAOYSA-I 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 125000005702 oxyalkylene group Chemical group 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 229960004063 propylene glycol Drugs 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000010998 test method Methods 0.000 description 4
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 4
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- KWIUHFFTVRNATP-UHFFFAOYSA-N Betaine Natural products C[N+](C)(C)CC([O-])=O KWIUHFFTVRNATP-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 125000001931 aliphatic group Chemical group 0.000 description 3
- 229910052783 alkali metal Inorganic materials 0.000 description 3
- 150000003973 alkyl amines Chemical class 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- 229960003237 betaine Drugs 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 150000001991 dicarboxylic acids Chemical class 0.000 description 3
- GPLRAVKSCUXZTP-UHFFFAOYSA-N diglycerol Chemical compound OCC(O)COCC(O)CO GPLRAVKSCUXZTP-UHFFFAOYSA-N 0.000 description 3
- 150000002009 diols Chemical class 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 150000007522 mineralic acids Chemical class 0.000 description 3
- 239000002736 nonionic surfactant Substances 0.000 description 3
- 150000007524 organic acids Chemical class 0.000 description 3
- 230000008929 regeneration Effects 0.000 description 3
- 238000011069 regeneration method Methods 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- CBXCPBUEXACCNR-UHFFFAOYSA-N tetraethylammonium Chemical compound CC[N+](CC)(CC)CC CBXCPBUEXACCNR-UHFFFAOYSA-N 0.000 description 3
- QEMXHQIAXOOASZ-UHFFFAOYSA-N tetramethylammonium Chemical compound C[N+](C)(C)C QEMXHQIAXOOASZ-UHFFFAOYSA-N 0.000 description 3
- 239000001993 wax Substances 0.000 description 3
- DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical compound C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 description 2
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 2
- QDCPNGVVOWVKJG-VAWYXSNFSA-N 2-[(e)-dodec-1-enyl]butanedioic acid Chemical compound CCCCCCCCCC\C=C\C(C(O)=O)CC(O)=O QDCPNGVVOWVKJG-VAWYXSNFSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- REYJJPSVUYRZGE-UHFFFAOYSA-N Octadecylamine Chemical compound CCCCCCCCCCCCCCCCCCN REYJJPSVUYRZGE-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 125000002723 alicyclic group Chemical group 0.000 description 2
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 150000001336 alkenes Chemical class 0.000 description 2
- 125000003342 alkenyl group Chemical group 0.000 description 2
- 150000001408 amides Chemical class 0.000 description 2
- 150000003863 ammonium salts Chemical class 0.000 description 2
- 239000003963 antioxidant agent Substances 0.000 description 2
- 230000003078 antioxidant effect Effects 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- PAFZNILMFXTMIY-UHFFFAOYSA-N cyclohexylamine Chemical compound NC1CCCCC1 PAFZNILMFXTMIY-UHFFFAOYSA-N 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 229940105990 diglycerin Drugs 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 description 2
- POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical compound CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 description 2
- JRBPAEWTRLWTQC-UHFFFAOYSA-N dodecylamine Chemical compound CCCCCCCCCCCCN JRBPAEWTRLWTQC-UHFFFAOYSA-N 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000005227 gel permeation chromatography Methods 0.000 description 2
- 150000002334 glycols Chemical class 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 235000001055 magnesium Nutrition 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- LYRFLYHAGKPMFH-UHFFFAOYSA-N octadecanamide Chemical compound CCCCCCCCCCCCCCCCCC(N)=O LYRFLYHAGKPMFH-UHFFFAOYSA-N 0.000 description 2
- 235000005985 organic acids Nutrition 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 229930195734 saturated hydrocarbon Natural products 0.000 description 2
- 239000003352 sequestering agent Substances 0.000 description 2
- ZMANZCXQSJIPKH-UHFFFAOYSA-N triethylamine Natural products CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 2
- HVLLSGMXQDNUAL-UHFFFAOYSA-N triphenyl phosphite Chemical compound C=1C=CC=CC=1OP(OC=1C=CC=CC=1)OC1=CC=CC=C1 HVLLSGMXQDNUAL-UHFFFAOYSA-N 0.000 description 2
- 150000004670 unsaturated fatty acids Chemical class 0.000 description 2
- 235000021122 unsaturated fatty acids Nutrition 0.000 description 2
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 2
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 1
- QLAJNZSPVITUCQ-UHFFFAOYSA-N 1,3,2-dioxathietane 2,2-dioxide Chemical compound O=S1(=O)OCO1 QLAJNZSPVITUCQ-UHFFFAOYSA-N 0.000 description 1
- 150000000185 1,3-diols Chemical class 0.000 description 1
- 150000000190 1,4-diols Chemical class 0.000 description 1
- UHLVEPZGUGASIP-UHFFFAOYSA-N 1-(diethylamino)-2-methylbutan-2-ol octadecanamide Chemical compound C(C)C(O)(CN(CC)CC)C.C(CCCCCCCCCCCCCCCCC)(=O)N UHLVEPZGUGASIP-UHFFFAOYSA-N 0.000 description 1
- ZFPGARUNNKGOBB-UHFFFAOYSA-N 1-Ethyl-2-pyrrolidinone Chemical compound CCN1CCCC1=O ZFPGARUNNKGOBB-UHFFFAOYSA-N 0.000 description 1
- FJLUATLTXUNBOT-UHFFFAOYSA-N 1-Hexadecylamine Chemical compound CCCCCCCCCCCCCCCCN FJLUATLTXUNBOT-UHFFFAOYSA-N 0.000 description 1
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- BJDXPJYYDSBLGV-UHFFFAOYSA-N 18,18-diethylicosan-1-amine Chemical compound CCC(CC)(CC)CCCCCCCCCCCCCCCCCN BJDXPJYYDSBLGV-UHFFFAOYSA-N 0.000 description 1
- FVIMRJIDRHUTQP-UHFFFAOYSA-N 2-[bis(2-hydroxyethyl)amino]ethyl octadecanoate Chemical compound CCCCCCCCCCCCCCCCCC(=O)OCCN(CCO)CCO FVIMRJIDRHUTQP-UHFFFAOYSA-N 0.000 description 1
- SQRFXEGLEGEFHV-UHFFFAOYSA-N 2-[pentadecyl(sulfo)amino]ethanesulfonic acid Chemical compound CCCCCCCCCCCCCCCN(S(O)(=O)=O)CCS(O)(=O)=O SQRFXEGLEGEFHV-UHFFFAOYSA-N 0.000 description 1
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 1
- FLHWLBNLXDWNJC-UHFFFAOYSA-N 4,5-dihydroimidazole-1-sulfonic acid Chemical compound OS(=O)(=O)N1CCN=C1 FLHWLBNLXDWNJC-UHFFFAOYSA-N 0.000 description 1
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 1
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 1
- RUPBZQFQVRMKDG-UHFFFAOYSA-M Didecyldimethylammonium chloride Chemical compound [Cl-].CCCCCCCCCC[N+](C)(C)CCCCCCCCCC RUPBZQFQVRMKDG-UHFFFAOYSA-M 0.000 description 1
- GHKOFFNLGXMVNJ-UHFFFAOYSA-N Didodecyl thiobispropanoate Chemical compound CCCCCCCCCCCCOC(=O)CCSCCC(=O)OCCCCCCCCCCCC GHKOFFNLGXMVNJ-UHFFFAOYSA-N 0.000 description 1
- 239000003508 Dilauryl thiodipropionate Substances 0.000 description 1
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 1
- AVXURJPOCDRRFD-UHFFFAOYSA-N Hydroxylamine Chemical compound ON AVXURJPOCDRRFD-UHFFFAOYSA-N 0.000 description 1
- 239000005639 Lauric acid Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- KWIUHFFTVRNATP-UHFFFAOYSA-O N,N,N-trimethylglycinium Chemical compound C[N+](C)(C)CC(O)=O KWIUHFFTVRNATP-UHFFFAOYSA-O 0.000 description 1
- JQVDAXLFBXTEQA-UHFFFAOYSA-N N-butyl-butylamine Natural products CCCCNCCCC JQVDAXLFBXTEQA-UHFFFAOYSA-N 0.000 description 1
- HQABUPZFAYXKJW-UHFFFAOYSA-N N-butylamine Natural products CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000005642 Oleic acid Substances 0.000 description 1
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 235000019482 Palm oil Nutrition 0.000 description 1
- 239000004111 Potassium silicate Substances 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical class C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- 229930006000 Sucrose Natural products 0.000 description 1
- CZMRCDWAGMRECN-UGDNZRGBSA-N Sucrose Chemical compound O[C@H]1[C@H](O)[C@@H](CO)O[C@@]1(CO)O[C@@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 CZMRCDWAGMRECN-UGDNZRGBSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical class OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- TVXBFESIOXBWNM-UHFFFAOYSA-N Xylitol Natural products OCCC(O)C(O)C(O)CCO TVXBFESIOXBWNM-UHFFFAOYSA-N 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 229910000288 alkali metal carbonate Inorganic materials 0.000 description 1
- 150000008041 alkali metal carbonates Chemical class 0.000 description 1
- 229910000318 alkali metal phosphate Inorganic materials 0.000 description 1
- 229910052910 alkali metal silicate Inorganic materials 0.000 description 1
- 229910001860 alkaline earth metal hydroxide Inorganic materials 0.000 description 1
- 229910000316 alkaline earth metal phosphate Inorganic materials 0.000 description 1
- 229910052915 alkaline earth metal silicate Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 125000002877 alkyl aryl group Chemical group 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 150000001413 amino acids Chemical class 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 235000019270 ammonium chloride Nutrition 0.000 description 1
- GETQZCLCWQTVFV-UHFFFAOYSA-N anhydrous trimethylamine Natural products CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 125000003710 aryl alkyl group Chemical group 0.000 description 1
- 150000001536 azelaic acids Chemical class 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- RQPZNWPYLFFXCP-UHFFFAOYSA-L barium dihydroxide Chemical compound [OH-].[OH-].[Ba+2] RQPZNWPYLFFXCP-UHFFFAOYSA-L 0.000 description 1
- 229910001863 barium hydroxide Inorganic materials 0.000 description 1
- 229910052916 barium silicate Inorganic materials 0.000 description 1
- HMOQPOVBDRFNIU-UHFFFAOYSA-N barium(2+);dioxido(oxo)silane Chemical compound [Ba+2].[O-][Si]([O-])=O HMOQPOVBDRFNIU-UHFFFAOYSA-N 0.000 description 1
- AYJRCSIUFZENHW-DEQYMQKBSA-L barium(2+);oxomethanediolate Chemical compound [Ba+2].[O-][14C]([O-])=O AYJRCSIUFZENHW-DEQYMQKBSA-L 0.000 description 1
- RCUAPGYXYWSYKO-UHFFFAOYSA-J barium(2+);phosphonato phosphate Chemical compound [Ba+2].[Ba+2].[O-]P([O-])(=O)OP([O-])([O-])=O RCUAPGYXYWSYKO-UHFFFAOYSA-J 0.000 description 1
- 229960000686 benzalkonium chloride Drugs 0.000 description 1
- JBIROUFYLSSYDX-UHFFFAOYSA-M benzododecinium chloride Chemical compound [Cl-].CCCCCCCCCCCC[N+](C)(C)CC1=CC=CC=C1 JBIROUFYLSSYDX-UHFFFAOYSA-M 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- CADWTSSKOVRVJC-UHFFFAOYSA-N benzyl(dimethyl)azanium;chloride Chemical compound [Cl-].C[NH+](C)CC1=CC=CC=C1 CADWTSSKOVRVJC-UHFFFAOYSA-N 0.000 description 1
- VBQDSLGFSUGBBE-UHFFFAOYSA-N benzyl(triethyl)azanium Chemical compound CC[N+](CC)(CC)CC1=CC=CC=C1 VBQDSLGFSUGBBE-UHFFFAOYSA-N 0.000 description 1
- YOUGRGFIHBUKRS-UHFFFAOYSA-N benzyl(trimethyl)azanium Chemical compound C[N+](C)(C)CC1=CC=CC=C1 YOUGRGFIHBUKRS-UHFFFAOYSA-N 0.000 description 1
- WGQKYBSKWIADBV-UHFFFAOYSA-N benzylamine Chemical class NCC1=CC=CC=C1 WGQKYBSKWIADBV-UHFFFAOYSA-N 0.000 description 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical class C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 1
- 125000004369 butenyl group Chemical group C(=CCC)* 0.000 description 1
- HQABUPZFAYXKJW-UHFFFAOYSA-O butylazanium Chemical compound CCCC[NH3+] HQABUPZFAYXKJW-UHFFFAOYSA-O 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 1
- JUNWLZAGQLJVLR-UHFFFAOYSA-J calcium diphosphate Chemical compound [Ca+2].[Ca+2].[O-]P([O-])(=O)OP([O-])([O-])=O JUNWLZAGQLJVLR-UHFFFAOYSA-J 0.000 description 1
- 239000000920 calcium hydroxide Substances 0.000 description 1
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 1
- 229940043256 calcium pyrophosphate Drugs 0.000 description 1
- 239000000378 calcium silicate Substances 0.000 description 1
