KR100363055B1 - Continuous heat treatment system - Google Patents

Abstract

First and second heat treatment chambers 2 and 3 extending in the vertical direction are provided in parallel in the first furnace 1 with the partition walls 4 interposed therebetween, 18 in the second heat treatment chamber 3, and a lower transfer conveying device 19 in the second heat treatment chamber 3. The upper transmission transport device 18 and the lower transport transport device 19 are constituted by a movable rack 22 and a fixed rack 23 which are provided so as to face each other in the front and rear of each of the heat treatment chambers 2 and 3. A movable rack main body 24 which is movable in the up-and-down direction and the front-rear direction; a plurality of movable rack main bodies 24 which are provided in the movable rack main body 24 at intervals in the vertical direction, And a plurality of fingers 27 each having a long length in the direction indicated by the arrow. A plurality of fixed fingers 33 are provided in the fixed rack body 29 and the fixed rack body 29 at intervals in the up and down direction and spaced apart in the left and right direction, And a to-be-processed support fork 34 made of a material to be processed. The respective fingers 27 of the to-be-processed object supporting fork 28 of the movable rack 22 and the respective fingers 33 of the to-be-processed supporting fork 34 of the fixed rack 23 are disposed at positions deviating laterally do.

Description

Continuous heat treatment system

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for continuously performing heat treatment on a plate-like object to be processed made of an electro-optical part such as a liquid crystal display or an optical device.

In this specification, the left and right sides of FIG. 1 are referred to as "left and right", the lower side of FIG. 2 is referred to as "former", and the opposite side thereof is referred to as "back".

In this type of continuous heat treatment apparatus, a first heat treatment chamber and a second heat treatment chamber extending in the up-and-down direction are provided side by side in the furnace with a partition wall therebetween, and an object to be treated is formed at the lower end of the first heat treatment chamber A communication port for communicating the two heat treatment chambers with each other is formed at the upper end of the partition wall, and the to-be-processed object transferred from the inlet of the object to be processed in the first heat treatment chamber is supplied one by one And a lower transfer conveying device for intermittently transferring the object to be processed transferred from the first heat treatment chamber through the communication hole in the second heat treatment chamber one by one and intermittently transferring the object to be processed downward And an upper conveying device for conveying the object to be processed to the upper end of the first heat treatment chamber at an upper end in the furnace, And the upper transmission unit and the lower unit are freely movable up and down and freely rotatable around the axis. A pair of rotary rods each of which is composed of a vertical type elevating and rotating rod and a vertical type rotary rod freely rotatable about an axial line are provided and each pair is provided on the front and rear sides of the respective heat treatment chambers, There is known a heat treatment apparatus in which a to-be-processed support fork supporting both front and rear ends of a material to be processed is fixed in the same direction around the periphery thereof (see Japanese Patent Publication No. 63-52307).

However, in the conventional apparatus, since the object to be processed is supported by both the front and rear ends of the object to be processed while the object is being transported by the upper and lower transporting apparatuses, As shown in Fig. For example, in the case of a glass substrate for a liquid crystal display, it is necessary to adhere two glass substrates in a state in which a clearance of a unit of micron is provided for injecting liquid crystal therebetween. When the glass substrate is warped, There is a problem in that it can not be maintained. Further, in the case of a large glass substrate, stress is applied due to such bending, so that fine cracks or minute gaps are generated. If such fine cracks or minute gaps are present, there is a problem that the glass substrate is broken by the temperature difference. In addition, if the size of the plate-like object to be processed is small so that both ends of the plate-like object can not be supported by the to-be-processed object supporting fork, a tray must be prepared. The tray is supported on a support fork Needs to be. In this case, since the tray must be heated, the heating efficiency is deteriorated, and the temperature between the contact surface with the tray and the non-contact surface becomes uneven.

It is an object of the present invention to provide a continuous heat treatment apparatus which solves the above problems.

In the first continuous heat treatment apparatus according to the present invention,

The furnace is provided with a heat treatment chamber extending upward and downward in the furnace. An opening is formed at both upper and lower ends of the heat treatment chamber. The plate-like substance to be processed transferred from one of the upper and lower openings is intermittently held in the vertical direction And a transporting device for transporting the other transporting device toward the other opening,

A movable rack body having a height ranging from an upper end opening to a lower end opening and being freely movable in the vertical direction forward and backward directions, And a plurality of fingers extending in the front-rear direction and spaced apart from each other in the left-right direction. The fixed rack has a height ranging from an upper end opening to a lower end opening And a plurality of fingers for supporting the object to be processed, the plurality of fingers being arranged in the longitudinal direction and spaced horizontally from the fixed rack body, The respective fingers of the support fork of the object to be processed in the rack, Each finger has a fork is arranged in a staggered position in the right and left direction.

