KR100584310B1 - 분사액체로 주입되는 레이저빔으로 소재를 가공하는방법과 장치 - Google Patents
분사액체로 주입되는 레이저빔으로 소재를 가공하는방법과 장치 Download PDFInfo
- Publication number
- KR100584310B1 KR100584310B1 KR1020007012090A KR20007012090A KR100584310B1 KR 100584310 B1 KR100584310 B1 KR 100584310B1 KR 1020007012090 A KR1020007012090 A KR 1020007012090A KR 20007012090 A KR20007012090 A KR 20007012090A KR 100584310 B1 KR100584310 B1 KR 100584310B1
- Authority
- KR
- South Korea
- Prior art keywords
- nozzle
- liquid
- laser beam
- laser
- nozzle tube
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/122—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in a liquid, e.g. underwater
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19819429.3 | 1998-04-30 | ||
DE19819429 | 1998-04-30 | ||
PCT/CH1999/000180 WO1999056907A1 (fr) | 1998-04-30 | 1999-04-30 | Dispositif de façonnage de matiere avec un faisceau laser injecte dans un jet de liquide |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010043171A KR20010043171A (ko) | 2001-05-25 |
KR100584310B1 true KR100584310B1 (ko) | 2006-05-26 |
Family
ID=7866347
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020007012090A KR100584310B1 (ko) | 1998-04-30 | 1999-04-30 | 분사액체로 주입되는 레이저빔으로 소재를 가공하는방법과 장치 |
Country Status (4)
Country | Link |
---|---|
KR (1) | KR100584310B1 (fr) |
CN (1) | CN1134322C (fr) |
CA (1) | CA2330426C (fr) |
WO (1) | WO1999056907A1 (fr) |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1132058A1 (fr) * | 2000-03-06 | 2001-09-12 | Advanced Laser Applications Holding S.A. | Prothèse intravasculaire |
JP2003533871A (ja) | 2000-04-04 | 2003-11-11 | シノヴァ エス.アー. | 対象物を切断して切断物を機械加工するための方法および対象物または切断物を保持するための支持台 |
US6563080B2 (en) | 2001-02-15 | 2003-05-13 | Scimed Life Systems, Inc. | Laser cutting of stents and other medical devices |
SG139508A1 (en) | 2001-09-10 | 2008-02-29 | Micron Technology Inc | Wafer dicing device and method |
SG102639A1 (en) | 2001-10-08 | 2004-03-26 | Micron Technology Inc | Apparatus and method for packing circuits |
SG142115A1 (en) | 2002-06-14 | 2008-05-28 | Micron Technology Inc | Wafer level packaging |
US6696666B2 (en) | 2002-07-03 | 2004-02-24 | Scimed Life Systems, Inc. | Tubular cutting process and system |
US6777647B1 (en) * | 2003-04-16 | 2004-08-17 | Scimed Life Systems, Inc. | Combination laser cutter and cleaner |
SG119185A1 (en) | 2003-05-06 | 2006-02-28 | Micron Technology Inc | Method for packaging circuits and packaged circuits |
US7476034B2 (en) | 2003-08-28 | 2009-01-13 | Boston Scientific Scimed, Inc. | Dynamic bushing for medical device tubing |
EP1657020A1 (fr) | 2004-11-10 | 2006-05-17 | Synova S.A. | Méthode et dispositif pour optimiser la cohérence d'un jet de fluide utilisé pour le travail de matériaux et buse pour un tel dispositif |
ES2347683T3 (es) * | 2005-05-17 | 2010-11-03 | Technikus Ag | Procedimiento de mecanizacion de materiales mediante un laser guiado por un chorro de agua asi como dispositivo para llevar a cabo el procedimiento. |
JP4844715B2 (ja) * | 2005-08-25 | 2011-12-28 | 澁谷工業株式会社 | ハイブリッドレーザ加工装置 |
JP2007144494A (ja) * | 2005-11-30 | 2007-06-14 | Tokyo Electron Ltd | レーザー処理装置及びレーザー処理方法 |
DE102006038001B3 (de) * | 2006-08-14 | 2008-03-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zur Werkstücktrocknung und/oder Trockenhaltung bei der flüssigkeitsstrahlgeführten Bearbeitung eines Werkstücks |
US9232959B2 (en) | 2007-01-02 | 2016-01-12 | Aquabeam, Llc | Multi fluid tissue resection methods and devices |
US8134098B2 (en) * | 2007-09-28 | 2012-03-13 | Sugino Machine Limited | Laser machining apparatus using laser beam introduced into jet liquid column |
US7722661B2 (en) | 2007-12-19 | 2010-05-25 | Boston Scientific Scimed, Inc. | Stent |
EP2259742B1 (fr) | 2008-03-06 | 2020-01-01 | AquaBeam LLC | Ablation des tissus et cautérisation avec de l'énergie optique véhiculée dans un courant de fluide |
EP2208568A1 (fr) * | 2009-01-20 | 2010-07-21 | Synova S.A. | Appareil et procédé pour le traitement de matériaux avec un laser |
