KR100598165B1 - Contact formation method of semiconductor device - Google Patents

Contact formation method of semiconductor device Download PDF

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KR100598165B1
KR100598165B1 KR1020000051270A KR20000051270A KR100598165B1 KR 100598165 B1 KR100598165 B1 KR 100598165B1 KR 1020000051270 A KR1020000051270 A KR 1020000051270A KR 20000051270 A KR20000051270 A KR 20000051270A KR 100598165 B1 KR100598165 B1 KR 100598165B1
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contact
interlayer insulating
insulating film
film
semiconductor device
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KR20020017757A (en
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김창일
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주식회사 하이닉스반도체
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    • H01L21/3105—After-treatment
    • H01L21/31051—Planarisation of the insulating layers
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Abstract

본 발명은, 반도체소자의 콘택 형성방법에 관한 것으로서, 특히 반도체기판상에 층간절연막을 적층하여 식각으로 콘택을 형성한 후, 폴리실리콘층을 콘택의 내부에 메탈라인의 하드마스크의 높이로 매립하여 형성한 후 화학기계적연마 공정으로 평탄화하므로써 층간절연막과 하드마스크에 과도 식각으로 인한 디슁 (Dishing)이 발생하는 것을 방지하는 매우 유용하고 효과적인 발명에 관한 것이다.
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a contact of a semiconductor device. In particular, a contact layer is formed by etching an interlayer insulating film on a semiconductor substrate, and then a polysilicon layer is embedded in the contact at a height of a hard mask of a metal line. The present invention relates to a very useful and effective invention which prevents dishing due to excessive etching on an interlayer insulating film and a hard mask by planarization by a chemical mechanical polishing process.

배선라인 하드 마스크 층간절연막 연마속도Wiring Line Hard Mask Interlayer Insulation Film Polishing Speed

Description

반도체소자의 콘택 형성방법 { Method For Forming The Contact Of Semi-conductor Device } Method for Forming The Contact Of Semi-conductor Device             

도 1은 종래의 홀 타입 콘택이 형성된 상태를 보인 도면이고,1 is a view showing a state in which a conventional hole type contact is formed,

도 2는 종래의 셀프 얼라인 콘택을 형성한 상태를 보인 도면이며,2 is a view showing a state of forming a conventional self-aligned contact,

도 3(a) 내지 도 3(c)는 본 발명에 따른 반도체소자의 콘택 형성방법을 순차적으로 보인 도면이다.
3 (a) to 3 (c) are views sequentially showing a method for forming a contact of a semiconductor device according to the present invention.

-도면의 주요부분에 대한 부호의 설명- Explanation of symbols on the main parts of the drawing

10 : 반도체기판 15 : 배선라인10: semiconductor substrate 15: wiring line

20 : 하드마스크 25 : 층간절연막20: hard mask 25: interlayer insulating film

30 : 평탄화라인 35 : 콘택 30: planarization line 35: contact

40 : 플러그폴리
40: plug pulley

본 발명은 반도체소자에 콘택(Contact)형성 방법에 관한 것으로서, 특히, 반도체기판상에 층간절연막을 적층하여 식각으로 콘택을 형성한 후, 폴리실리콘층을 콘택의 내부에 메탈라인의 하드마스크의 높이로 매립하여 형성한 후 화학기계적연마 공정으로 평탄화하므로써 층간절연막과 하드마스크에 과도 식각으로 인한 디슁(Dishing)이 발생하는 것을 방지하도록 하는 반도체소자의 콘택 형성방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of forming a contact on a semiconductor device. In particular, after forming an contact by etching an interlayer insulating film on a semiconductor substrate, the height of the hard mask of a metal line is formed inside the contact. The present invention relates to a contact forming method of a semiconductor device which prevents dishing due to overetching between an interlayer insulating film and a hard mask by forming a buried film and then planarizing it by a chemical mechanical polishing process.

일반적으로, 반도체기판 상에 소정의 하부구조를 형성하고, 특히, 메탈라인 (Metal line)을 형성하는 경우, 그 위에 산화막등을 적층하여서 상부층과 메탈라인이 연결되도록 콘택홀을 형성하게 된다.In general, a predetermined substructure is formed on a semiconductor substrate, and in particular, in the case of forming a metal line, an oxide film or the like is stacked thereon to form a contact hole to connect the upper layer and the metal line.

