KR100470826B1 - 보호층 시스템을 가지는 툴 - Google Patents

보호층 시스템을 가지는 툴 Download PDF

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Publication number
KR100470826B1
KR100470826B1 KR10-2000-7002654A KR20007002654A KR100470826B1 KR 100470826 B1 KR100470826 B1 KR 100470826B1 KR 20007002654 A KR20007002654 A KR 20007002654A KR 100470826 B1 KR100470826 B1 KR 100470826B1
Authority
KR
South Korea
Prior art keywords
tool
layer
workpiece
value
coating
Prior art date
Application number
KR10-2000-7002654A
Other languages
English (en)
Korean (ko)
Other versions
KR20010030596A (ko
Inventor
브랜들한스
시마노부히코
Original Assignee
어낵시스 발처스 악티엔게젤샤프트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 어낵시스 발처스 악티엔게젤샤프트 filed Critical 어낵시스 발처스 악티엔게젤샤프트
Priority claimed from PCT/IB1997/001090 external-priority patent/WO1999014392A1/en
Publication of KR20010030596A publication Critical patent/KR20010030596A/ko
Application granted granted Critical
Publication of KR100470826B1 publication Critical patent/KR100470826B1/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Materials For Medical Uses (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
KR10-2000-7002654A 1997-09-12 1997-09-12 보호층 시스템을 가지는 툴 KR100470826B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IB1997/001090 WO1999014392A1 (en) 1997-09-12 1997-09-12 Tool having a protective layer system

Publications (2)

Publication Number Publication Date
KR20010030596A KR20010030596A (ko) 2001-04-16
KR100470826B1 true KR100470826B1 (ko) 2005-03-07

Family

ID=11004604

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2000-7002654A KR100470826B1 (ko) 1997-09-12 1997-09-12 보호층 시스템을 가지는 툴

Country Status (8)

Country Link
JP (1) JP2001516655A (ja)
KR (1) KR100470826B1 (ja)
AT (1) ATE226647T1 (ja)
CA (1) CA2303124C (ja)
CZ (1) CZ301431B6 (ja)
DE (1) DE69716651T2 (ja)
SK (1) SK287369B6 (ja)
TR (1) TR200000710T2 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4711107B2 (ja) * 2004-04-08 2011-06-29 三菱マテリアル株式会社 高硬度鋼の高速断続切削加工で硬質被覆層がすぐれた耐チッピング性および耐熱塑性変形性を発揮する表面被覆立方晶窒化硼素系焼結材料製切削工具
JP4711106B2 (ja) * 2004-04-09 2011-06-29 三菱マテリアル株式会社 難削材の高速断続切削加工ですぐれた耐チッピング性を発揮する表面被覆立方晶窒化硼素系焼結材料製切削工具
JP5209960B2 (ja) * 2004-04-19 2013-06-12 ピヴォット アー．エス． 窒化アルミニウムベースの硬い耐摩耗性コーティング
CN109128391A (zh) * 2018-11-22 2019-01-04 上海电气集团股份有限公司 一种齿轮加工方法

Also Published As

Publication number Publication date
SK287369B6 (sk) 2010-08-09
KR20010030596A (ko) 2001-04-16
TR200000710T2 (tr) 2000-09-21
SK3472000A3 (en) 2001-07-10
DE69716651T2 (de) 2003-06-18
CA2303124A1 (en) 1999-03-25
CZ301431B6 (cs) 2010-03-03
ATE226647T1 (de) 2002-11-15
CA2303124C (en) 2007-09-25
DE69716651D1 (de) 2002-11-28
JP2001516655A (ja) 2001-10-02
CZ2000904A3 (cs) 2001-01-17

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