In the second continuous heat treatment apparatus according to the present invention,

A first heat treatment chamber and a second heat treatment chamber extending in the vertical direction in the furnace are provided side by side through the partition wall, an inlet for the object to be processed is formed at the lower end of the first heat treatment chamber, And an upper portion of the partition wall is provided with a communication hole for communicating the two heat treatment chambers with each other. The upper portion of the partition wall is provided with a communication hole for communicating the two heat treatment chambers, There is provided a lower transporting apparatus in which a transporting apparatus is installed and intermittently transports a plate-like object to be processed transferred from a first heat treatment chamber through a communication hole in a second heat treatment chamber intermittently downward, Receiving a plate-shaped article to be transferred to an upper end portion of the first heat treatment chamber by the transfer conveying device and simultaneously performing a second heat treatment Transferred to and in the continuous heat treatment system with a transverse transfer carrier to pass to the lower transmission carrier is provided,

Wherein said upper and lower transporting apparatuses are constituted by a movable rack and a fixed rack provided so as to be opposed to each other in a front and rear direction in respective heat treatment chambers, said movable rack having a height from an inlet of the object to be processed to a communication port, And a plurality of fingers for supporting the object to be processed, the plurality of fingers being arranged in the longitudinal direction of the movable rack body and spaced apart from each other in the left-right direction A fixed rack main body having a height ranging from the entrance of the object to be processed to a communication port; a plurality of fixed rack main bodies provided in the fixed rack main body at intervals in the vertical direction and spaced apart in the left- Shaped workpiece support fork made up of four fingers, and the feature of the movable rack The fingers of the leg support fork and the fingers of the support object fork of the fixed rack are arranged at positions staggered in the left and right direction.

In the third continuous heat treatment apparatus according to the present invention,

In the first continuous heat treatment apparatus or the second continuous heat treatment apparatus, unlike the fixed rack of the first continuous heat treatment apparatus or the second continuous heat treatment apparatus described above, the fixed rack includes a stationary rack body and a stationary rack body And the movable rack is provided at a plurality of points in the left and right direction corresponding to the fingers of the to-be-processed object support fork of the movable rack on the to-be-processed support plate of the fixed rack, A plurality of grooves through which the fingers of the movable rack can pass are formed from the tip end of the workpiece support plate.

In the third continuous heat treatment apparatus, the object support plate may be provided with a heating means.

According to the first continuous heat treatment apparatus of the present invention, the plate-like object to be brought into the heat treatment chamber from the lower end opening is transported upward in the heat treatment chamber and is carried out through the upper opening as described later. At this time, the movable rack and the fixed rack of the conveying apparatus are located at the maximum spacing. Further, each of the for-treatment object forks of the movable rack and the to-be-processed object support forks of the fixed rack are staggered in the up-and-down direction, and the tip ends of the for- Respectively. Then, the plate-shaped object to be processed is placed on the for-treatment object support member at the lowermost end of the fixed rack of the conveying device by suitable conveying means. Then, the movable rack is moved toward the fixed rack, and the object to be supported fork enters the lower side of the object to be supported fork of the fixed rack. Then, the movable rack is raised until each for-treatment object supporting fork reaches the upper side of the to-be-processed support fork of the fixed rack immediately above, and the to-be-processed object is placed on the fork of the lowermost end of the movable rack. Subsequently, the movable racks are disposed at positions as far as possible with respect to the fixed rack. Then, the movable rack is lifted until each for-treatment object fork reaches the upper side of each for-treatment support fork of the fixed rack immediately above. Subsequently, the movable rack is approached to a position where it is as close as possible to the fixed rack. Subsequently, the movable rack is lowered until each to-be-processed supporting fork comes to the lower side of each of the for-treatment supporting fingers of the fixed rack immediately below, and the to-be- It rests on a fork. Subsequently, the movable rack is disposed at a position spaced apart as far as possible from the fixed rack, and then is lowered and returned to the initial state. By repeating this operation, the plate-like object is carried on the for-treatment object supporting fork at the uppermost end of the fixed rack of the conveyance device. Thereafter, the plate-shaped object to be processed is taken out to the outside of the heat treatment chamber through the upper opening by an appropriate carrying out means.