반도체장치에는 배선라인과 배선라인을 서로 연결하기 위하여 도전물질을 증착한 후에 식각하여서 상부배선라인과 하부배선라인을 서로 연결시키는 플러그(Plug)를 형성시켜서 사용하게 된다.In the semiconductor device, a conductive material is deposited and then etched to connect the wiring line and the wiring line to form a plug for connecting the upper wiring line and the lower wiring line to each other.

그리고, 이 플러그를 형성하기 위하여서는 식각공정을 통하여 절연막 상에 일정깊이 함몰된 콘택홀(Contact Hole)("비어홀"이라 칭하기도 함)을 형성하고서 하부배선라인과 플러그가 직접적으로 접촉되지 않고 전류의 흐름을 매개하도록 구성된다.In order to form the plug, a contact hole (sometimes referred to as a “hole hole”) recessed in a predetermined depth is formed on the insulating layer through an etching process, so that the lower wiring line and the plug do not directly contact each other. It is configured to mediate the flow.

도 1은 종래의 홀 타입 콘택이 형성된 상태를 보인 도면으로서, 이 홀타입 콘택 형성방법을 살펴 보면, 반도체기판(1) 상에 메탈라인(2)과 하드마스크(3)를 적층하여 마스킹식각으로 패턴을 형성하도록 한다.FIG. 1 is a view illustrating a conventional hole type contact formed. Referring to this hole type contact forming method, a metal line 2 and a hard mask 3 are stacked on a semiconductor substrate 1 in a masking etching manner. Make a pattern.

그리고, 상기 결과물 상에 층간절연막(4)을 적층한 후, 메탈라인(2)에 연결 되는 콘택(50)을 형성한 후, 그 콘택(5)의 내부에 폴리실리콘층을 매립하여서 화학기계적적 연마 공정으로 평탄화하여서 플러그 폴리(6)를 형성하도록 한다.After the interlayer insulating film 4 is laminated on the resultant, a contact 50 connected to the metal line 2 is formed, and then a polysilicon layer is embedded in the contact 5 to form a chemical mechanical The plug poly 6 is formed by flattening by a polishing process.

한편, 도 2는 종래의 바아 타입(Bar-Type)에 의한 셀프 얼라인 콘택(SAC; Self Align Contact)을 형성한 상태를 보인 도면으로서, 반도체기판(11) 상에 메탈라인(12)과 하드마스크(13)를 적층한 후, 마스킹식각공정으로 패턴을 형성하도록 한다. FIG. 2 is a view illustrating a state in which a self alignment contact (SAC) is formed by a conventional bar-type, and the metal line 12 and the hard line are formed on the semiconductor substrate 11. After the mask 13 is laminated, a pattern is formed by a masking etching process.

그리고, 상기 결과물 상에 층간절연막(14)을 적층한 후, SAC형성시에 사진 공정의 마아진을 증가하기 위하여 층간적연막을 일정량 남기는 방법으로 평탄화공정을 진행하도록 한다.In addition, after the interlayer insulating film 14 is stacked on the resultant, the planarization process is performed by leaving a predetermined amount of the interlayer film in order to increase the margin of the photographing process when forming the SAC.

그리고, 상기 결과물 상에 마스킹식각공정으로 셀프얼라인콘택(15)을 형성하도록 한 후 폴리실리콘층을 매립하도록 한다.Then, the self-aligned contact 15 is formed on the resultant by a masking etching process, and then the polysilicon layer is embedded.

연속하여서 상기 결과물을 메탈라인(12)의 하드마스크(13) 까지 완전하게 평탄화하여서 콘택(15) 내부에 플러그폴리(16)를 형성하도록 한다.Subsequently, the resultant is completely flattened to the hard mask 13 of the metal line 12 to form the plug poly 16 in the contact 15.

이 때, 상기 화학기계적 연마공정을 공정을 거치게 되면, 층간절연막(14)과 플러그폴리(16) 상에 일정 깊이로 함몰된 디슁(Dishing)(17)(18)이 각각 형성 되어진다.At this time, when the chemical mechanical polishing process is performed, dishing 17 and 18 recessed to a predetermined depth are formed on the interlayer insulating film 14 and the plug poly 16, respectively.