- 229910052918 calcium silicate Inorganic materials 0.000 description 1
- OYACROKNLOSFPA-UHFFFAOYSA-N calcium;dioxido(oxo)silane Chemical compound [Ca+2].[O-][Si]([O-])=O OYACROKNLOSFPA-UHFFFAOYSA-N 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 239000003093 cationic surfactant Substances 0.000 description 1
- 229960001927 cetylpyridinium chloride Drugs 0.000 description 1
- YMKDRGPMQRFJGP-UHFFFAOYSA-M cetylpyridinium chloride Chemical compound [Cl-].CCCCCCCCCCCCCCCC[N+]1=CC=CC=C1 YMKDRGPMQRFJGP-UHFFFAOYSA-M 0.000 description 1
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical class [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- RKMJXTWHATWGNX-UHFFFAOYSA-N decyltrimethylammonium ion Chemical compound CCCCCCCCCC[N+](C)(C)C RKMJXTWHATWGNX-UHFFFAOYSA-N 0.000 description 1
- LNIYNESXCOYFPW-UHFFFAOYSA-N dibenzyl(dimethyl)azanium Chemical compound C=1C=CC=CC=1C[N+](C)(C)CC1=CC=CC=C1 LNIYNESXCOYFPW-UHFFFAOYSA-N 0.000 description 1
- IWNOOSCVWBRLDC-UHFFFAOYSA-N dibenzyl-methyl-octylazanium Chemical compound C=1C=CC=CC=1C[N+](C)(CCCCCCCC)CC1=CC=CC=C1 IWNOOSCVWBRLDC-UHFFFAOYSA-N 0.000 description 1
- 235000019821 dicalcium diphosphate Nutrition 0.000 description 1
- 229960004670 didecyldimethylammonium chloride Drugs 0.000 description 1
- YHGYWQSVROLRND-UHFFFAOYSA-N diethyl(dioctyl)azanium Chemical compound CCCCCCCC[N+](CC)(CC)CCCCCCCC YHGYWQSVROLRND-UHFFFAOYSA-N 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- 235000019304 dilauryl thiodipropionate Nutrition 0.000 description 1
- XZTWHWHGBBCSMX-UHFFFAOYSA-J dimagnesium;phosphonato phosphate Chemical compound [Mg+2].[Mg+2].[O-]P([O-])(=O)OP([O-])([O-])=O XZTWHWHGBBCSMX-UHFFFAOYSA-J 0.000 description 1
- 229950010007 dimantine Drugs 0.000 description 1
- MELGLHXCBHKVJG-UHFFFAOYSA-N dimethyl(dioctyl)azanium Chemical compound CCCCCCCC[N+](C)(C)CCCCCCCC MELGLHXCBHKVJG-UHFFFAOYSA-N 0.000 description 1
- APTVNWGLSRAOFJ-UHFFFAOYSA-M dimethyl(dioctyl)azanium;bromide Chemical compound [Br-].CCCCCCCC[N+](C)(C)CCCCCCCC APTVNWGLSRAOFJ-UHFFFAOYSA-M 0.000 description 1
- DMBHHRLKUKUOEG-UHFFFAOYSA-N diphenylamine Chemical class C=1C=CC=CC=1NC1=CC=CC=C1 DMBHHRLKUKUOEG-UHFFFAOYSA-N 0.000 description 1
- DDXLVDQZPFLQMZ-UHFFFAOYSA-M dodecyl(trimethyl)azanium;chloride Chemical compound [Cl-].CCCCCCCCCCCC[N+](C)(C)C DDXLVDQZPFLQMZ-UHFFFAOYSA-M 0.000 description 1
- VICYBMUVWHJEFT-UHFFFAOYSA-N dodecyltrimethylammonium ion Chemical compound CCCCCCCCCCCC[N+](C)(C)C VICYBMUVWHJEFT-UHFFFAOYSA-N 0.000 description 1
- 125000001033 ether group Chemical group 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- FBWKUAUBADFSOJ-UHFFFAOYSA-N ethyl(trioctyl)azanium Chemical compound CCCCCCCC[N+](CC)(CCCCCCCC)CCCCCCCC FBWKUAUBADFSOJ-UHFFFAOYSA-N 0.000 description 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- YOMFVLRTMZWACQ-UHFFFAOYSA-N ethyltrimethylammonium Chemical compound CC[N+](C)(C)C YOMFVLRTMZWACQ-UHFFFAOYSA-N 0.000 description 1
- 239000003925 fat Substances 0.000 description 1
- 235000019197 fats Nutrition 0.000 description 1
- PISCILXZPLTTFP-UHFFFAOYSA-N heptyl(trimethyl)azanium Chemical compound CCCCCCC[N+](C)(C)C PISCILXZPLTTFP-UHFFFAOYSA-N 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000010954 inorganic particle Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 1
- 239000000347 magnesium hydroxide Substances 0.000 description 1
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 239000000391 magnesium silicate Substances 0.000 description 1
- 229910052919 magnesium silicate Inorganic materials 0.000 description 1
- 235000019792 magnesium silicate Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- HEBKCHPVOIAQTA-UHFFFAOYSA-N meso ribitol Natural products OCC(O)C(O)C(O)CO HEBKCHPVOIAQTA-UHFFFAOYSA-N 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 150000004692 metal hydroxides Chemical class 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- ZUZLIXGTXQBUDC-UHFFFAOYSA-N methyltrioctylammonium Chemical compound CCCCCCCC[N+](C)(CCCCCCCC)CCCCCCCC ZUZLIXGTXQBUDC-UHFFFAOYSA-N 0.000 description 1
- BAVYZALUXZFZLV-UHFFFAOYSA-N mono-methylamine Natural products NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 1
- QUSNBJAOOMFDIB-UHFFFAOYSA-N monoethyl amine Natural products CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- 229940117969 neopentyl glycol Drugs 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 150000002826 nitrites Chemical class 0.000 description 1
- HLERILKGMXJNBU-UHFFFAOYSA-N norvaline betaine Chemical compound CCCC(C([O-])=O)[N+](C)(C)C HLERILKGMXJNBU-UHFFFAOYSA-N 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- HTKPDYSCAPSXIR-UHFFFAOYSA-N octyltrimethylammonium ion Chemical compound CCCCCCCC[N+](C)(C)C HTKPDYSCAPSXIR-UHFFFAOYSA-N 0.000 description 1
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 1
- 150000002889 oleic acids Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000011146 organic particle Substances 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 239000002540 palm oil Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 150000003018 phosphorus compounds Chemical class 0.000 description 1
- DOIRQSBPFJWKBE-UHFFFAOYSA-N phthalic acid di-n-butyl ester Natural products CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- NNHHDJVEYQHLHG-UHFFFAOYSA-N potassium silicate Chemical compound [K+].[K+].[O-][Si]([O-])=O NNHHDJVEYQHLHG-UHFFFAOYSA-N 0.000 description 1
- 229910052913 potassium silicate Inorganic materials 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- WGYKZJWCGVVSQN-UHFFFAOYSA-O propan-1-aminium Chemical compound CCC[NH3+] WGYKZJWCGVVSQN-UHFFFAOYSA-O 0.000 description 1
- 125000004368 propenyl group Chemical group C(=CC)* 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- ROSDSFDQCJNGOL-UHFFFAOYSA-N protonated dimethyl amine Natural products CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 1
- HNJBEVLQSNELDL-UHFFFAOYSA-N pyrrolidin-2-one Chemical compound O=C1CCCN1 HNJBEVLQSNELDL-UHFFFAOYSA-N 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 235000003441 saturated fatty acids Nutrition 0.000 description 1
- 150000004671 saturated fatty acids Chemical class 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 1
- FQENQNTWSFEDLI-UHFFFAOYSA-J sodium diphosphate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]P([O-])(=O)OP([O-])([O-])=O FQENQNTWSFEDLI-UHFFFAOYSA-J 0.000 description 1
- 235000019830 sodium polyphosphate Nutrition 0.000 description 1
- 239000004324 sodium propionate Substances 0.000 description 1
- 235000010334 sodium propionate Nutrition 0.000 description 1
- JXKPEJDQGNYQSM-UHFFFAOYSA-M sodium propionate Chemical compound [Na+].CCC([O-])=O JXKPEJDQGNYQSM-UHFFFAOYSA-M 0.000 description 1
- 229960003212 sodium propionate Drugs 0.000 description 1
- 229940048086 sodium pyrophosphate Drugs 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229940037312 stearamide Drugs 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000005720 sucrose Substances 0.000 description 1
- 150000003871 sulfonates Chemical class 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000003760 tallow Substances 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- DTIFFPXSSXFQCJ-UHFFFAOYSA-N tetrahexylazanium Chemical compound CCCCCC[N+](CCCCCC)(CCCCCC)CCCCCC DTIFFPXSSXFQCJ-UHFFFAOYSA-N 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
- GJSGYPDDPQRWPK-UHFFFAOYSA-N tetrapentylammonium Chemical compound CCCCC[N+](CCCCC)(CCCCC)CCCCC GJSGYPDDPQRWPK-UHFFFAOYSA-N 0.000 description 1
- RYCLIXPGLDDLTM-UHFFFAOYSA-J tetrapotassium;phosphonato phosphate Chemical compound [K+].[K+].[K+].[K+].[O-]P([O-])(=O)OP([O-])([O-])=O RYCLIXPGLDDLTM-UHFFFAOYSA-J 0.000 description 1
- 235000019818 tetrasodium diphosphate Nutrition 0.000 description 1
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 description 1
- FEJQDYXPAQVBCA-UHFFFAOYSA-J tetrasodium;ethane-1,2-diamine;tetraacetate Chemical compound [Na+].[Na+].[Na+].[Na+].CC([O-])=O.CC([O-])=O.CC([O-])=O.CC([O-])=O.NCCN FEJQDYXPAQVBCA-UHFFFAOYSA-J 0.000 description 1
- POWFTOSLLWLEBN-UHFFFAOYSA-N tetrasodium;silicate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-][Si]([O-])([O-])[O-] POWFTOSLLWLEBN-UHFFFAOYSA-N 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 125000005208 trialkylammonium group Chemical group 0.000 description 1
- IMFACGCPASFAPR-UHFFFAOYSA-O tributylazanium Chemical compound CCCC[NH+](CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-O 0.000 description 1
- GCRCSLNXFKCFHB-UHFFFAOYSA-N triethyl(hexyl)azanium Chemical compound CCCCCC[N+](CC)(CC)CC GCRCSLNXFKCFHB-UHFFFAOYSA-N 0.000 description 1
- JHNACYHGMDXEMK-UHFFFAOYSA-N triethyl(octyl)azanium Chemical compound CCCCCCCC[N+](CC)(CC)CC JHNACYHGMDXEMK-UHFFFAOYSA-N 0.000 description 1
- PDSVZUAJOIQXRK-UHFFFAOYSA-N trimethyl(octadecyl)azanium Chemical compound CCCCCCCCCCCCCCCCCC[N+](C)(C)C PDSVZUAJOIQXRK-UHFFFAOYSA-N 0.000 description 1
- SZEMGTQCPRNXEG-UHFFFAOYSA-M trimethyl(octadecyl)azanium;bromide Chemical compound [Br-].CCCCCCCCCCCCCCCCCC[N+](C)(C)C SZEMGTQCPRNXEG-UHFFFAOYSA-M 0.000 description 1
- QXJQHYBHAIHNGG-UHFFFAOYSA-N trimethylolethane Chemical compound OCC(C)(CO)CO QXJQHYBHAIHNGG-UHFFFAOYSA-N 0.000 description 1
- 235000021081 unsaturated fats Nutrition 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 239000000811 xylitol Substances 0.000 description 1
- HEBKCHPVOIAQTA-SCDXWVJYSA-N xylitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)CO HEBKCHPVOIAQTA-SCDXWVJYSA-N 0.000 description 1
- 235000010447 xylitol Nutrition 0.000 description 1
- 229960002675 xylitol Drugs 0.000 description 1
- 239000004711 α-olefin Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/261—Alcohols; Phenols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2003—Alcohols; Phenols
- C11D3/2006—Monohydric alcohols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2003—Alcohols; Phenols
- C11D3/2041—Dihydric alcohols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
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- C11D3/2003—Alcohols; Phenols
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- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
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- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
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- C11D3/30—Amines; Substituted amines ; Quaternized amines
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- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/06—Hydroxides
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- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
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- C11D7/10—Salts
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- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
- C11D7/3209—Amines or imines with one to four nitrogen atoms; Quaternized amines
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- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
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- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
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- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
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Abstract
본 발명은 내알루미늄부식성이 우수한 신규한 세정제, 세정방법 및 세정된 전자부품을 제공한다.The present invention provides a novel cleaner, a cleaning method and a cleaned electronic component having excellent aluminum corrosion resistance.