DE102009011305A1 (de) * | 2009-03-02 | 2010-09-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Solarzellen mit Rückseitenkontaktierung sowie Verfahren zu deren Herstellung |
US9848904B2 (en) | 2009-03-06 | 2017-12-26 | Procept Biorobotics Corporation | Tissue resection and treatment with shedding pulses |
WO2014127242A2 (fr) | 2013-02-14 | 2014-08-21 | Procept Biorobotics Corporation | Procédés et appareil de chirurgie oculaire aquabeam d'ablation par jet de fluide |
DE102010011580B4 (de) * | 2010-03-16 | 2020-01-02 | Vollmer Werke Maschinenfabrik Gmbh | Vorrichtung und Verfahren zum Vermessen eines, insbesondere als Lichtleiter genutzten, Flüssigkeitsstrahls sowie Einrichtung zum Bearbeiten eines Werkstücks |
DE102011001322A1 (de) * | 2011-03-16 | 2012-09-20 | Ipg Laser Gmbh | Maschine und Verfahren zur Materialbearbeitung von Werkstücken mit einem Laserstrahl |
CN102259236A (zh) * | 2011-07-01 | 2011-11-30 | 中国电子科技集团公司第四十五研究所 | 一种微水导激光耦合对准装置 |
CN102259237B (zh) * | 2011-07-01 | 2014-09-03 | 中国电子科技集团公司第四十五研究所 | 激光光束与水射流耦合调节装置 |
EP2819599B1 (fr) | 2012-02-29 | 2018-05-23 | Procept Biorobotics Corporation | Résection et traitement de tissu guidés par image automatisée |
JP5877432B2 (ja) * | 2012-02-29 | 2016-03-08 | 株式会社スギノマシン | レーザー加工装置 |
US8969760B2 (en) | 2012-09-14 | 2015-03-03 | General Electric Company | System and method for manufacturing an airfoil |
US8993923B2 (en) | 2012-09-14 | 2015-03-31 | General Electric Company | System and method for manufacturing an airfoil |
US11440135B2 (en) | 2013-05-23 | 2022-09-13 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Laser machining nozzle for a laser machining device, and laser machining device |
WO2014187467A1 (fr) * | 2013-05-23 | 2014-11-27 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Buse de traitement au laser pour dispositif de traitement au laser et dispositif de traitement au laser |
EP2957378A1 (fr) | 2014-06-16 | 2015-12-23 | Synova SA | Tête d'usinage pour coupler un fisceau laser et un faisceau de fluide avec une interface |
GB201419809D0 (en) | 2014-11-07 | 2014-12-24 | Element Six Technologies Ltd | A method of fabricating plates of super-hard material and cutting techniques suitable for such a method |
US9770785B2 (en) | 2014-11-18 | 2017-09-26 | General Electric Company | System and method for forming a cooling hole in an airfoil |
DE102014223716A1 (de) | 2014-11-20 | 2016-05-25 | Siemens Aktiengesellschaft | Vorrichtung sowie Verfahren zur Bearbeitung eines Bauteils mittels eines in einem Flüssigkeitsstrahl propagierenden Laserstrahls |
US9895755B2 (en) | 2014-12-09 | 2018-02-20 | Kennametal Inc. | Cutting insert with internal coolant passages and method of making same |
US9776284B2 (en) | 2015-01-22 | 2017-10-03 | General Electric Company | System and method for cutting a passage in an airfoil |
EP3124165B1 (fr) | 2015-07-28 | 2020-06-17 | Synova S.A. | Procédé de traitement d'une pièce utilisant un faisceau laser guidé par jet de liquide |
US10160059B2 (en) | 2016-03-03 | 2018-12-25 | General Electric Company | Decoupled liquid-jet guided laser nozzle cap |
US10335900B2 (en) | 2016-03-03 | 2019-07-02 | General Electric Company | Protective shield for liquid guided laser cutting tools |
DE102016116512A1 (de) | 2016-09-03 | 2018-03-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zur Bearbeitung eines Werkstückes |
EP3300833B1 (fr) * | 2016-10-03 | 2019-11-27 | Synova SA | Dispositif de production d'un jet liquide |
CN109803770B (zh) * | 2016-10-17 | 2020-02-21 | Abb瑞士股份有限公司 | 用于将激光焦点控制在流体束内部的清洁设备和方法以及包括清洁设备的系统 |
ES2921237T3 (es) * | 2017-01-23 | 2022-08-22 | Subaru Corp | Dispositivo de granallado por láser y procedimientos de granallado por láser |
DE102017112113A1 (de) | 2017-06-01 | 2018-12-06 | Lohmann-Koester Gmbh & Co. Kg | Verfahren zur Herstellung eines siebförmigen Entformungswerkzeuges und siebförmiges Entformungswerkzeug |
EP3466597A1 (fr) * | 2017-10-05 | 2019-04-10 | Synova S.A. | Appareil d'usinage d'une pièce par faisceau laser |