그런데, 상기한 홀 타입 콘택은, 도 1에 도시된 바와 같이, 소자의 집적도에 의하여 공정 마아진이 줄어들게 되면서 미스얼라인시 콘택 형성이 제대로 되지 않는 문제점을 지닌다.However, the hole type contact, as shown in FIG. 1, has a problem in that contact margins are not properly formed at the time of misalignment due to the reduction of the process margin due to the degree of integration of the device.

또한, 상기한 SAC 타입의 콘택은, 도 2에 도시된 바와 같이, 워드라인과 비 트라인으로 사용되는 하드마스크의 질화막을 식각정지막으로 사용하고, 콘택 분리를 위하여 어느 정도의 하드 마스크 질화막의 손실이 요구되는 데, 연마불균일도에의하여 취약지역의 경우에는 메탈라인이 노출되는 문제점을 지니며, 웨이퍼의 에지(Edge) 쪽의 경우에는 완전하게 연마되는 문제를 지닌다.In addition, as shown in FIG. 2, the SAC type contact uses a nitride film of a hard mask, which is used as a word line and a bit line, as an etch stop layer, and a portion of the hard mask nitride film for contact isolation. Loss is required, which is a problem in that the metal line is exposed in the vulnerable area due to the nonuniformity of the polishing, and is completely polished in the edge side of the wafer.

특히, 상기 메탈라인이 금속인 경우에는 장비 내 메탈로 인한 오염을 촉발하는 문제점을 지닌다.
In particular, when the metal line is a metal, there is a problem of triggering contamination due to metal in the equipment.

본 발명은 이러한 점을 감안하여 안출한 것으로서, 반도체기판 상에 층간절연막을 적층하여 식각으로 콘택을 형성한 후, 폴리실리콘층을 콘택의 내부에 메탈라인의 하드마스크의 높이로 매립하여 형성한 후 화학기계적연마 공정으로 평탄화하므로써 층간절연막과 하드마스크에 과도 식각으로 인한 디슁(Dishing)이 발생하는 것을 방지하는 것이 목적이다.
The present invention has been made in view of this point, and after forming an interlayer insulating film on a semiconductor substrate to form a contact by etching, and then a polysilicon layer is formed by filling the height of the hard mask of the metal line inside the contact; The purpose of the present invention is to prevent the occurrence of dishing due to excessive etching in the interlayer insulating film and the hard mask by planarization by chemical mechanical polishing process.

이러한 목적은, 소정의 하부 구조를 갖는 반도체기판 상에 배선라인 및 하드 마스크를 형성한 후, 이 결과물 상에 층간절연막을 적층하는 단계와; 상기 층간절연막을 소정의 두께까지 화학적 기계적 연마공정으로 평탄화하는 단계와; 상기 결과물 상에 감광막을 적층하여 마스킹 식각으로 배선라인 사이에 콘택을 형성하는 단계와; 상기 콘택의 내부에 폴리실리콘을 매립한 후, 전면 식각공정으로 하드마스 크 높이로 플러그폴리를 형성하는 단계와; 상기 단계 후에 하드마스크와 층간절연막 사이의 연마 속도 차이가 큰 슬러리를 사용하여 하드마스크까지 층간절연막을 식각하여 플러그 폴리 높이로 평탄화하는 단계를 포함하여 이루어진 반도체소자의 콘택 형성방법을 제공함으로써 달성된다. This object is achieved by forming a wiring line and a hard mask on a semiconductor substrate having a predetermined substructure and then laminating an interlayer insulating film on the resulting product; Planarizing the interlayer insulating film to a predetermined thickness by a chemical mechanical polishing process; Stacking a photoresist on the resultant to form a contact between the wiring lines by masking etching; Embedding polysilicon in the contact, and then forming a plug poly with a hard mask height by an entire etching process; After the step, using a slurry having a large difference in polishing rate between the hard mask and the interlayer insulating film is achieved by providing a method for forming a contact of a semiconductor device comprising etching the interlayer insulating film to the hard mask to planarize to the plug poly height.

그리고, 상기 배선라인은, 텅스텐을 사용하고, CVD 혹은 PVD법에 의하여 1000 ∼ 5000Å의 두께로 증착하도록 한다.The wiring line is made of tungsten and deposited to a thickness of 1000 to 5000 kW by CVD or PVD.