알칼리성분(A), 글리세린(B), 및 질소원자를 함유하지 않는 수평균 분자량 32~500의 1가 알코올(C2)로 이루어진 군으로부터 선택되는 적어도 1종류의 알코올(C)를 함유하는 알칼리 세정제; 상기 세정제를 사용하여 초음파 세정, 샤워 세정, 스프레이 세정, 침지 및 침지 요동으로부터 선택되는 1종류 이상의 방법으로 세정하는 것을 특징으로 하는 전자부품, 전기부품 또는 알루미늄 건재의 세정방법; 상기 세정방법으로 세정하여 린스한 후, 건조하여 얻어지는 전자부품, 전기부품 또는 알루미늄 건재;이다.Alkali detergent (A), glycerin (B), and alkali cleaning agent containing at least 1 type of alcohol (C) chosen from the group which consists of monohydric alcohol (C2) of the number average molecular weights 32-500 which do not contain nitrogen atom. ; A cleaning method for an electronic part, an electric part or an aluminum building material, characterized in that the cleaning agent is used for cleaning by at least one method selected from ultrasonic cleaning, shower cleaning, spray cleaning, dipping and dipping fluctuations; Electronic components, electrical components, or aluminum building materials obtained by washing and rinsing with the washing method and then drying.
내알루미늄부식성, 알칼리 세정제, 세정방법 Aluminum corrosion resistance, alkali cleaner, cleaning method
Description
본 발명은 전자부품, 금속부품, 세라믹부품 등에 부착되어 있는 유지류, 수지, 파티클 등을 제거하는 데 사용되는 알칼리 세정제, 더욱 상세하게는 액정패널의 수직배향 폴리이미드막(특히 반소성막)의 박리액으로서 사용되는 알칼리 세정제에 관한 것이다.The present invention is an alkali cleaner used to remove oils, resins, particles, etc. adhering to electronic parts, metal parts, ceramic parts, and the like, and more particularly, a peeling liquid of a vertically oriented polyimide film (especially a semi-baked film) of a liquid crystal panel. It relates to an alkali cleaner used as a.
종래부터, 알칼리 세정제는 중성 세정제에 비해 유지류, 수지, 파티클 등을 제거하는 능력이 우수하기 때문에 전자부품, 금속부품, 세라믹부품 등 생산현장에 있어서 폭넓게 사용되고 있다. 그러나, 알칼리 세정제는 알루미늄 등의 비철금속을 용이하게 부식시키기 때문에 알루미늄이 부품의 일부 또는 전부에 사용되고 있는 전자부품 등의 세정에는 사용할 수 없는 것이 현재 상태였다. 예를 들면, 전자부품 특히 액정패널의 폴리이미드 배향막은 지금까지 수평배향 타입이었지만, 광시야각 액정패널의 요망이 강해짐에 따라 수직배향 타입의 폴리이미드 배향막이 증가하는 추세에 있다. 수평배향 타입의 폴리이미드 배향막 유리기판은 완전소성(소성온도: 약 180℃) 전의 반소성 상태(약 80℃에서 탈용제한 반경화막)라면, 그 불량품은 N-메틸피롤리돈 등의 용제로 알루미늄 박막(배선)을 부식하지 않고 배향막을 박리할 수 있지만, 수직배향 타입의 폴리이미드 배향막의 경우에는 상기 반소성 상태이더라도 용제로는 폴리이미드 배향막(반소성)을 박리할 수 없기 때문에 알칼리 세정제를 사용하여 배향막 박리를 행하고 있다(특허문헌-1 참조). 그 때, 유리기판의 알루미늄 박막(배선)은 부식하기 때문에 알루미늄 박막부분을 왁스 등으로 보호하여 세정하고, 이어서 탄화수소 등의 용제로 왁스 제거하여 기판을 재생시키거나, 배향막과 동시에 알루미늄 박막을 완전하게 박리·용해시키고 나서 유리기판만을 재생시키는 방법이 취해지고 있었다.Conventionally, alkali cleaners have been widely used in production sites such as electronic parts, metal parts, ceramic parts, etc. because of their superior ability to remove fats, oils, particles, and the like from neutral detergents. However, since alkaline cleaners easily corrode nonferrous metals such as aluminum, it has not been possible to use aluminum for cleaning electronic parts and the like that are used for some or all of the parts. For example, the polyimide alignment film of an electronic component, especially a liquid crystal panel, has been a horizontal alignment type until now, but as the demand of a wide viewing angle liquid crystal panel becomes stronger, the vertical alignment type polyimide alignment film is increasing. If the horizontal orientation type polyimide alignment film glass substrate is in a semi-fired state (a semi-hardened film desolvated at about 80 ° C.) before complete firing (firing temperature: about 180 ° C.), the defective product may be a solvent such as N-methylpyrrolidone. The alignment film can be peeled off without corrosion of the aluminum thin film (wiring). However, in the case of the vertical alignment type polyimide alignment film, even if the semi-baked state is used, the solvent cannot peel off the polyimide alignment film (semi-fired). It is using, and oriented film peeling is performed (refer patent document-1). At this time, since the aluminum thin film (wiring) of the glass substrate is corroded, the aluminum thin film portion is protected by wax or the like and then washed, and then wax is removed with a solvent such as hydrocarbon to regenerate the substrate, or the aluminum thin film is completely removed at the same time as the alignment film. After peeling and melting, the method of regenerating only a glass substrate was taken.
[특허문헌-1] 일본국 특허공개 제(평)6-306661호 공보[Patent Document-1] Japanese Patent Application Laid-Open No. 6-306661
본 발명의 목적은 내알루미늄부식성이 우수한 신규한 세정제, 세정방법 및 세정된 전자부품을 제공하는 데 있다.An object of the present invention is to provide a novel cleaner, a cleaning method and a cleaned electronic component excellent in aluminum corrosion resistance.
본 발명자는 상기 목적을 달성하기 위해 예의 연구한 결과 본 발명에 도달하였다. MEANS TO SOLVE THE PROBLEM The present inventor arrived at this invention as a result of earnestly researching in order to achieve the said objective.
즉, 본 발명은 알칼리성분(A), 질소원자를 함유하지 않는 수평균 분자량 92~400의 3~8가의 다가 알코올(B) 및 질소원자를 함유하지 않는 수평균 분자량 62~250의 2가 알코올(C1)과 질소원자를 함유하지 않는 수평균 분자량 32~500의 1가 알코올(C2)로 이루어진 군으로부터 선택되는 적어도 1종류의 알코올(C)로 된 알칼리 세정제; 상기 세정제를 사용하여 초음파 세정, 샤워 세정, 스프레이 세정, 침지 및 침지요동으로부터 선택되는 1종류 이상의 방법으로 세정하는 것을 특징으로 하 는 전자부품, 전기부품 또는 알루미늄 건재의 세정방법; 상기 세정방법으로 세정하고, 린스한 후 건조하여 얻어지는 전자부품, 전기부품 또는 알루미늄 건재;이다.That is, this invention is an alkali component (A), the trihydric alcohol (B) of the number average molecular weights 92-400 which does not contain a nitrogen atom, and the dihydric alcohol of the number average molecular weight 62-250 which does not contain a nitrogen atom. An alkali detergent comprising at least one alcohol (C) selected from the group consisting of (C1) and a monohydric alcohol (C2) having a number average molecular weight of 32 to 500 containing no nitrogen atom; A cleaning method for an electronic part, an electric part or an aluminum building material, characterized in that the cleaning agent is used for cleaning by at least one method selected from ultrasonic cleaning, shower cleaning, spray cleaning, dipping and immersion copper; An electronic part, an electric part, or an aluminum building material obtained by washing | cleaning by the said washing | cleaning method, rinsing, and drying.