According to the first continuous heat treatment apparatus of the present invention, the plate-shaped object to be processed brought into the heat treatment chamber from the upper opening is transported downward in the heat treatment chamber and is carried out through the lower end opening as described later. At this time, the movable rack and the fixed rack of the conveying device are disposed with a maximum spacing. Further, the for-treatment object forks of the movable rack and the to-be-processed object support forks of the fixed rack are arranged at positions staggered in the vertical direction, and the ends of the for-processing object support forks are spaced apart from each other Respectively. Then, the plate-shaped object to be processed is placed on the for-processing object support fork at the uppermost end of the fixed rack of the conveyance device by suitable conveying means. Then, the movable rack of the conveying apparatus is raised, and the to-be-processed object supporting fork comes to the upper side of the to-be-processed supporting fork of the fixed rack. Then, the movable rack approaches the fixed rack, and the object to be supported fork enters the lower side of the object to be supported fork of the fixed rack. Subsequently, the movable rack is lifted until each for-treatment object supporting fork reaches the upper side of the to-be-processed support fork of the fixed rack immediately above, and the to-be-processed object is placed on the for-treatment object fork of the movable rack. Then, the movable racks are disposed at positions spaced apart from each other as much as possible with respect to the fixed rack. Subsequently, the movable rack is lowered until each to-be-processed supporting fork comes to the lower side of each of the for-treatment supporting fingers of the fixed rack immediately below. Then, the movable rack is approached to a position where it reaches the maximum position with respect to the fixed rack . Subsequently, the movable rack is lowered until each to-be-processed supporting fork comes to the lower side of each of the for-treatment supporting fingers of the fixed rack immediately below, and the to-be- Lt; / RTI > Then, the movable racks are arranged at positions as far as possible with respect to the fixed racks, and return to the initial state. By repeating this operation, the plate-like object is carried on the for-treatment object support member at the lowermost end of the fixed rack of the conveyance apparatus. Thereafter, the plate-like article to be processed is taken out to the outside of the heat treatment chamber through the lower end opening by an appropriate carrying-out means.

According to the second continuous heat treatment apparatus of the present invention, the plate-like object to be brought into the first heat treatment chamber through the inlet of the object to be processed is conveyed upward in the first heat treatment chamber as described later, And is carried out through the object to be treated. First, the plate-like object to be processed is placed on the for-treatment object at the lowermost end of the stationary rack of the upper transporting apparatus by suitable loading means. Thereafter, the plate-shaped object to be processed is conveyed to the object to be processed fork on the uppermost stage of the fixed rack of the upper transporting apparatus, similarly to carrying the plate-shaped object to be processed brought in at the lower end opening in the first continuous heat- Lt; / RTI >

Subsequently, the lateral transfer conveying device receives the plate-shaped object to be processed, and at the same time, transfers it to the second heat treatment chamber through the communication hole, and transfers it to the object to be supported fork at the uppermost end of the fixed rack of the lower transfer carrier. Thereafter, the plate-shaped object to be processed is conveyed to the object to be processed on the fork of the lowermost stage of the stationary rack of the lower transporting apparatus, similarly to carrying the plate-shaped article to be transported from the upper opening in the first continuous heat- Lt; / RTI > Thereafter, the plate-like object to be processed is carried out to the outside of the second heat treatment chamber through the outlet of the object to be processed by suitable carrying out means.

According to the first continuous heat treatment apparatus and the second continuous heat treatment apparatus of the present invention, since the fingers of the to-be-processed supporting fingers of the movable rack and the fingers of the to-be-processed supporting fingers of the fixed rack are arranged at positions staggered in the left- These fingers do not interfere with each other even when the movable rack is moved up and down with a maximum approach to the fixed rack.

According to the third continuous heat treatment apparatus of the present invention, the conveyance of the plate-like object to be processed is performed in the same manner as in the case of the first continuous heat treatment apparatus and the second continuous heat treatment apparatus. When the movable rack is moved up and down in a state of being as close as possible to the fixed rack at various points in the left and right direction corresponding to the fingers of the to-be-processed support fork of the movable rack in the fixed rack, Since the plurality of grooves through which the fingers of the rack are allowed to pass are formed from the front ends thereof, when the movable rack is moved up and down as close as possible to the fixed rack, each finger of the supporting object fork of the movable rack is moved So that the object to be supported in the movable rack and the object support plate in the fixed rack do not interfere with each other.

Further, in the third continuous heat treatment apparatus of the present invention, when the object support plate is provided with the heating means, only the object support plate during the transportation of the plate-like object to be processed as described above, And other appropriate heating means to perform the heat treatment.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 to FIG. 3 show the overall configuration of the continuous heat treatment apparatus of the present invention, and FIGS. 4 to 8 show the configuration of the main part thereof. Fig. 9 also shows the operation of the upper transmission carrier. 1 to 3, the continuous heat treatment apparatus is provided with a vertical furnace 1. A first heat treatment chamber 2 and a second heat treatment chamber 3 extending in the vertical direction are provided in the furnace 1 side by side along the partition wall 4. The object to be treated 5 is formed at the lower end of the first heat treatment chamber 2 on the right side and the material to be treated 6 is formed at the lower end of the second heat treatment chamber 3 on the left side, 4 are formed at the upper end thereof with a communication hole 7 for communicating the first heat treatment chamber 2 and the second heat treatment chamber 3 with each other. Then, the plate-like object S to be processed is brought into the first heat treatment chamber 2 one by one through the object to be treated 5 by means of a suitable loading device (not shown). The object to be processed S is carried out one by one from the second heat treatment chamber 3 through the to-be-processed water outlet 6 by a suitable unloading device (not shown).