상기 하드마스크는, 질화막을 사용하고, LP-CVD 혹은 PE-CVD법으로 400 ∼ 800℃의 온도로, 300 ∼ 3000Å의 두께로 적층하는 것이 바람직 하다.The hard mask is preferably laminated at a thickness of 300 to 3000 Pa by a LP-CVD or PE-CVD method at a temperature of 400 to 800 占 폚 using a nitride film.

상기 층간절연막은, 산화막을 사용하여 PE-CVD법으로 증착하고, BPSG막, HDP막 혹은 PE-TEOS막 중에 어느 하나를 선택하여 적층하는 것이 바람직 하다.The interlayer insulating film is deposited by an PE-CVD method using an oxide film, and it is preferable that any one of a BPSG film, an HDP film or a PE-TEOS film is selected and laminated.

상기 층간절연막으로 BPSG막을 적층할 때, 보론(Boron)의 농도를 0 ∼ 10wt%, 포스포러스(Phosphrous)의 농도를 0 ∼ 10wt%를 적층하고, 증착온도는, 500 ∼ 1000℃로 하여 2000 ∼ 10000Å의 두께로 적층하는 것이 바람직 하다.When the BPSG film is laminated with the interlayer insulating film, the concentration of boron is 0 to 10 wt% and the concentration of phosphorus is 0 to 10 wt%, and the deposition temperature is 500 to 1000 ° C. It is preferable to laminate at a thickness of 10000 kPa.

그리고, 상기 층간절연막으로 HDP막 혹은 PE-TEOS막을 적층 할 때, 증착온도는 400 ∼ 800℃로 하여 2000 ∼ 10000Å의 두께로 적층하는 것이 바람직 하다.When the HDP film or the PE-TEOS film is laminated with the interlayer insulating film, the deposition temperature is preferably 400 to 800 ° C and laminated at a thickness of 2000 to 10000 Pa.

그리고, 상기 층간절연막을 평탄화할 때, 1000 ∼ 7000Å의 두께를 제거하여 형성하고, 사용되는 슬러리(Slurry)는, 50 ∼ 400nm크기의 실리카, 알루미나 혹은 세리아 중에 적어도 어느 하나를 이용하고, PH 6 ∼ 11을 유지하는 것이 바람직 하다.When the interlayer insulating film is planarized, a thickness of 1000 to 7000 kPa is removed and a slurry used is at least one of silica, alumina or ceria having a size of 50 to 400 nm. It is desirable to keep 11.

그리고, 상기 콘택 내부에 적층되는 폴리실리콘층은, 400 ∼ 1200℃의 온도 범위에서 500 ∼ 5000Å의 두께로 적층하는 것이 바람직 하다.And it is preferable to laminate | stack the polysilicon layer laminated | stacked inside the said contact at thickness of 500-5000 Pa in 400-1200 degreeC temperature range.

상기 플러그 폴리를 평탄화할 때, 사용하는 슬러리는 100 ∼500nm의 크기를 갖고, 2 ∼ 13의 PH를 갖는 콜로이달(Colloidal) 혹은 퓸(Fumed) 형태를 사용하고, 1 ∼ 20wt%를 갖는 산화세슘(CeO2)을 사용하는 것이 바람직 하다.When planarizing the plug poly, the slurry to be used has a size of 100 to 500 nm, a colloidal or fumed form having a PH of 2 to 13, and cesium oxide having 1 to 20 wt%. Preference is given to using (CeO 2 ).

이하, 첨부도면에 의거하여 본 발명의 일 실시예에 따른 콘택 형성방법을 순차적으로 설명하도록 한다.Hereinafter, the contact forming method according to an embodiment of the present invention will be described sequentially based on the accompanying drawings.

도 3(a) 내지 도 3(c)는 본 발명에 따른 반도체소자의 콘택 형성방법을 순차적으로 보인 도면이다. 3 (a) to 3 (c) are views sequentially showing a method for forming a contact of a semiconductor device according to the present invention.