본 발명에 있어서의 알칼리성분(A)로서는 (A1) 금속 수산화물[알칼리금속 수산화물(수산화리튬, 수산화나트륨 및 수산화칼륨 등), 알칼리토류금속 수산화물(수산화칼슘, 수산화마그네슘 및 수산화바륨 등)], (A2) 탄산염[알칼리금속 탄산염(탄산나트륨 및 탄산칼륨 등), 알칼리토류금속 탄산염(탄산칼슘, 탄산마그네슘 및 탄산바륨 등)], (A3) 인산염[알칼리금속 인산염(피로인산나트륨, 피로인산칼륨, 트리폴리인산나트륨 및 트리폴리인산칼륨 등), 알칼리토류금속 인산염(피로인산칼슘, 피로인산마그네슘, 피로인산바륨, 트리폴리인산칼슘, 트리폴리인산마그네슘 및 트리폴리인산바륨 등)], (A4) 규산염[알칼리금속 규산염(규산나트륨 및 규산칼륨 등), 알칼리토류금속 규산염(규산칼슘, 규산마그네슘 및 규산바륨 등)], (A5) 암모니아, (A6) 히드록실아민, (A7) 하기 화학식 1로 나타내어지는 유기 알칼리 및 이들의 혼합물 등을 들 수 있다.Examples of the alkali component (A) in the present invention include (A1) metal hydroxides (alkali metal hydroxides (lithium hydroxide, sodium hydroxide and potassium hydroxide, etc.), alkaline earth metal hydroxides (calcium hydroxide, magnesium hydroxide and barium hydroxide, etc.)], (A2) ) Carbonates [alkali metal carbonates (such as sodium carbonate and potassium carbonate), alkaline earth metal carbonates (calcium carbonate, magnesium carbonate and barium carbonate, etc.)], (A3) phosphates [alkali metal phosphates (sodium pyrophosphate, potassium pyrophosphate, tripolyphosphate) Sodium and tripolyphosphate, etc.), alkaline earth metal phosphates (calcium pyrophosphate, magnesium pyrophosphate, barium pyrophosphate, tripolyphosphate, magnesium tripolyphosphate and barium tripolyphosphate)], (A4) silicate [alkali metal silicate (silicate) Sodium and potassium silicate), alkaline earth metal silicates (such as calcium silicate, magnesium silicate and barium silicate)], (A5) ammonia, (A6) hydroxylamine, (A7) The organic alkali represented by general formula (1), a mixture thereof, etc. are mentioned.
식중, R1은 탄소수 1~24, 바람직하게는 1~14의 탄화수소기, R2, R3 및 R4는 각각 수소원자, 탄소수 1~24, 바람직하게는 1~14의 탄화수소기 또는 화학식 2로 나타내어지는 기로, R5는 탄소수 2~4의 알킬렌기, p는 1~6의 정수를 나타낸다.Wherein R 1 is a hydrocarbon group having 1 to 24 carbon atoms, preferably 1 to 14 carbon atoms, R 2 , R 3 and R 4 are each a hydrogen atom, a hydrocarbon group having 1 to 24 carbon atoms, preferably 1 to 14 carbon atoms R <5> is a C2-C4 alkylene group and p represents the integer of 1-6 by group represented by these.
화학식 1에 있어서, R1로서는 직쇄 또는 분지의 포화 또는 불포화 탄화수소기, 지환식 탄화수소기 및 방향고리 함유 탄화수소기 등을 들 수 있다.In general formula (1), as R <1> , a linear or branched saturated or unsaturated hydrocarbon group, an alicyclic hydrocarbon group, an aromatic ring containing hydrocarbon group, etc. are mentioned.
직쇄 또는 분지의 포화 탄화수소기로서는, 알킬기(메틸기, 에틸기, n-, i-, sec- 및 t-부틸기, 옥틸기, 2-에틸헥실기 및 옥타데실기 등); 직쇄 또는 분지의 불포화 탄화수소기로서는 알케닐기(비닐기, 프로페닐기, 알릴기 및 부테닐기 등); 지환식 탄화수소기로서는, 시클로알킬기(시클로헥실기 등); 방향고리 함유 탄화수소기로서는, 아릴기(페닐기 및 나프틸기 등), 아랄킬기(벤질기 및 페네틸기 등), 알킬아릴기(메틸페닐기, 에틸페닐기, 노닐페닐기, 메틸나프틸기 및 에틸나프틸기 등) 등을 들 수 있다.Examples of the linear or branched saturated hydrocarbon group include alkyl groups (methyl group, ethyl group, n-, i-, sec- and t-butyl group, octyl group, 2-ethylhexyl group and octadecyl group, etc.); Examples of the linear or branched unsaturated hydrocarbon group include alkenyl groups (vinyl group, propenyl group, allyl group and butenyl group); As an alicyclic hydrocarbon group, Cycloalkyl group (cyclohexyl group etc.); Examples of the aromatic ring-containing hydrocarbon group include an aryl group (such as a phenyl group and a naphthyl group), an aralkyl group (such as a benzyl group and a phenethyl group), an alkylaryl group (methylphenyl group, ethylphenyl group, nonylphenyl group, methylnaphthyl group, and ethyl naphthyl group) Etc. can be mentioned.
이들 탄화수소기 중에서는, 세정성의 관점에서 바람직한 것은 알킬기 및 알케닐기이다.Among these hydrocarbon groups, alkyl groups and alkenyl groups are preferable from the viewpoint of washability.
R1의 탄소수가 24 이하이면 세정성(또는 박리성, 이하 동일)이 우수하다.It is excellent in washability (or peelability, the same below) that carbon number of R <1> is 24 or less.
R2, R3 및 R4가 탄화수소기인 경우의 탄화수소기로서는 R1과 동일한 것을 들 수 있고, 바람직한 것도 동일하다. R2, R3 및 R4의 탄소수가 24 이하이면 세정성이 양호하다.Examples of the hydrocarbon group in the case where R 2 , R 3 and R 4 are hydrocarbon groups include the same ones as R 1, and preferred ones are also the same. If the carbon number of R <2> , R <3> and R <4> is 24 or less, washability is favorable.
화학식 2에 있어서, R5로서는 예를 들면 에틸렌기, 프로필렌기 및 부틸렌기 등의 탄소수 2~4의 알킬렌기를 들 수 있다.In general formula (2), as R <5> , C2-C4 alkylene groups, such as an ethylene group, a propylene group, and a butylene group, are mentioned, for example.
R5의 탄소수가 4 이하이면 세정성이 양호하다. p는 1~6(바람직하게는 1~3)의 정수이고, p가 6 이하이면 세정성이 양호하다.If the carbon number of R <5> is 4 or less, washability is favorable. p is an integer of 1-6 (preferably 1-3), and when p is 6 or less, washability is favorable.
유기 알칼리(A7)의 예로서는 적어도 1개의 탄화수소기가 질소원자에 결합한 하기 (1)~(5)의 양이온과 하이드로옥사이드 음이온의 염 및 이들의 혼합물을 들 수 있다.As an example of an organic alkali (A7), the salt of the cation of following (1)-(5) and the hydroxide anion which the at least 1 hydrocarbon group couple | bonded with the nitrogen atom, and mixtures thereof are mentioned.
(1) 탄화수소기를 4개 포함하는 4급 암모늄 양이온(1) quaternary ammonium cations containing four hydrocarbon groups
탄소수 1~6의 알킬기를 4개 포함하는 테트라하이드로카르빌암모늄[예를 들면, 테트라메틸암모늄, 테트라에틸암모늄, 트리메틸에틸암모늄, 테트라(n- 또는 i-)프로필암모늄, 테트라(n-, i- 또는 t-)부틸암모늄, 테트라펜틸암모늄 및 테트라헥실암모늄 등];Tetrahydrocarbyl ammonium containing four alkyl groups of 1 to 6 carbon atoms [eg, tetramethylammonium, tetraethylammonium, trimethylethylammonium, tetra (n- or i-) propylammonium, tetra (n-, i Or t-) butylammonium, tetrapentylammonium and tetrahexylammonium and the like];
탄소수 1~6의 알킬기를 3개 포함하는 테트라하이드로카르빌암모늄[예를 들면, 트리메틸헵틸암모늄, 트리메틸옥틸암모늄, 트리메틸데실암모늄, 트리메틸도데실암모늄, 트리메틸스테아릴암모늄, 트리메틸벤질암모늄, 트리에틸헥실암모늄, 트리에틸옥틸암모늄, 트리에틸스테아릴암모늄, 트리에틸벤질암모늄, 트리부틸암모늄, 트리부틸옥틸암모늄 및 트리헥실스테아릴암모늄 등];Tetrahydrocarbyl ammonium containing three alkyl groups of 1 to 6 carbon atoms [for example, trimethylheptyl ammonium, trimethyloctyl ammonium, trimethyldecyl ammonium, trimethyl dodecyl ammonium, trimethyl stearyl ammonium, trimethylbenzyl ammonium, triethylhexyl Ammonium, triethyloctylammonium, triethylstearylammonium, triethylbenzylammonium, tributylammonium, tributyloctylammonium and trihexylstearylammonium, etc .;
탄소수 1~6의 알킬기를 2개 포함하는 테트라하이드로카르빌암모늄[예를 들 면, 디메틸디옥틸암모늄, 디에틸디옥틸암모늄 및 디메틸디벤질암모늄 등],Tetrahydrocarbylammonium containing two alkyl groups of 1 to 6 carbon atoms [eg, dimethyldioctylammonium, diethyldioctylammonium, dimethyldibenzylammonium, etc.],
탄소수 1~6의 알킬기를 1개 포함하는 테트라하이드로카르빌암모늄[예를 들면, 메틸트리옥틸암모늄, 에틸트리옥틸암모늄 및 메틸옥틸디벤질암모늄 등].Tetrahydrocarbyl ammonium containing one alkyl group having 1 to 6 carbon atoms (for example, methyltrioctyl ammonium, ethyl trioctyl ammonium, methyl octyl dibenzyl ammonium, etc.).
(2) 탄화수소기를 3개 포함하는 3급 아민 양이온(2) tertiary amine cations containing three hydrocarbon groups
탄소수 1~6의 알킬기를 3개 포함하는 트리하이드로카르빌아민 양이온[예를 들면, 트리메틸아민 양이온, 트리에틸아민 양이온 및 트리부틸아민 양이온 등];Trihydrocarbylamine cations containing three alkyl groups having 1 to 6 carbon atoms (eg, trimethylamine cation, triethylamine cation, tributylamine cation, etc.);
탄소수 1~6의 알킬기를 2개 포함하는 트리하이드로카르빌아민 양이온[예를 들면, 디메틸옥틸아민 양이온, 디메틸스테아릴아민 양이온, 디에틸옥틸아민 양이온, 디부틸옥틸아민 양이온 및 디메틸벤질아민 양이온 등];Trihydrocarbylamine cations containing two alkyl groups having 1 to 6 carbon atoms [for example, dimethyloctylamine cation, dimethylstearylamine cation, diethyloctylamine cation, dibutyloctylamine cation, dimethylbenzylamine cation, etc. ];
탄소수 1~6의 알킬기를 1개 포함하는 트리하이드로카르빌아민 양이온[예를 들면, 메틸디옥틸아민 양이온, 에틸디옥틸아민 양이온 및 메틸옥틸벤질아민 양이온 등].Trihydrocarbylamine cations containing one alkyl group having 1 to 6 carbon atoms (eg, methyldioctylamine cation, ethyldioctylamine cation, methyloctylbenzylamine cation and the like).