The furnace 1 is provided with a large circulation passage 8 on the rear right side of the first heat treatment chamber 2. An air inlet 9 is formed in the right side wall of the first heat treatment chamber 2 and an atmospheric outlet 11 is formed in the rear wall. An atmospheric circulation path 12 is formed on the rear left side of the second heat treatment chamber 3. An atmosphere inlet (13) is formed in the left side wall of the second heat treatment chamber (3), and an atmospheric outlet (14) is formed in the rear wall. The heater 15 and the blower 16 are disposed in the respective circulation paths 8 and 12 so that the high temperature atmosphere heated by the heater 15 is supplied to the circulation paths 8 and 12 by the blower 16. [ To the first heat treatment chamber (2) and the second heat treatment chamber (3). A HEPA filter 17 for covering atmospheric inlets 9 and 13 is disposed in the first heat treatment chamber 2 and the second heat treatment chamber 3 so that atmospheric air passes through the first heat treatment chamber 2 and the second heat treatment chamber 3, Is cleaned by the HEPA filter (17) before being blown to the object (S) in the heat treatment chamber (3).

An upper transfer conveying device 18 is provided in the first heat treatment chamber 2 for intermittently transferring the object S transferred from the object to be treated 5 from the object to be processed 5 upwardly, (3), there is provided a lower transmission device (19) for intermittently transferring the object (S) transferred from the first heat treatment chamber (2) through the communication hole (7) one by one and intermittently transferring the object (S) downward. The upper end of the furnace 1 receives the object S to be transferred to the upper end of the first heat treatment chamber 2 by the upper transfer carrier 18 and the object to be processed is passed through the communication hole 7 And a transverse transmission equipment 21 for transferring to the second heat treatment room 3 and delivering it to the lower transmission equipment 19 are provided.

The upper transfer conveying device 18 is constituted by a movable rack 22 and a fixed rack 23 provided in the first heat treatment chamber 2 so as to be opposed to each other in the forward and backward directions. The movable rack 22 has a movable rack body 24 having a height from the object to be processed 5 to the communication port 7 and being movable up and down. The movable rack body 24 is provided with a pair of left and right leg portions 25. These leg portions 25 pass through the elongated hole 26 in the front and rear direction formed on the bottom wall of the furnace 1 respectively. A plurality of workpiece support forks 28, each of which is made up of a plurality of stainless steel pipe fingers 27 fixed to the movable rack body 24 at intervals in the lateral direction and extending rearward, are provided at intervals in the vertical direction . The fixed rack 23 has a fixed rack body 29 provided along the rear wall of the first heat treatment chamber 2 and having a height from the object to be processed 5 to the communication hole 7. The fixed rack main body 29 has a pair of left and right pillars 31. These pillars 31 extend downward through the bottom wall of the furnace 1 and have a lower end, And fixed to the base frame 32 fixed to the bottom surface of the base frame 32. [ A plurality of work piece supporting forks 34 made up of a plurality of longitudinally extending stainless steel pipe fingers 33 which are fixed to the fixed rack body 29 in the left and right direction with intervals therebetween are provided at intervals in the vertical direction .

As shown in FIG. 4, on the upper surfaces of all the fingers 27 and 33 constituting the to-be-processed support forks 28 and 34 of the movable rack 22 and the fixed rack 23, A plurality of protrusions 27a and 33a are formed. The front and rear lengths of the fingers 27 and 33 constituting the to-be-processed support forks 28 and 34 of the movable rack 22 and the fixed rack 23 are set to be the maximum It is preferable to be longer than the front-back direction width of the plate-like object S to be processed. The fingers 27 of the to-be-processed support fork 28 of the movable rack 22 and the fingers 33 of the to-be-processed support fork 34 of the fixed rack 23 are staggered in the left- (See FIG. 2).

The lower transmission transport device 19 has exactly the same structure as the upper transport transport device 18, and the same parts are denoted by the same reference numerals and the description thereof is omitted.

The transverse transmission and delivery device 21 is provided with a long movable bar 35 in the left and right direction which is freely movable in the lateral direction. The movable bar 35 is located on the upper side of the fixed rack body 29 of the fixed rack 23. Both ends of the moving bar 35 extend outside the furnace 1 through holes 36 formed in the right and left side walls of the furnace 1. A to-be-processed object holding member 38 is fixed to a portion of the movable bar 35 existing in the furnace 1 through a bracket 37 protruding downward. The object to be processed holding member 38 includes a rod member 39 extending in the left and right direction and a plurality of stainless steel pipe fingers 41 extending in the left and right direction and extending forward in the rod member 39, . Although not shown, a plurality of projections are formed on the upper surface of each finger 41 at intervals in the longitudinal direction. The object to be processed holding member 38 is located on the upper side of the for-treatment object 34 at the uppermost stage of the fixed rack 23, The distance between the water holding fork 34 and the water holding fork 34 is equal to the distance between the adjacent to-be-processed supporting forks 34 of the fixed rack 23. [ The number of the fingers 41 of the object to be processed holding member 38 is equal to the number of the fingers 33 of the to-be-processed object supporting fork 34 of the fixed rack 23, Is equal to the distance between adjacent fingers (33) of the workpiece support fork (34) of the fixed rack (23). The distal end of the finger 41 of the object to be processed holding member 38 is positioned on the same vertical plane as the tip of the finger 33 of the object to be supported 34 of the fixed rack 23.

