DE69716651D1 - Werkzeug mit einem schützenden schichten system - Google Patents

Werkzeug mit einem schützenden schichten system

Info

Publication number
DE69716651D1
DE69716651D1 DE69716651T DE69716651T DE69716651D1 DE 69716651 D1 DE69716651 D1 DE 69716651D1 DE 69716651 T DE69716651 T DE 69716651T DE 69716651 T DE69716651 T DE 69716651T DE 69716651 D1 DE69716651 D1 DE 69716651D1
Authority
DE
Germany
Prior art keywords
tool
layer system
layer
theta
mex
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69716651T
Other languages
English (en)
Other versions
DE69716651T2 (de
Inventor
Hans Braendle
Nobuhiko Shima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
Unaxis Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unaxis Balzers AG filed Critical Unaxis Balzers AG
Priority claimed from PCT/IB1997/001090 external-priority patent/WO1999014392A1/de
Application granted granted Critical
Publication of DE69716651D1 publication Critical patent/DE69716651D1/de
Publication of DE69716651T2 publication Critical patent/DE69716651T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Materials For Medical Uses (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
DE69716651T 1997-09-12 1997-09-12 Werkzeug mit einem schützenden schichten system Expired - Lifetime DE69716651T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IB1997/001090 WO1999014392A1 (de) 1997-09-12 1997-09-12 Tool with tool body and protective layer system

Publications (2)

Publication Number Publication Date
DE69716651D1 true DE69716651D1 (de) 2002-11-28
DE69716651T2 DE69716651T2 (de) 2003-06-18

Family

ID=11004604

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69716651T Expired - Lifetime DE69716651T2 (de) 1997-09-12 1997-09-12 Werkzeug mit einem schützenden schichten system

Country Status (8)

Country Link
JP (1) JP2001516655A (de)
KR (1) KR100470826B1 (de)
AT (1) ATE226647T1 (de)
CA (1) CA2303124C (de)
CZ (1) CZ301431B6 (de)
DE (1) DE69716651T2 (de)
SK (1) SK287369B6 (de)
TR (1) TR200000710T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4711107B2 (ja) * 2004-04-08 2011-06-29 三菱マテリアル株式会社 高硬度鋼の高速断続切削加工で硬質被覆層がすぐれた耐チッピング性および耐熱塑性変形性を発揮する表面被覆立方晶窒化硼素系焼結材料製切削工具
JP4711106B2 (ja) * 2004-04-09 2011-06-29 三菱マテリアル株式会社 難削材の高速断続切削加工ですぐれた耐チッピング性を発揮する表面被覆立方晶窒化硼素系焼結材料製切削工具
JP5209960B2 (ja) * 2004-04-19 2013-06-12 ピヴォット アー．エス． 窒化アルミニウムベースの硬い耐摩耗性コーティング
CN109128391A (zh) * 2018-11-22 2019-01-04 上海电气集团股份有限公司 一种齿轮加工方法

Also Published As

Publication number Publication date
SK287369B6 (sk) 2010-08-09
KR20010030596A (ko) 2001-04-16
TR200000710T2 (tr) 2000-09-21
SK3472000A3 (en) 2001-07-10
DE69716651T2 (de) 2003-06-18
CA2303124A1 (en) 1999-03-25
KR100470826B1 (ko) 2005-03-07
CZ301431B6 (cs) 2010-03-03
ATE226647T1 (de) 2002-11-15
CA2303124C (en) 2007-09-25
JP2001516655A (ja) 2001-10-02
CZ2000904A3 (cs) 2001-01-17

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Legal Events

Date Code Title Description
8328 Change in the person/name/address of the agent

Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN

8327 Change in the person/name/address of the patent owner

Owner name: OC OERLIKON BALZERS AG, BALZERS, LI

8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: BOCKHORNI & KOLLEGEN, 80687 MUENCHEN

8327 Change in the person/name/address of the patent owner

Owner name: OERLIKON TRADING AG, TRUEBBACH, TRUEBBACH, CH

8328 Change in the person/name/address of the agent

Representative=s name: DERZEIT KEIN VERTRETER BESTELLT