(3) 탄화수소기를 2개 포함하는 2급 아민 양이온(3) secondary amine cations containing two hydrocarbon groups
탄소수 1~6의 알킬기를 2개 포함하는 디하이드로카르빌아민 양이온[예를 들면, 디메틸아민 양이온, 디에틸아민 양이온, 디부틸아민 양이온 및 디헥실아민 양이온 등]; 탄소수 1~6의 알킬기를 1개 포함하는 디하이드로카르빌아민 양이온[예를 들면, 메틸옥틸아민 양이온, 에틸옥틸아민 양이온, 부틸옥틸아민 양이온, 헥실옥틸아민 양이온, 메틸스테아릴아민 양이온, 메틸벤질아민 양이온 및 에틸벤질아민 양이온 등]Dihydrocarbylamine cations containing two alkyl groups having 1 to 6 carbon atoms (for example, dimethylamine cation, diethylamine cation, dibutylamine cation, dihexylamine cation and the like); Dihydrocarbylamine cations containing one alkyl group having 1 to 6 carbon atoms [eg, methyloctylamine cation, ethyloctylamine cation, butyloctylamine cation, hexyloctylamine cation, methylstearylamine cation, methyl Benzylamine cation and ethylbenzylamine cation, etc.]
(4) 탄화수소기를 1개 포함하는 1급 아민 양이온(4) a primary amine cation containing one hydrocarbon group
모노하이드로카르빌(탄소수 1~6)아민 양이온, 예를 들면 메틸아민 양이온, 에틸아민 양이온, 부틸아민 양이온 및 헥실아민 양이온 등Monohydrocarbyl (C 1-6) amine cations such as methylamine cation, ethylamine cation, butylamine cation and hexylamine cation, etc.
(5) 옥시알킬렌기를 포함하는 양이온(5) a cation containing an oxyalkylene group
(i) 옥시알킬렌기를 1개 가지는 양이온[예를 들면, 히드록시에틸트리메틸아민 양이온, 히드록시에틸트리에틸아민 양이온, 히드록시프로필트리메틸아민 양이온, 히드록시프로필트리에틸아민 양이온, 히드록시에틸디메틸에틸아민 양이온 및 히드록시에틸디메틸옥틸아민 양이온 등](i) Cations having one oxyalkylene group [eg, hydroxyethyltrimethylamine cation, hydroxyethyltriethylamine cation, hydroxypropyltrimethylamine cation, hydroxypropyltriethylamine cation, hydroxyethyldimethyl Ethylamine cation and hydroxyethyldimethyloctylamine cation;
(ii) 옥시알킬렌기를 2개 가지는 양이온[예를 들면, 디히드록시에틸디메틸아민 양이온, 디히드록시에틸디에틸아민 양이온, 디히드록시프로필디메틸아민 양이온, 디히드록시프로필디에틸아민 양이온, 디히드록시에틸메틸에틸아민 양이온, 디히드록시에틸메틸옥틸아민 양이온 및 비스(2-히드록시에톡시에틸)옥틸아민 양이온 등](ii) cations having two oxyalkylene groups [eg, dihydroxyethyldimethylamine cation, dihydroxyethyldiethylamine cation, dihydroxypropyldimethylamine cation, dihydroxypropyldiethylamine cation, Dihydroxyethylmethylethylamine cation, dihydroxyethylmethyloctylamine cation and bis (2-hydroxyethoxyethyl) octylamine cation and the like]
(iii) 옥시알킬렌기를 3개 가지는 양이온[예를 들면, 트리히드록시에틸메틸아민 양이온, 트리히드록시에틸에틸아민 양이온, 트리히드록시에틸부틸아민 양이온, 트리히드록시프로필메틸아민 양이온, 트리히드록시프로필에틸아민 양이온 및 트리히드록시에틸옥틸아민 양이온 등](iii) cations having three oxyalkylene groups [e.g., trihydroxyethylmethylamine cation, trihydroxyethylethylamine cation, trihydroxyethylbutylamine cation, trihydroxypropylmethylamine cation, trihydrate Hydroxypropylethylamine cation and trihydroxyethyloctylamine cation;
알칼리성분(A) 중, 세정성과 린스성의 관점에서 바람직한 것은 (A1) 및 (A7)이다. (A1) 중 세정성의 관점에서 바람직한 것은 알칼리금속 수산화물, 더욱 바람직한 것은 수산화나트륨 및 수산화칼륨이다. (A7) 중 세정성과 린스성의 관점에서 바람직한 것은 상기 (1) 및 (2)의 염, 더욱 바람직한 것은 (1)의 염, 특히 바람직 한 것은 탄소수 1~6의 알킬기를 4개 포함하는 테트라알킬암모늄하이드로옥사이드, 가장 바람직한 것은 테트라메틸암모늄하이드로옥사이드 및 테트라에틸암모늄하이드로옥사이드이다. Among the alkaline components (A), preferred are (A1) and (A7) from the viewpoint of washability and rinsability. Among the (A1), preferred are alkali metal hydroxides, more preferably sodium hydroxide and potassium hydroxide from the viewpoint of washability. From the viewpoint of cleansing and rinsing properties in (A7), preferred are the salts of (1) and (2), more preferably salts of (1), particularly preferably tetraalkylammonium containing four alkyl groups of 1 to 6 carbon atoms. Hydroxides, most preferred are tetramethylammonium hydrooxide and tetraethylammonium hydrooxide.
상기 화합물은 혼합물로서 사용하는 것도 가능하다.The compound can also be used as a mixture.
본 발명에 있어서의 질소원자를 함유하지 않는 수평균 분자량 92~400[수평균 분자량, 이하 Mn이라고 약기, 측정은 겔 투과 크로마토그래피(GPC)에 의한다]의 3~8가의 다가 알코올(B)로서는, 3~8가의 지방족 다가 알코올(글리세린, 트리메틸올에탄, 트리메틸올프로판, 디글리세린, 트리글리세린, 테트라글리세린, 펜타글리세린, 크실리톨, 소르비톨 및 수크로오스 등) 및 이들의 알킬렌옥사이드(탄소수 2~3)부가물(부가몰수 1~7몰) 등을 들 수 있다.3-8 valent polyhydric alcohol (B) of the number average molecular weight 92-400 which does not contain the nitrogen atom in this invention (a number-average molecular weight, hereafter abbreviated as Mn, measurement is based on a gel permeation chromatography (GPC)]. Examples of the polyhydric alcohols include 3 to 8 aliphatic polyhydric alcohols (glycerine, trimethylolethane, trimethylolpropane, diglycerin, triglycerine, tetraglycerine, pentaglycerin, xylitol, sorbitol and sucrose) and alkylene oxides thereof (C2) 3) an additive (additional molar number 1-7 mol) etc. are mentioned.
이들 중 세정성과 린스성의 관점에서 바람직한 것은 글리세린, 디글리세린 및 트리글리세린이다.Among them, glycerin, diglycerine and triglycerine are preferable from the viewpoint of detergency and rinsing properties.
본 발명에 있어서의 질소원자를 함유하지 않는 Mn 62~250의 2가 알코올(C1)로서는, 알칸디올(탄소수 2~8의 알칸디올: 에틸렌글리콜, 1,2-프로필렌글리콜, 1,3-프로필렌글리콜, 1,4-부탄디올, 1,6-헥산디올 및 네오펜틸글리콜 등), 지환식 디올(탄소수 6~15의 디올: 시클로헥산-1,2-, 1,3- 및 1,4-디올, 시클로펜탄-1,2- 및 1,3-디올과 수소첨가 비스페놀 A 등), 분자 중에 에테르기를 1개 가지는 디올(디에틸렌글리콜 및 디프로필렌글리콜 등) 및 이들의 혼합물을 들 수 있다. (C1)의 분자량은 바람직하게는 62 이상 150 미만이다.As Mn 62-250 divalent alcohol (C1) which does not contain the nitrogen atom in this invention, alkanediol (C2-C8 alkanediol: ethylene glycol, 1, 2- propylene glycol, 1, 3- propylene) Glycols, 1,4-butanediol, 1,6-hexanediol and neopentylglycol, etc., alicyclic diols (diols having 6 to 15 carbon atoms: cyclohexane-1,2-, 1,3- and 1,4-diol) And cyclopentane-1,2- and 1,3-diol and hydrogenated bisphenol A), diols having one ether group in the molecule (such as diethylene glycol and dipropylene glycol) and mixtures thereof. The molecular weight of (C1) is preferably 62 or more and less than 150.
본 발명에 있어서의 질소원자를 함유하지 않는 Mn 32~500의 1가 알코올(C2) 로서는 탄소수 1~12의 지방족 알코올 및 상기 알코올에 탄소수 2~4의 알킬렌옥사이드를 부가한 화합물 및 이들의 혼합물을 들 수 있다. 탄소수 1~12의 지방족 알코올로서는 구체적으로는 메탄올, 에탄올, 이소프로판올 및 부탄올 등을 들 수 있고, 상기 알코올에 탄소수 2~4의 알킬렌옥사이드를 부가한 화합물로서는 에틸렌글리콜모노메틸에테르, 디에틸렌글리콜모노메틸에테르, 트리에틸렌글리콜모노메틸에테르, 프로필렌글리콜모노메틸에테르 및 디에틸렌글리콜모노부틸에테르 등을 들 수 있다.As the monovalent alcohol (C2) of Mn 32 to 500 which does not contain a nitrogen atom in the present invention, an aliphatic alcohol having 1 to 12 carbon atoms, a compound in which an alkylene oxide having 2 to 4 carbon atoms is added to the alcohol and a mixture thereof Can be mentioned. Specific examples of the aliphatic alcohol having 1 to 12 carbon atoms include methanol, ethanol, isopropanol and butanol, and examples of the compound in which an alkylene oxide having 2 to 4 carbon atoms are added to the alcohol include ethylene glycol monomethyl ether and diethylene glycol mono. Methyl ether, triethylene glycol monomethyl ether, propylene glycol monomethyl ether, diethylene glycol monobutyl ether, etc. are mentioned.
(C) 중에서는, 세정성과 내부식성의 관점에서 바람직한 것은 하기 화학식 3으로 나타내어지는 2가 또는 1가 알코올이다.In (C), what is preferable from a viewpoint of wash | cleaning property and corrosion resistance is a dihydric or monohydric alcohol represented by following General formula (3).
식중, R6은 수소원자 또는 탄소수 1~12, 바람직하게는 1~4의 탄화수소기이고, A1은 탄소수 2~4, 바람직하게는 2 또는 3의 알킬렌기이며, n은 1~4, 바람직하게는 1 또는 2의 정수를 나타낸다.Wherein R 6 is a hydrogen atom or a hydrocarbon group of 1 to 12 carbon atoms, preferably 1 to 4 carbon atoms, A 1 is an alkylene group of 2 to 4 carbon atoms, preferably 2 or 3 carbon atoms, and n is 1 to 4 carbon atoms Preferably an integer of 1 or 2.
화학식 3으로 나타내어지는 알코올 중, 더욱 바람직한 것은 (C1) 중 프로필렌글리콜 및 디프로필렌글리콜, (C2) 중 에틸렌글리콜모노메틸에테르, 디에틸렌글리콜모노메틸에테르 및 트리에틸렌글리콜모노메틸에테르이고, 특히 바람직한 것은 프로필렌글리콜, 디에틸렌글리콜모노메틸에테르, 트리에틸렌글리콜모노메틸에테르 및 이들 중 2종류 이상의 병용이다.Among the alcohols represented by the general formula (3), more preferred are propylene glycol and dipropylene glycol in (C1), ethylene glycol monomethyl ether, (ethylene glycol monomethyl ether and triethylene glycol monomethyl ether in (C2)), and particularly preferred Propylene glycol, diethylene glycol monomethyl ether, triethylene glycol monomethyl ether, and two or more kinds thereof.