The driving mechanism of the movable rack 22 of the upper transmission transport device 18 is provided outside the furnace 1 as described later.

As shown in FIGS. 5 and 6, a pair of vertical walls 42 fixed to the base frame 32 in the front-rear direction are provided fixedly at intervals in the left-right direction, and the vertical walls 42 And a horizontal support plate 43 for supporting the movable rack 22 is disposed on the upper side. A guide rail 44 extending in the vertical direction is fixed to both front and rear ends of the left and right outer surfaces of the both vertical walls 42, respectively. On the lower surface of the horizontal support plate 43, there are fixedly provided a pair of vertical walls 45 spaced apart from each other in the left-right direction and extending in the longitudinal direction of the both vertical walls 42, A slider 46 is fixed to the mutually facing surfaces of the both vertical walls 45, respectively, which slides in the vertical direction along the guide rails 44. Both ends of the horizontal rotation shaft 47 extending in the left-right direction are rotatably supported by the both vertical walls 42, respectively. One end of the rotary shaft 47 is connected to the drive shaft of the motor 48 through a speed reducer (not shown). Further, the cam 49 is fixed in the vicinity of the central portion in the longitudinal direction of the rotary shaft 47. A cam follower 51 that moves up and down by the rotation of the cam 49 is rotatably mounted on the lower surface of the horizontal support plate 43 through the bracket 52. [ The rotation shaft 47 is rotated by the motor 48 so that the cam 49 is rotated and the horizontal support plate 43 is moved up and down through the cam follower 51. [

Guide rails 53 extending in the front-rear direction are fixed to the left and right side edges of the upper surface of the horizontal support plate 43, respectively. Two brackets 54 protruding upward are fixed to the upper surface of the horizontal support plate 43 between the both guide rails 53 at intervals in the front and rear direction. (55) is rotatably supported. One end of the ball screw shaft 55 is connected to the drive shaft of the motor 56. The guide rails 53 are fixed to both front and rear ends of the left and right side edges of the connecting plate 57 in the front and rear directions And a slider 58 slidable in the direction of the arrow. A ball nut 59 is provided on the lower surface of the connecting plate 57 so that the ball passes through the ball screw shaft 55. The ball screw shaft 55 is rotated by the motor 56 to move the movable rack 22 in the forward and backward direction by the action of the ball screw shaft 55 and the ball nut 59. [

The driving mechanism of the movable rack 22 of the lower transmission transport device 19 is completely the same as the driving mechanism of the movable rack 22 of the upper transmission transport device 18. [

The driving mechanism of the transverse transmission and transport device 21 is installed outside the furnace as follows.

7 and 8, a support member 61 extending in the left-right direction is fixed to the upper surface of the top wall of the furnace 1. Both left and right end portions of the support member 61 protrude more than left and right end portions of the top wall of the furnace 1. Guide rails 62 extending in the left and right directions are fixed to both front and rear edges of the lower surface of the portion of the support member 61 which protrudes more than the top wall of the furnace 1 on both left and right sides. Two brackets 63 protruding downward in the left and right direction are provided on the lower surface of the portion of the support member 61 which protrudes more than the top wall of the right side furnace 1 and between the both guide rails 62, And a ball screw shaft 64 extending in the left-right direction is rotatably supported on these brackets 63. [0053] The right end of the ball screw shaft 64 is connected to the drive shaft of the motor 65. A slider 67 is fixed to both the front and rear sides of the left and right ends of the movable bar 35, respectively, through the bracket 66, and slides in the left-right direction along the guide rail 62. A ball nut 68 is provided on the upper surface of the right end of the moving bar 35 so that the ball passes through the ball screw shaft 64. The ball screw shaft 64 is rotated by the motor 65 so that the movement bar 35 is moved in the left and right direction by the action of the ball screw shaft 64 and the ball nut 68. [ In Fig. 7, the guide rail 62, the bracket 66 and the slider 67 on the right front side are omitted.

In this configuration, the plate-like object S conveyed into the first heat treatment chamber 2 through the object to be treated 5 by the appropriate carrying means (not shown) is introduced into the furnace 1 And is taken out from the second heat treatment chamber 3 through the object to be treated outlet 6 by an appropriate unloading means not shown.