도 3(a)에 도시된 바와 같이, 소정의 하부 구조를 갖는 반도체기판 상에 배선라인(15) 및 하드 마스크(20)를 형성한 후, 이 결과물 상에 층간절연막(25)을 적층하도록 한다.As shown in FIG. 3A, after the wiring line 15 and the hard mask 20 are formed on a semiconductor substrate having a predetermined substructure, an interlayer insulating film 25 is stacked on the resultant. .

그리고, 상기 층간절연막(25)을 소정의 두께인 평탄화라인(30)까지 화학적 기계적 연마공정으로 평탄화하도록 한다.The interlayer insulating layer 25 is planarized by a chemical mechanical polishing process up to the planarization line 30 having a predetermined thickness.

상기 배선라인(15)은, 텅스텐을 사용하고, CVD 혹은 PVD 법에 의하여 1000 ∼ 5000Å의 두께로 증착하도록 한다.The wiring line 15 is made of tungsten and deposited to a thickness of 1000 to 5000 kV by CVD or PVD.

상기 하드마스크(20)는, 질화막을 사용하고, LP-CVD 혹은 PE-CVD법으로 400 ∼ 800℃의 온도로, 300 ∼ 3000Å의 두께로 적층하는 것이 바람직 하다.It is preferable to laminate | stack the said hard mask 20 in thickness of 300-3000 Pa by the temperature of 400-800 degreeC by the LP-CVD or PE-CVD method using a nitride film.

그리고, 상기 층간절연막(25)은, PE-CVD법으로 증착하고, BPSG막, HDP막 혹은 PE-TEOS막 중에 어느 하나를 선택하여 적층하는 것이 바람직 하다.The interlayer insulating film 25 is preferably deposited by PE-CVD, and selected by laminating any one of a BPSG film, an HDP film and a PE-TEOS film.

또한, 상기 층간절연막(25)으로 BPSG막을 적층할 때, 보론의 농도를 0 ∼ 10wt%, 포스포러스의 농도를 0 ∼ 10wt%를 적층하고, 증착온도는, 500 ∼ 1000℃로 하여 2000 ∼ 10000Å의 두께로 적층하는 것이 바람직 하다.When the BPSG film is laminated with the interlayer insulating film 25, the concentration of boron is 0-10 wt% and the concentration of phosphorus is 0-10 wt%, and the deposition temperature is 2000-10000 Pa. It is preferable to laminate at a thickness of.

상기 층간절연막(25)으로 HDP막 혹은 PE-TEOS막을 적층할 때, 증착온도는 400 ∼ 800℃로 하여 2000 ∼ 10000Å의 두께로 적층하도록 한다.When the HDP film or the PE-TEOS film is laminated with the interlayer insulating film 25, the deposition temperature is set to 400 to 800 ° C so as to have a thickness of 2000 to 10000 Pa.

상기 층간절연막(25)을 평탄화할 때, 1000 ∼ 7000Å의 두께를 제거하여 형성하고, 사용되는 슬러리는, 50 ∼ 400nm크기의 실리카, 알루미나 혹은 세리아 중에 적어도 어느 하나를 이용하고, PH 6 ∼ 11을 유지하는 것이 바람직 하다.When the interlayer insulating film 25 is planarized, a thickness of 1000 to 7000 kPa is removed and a slurry used is at least one of silica, alumina or ceria having a size of 50 to 400 nm, and PH 6 to 11 is used. It is desirable to maintain.

그리고, 상기 결과물 상에 감광막을 적층하여 마스킹 식각으로 배선라인(15) 사이에 콘택(35)을 형성하도록 하고, 상기 콘택(35)의 내부에 폴리실리콘을 매립한 후, 전면 식각공정으로 하드마스크 높이로 플러그폴리(40)를 식각하여 형성하도록 한다. Then, the photoresist layer is stacked on the resultant to form a contact 35 between the wiring lines 15 by masking etching, and the polysilicon is buried in the contact 35, followed by a hard mask by a front etching process. The plug poly 40 is etched to form a height.

상기 콘택(35) 내부에 적층되는 폴리실리콘층은, 400 ∼ 1200℃의 온도범위에서 500 ∼ 5000Å의 두께로 적층하도록 한다.The polysilicon layer laminated in the contact 35 is laminated to a thickness of 500 to 5000 kPa in a temperature range of 400 to 1200 ° C.