본 발명의 세정제에 있어서의 (A), (B) 및 (C)의 함유량은 세정성과 내부식 성의 관점에서 (A), (B) 및 (C)의 합계 중량을 기준으로, (A)는 바람직하게는 0.1~25%(이하에 있어서 %는 중량%를 나타낸다), 더욱 바람직하게는 0.2~10%이고, (B)는 바람직하게는 1~25%, 더욱 바람직하게는 2~15%이며, (C)는 바람직하게는 60~95%, 더욱 바람직하게는 75~93%이다. 또한, (A)와 (B)의 중량비는 세정성과 내부식성의 관점에서 바람직하게는 1/99~50/50, 더욱 바람직하게는 20/80~50/50이다.Content of (A), (B) and (C) in the washing | cleaning agent of this invention is based on the total weight of (A), (B) and (C) from a viewpoint of washability and corrosion resistance, Preferably it is 0.1 to 25% (Hereinafter,% shows a weight%), More preferably, it is 0.2 to 10%, (B) becomes like this. Preferably it is 1 to 25%, More preferably, it is 2 to 15%. (C) is preferably 60 to 95%, more preferably 75 to 93%. The weight ratio of (A) and (B) is preferably 1/99 to 50/50, more preferably 20/80 to 50/50 from the viewpoint of detergency and corrosion resistance.
본 발명의 세정제에는 (A), (B) 및 (C) 이외에, 필요에 따라 추가로 계면활성제(D), 아미드기 함유 친수성 용제(E), 기타 첨가제(F) 및/또는 물을 함유할 수 있다.In addition to (A), (B) and (C), the cleaning agent of the present invention may further contain a surfactant (D), an amide group-containing hydrophilic solvent (E), other additives (F) and / or water as necessary. Can be.
계면활성제(D)로서는 비이온 계면활성제(D1), 음이온 계면활성제(D2), 양이온 계면활성제(D3), 양성 계면활성제(D4) 및 이들의 혼합물을 들 수 있다. 단, (D1)에는 (B) 및 (C)의 범위의 알코올은 포함되지 않는다. 또한, (D3)에는 화학식 1로 나타내어지는 유기 알칼리는 포함되지 않는다.As surfactant (D), a nonionic surfactant (D1), an anionic surfactant (D2), a cationic surfactant (D3), an amphoteric surfactant (D4), and a mixture thereof are mentioned. However, (D1) does not contain the alcohol of the range of (B) and (C). In addition, (D3) does not contain the organic alkali represented by General formula (1).
(D1)로서는, 예를 들면, 알킬렌옥사이드 부가형 비이온 계면활성제[고급 알코올(탄소수 8~18), 알킬페놀(탄소수 10~24), 고급 지방산(탄소수 12~24) 또는 고급 알킬아민(탄소수 8~24) 등에 직접 알킬렌옥사이드[탄소수 2~4, 예를 들면 에틸렌옥사이드(이하 EO라고 약기), 프로필렌옥사이드, 부틸렌옥사이드, 이하 동일]를 부가시킨 것(Mn 158~200,000); 폴리옥시알킬렌글리콜(Mn 150~6,000)에 고급 지방산(탄소수 12~24) 등을 반응시킨 것; 디올[상기 (C1)로서 예시한 것] 또는 3~8가의 다가 알코올[상기 (B)로서 예시한 것] 등의 수산기 함유 화합물에 고급 지방산(탄소수 12~24)을 반응시켜서 얻어진 에스테르화물에 알킬렌옥사이드를 부가시킨 것 (Mn 250~30,000), 고급 지방산(탄소수 8~24)아미드에 알킬렌옥사이드를 부가시킨 것(Mn 200~30,000), 다가 알코올(상기의 것)알킬(탄소수 8~60)에테르에 알킬렌옥사이드를 부가시킨 것(Mn 120~30,000) 등] 및 다가 알코올(탄소수 3~20)형 비이온 계면활성제[다가 알코올 지방산(탄소수 8~60)에스테르, 다가 알코올알킬(탄소수 8~60)에테르, 지방산(탄소수 8~60)알칸올아미드 등] 등을 들 수 있다.As (D1), for example, alkylene oxide addition type nonionic surfactant [higher alcohol (C8-C18), alkylphenol (C10-C24), higher fatty acid (C12-24), or higher alkylamine (carbon number 8 to 24) or the like, which is directly added with alkylene oxide [carbon number 2 to 4, for example, ethylene oxide (hereinafter abbreviated as EO), propylene oxide, butylene oxide, the same below] (Mn 158 to 200,000); Polyoxyalkylene glycols (Mn 150 to 6,000) having higher fatty acids (12 to 24 carbon atoms) reacted; Alkyl to esterified products obtained by reacting a higher fatty acid (C12-C24) with a hydroxyl group-containing compound such as diol [exemplified as the above (C1)] or 3-8 valent polyhydric alcohol [exemplified as the above (B)] Addition of ethylene oxide (Mn 250-30,000), Addition of alkylene oxide to higher fatty acid (C8-24) amide (Mn 200-30,000), Polyhydric alcohol (above) Alkyl (8-60 carbon atoms) ) By adding alkylene oxide to ether (Mn 120 to 30,000)] and polyhydric alcohol (C3-20) type nonionic surfactant [polyhydric alcohol fatty acid (C8-60) ester, polyhydric alcohol alkyl (C8) 60) ether, fatty acid (C8-60) alkanolamide, etc. are mentioned.
(D2)로서는, 예를 들면, 카르복실산(탄소수 8~22의 포화 또는 불포화 지방산) 또는 그의 염, 카르복시메틸화물의 염[탄소수 8~16의 지방족 알코올 및/또는 그의 EO(1~10 몰)부가물 등의 카르복시메틸화물의 염 등], 황산에스테르염[고급 알코올 황산에스테르염(탄소수 8~18의 지방족 알코올의 황산에스테르염 등) 등], 고급 알킬에테르 황산에스테르염[탄소수 8~18의 지방족 알코올의 EO(1~10 몰)부가물의 황산에스테르염], 황산화유(천연의 불포화 유지 또는 불포화 밀랍(wax)을 그대로 황산화하여 중화한 염), 황산화 지방산에스테르(불포화 지방산의 저급 알코올에스테르를 황산화하여 중화한 염), 황산화 올레핀(탄소수 12~18의 올레핀을 황산화하여 중화한 염), 설폰산염[알킬벤젠설폰산염, 알킬나프탈렌설폰산염, 설포숙신산디에스테르형, α-올레핀(탄소수 12~18)설폰산염, 이게폰 T형 등] 및 인산에스테르염[고급 알코올(탄소수 8~60) 인산에스테르염, 고급 알코올(탄소수 8~60) EO부가물 인산에스테르염, 알킬(탄소수 4~60)페놀 EO부가물 인산에스테르염 등]을 들 수 있다.Examples of (D2) include carboxylic acids (saturated or unsaturated fatty acids having 8 to 22 carbon atoms) or salts thereof, and salts of carboxymethylates [aliphatic alcohols having 8 to 16 carbon atoms and / or EO thereof (1 to 10 moles). Salts of carboxymethylates such as adducts; sulfuric acid ester salts [higher alcohol sulfuric acid ester salts (such as sulfuric acid ester salts of aliphatic alcohols having 8 to 18 carbon atoms)], and higher alkyl ether sulfate ester salts (aliphatic having 8 to 18 carbon atoms). Sulfuric acid ester salts of EO (1-10 moles) adducts of alcohols], sulfated oils (salts neutralized by unsaturation of natural unsaturated fats or unsaturated waxes), sulfated fatty acid esters (lower alcohol esters of unsaturated fatty acids) Salts neutralized by sulphation), sulfated olefins (salts neutralized by sulphation of olefins having 12 to 18 carbon atoms), sulfonates [alkylbenzenesulfonates, alkylnaphthalenesulfonates, sulfosuccinic acid diesters, α-olefins (12-18 carbon atoms) Acid salts, Igone T-type, etc.] and phosphate ester salts [higher alcohols (8 to 60 carbon atoms), phosphate ester salts, higher alcohols (8 to 60 carbon atoms) EO adducts, phosphate ester salts, alkyl (4 to 60 carbon atoms) phenol additions Water phosphate ester salt and the like].
상기의 염으로서는, 알칼리금속(나트륨, 칼륨 등)염, 알칼리토류금속(칼슘, 마그네슘 등)염, 암모늄염, 알킬아민(탄소수 1~20)염 및 알칸올아민(탄소수 2~12, 예를 들면 모노-, 디- 및 트리에탄올아민)염 등을 들 수 있다.As said salt, an alkali metal (sodium, potassium, etc.) salt, an alkaline earth metal (calcium, magnesium, etc.) salt, an ammonium salt, an alkylamine (C1-C20) salt, and an alkanolamine (C2-C12, for example, Mono-, di- and triethanolamine) salts and the like.
(D3)로서는 제4급 암모늄염형[테트라알킬(탄소수 4~100) 암모늄염, 예를 들면, 라우릴트리메틸 암모늄클로라이드, 디데실디메틸 암모늄클로라이드, 디옥틸디메틸 암모늄브로마이드, 스테아릴트리메틸 암모늄브로마이드; 트리알킬(탄소수 3~80)벤질 암모늄염, 예를 들면 라우릴디메틸벤질 암모늄클로라이드(염화벤잘코늄); 알킬(탄소수 2~60)피리디늄염, 예를 들면 세틸피리디늄클로라이드; 폴리옥시알킬렌(탄소수 2~4)트리알킬 암모늄염, 예를 들면 폴리옥시에틸렌트리메틸 암모늄클로라이드; 사파민형 제4급 암모늄염, 예를 들면 스테아라미드에틸디에틸메틸 암모늄메토설페이트], 아민염형[지방족 고급 아민(탄소수 12~60, 예를 들면 라우릴아민, 스테아릴아민, 세틸아민, 경화 우지(牛脂)아민, 로진(rosin)아민 등)의 무기산(염산, 황산, 질산 및 인산 등)염 또는 유기산(탄소수 2~22, 예를 들면 초산, 프로피온산, 라우릴산, 올레산, 안식향산, 숙신산, 아디프산, 아젤라인산)염; 저급 아민(탄소수 1~11)의 고급 지방산(탄소수 12~24, 예를 들면 스테아르산, 올레산)염; 지방족 아민(탄소수 1~30)의 EO부가물 등의 무기산(상기의 것)염 또는 유기산(상기의 것)염; 3급 아민류(트리에탄올아민모노스테아레이트, 스테아라미드에틸디에틸메틸에탄올아민 등)의 무기산(상기의 것)염 또는 유기산(상기의 것)염 등] 등을 들 수 있다.As (D3), a quaternary ammonium salt type [tetraalkyl (C4-C100) ammonium salt, for example, lauryl trimethyl ammonium chloride, didecyldimethyl ammonium chloride, dioctyldimethyl ammonium bromide, stearyl trimethyl ammonium bromide; Trialkyl (3-80 carbon atoms) benzyl ammonium salts such as lauryldimethylbenzyl ammonium chloride (benzalkonium chloride); Alkyl (2-60) pyridinium salts such as cetylpyridinium chloride; Polyoxyalkylene (C 2-4) trialkyl ammonium salts such as polyoxyethylenetrimethyl ammonium chloride; Sappamine quaternary ammonium salts, for example stearamide ethyldiethylmethyl ammonium methosulfate], amine salts [aliphatic higher amines (C12-60, for example laurylamine, stearylamine, cetylamine, cured tallow) (I) salts of inorganic acids (such as hydrochloric acid, sulfuric acid, nitric acid and phosphoric acid) or organic acids (such as acetic acid, propionic acid, lauric acid, oleic acid, benzoic acid, succinic acid, amine) Diflic acid, azelaic acid) salts; Higher fatty acid (12-24 carbon atoms, for example stearic acid, oleic acid) salts of lower amines (C1-C11); Inorganic acid (the above) salts or organic acid (the above) salts, such as EO addition products of aliphatic amines (C1-C30); And inorganic acids (above) salts or organic acids (above) salts of tertiary amines (such as triethanolamine monostearate and stearamide ethyldiethylmethylethanolamine).