FIG. 9 shows a state in which the movable rack 22 of the upper transmission transport apparatus 18 is disposed at the farthest position from the fixed rack 23. The movable rack 22 of the upper transfer conveyance device 18 is in the lowered position and the to-be-processed support fork 28 is positioned slightly lower than the to-be-processed support fork 34 of the fixed rack 23 have. At this time, a clearance is present between the tip of the to-be-processed supporting fork 28 of the movable rack 22 and the to-be-processed supporting fork 34 of the fixed rack 23 in a plan view. In this state, first, the plate-like object S is placed on the for-treatment object holding member 34 at the lowermost end of the stationary rack 23 via the object to be processed 5 by the carrying means (step A) See also Section 9a). The ball screw shaft 55 is rotated by the motor 56 and the movable rack 22 is moved backward by the action of the ball screw shaft 55 and the ball nut 59 to move the movable rack 22, So that the to-be-processed object supporting fork 28 reaches the fixed rack 23 directly below the to-be-processed supporting fork 34 of the fixed rack 23 (step B) (see also FIG. 9b) ). The rotary shaft 47 is rotated by the motor 48 so that the horizontal support plate 43 is raised by the action of the cam 49 and the cam follower 51 so that the to- The movable rack 22 is lifted until the movable rack 22 reaches the upper side of the to-be-processed support fork 34 of the fixed rack 23 of the movable rack 22, 28) (step C) (see also figure 9c). Subsequently, the ball screw shaft 55 is rotated by the motor 56, and the movable rack 22 is moved forward by the action of the ball screw shaft 55 and the ball nut 59, (Step D) (see also figure 9d). The rotary support shaft 47 is rotated by the motor 48 so that the horizontal support plate 43 is moved upward by the action of the cam 49 and the cam follower 51, The movable rack 22 is lifted up (step E) (see also Fig. 9e) until it comes to the upper side of the to-be-processed support fork 34 of the fixed rack 23 of the fixed rack 23. The rising distance of the movable rack 22 in the step E is slightly longer than the rising distance of the movable rack 22 in the step C. The ball screw shaft 55 is rotated by the motor 56 so that the movable rack 22 is moved backward by the action of the ball screw shaft 55 and the ball nut 59 to move the fixed rack 23 to the maximum extent (Step F) (see also Fig. 9 (f)) so that the for-processing support fork 28 is brought directly under the workpiece support fork 34 of the fixed rack 23. Subsequently, the rotary shaft 47 is rotated by the motor 48 so that the horizontal support plate 43 is lowered by the action of the cam 49 and the cam follower 51, The movable rack 22 is lowered until the movable rack 22 reaches the lower side of the to-be-processed support fork 34 of the lower fixed rack 23 and the plate- (Step G) (see also Fig. 9g). The descent distance of the movable rack 22 in the step G is a distance obtained by subtracting the rising distance of the movable rack 22 in the step C from the rising distance of the movable rack 22 in the step E. The ball screw shaft 55 is rotated by the motor 56 and the movable rack 22 is moved forward by the action of the ball screw shaft 55 and the ball nut 59 to move the movable rack 22, (Step H) (see also Fig. 9 (h)). Subsequently, the rotary shaft 47 is rotated by the motor 48, the horizontal supporting plate 43 is lowered by the action of the cam 49 and the cam follower 51, and the to-be- The movable rack 22 is lowered (Step 1) until it comes to the lower side of the to-be-processed support fork 34 of the lower fixed rack 23 (see also Fig. In this way, the movable rack 22 and the fixed rack 23 are returned to the state shown in FIG. 9A, and wait for the plate-like object S to be brought in afterward. By repeating this cycle of the operations from step A to step 1, the plate-like object S is intermittently moved upward in the first heat treatment chamber 2 by the upper transfer carrier 18 Lt; / RTI >

The downward conveyance of the plate-like object S in the second heat treatment chamber 3 by the lower transmission conveyor 19 is performed in the opposite manner to the operation from Step A to Step I described above, And repeating the cycle in which the steps from step I to step A are repeated.

The transfer of the plate-like object S from the upper transfer conveyance device 18 to the lateral transfer conveyance device 21 is carried out from the first heat treatment chamber 2 by the lateral transfer conveyance device 21 to the second heat treatment chamber 3 And the mutual transfer of the plate-like object S from the lateral transfer conveying device 21 to the lower transfer conveying device 19 is carried out as described later. The ball screw shaft 64 is rotated by the motor 65 when the movable rack 22 and the fixed rack 23 of the upper transmission transport apparatus 18 are in the state shown in Fig. 35 are moved to the left by the action of the ball screw shaft 64 and the ball nut 68 and the object to be processed holding member 38 is moved to the uppermost processing And stands at a position just above the water support fork 34. [ While the upper transporting apparatus 18 is performing the above-described one cycle of operation, the plate-shaped processing object (not shown) placed on the uppermost target object supporting fork 34 at the uppermost stage of the fixed rack 23 of the upper transporting apparatus 18 The water S is placed on the object to be treated 38. Subsequently, the ball screw shaft 64 is rotated by the motor 65 so that the moving bar 35 is moved to the right by the action of the ball screw shaft 64 and the ball nut 68, (38) comes to a position just above the uppermost target support fork (34) of the fixed rack (23) of the lower transmission transport device (19). While the lower transmission device 19 performs the above-described one cycle of operation, the plate-like object S placed on the to-be-processed object holding member 38 is guided to the fixed rack (not shown) of the lower transmission device 19 23 on the uppermost object to be supported fork 34.