도 3(c)에 도시된 바와 같이, 상기 단계 후에 하드마스크(20)와 층간절연막 (25)사이의 연마 속도 차이가 큰 슬러리를 사용하여 하드마스크(20)까지 층간절연막(25)을 식각하여 플러그 폴리(40) 높이로 전체적으로 평탄화하도록 한다.As shown in FIG. 3C, after the step, the interlayer insulating layer 25 is etched to the hard mask 20 using a slurry having a large difference in polishing rate between the hard mask 20 and the interlayer insulating layer 25. The entire planarization to the height of the plug pulley 40 is made.

상기 플러그폴리(40)를 평탄화할 때, 사용하는 슬러리는 100 ∼500nm의 크기를 갖고, 2 ∼ 13의 PH를 갖는 콜로이달 혹은 퓸 형태를 사용하고, 1 ∼ 20wt%를 갖는 산화세슘을 사용하는 것이 바람직 하다. When the plug poly 40 is planarized, the slurry used has a size of 100 to 500 nm, uses a colloidal or fume form having a PH of 2 to 13, and uses cesium oxide having 1 to 20 wt%. It is desirable.

따라서, 상기한 바와 같이, 본 발명에 따른 반도체소자의 콘택 형성방법을 이용하게 되면, 반도체기판상에 층간절연막을 적층하여 식각으로 콘택을 형성한 후, 폴리실리콘층을 콘택의 내부에 메탈라인의 하드마스크의 높이로 매립하여 형성한 후 화학기계적연마 공정으로 평탄화하므로써 층간절연막과 하드마스크에 과도 식각으로 인한 디슁(Dishing)이 발생하는 것을 방지하도록 하는 매우 유용하고 효과적인 발명이다.













Therefore, as described above, when the contact forming method of the semiconductor device according to the present invention is used, a contact is formed by etching an interlayer insulating film on a semiconductor substrate, and then a polysilicon layer is formed on the inside of the contact. It is a very useful and effective invention to prevent the occurrence of dishing due to excessive etching in the interlayer insulating film and the hard mask by forming by filling to the height of the hard mask and planarized by chemical mechanical polishing process.













Claims (9)