(D4)로서는 아미노산형 양성 계면활성제[고급 알킬아민(탄소수 12~18)의 프로피온산나트륨 등], 베타인형 양성 계면활성제[알킬(탄소수 12~18)디메틸 베타인, 알킬(탄소수 12~18)디히드록시에틸 베타인, 야자유 지방산아미드프로필 베타인 등 ], 황산에스테르염형 양성 계면활성제[고급 알킬(탄소수 8~18)아민의 황산에스테르나트륨염, 히드록시에틸이미다졸린 황산에스테르나트륨염 등], 설폰산염형 양성 계면활성제(펜타데실설포타우린, 이미다졸린설폰산 등), 인산에스테르염형 양성 계면활성제[글리세린 고급 지방산(탄소수 8~22)에스테르화물의 인산에스테르아민염] 등을 들 수 있다.As (D4), amino acid type amphoteric surfactant [sodium propionate of a higher alkylamine (C12-C18), etc.], betaine type amphoteric surfactant [alkyl (C12-C18) dimethyl betaine, alkyl (C12-C18) di Hydroxyethyl betaine, palm oil fatty acid amide propyl betaine, etc.], sulfuric acid ester salt type amphoteric surfactant [sodium sulfate ester salt of higher alkyl (C18-C18) amine, sodium hydroxyethyl imidazoline sulfate ester, etc.], Sulfonate-type amphoteric surfactants (such as pentadecyl sulfotaurine and imidazoline sulfonic acid), and phosphate ester salt-type amphoteric surfactants (phosphate ester amine salts of glycerin higher fatty acid (C8-C22) ester);
(D1)~(D4) 중에서는 세정성과 내부식성의 관점에서 바람직한 것은 (D1) 및 (D2), 더욱 바람직한 것은 (D1)이다. (D)의 함유량은 세정제의 전체중량을 기준으로 통상 30% 이하, 바람직하게는 1~20%이다.Among the (D1) to (D4), preferred are (D1) and (D2), and more preferably (D1) from the viewpoint of detergency and corrosion resistance. The content of (D) is usually 30% or less, preferably 1 to 20%, based on the total weight of the detergent.
아미드기 함유 친수성 용제(E)는 20℃에 있어서의 물에 대한 용해도(g/100 g H2O)가 3 이상이고, 분자 중에 아미드기를 1개 이상 함유하는 수용성 아미드로, 2-피롤리돈 및 N-알킬(탄소수 1~3)-2-피롤리돈 등을 들 수 있다. 이들 중, 세정성과 린스성의 관점에서 바람직한 것은 N-메틸-2-피롤리돈, N-에틸-2-피롤리돈, N-n-프로필-2-피롤리돈 및 N-이소프로필-2-피롤리돈, 더욱 바람직한 것은 N-메틸-2-피롤리돈이다.The amide group-containing hydrophilic solvent (E) is a water-soluble amide having a solubility (g / 100 g H 2 O) of 3 or more in water at 20 ° C. and containing at least one amide group in a molecule. 2-pyrrolidone And N-alkyl (1 to 3 carbon atoms) -2-pyrrolidone. Among them, preferred from the viewpoint of detergency and rinsing properties are N-methyl-2-pyrrolidone, N-ethyl-2-pyrrolidone, Nn-propyl-2-pyrrolidone and N-isopropyl-2-pyrroli Don, more preferably N-methyl-2-pyrrolidone.
(E)의 함유량은 세정제의 전체중량을 기준으로, 세정성, 린스성 및 내부식성의 관점에서 바람직하게는 30% 이하, 더욱 바람직하게는 1~20%이다.The content of (E) is preferably 30% or less, and more preferably 1 to 20%, from the viewpoint of cleaning property, rinsing property and corrosion resistance, based on the total weight of the cleaning agent.
물의 함유량은 세정제의 전체중량을 기준으로, 세정성, 린스성 및 내부식성의 관점에서 바람직하게는 39% 이하, 더욱 바람직하게는 1~38%, 특히 바람직하게는 2~30%이다.The water content is preferably 39% or less, more preferably 1 to 38%, particularly preferably 2 to 30%, from the viewpoint of cleanability, rinsing property and corrosion resistance, based on the total weight of the cleaning agent.
기타 첨가제(F)로서는 방청제[아민(탄소수 6~30, 예를 들면 시클로헥실아민, 라우릴아민, 스테아릴아민 등)의 EO(2~10 몰)부가물, 크롬산염, 아질산염, 아민(탄소수 6~30)의 고급 지방산(탄소수 8~30)염, 디카르복실산(탄소수 12~24)의 알칼리금속(나트륨, 칼륨 등)염, 디카르복실산(탄소수 12~24)의 알칸올아미드(예를 들면, 도데세닐숙신산 디에탄올아미드), 디카르복실산(탄소수 12~24)의 알칸올아미드알칼리금속염(예를 들면, 도데세닐숙신산 디에탄올아미드나트륨염) 등], 산화방지제[페놀화합물(2,6-디-t-부틸-4-메틸페놀 등), 함황화합물(디라우릴티오디프로피오네이트 등), 아민화합물(옥틸화디페닐아민 등), 인화합물(트리페닐포스파이트 등) 등], 금속이온 봉쇄제(에틸렌디아민 4초산나트륨, 구연산나트륨 등) 등을 들 수 있다.Other additives (F) include EO (2 to 10 moles) adducts of rust inhibitors (amines having 6 to 30 carbon atoms, for example cyclohexylamine, laurylamine, stearylamine, etc.), chromates, nitrites, and amines (carbon number). 6-30) higher fatty acid (C8-C30) salts, alkali metal (sodium, potassium, etc.) salts of dicarboxylic acids (C12-24), alkanolamides of dicarboxylic acids (C12-24) (For example, dodecenyl succinic acid diethanolamide), an alkanolamide alkali metal salt of dicarboxylic acid (C12-C24) (for example, dodecenyl succinic acid diethanolamide sodium salt), etc.], antioxidant [phenol Compounds (2,6-di-t-butyl-4-methylphenol, etc.), sulfur-containing compounds (dilaurylthiodipropionate, etc.), amine compounds (octylated diphenylamines, etc.), phosphorus compounds (triphenylphosphite, etc.) And the like; and metal ion sequestrants (such as ethylenediamine sodium tetraacetate, sodium citrate) and the like.
(F)의 함유량은 세정제의 전체중량을 기준으로, 방청제는 통상 20% 이하, 바람직하게는 0.5~10%, 산화방지제는 통상 5% 이하, 바람직하게는 0.1~1%, 금속이온 봉쇄제는 통상 20% 이하, 바람직하게는 0.5~10%이다.The content of (F) is based on the total weight of the detergent, the rust inhibitor is usually 20% or less, preferably 0.5 to 10%, the antioxidant is usually 5% or less, preferably 0.1 to 1%, the metal ion sequestrant Usually 20% or less, Preferably it is 0.5-10%.
본 발명의 세정제의 중량을 기준으로 하는, (D), (E) 및 (F)의 합계 함유량은 통상 40% 이하, 바람직하게는 30% 이하, 더욱 바람직하게는 20% 이하이다.The total content of (D), (E) and (F) based on the weight of the cleaning agent of the present invention is usually 40% or less, preferably 30% or less, and more preferably 20% or less.
본 발명의 세정제의 25℃에 있어서의 점도는 통상 2~300 ㎟/s, 세정성 및 린스성의 관점에서 바람직하게는 3~100 ㎟/s, 더욱 바람직하게는 4~50 ㎟/s이다. 점도는 오스트발트(Ostwald) 또는 우벨로데(Ubbelohde) 등의 점도계로 측정할 수 있다.The viscosity at 25 degrees C of the washing | cleaning agent of this invention is 3-100 mm <2> / s normally from a viewpoint of 2-300 mm <2> / s, washing | cleaning property, and a rinse property, More preferably, it is 4-50 mm <2> / s. Viscosity can be measured with a viscometer such as Ostwald or Ubbelohde.
본 발명의 세정제의 pH(10% 수용액)는 통상 10~14, 세정성 및 내부식성의 관점에서 바람직하게는 10.5~13.5이다.PH (10% aqueous solution) of the washing | cleaning agent of this invention is 10.5-13.5 normally from a viewpoint of 10-14, washability, and corrosion resistance.
본 발명의 세정제는 각종 금속, 예를 들면, 철, 구리, 니켈, 알루미늄 및 이들 중 2종류 이상으로 된 합금에 대한 부식성이 적다. 특히 비철금속, 특히 알루미늄에 대한 부식성이 적다.The cleaning agent of the present invention is less corrosive to various metals such as iron, copper, nickel, aluminum, and alloys of two or more thereof. In particular, it is less corrosive to nonferrous metals, especially aluminum.
본 발명의 세정제의 알루미늄에 대한 부식속도(mdd)는 하기의 시험방법으로 측정할 수 있다. 바람직한 부식속도는 10 mdd 이하, 특히 5 mdd 이하이다.Corrosion rate (mdd) of aluminum of the cleaning agent of the present invention can be measured by the following test method. Preferred corrosion rates are below 10 mdd, in particular below 5 mdd.
부식 시험방법:Corrosion test method:
알루미늄 시험편(20 mm×50 mm, 두께 1 mm)을 세정제에 침지하고 50℃에서 1주일간 방치한 후, 순수로 린스한 후 90℃에서 30분간 건조하여 시험편의 중량을 측정하였다. 부식속도는 하기 식에 의해 구하였다.The aluminum test piece (20 mm x 50 mm, thickness 1 mm) was immersed in a detergent and left at 50 ° C for 1 week, then rinsed with pure water and dried at 90 ° C for 30 minutes to measure the weight of the test piece. The corrosion rate was calculated | required by the following formula.