EP3470165B1 (fr) * | 2017-10-13 | 2023-08-16 | Synova S.A. | Appareil d'usinage d'une pièce au moyen d'un faisceau laser guidé par un jet liquide et son assemblage |
CN108132511A (zh) * | 2017-12-21 | 2018-06-08 | 暨南大学 | 一种用于钻石激光切割的复合镜头 |
CN108480842B (zh) * | 2018-06-12 | 2022-11-29 | 桂林电子科技大学 | 水导激光耦合分流稳压装置 |
EP3965990A1 (fr) * | 2019-05-08 | 2022-03-16 | Wsoptics Technologies GmbH | Procédé d'usinage par faisceau d'une pièce |
CN113618232B (zh) * | 2021-07-28 | 2024-03-19 | 中国科学院宁波材料技术与工程研究所 | 一种双光束耦合水导加工头装置及加工方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4952771A (en) * | 1986-12-18 | 1990-08-28 | Aesculap Ag | Process for cutting a material by means of a laser beam |
FR2676913B1 (fr) * | 1991-05-28 | 1993-08-13 | Lasag Ag | Dispositif d'ablation de matiere, notamment pour la dentisterie. |
DE4418845C5 (de) * | 1994-05-30 | 2012-01-05 | Synova S.A. | Verfahren und Vorrichtung zur Materialbearbeitung mit Hilfe eines Laserstrahls |
US5773791A (en) * | 1996-09-03 | 1998-06-30 | Kuykendal; Robert | Water laser machine tool |
-
1999
- 1999-04-30 WO PCT/CH1999/000180 patent/WO1999056907A1/fr active IP Right Grant
- 1999-04-30 CA CA002330426A patent/CA2330426C/fr not_active Expired - Lifetime
- 1999-04-30 KR KR1020007012090A patent/KR100584310B1/ko not_active IP Right Cessation
- 1999-04-30 CN CNB998075752A patent/CN1134322C/zh not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CA2330426A1 (fr) | 1999-11-11 |
CA2330426C (fr) | 2007-11-13 |
CN1306467A (zh) | 2001-08-01 |
CN1134322C (zh) | 2004-01-14 |
KR20010043171A (ko) | 2001-05-25 |
WO1999056907A1 (fr) | 1999-11-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100584310B1 (ko) | 분사액체로 주입되는 레이저빔으로 소재를 가공하는방법과 장치 | |
US20180126488A1 (en) | Fibre optic laser machining equipment for etching grooves forming incipient cracks | |
CN105392593B (zh) | 借助激光从平坦基板中切割轮廓的设备及方法 | |
US8866043B2 (en) | Method and apparatus for laser drilling holes with Gaussian pulses | |
US7054341B2 (en) | Methods and systems for laser processing a workpiece and methods and apparatus for controlling beam quality therein | |
CN110402179A (zh) | 焊接方法及焊接装置 | |
US7319204B2 (en) | Laser welding device and method | |
US7671296B2 (en) | Nose-piece for a laser-beam drilling or machining head | |
JP6917809B2 (ja) | アシストガス流に対するレーザの光軸位置制御による金属材料のレーザ加工方法並びに該方法の実施のための機械およびコンピュータプログラム | |
JP6063636B2 (ja) | レーザ加工装置、レーザ加工システム、レーザ加工方法 | |
JP2012510156A5 (fr) | ||
US3972599A (en) | Method and apparatus for focussing laser beams | |
US8952290B2 (en) | Method and apparatus for the thermal treatment of a workpiece by means of a laser beam | |
ATE493224T1 (de) | Vorrichtung zum wiederaufladen einer konkaven oberfläche eines werkstückes durch einbringung eines materiales und durch einbringung von laserenergie | |
ES2320664T3 (es) | Procedimiento y dispositivo para taladrar agujeros con impulsos laser de co2. | |
JP6063635B2 (ja) | レーザ加工装置、レーザ加工システム、レーザ加工方法 | |
WO2012073931A1 (fr) | Appareil de traitement au laser | |
US20030015503A1 (en) | Apparatus and method of forming orifices and chamfers for uniform orifice coefficient and surface properties by laser | |
JPH10249572A (ja) | レーザ切断加工方法及び装置並びにレーザノズル | |
RU2466842C1 (ru) | Способ газолазерной резки материалов и установка для газолазерной резки | |
JP3623274B2 (ja) | レーザー加工装置の加工ヘッド | |
KR102176312B1 (ko) | 형상홀을 만들기 위한 레이저 드릴링 방법 및 시스템 | |
US6603095B2 (en) | Apparatus and method of overlapping formation of chamfers and orifices by laser light | |
JP2000202676A (ja) | レ―ザ加工ヘッド | |
JP2001287071A (ja) | レーザ加工装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20130520 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20140516 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20150428 Year of fee payment: 10 |
|
FPAY | Annual fee payment |
Payment date: 20160512 Year of fee payment: 11 |
|
FPAY | Annual fee payment |
Payment date: 20170508 Year of fee payment: 12 |
|
FPAY | Annual fee payment |
Payment date: 20180517 Year of fee payment: 13 |
|
EXPY | Expiration of term |