As described above, the plate-shaped object S to be introduced into the first heat treatment chamber 2 through the object to be treated 5 is discharged from the object to be processed 6 of the second heat treatment chamber 3 The high temperature atmosphere heated by the heater 15 is circulated in the first heat treatment chamber 2 and the second heat treatment chamber 3 and the circulation paths 8 and 12 by the blower 16 while being blown out, The high-temperature atmosphere cleaned by the heater 17 is blown to the object to be treated S, so that the object to be treated S is subjected to a suitable heat treatment.

The movable rack 22 of the upper transmission transport device 18 and the lower transmission transport device 19 and the fingers 27 and 34 constituting the to-be-processed support forks 28 and 34 of the fixed rack 23, 33 and the fingers 41 of the object to be treated holding member 38 of the transverse transmission and delivery device 21 are made of stainless steel pipes, respectively, but these may be made of ceramics. In this case, metal contamination of the plate-like object to be processed, which may occur when the fingers (27, 33, 41) are made of metal, is prevented. In the above embodiment, the movable rack 22 of the upper transmission transport device 18 and the lower transmission transport device 19, and the fingers (not shown) of the to-be- The projections 27a and 33a are formed on the upper surfaces of the fingers 41 of the target object holding members 38 of the transverse transmission and transport devices 21 and 27 and 33, The contact area between the fingers 27, 33 and 41 becomes smaller and the amount of heat transferred between the fingers 27, 33 and 41 and the plate-like object S becomes smaller. Therefore, the temperature difference between the contact portion of the plate-like object S with the fingers 27, 33, 41 and the non-contact portion becomes extremely small, and the entire plate-like object S can be uniformly heated. However, it is not necessary to form the projections 27a, 33a on the upper surfaces of all the fingers 27, 33, 41 described above.

In the above embodiment, the inside of the stainless steel pipe constituting all the fingers 27, 33 and 41 may be formed as an atmospheric passage, and atmospheric air outlets may be formed at the ends of the projections of the fingers 27, 33 and 41. In this case, it is possible to support the plate-like object S in a noncontact state, and the plate-like object S is further uniformly heated.

FIG. 10 shows another embodiment of the present invention.

10, the fixed racks 23 of the upper transmission carrier device 18 and the lower transmission carrier device 19 are fixed to the stationary rack body 18 having the height from the object to be processed 5 to the communication hole 7, (Including an aluminum alloy system) supporting object plate 70 is provided in the upper portion 29 at intervals in the vertical direction. The movable rack 22 is fixed to the stationary rack 23 at a plurality of points in the left and right direction of the workpiece support plate 70 corresponding to the respective fingers 27 of the workpiece support fork 28 of the movable rack 22, A plurality of grooves 71 through which the respective fingers 27 of the movable rack 22 can pass are formed at the ends of the workpiece support plate when the workpiece is moved up and down in the state of being as close as possible to the workpiece support plate. A surface heater 72 (heating means) for heating the plate-like object S is mounted on the lower surface of the object to be processed support plate 70.

In the apparatus of the present embodiment, the plate-like object S conveyed into the first heat treatment chamber 2 through the object to be processed 5 by the appropriate carrying means (not shown) Lt; / RTI > The fingers 27 of the to-be-processed object supporting fingers 28 of the movable rack 22 move up and down on the to-be-processed support plate 70 when the movable rack 22 moves up and down as close as possible to the fixed rack 23 And passes through the respective grooves 71 formed.

The object to be processed S in the fixed rack 23 of the upper transmission conveyance device 18 and the lower transmission conveyance device 19 during the conveyance of the plate-like object S in the furnace 1 7C by the heat generated from the surface heater 72. As shown in FIG. Therefore, it is not necessary to form an atmospheric circulation path in the furnace 1 as in the case of the first embodiment, and a heater, a blower, and a HEPA filter become unnecessary. When the plate-like object S is heat-treated in another manner, another suitable heating means is required, and the above-mentioned heating means is unnecessary.

In addition, in the above-described another embodiment, the heat treatment of the plate-like object S is performed not only by the heating of the material support plate 70 but also by the heating by the material support plate 70, May be performed in combination with heating by the same method as that described above.

In the other embodiments, the heat treatment of the plate-like object S may be performed only in the same manner as in the first embodiment. In this case, the surface heater 72 is unnecessary.