소정의 하부 구조를 갖는 반도체기판 상에 배선라인 및 하드 마스크를 형성한 후, 이 결과물 상에 층간절연막을 적층하는 단계와;Forming a wiring line and a hard mask on the semiconductor substrate having a predetermined substructure, and then laminating an interlayer insulating film on the resultant; 상기 층간절연막을 소정의 두께까지 화학적 기계적 연마공정으로 평탄화하는 단계와;Planarizing the interlayer insulating film to a predetermined thickness by a chemical mechanical polishing process; 상기 결과물 상에 감광막을 적층하여 마스킹 식각으로 배선라인 사이에 콘택을 형성하는 단계와;Stacking a photoresist on the resultant to form a contact between the wiring lines by masking etching; 상기 콘택의 내부에 폴리실리콘을 매립한 후, 전면 식각공정으로 하드마스크 높이로 플러그폴리를 식각하는 단계와;Embedding polysilicon in the contact, and etching the plug poly with a hard mask height by a front etching process; 상기 단계 후에 하드마스크와 층간절연막 사이의 연마 속도 차이가 큰 슬러리를 사용하여 하드마스크까지 층간절연막을 식각하여 플러그 폴리 높이로 전체적으로 평탄화하는 단계를 포함하여 이루어진 것을 특징으로 하는 반도체소자의 콘택 형성방법. Etching the interlayer insulating film to a hard mask by using a slurry having a large difference in polishing rate between the hard mask and the interlayer insulating film after the step, and planarizing the plug poly height as a whole. 제 1 항에 있어서, 상기 배선라인은, 텅스텐을 사용하고, CVD 혹은 PVD법에 의하여 1000 ∼ 5000Å의 두께로 증착하는 것을 특징으로 하는 반도체소자의 콘택 형성방법. The method for forming a contact of a semiconductor device according to claim 1, wherein the wiring line is made of tungsten and deposited to a thickness of 1000 to 5000 kV by CVD or PVD. 제 1 항에 있어서, 상기 하드마스크는, 질화막을 사용하고, LP-CVD 혹은 PE-CVD법으로 400 ∼ 800℃의 온도로, 300 ∼ 3000Å의 두께로 적층하는 것을 특징으로 하는 반도체소자의 콘택 형성방법.2. The semiconductor device as claimed in claim 1, wherein the hard mask is formed of a nitride film and laminated at a thickness of 300 to 3000 Pa at a temperature of 400 to 800 DEG C by LP-CVD or PE-CVD. Way. 제 1 항에 있어서, 상기 층간절연막은, PE-CVD법으로 증착하고, BPSG막, HDP막 혹은 PE-TEOS막 중에 어느 하나를 선택하여 적층하는 것을 특징으로 하는 것을 특징으로 하는 반도체소자의 콘택 형성방법. The contact formation of a semiconductor device according to claim 1, wherein the interlayer insulating film is deposited by PE-CVD and selected by laminating any one of a BPSG film, an HDP film and a PE-TEOS film. Way. 제 4 항에 있어서, 상기 층간절연막으로 BPSG막을 적층할 때, 보론의 농도를 0 ∼ 10wt%, 포스포러스의 농도를 0 ∼ 10wt%를 적층하고, 증착온도는, 500 ∼ 1000℃로 하여 2000 ∼ 10000Å의 두께로 적층하는 것을 특징으로 하는 반도체소자의 콘택 형성방법.The method according to claim 4, wherein when the BPSG film is laminated with the interlayer insulating film, the boron concentration is 0-10 wt% and the phosphorus concentration is 0-10 wt%, and the deposition temperature is 500-1000 占 폚. A method of forming a contact for a semiconductor device, characterized in that it is laminated with a thickness of 10000 kPa. 제 1 항에 있어서, 상기 층간절연막으로 HDP막 혹은 PE-TEOS막을 적층 할 때, 증착온도는 400 ∼ 800℃로 하여 2000 ∼ 10000Å의 두께로 적층하는 것을 특징으로 하는 반도체소자의 콘택 형성방법.The method for forming a contact of a semiconductor device according to claim 1, wherein when the HDP film or the PE-TEOS film is laminated with the interlayer insulating film, the deposition temperature is 400 to 800 占 폚 and the thickness is 2000 to 10000 Pa. 제 1 항에 있어서, 상기 층간절연막을 평탄화할 때, 1000 ∼ 7000Å의 두께를 제거하여 형성하고, 사용되는 슬러리는, 50 ∼ 400nm크기의 실리카, 알루미나 혹은 세리아 중에 적어도 어느 하나를 이용하고, PH 6 ∼ 11을 유지하는 것을 특징으로 하는 반도체소자의 콘택홀 형성방법. The method according to claim 1, wherein when the interlayer insulating film is planarized, a thickness of 1000 to 7000 kPa is removed and a slurry used is at least one of silica, alumina or ceria having a size of 50 to 400 nm. The contact hole forming method of the semiconductor element which hold | maintains -11. 제 1 항에 있어서, 상기 콘택 내부에 적층되는 폴리실리콘층은, 400 ∼ 1200℃의 온도범위에서 500 ∼ 5000Å의 두께로 적층 되는 것을 특징으로 하는 반도체소자의 콘택 형성방법. The contact forming method of a semiconductor device according to claim 1, wherein the polysilicon layer laminated inside the contact is laminated to a thickness of 500 to 5000 Pa in a temperature range of 400 to 1200 占 폚. 제 1 항에 있어서, 상기 플러그폴리를 평탄화할 때, 사용하는 슬러리는 100 ∼500nm의 크기를 갖고, 2 ∼ 13의 PH를 갖는 콜로이달 혹은 퓸 형태를 사용하고, 1 ∼ 20wt%를 갖는 산화세슘을 사용하는 것을 특징으로 하는 반도체소자의 콘택 형성방법. The method of claim 1, wherein when the plug poly is planarized, the slurry to be used has a size of 100 to 500 nm, a colloidal or fume form having a PH of 2 to 13, and a cesium oxide having 1 to 20 wt%. The contact forming method of a semiconductor device, characterized in that using.
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KR100801846B1 (en) * 2002-08-07 2008-02-11 동부일렉트로닉스 주식회사 Liquid crystal display device manufacturing method
KR100881837B1 (en) * 2002-12-30 2009-02-03 주식회사 하이닉스반도체 Storage node contact formation method of semiconductor device

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