본 발명의 세정제를 적용할 수 있는 용도는 특별히 한정되지 않으며, 각종 전자부품, 전기부품 및 알루미늄 건재 등의 세정에 사용되고, 바람직하게는 전자부품의 세정, 특히 알루미늄이 부품의 일부 또는 전부에 사용되고 있는 전자부품 등의 세정용으로서 폭넓게 사용할 수 있다. 예를 들면 액정패널용 유리기판(배향막 패턴화 전의 세정, 불량 배향막의 박리 세정), 프린트 기판, 플라스마 디스플레이 유리기판, 서멀헤드 등의 전자부품, 에어콘 냉각핀, 공기청정기 알루미늄 전극판, 전기 면도기날 등의 전기부품, 알루미늄 건재 등을 들 수 있다. 또한, 세정의 대상물(더러움)은 유분, 지문, 수지, 유기 파티클 등의 유기물, 무기 파티클(예를 들면, 유리분말, 세라믹분말, 금속분말 등) 등의 무기물을 들 수 있다. 본 발명의 세 정제는 이들 중, 특히 액정패널용 유리기판의 세정(배향막을 박막화하기 전의 유리기판의 세정, 또는 배향막이 불량해진 유리기판의 세정)에 적합하게 사용할 수 있다.The use to which the cleaning agent of the present invention can be applied is not particularly limited, and is used for cleaning various electronic components, electrical components, aluminum building materials, and the like. Preferably, cleaning of electronic components, particularly aluminum, is used for part or all of the components. It can be used widely for washing | cleaning of electronic components. For example, glass substrates for liquid crystal panels (cleaning before alignment film patterning, peeling cleaning of defective alignment films), printed circuit boards, electronic components such as plasma display glass substrates, thermal heads, air conditioning cooling fins, air cleaner aluminum electrode plates, and electric razor blades. Electrical parts, aluminum building materials, etc. are mentioned. Examples of the object to be cleaned (dirt) include organic materials such as oil powder, fingerprints, resins and organic particles, and inorganic materials such as inorganic particles (for example, glass powder, ceramic powder and metal powder). Among these, the three tablets of the present invention can be suitably used for cleaning the glass substrate for liquid crystal panel, in particular, for cleaning the glass substrate before thinning the alignment film or for cleaning the glass substrate whose alignment film is poor.
본 발명의 세정제를 사용하여, 예를 들면 액정패널용 유리기판의 배향막을 박리 세정하는 방법으로서는, 초음파 세정, 샤워 세정, 스프레이 세정, 침지, 침지 요동 및 이들의 조합에 의한 세정방법을 적용할 수 있다.As the method of peeling and cleaning the alignment film of the liquid crystal panel glass substrate using the cleaning agent of the present invention, for example, a cleaning method by ultrasonic cleaning, shower cleaning, spray cleaning, dipping, dipping fluctuations, and a combination thereof can be applied. have.
세정시 본 발명의 세정제는 필요에 따라 더욱이 물로 희석되어 사용되어도 되지만, 바람직한 것은 상기 물 함유량의 범위내이다.At the time of washing | cleaning, the washing | cleaning agent of this invention may further be diluted with water and used as needed, but it is preferable that it is in the range of the said water content.
세정온도는 통상 10~70℃, 바람직하게는 15~60℃ 정도이다. 세정시간은 통상 0.2~120분, 바람직하게는 0.5~30분이다. 물에 의한 린스온도는 통상 5~90℃, 바람직하게는 10~70℃이고, 린스방법으로서는 상기 세정방법과 동일한 방법을 적용할 수 있다. 린스 후 통상 50~150℃, 바람직하게는 60~100℃이고, 통상 1~120분간, 바람직하게는 3~60분간 가열 건조함으로써 청정한 액정패널용 유리기판이 얻어져 재생 사용할 수 있다.Washing temperature is 10-70 degreeC normally, Preferably it is about 15-60 degreeC. The washing time is usually 0.2 to 120 minutes, preferably 0.5 to 30 minutes. The rinse temperature with water is usually 5 to 90 ° C, preferably 10 to 70 ° C, and the same method as the above washing method can be used as the rinsing method. After rinsing, it is 50-150 degreeC normally, Preferably it is 60-100 degreeC, The glass substrate for clean liquid crystal panels is obtained by heat-drying for 1 to 120 minutes normally, Preferably it is for 3 to 60 minutes, and can use it for regeneration.
<실시예><Example>
이하, 실시예에 의하여 본 발명을 상세하게 설명하지만, 본 발명은 이것에 한정되지는 않는다. 또한, 이하에 있어서 부는 중량부를 나타낸다.Hereinafter, although an Example demonstrates this invention in detail, this invention is not limited to this. In addition, below, a part shows a weight part.
실시예 1~7, 비교예 1~3Examples 1-7, Comparative Examples 1-3
표 1에 기재된 부수의 각 성분을 1 L 비이커 중에서 실온에서 충분히 교반·혼합하여 실시예 및 비교예의 세정제를 제작하였다.Each component of Table 1 was sufficiently stirred and mixed in a 1 L beaker at room temperature to prepare cleaning agents of Examples and Comparative Examples.
또한, 표 1 중의 부수는 모두 순분(純分)의 부수이다.In addition, all copies of Table 1 are copies of pure parts.
또한, 표 1 중의 약호는 하기와 같다.In addition, the symbol of Table 1 is as follows.
A-1: 수산화나트륨 A-1: sodium hydroxide
A-2: 테트라메틸암모늄하이드로옥사이드 A-2: tetramethylammonium hydrooxide
A-3: 테트라에틸암모늄하이드로옥사이드 A-3: tetraethylammonium hydrooxide
B-1: 글리세린 B-1: Glycerin
B-2: 디글리세린 B-2: diglycerin
C-1: 프로필렌글리콜 C-1: Propylene Glycol
C-2: 디에틸렌글리콜모노메틸에테르 C-2: diethylene glycol monomethyl ether
C-3: 트리에틸렌글리콜모노메틸에테르 C-3: triethylene glycol monomethyl ether
실시예 및 비교예에서 얻어진 세정제의 평가 시험방법을 이하에 나타내고, 평가결과를 표 1에 나타낸다.The evaluation test method of the cleaning agent obtained by the Example and the comparative example is shown below, and the evaluation result is shown in Table 1.
1. 배향막 박리성1. Alignment film peelability
미리 ITO막(인듐·주석 산화막)을 형성된 유리기판(25×25 mm, 두께 0.75 mm) 상에 폴리이미드 수지를 도포하고, 80℃에서 굽는 작업을 3회 반복하여 반소성의 수직배향 폴리이미드막(막 두께 5 ㎛)이 밀착된 유리기판 시험편을 작성하였다. 시험편을 세정제(25℃)에 소정 시간 침지 후 시험편을 스테인레스 그물바구니 위에 놓아 이온교환수로 1분간 샤워 린스하고, 추가로 안쪽 면에 대해서도 동일하게 린 스하였다. 이어서, 시험편을 70℃의 순풍건조기 중에서 10분간 건조 후 현미경으로 관찰하여 배향막 박리성을 다음 5단계로 평가하였다.Apply a polyimide resin onto a glass substrate (25 × 25 mm, thickness 0.75 mm) previously formed with an ITO film (indium tin oxide film), and repeat the baking operation at 80 ° C. three times to produce a semi-fired vertically oriented polyimide film ( A glass substrate test piece having a film thickness of 5 µm) was prepared. After the test piece was immersed in a detergent (25 ° C.) for a predetermined time, the test piece was placed on a stainless steel basket, shower rinsed with ion-exchanged water for 1 minute, and rinsed in the same manner for the inner side. Subsequently, the test piece was dried in a pure air dryer at 70 ° C. for 10 minutes and then observed under a microscope to evaluate the alignment film peelability in the following five steps.
<평가기준><Evaluation Criteria>
5: 유리기판면에 배향막이 전혀 없음. 5: There is no alignment film in the glass substrate surface at all.
4: 유리기판면에 배향막이 흔적 정도 남아 있다. 4: Traces of the alignment film remain on the glass substrate surface.
3: 유리기판면의 일부에 배향막이 조금 남아 있다. 3: The alignment film is slightly left in part of the glass substrate surface.
2: 유리기판면의 대부분에 배향막이 남아 있다. 2: The alignment film remains on most of the glass substrate surface.
1: 유리기판 전면에 배향막이 남아 있다. 1: An alignment film remains on the entire glass substrate.
2. 부식성-12. Corrosive-1
알루미늄 박막(막 두께 0.1 ㎛)이 밀착된 유리기판 시험편(25×25 mm, 두께 0.75 mm)을 세정제(40℃)에 소정 시간 침지하고, 알루미늄 박막이 완전히 없어져 시험편이 투명해질 때까지의 시간을 측정하여 부식시간으로 하였다.A glass substrate test piece (25 × 25 mm, thickness 0.75 mm) in which an aluminum thin film (0.1 μm thick) is in close contact is immersed in a detergent (40 ° C.) for a predetermined time, and the time until the aluminum thin film is completely removed and the test piece becomes transparent is determined. It measured and set it as corrosion time.
부식시간이 길수록 내부식성이 좋다.The longer the corrosion time, the better the corrosion resistance.
3. 부식성-23. Corrosive-2
전술한 알루미늄 시험편에 의한 시험방법으로 부식속도를 측정하였다.The corrosion rate was measured by the test method by the above-mentioned aluminum test piece.
표 1의 비교예 1에 나타내어지는 바와 같이, 알칼리성분과 다가 알코올만으로는 반소성 수직배향 폴리이미드막의 박리는 불충분하고 또한 알루미늄 내식성이 불충분하지만, 본 발명의 세정제(실시예 1~7)는 1~2분으로 반소성 수직배향 폴리이미드막을 박리할 수 있고, 또한 부식시간이 36시간 이상으로 내부식성이 매우 양호하다.As shown in Comparative Example 1 of Table 1, the peeling of the semi-baked vertically oriented polyimide membrane is insufficient with only the alkali component and the polyhydric alcohol, and the aluminum corrosion resistance is insufficient. The semi-baked vertically aligned polyimide film can be peeled off in minutes, and the corrosion time is 36 hours or more, and the corrosion resistance is very good.
본 발명의 세정제는 내알루미늄부식성이 우수하고, 또한 유분, 지문, 수지 및 파티클을 제거하는 능력도 우수하기 때문에, 액정패널용 유리기판 등의 전자부품의 세정용도 뿐만 아니라, 전기부품, 금속부품 및 건재 등의 세정용도에 적용이 가능하여 매우 유용성이 높다.Since the cleaning agent of the present invention is excellent in corrosion resistance of aluminum and also excellent in the ability to remove oil, fingerprints, resins, and particles, it is not only used for cleaning electronic parts such as glass substrates for liquid crystal panels, but also for electric parts, metal parts, and the like. It is very useful because it can be applied to cleaning applications such as building materials.
본 발명의 세정제는 내알루미늄부식성이 우수하기 때문에, 예를 들면 액정패 널용 유리기판의 알루미늄 배선, 컬러필터 부재에 손상을 주지 않고 반소성 수직배향 폴리이미드막을 단시간에 박리·세정할 수 있다. 따라서, 배향막 박리 세정공정(유리기판 재생공정)에 있어서 종래 유리기판의 재생 뿐만 아니라, 알루미늄 배선, 컬러필터 부재도 동시에 재생 사용할 수 있다.Since the cleaning agent of the present invention is excellent in aluminum corrosion resistance, for example, the semi-fired vertically oriented polyimide film can be peeled and washed in a short time without damaging the aluminum wiring of the glass substrate for the liquid crystal panel and the color filter member. Therefore, not only the regeneration of the conventional glass substrate but also the aluminum wiring and the color filter member can be simultaneously used in the alignment film peeling washing process (glass substrate regeneration step).
또한, 본 발명의 세정제는 유분, 지문, 수지 및 파티클을 제거하는 능력도 우수하다.The cleaning agent of the present invention is also excellent in the ability to remove oil, fingerprints, resins and particles.
Claims (12)
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