In the two embodiments, the furnace is provided with a first heat treatment chamber and a second heat treatment chamber arranged in parallel in the furnace through a partition wall, an inlet for the object to be processed is formed at the lower end of the first heat treatment chamber, Shaped object to be processed transferred from the inlet of the object to be processed from the inlet of the object to be processed in the first heat treatment chamber is intermittently supplied to the upper end of the partition wall, And a lower transfer conveying device for intermittently transferring down the plate-shaped objects transferred from the first heat treatment chamber through the communication holes in the second heat treatment chamber A transverse transmission device is provided at an upper end portion of the furnace, and a plate-shaped substrate is transferred to the upper end of the first heat treatment chamber by the upper transmission device The heat treatment chamber is provided with a heat treatment chamber extending upward and downward in the furnace. The heat treatment chamber is connected to the lower heat transfer chamber through a communication hole, And a conveying device may be provided in which openings are formed in both upper and lower ends of the heat treatment chamber and intermittent vertical movement of the plate-shaped objects to be processed transferred from either one of the upper and lower openings in the heat treatment chamber is made toward the other opening .

According to the first to third continuous heat treatment apparatuses of the present invention, as described above, the to-be-processed object is supported by the to-be-processed support fork of the movable rack and the to-be- So that the plate-like object to be processed is prevented from bending during transportation.

According to these three continuous heat treatment apparatuses, even when the size of the plate-like object to be processed is small, the object to be processed can be placed on the object to be supported fork or the substrate to be processed. Therefore, there is no need to prepare the tray as in the conventional apparatus, and the problem of using the tray, that is, the heating efficiency is deteriorated, and the temperature between the contact surface with the tray and the non- It is possible to prevent the occurrence of problems.

Further, according to such three continuous heat treatment apparatuses, even when the movable rack is vertically moved in a state of being as close as possible to the fixed rack, the to-be-processed support forks of the movable rack and the to- Can be prevented.

Further, in the third continuous heat treatment apparatus of the present invention, when the object to be processed has the heating means, the object to be processed is heated by the object support plate of the fixed rack while being conveyed in the furnace. Therefore, the heat generated by the heating means can be used for the heat treatment of the plate-like object to be processed.

FIG. 1 is a vertical sectional view showing the entire structure of a continuous heat treatment apparatus according to the present invention, viewed from the front,

FIG. 2 is a horizontal sectional view showing the entire configuration of a continuous heat treatment apparatus according to the present invention,

FIG. 3 is a vertical sectional view from the right side showing the overall structure of the continuous heat treatment apparatus according to the present invention,

4 is a side view showing an enlarged view of a part of the movable rack and a part of the fixed rack,

FIG. 5 is a partially enlarged view of FIG. 1,

6 is a cross-sectional view taken along line VI-VI of FIG. 5,

FIG. 7 is a vertical cross-sectional view of the upper part of the structure of the upper part of the continuous heat treatment apparatus,

8 is an enlarged cross-sectional view taken along line VIII-VIII of FIG. 7,

FIG. 9 is a view showing in sequence the carrying operation by the upper transmission carrier,

10 is a plan view of a movable rack and a fixed rack showing another embodiment of the present invention.

Description of the Related Art

1: No

2: First heat treatment chamber

3: second heat treatment chamber

4: partition wall

5: Entrance of material to be treated

6: Outlet of material to be treated

7:

18: Upper transmission carrier

19: Lower transmission carrier

21: transverse transmission device

22: movable rack

23: Fixed rack

24: movable rack main body

27: finger

28: object to be processed supporting fork

29: Fixed rack body

33: finger

34: object to be processed supporting fork

S: plate-shaped material to be processed

Claims (5)

The object 1 to be processed is placed in a heat treatment chamber extending up and down in the furnace 1, and openings are formed in both upper and lower ends of the heat treatment chamber. The plate- And a carrier for intermittently moving the carrier in the vertical direction toward the other opening, The conveying device is constituted by a movable rack (22) and a fixed rack (23) which are installed so as to be opposed to each other in the front and rear in the heat treatment chamber, The movable rack 22 has a height ranging from the upper end opening to the lower end opening and is movable in the up-down direction and the back-and-forth direction. The movable rack main body 24 is provided with a plurality of vertically spaced- And a to-be-processed support fork 28 made up of a plurality of fingers 27 arranged at intervals and long in the anteroposterior direction, The fixed rack (23) has a fixed rack body (29) having a height from an upper opening to a lower opening, a plurality of fixed rack main bodies (29) spaced apart in the vertical direction and spaced horizontally And a to-be-processed support fork 34 composed of a plurality of long fingers 33, The respective fingers 27 of the to-be-processed object supporting fork 28 of the movable rack 22 and the respective fingers 33 of the to-be-processed supporting fork 34 of the fixed rack 23 are positioned at positions And the second heat exchanger is disposed in the second heat exchanger. A first heat treatment chamber 2 and a second heat treatment chamber 3 extending in the vertical direction are provided side by side in the furnace 1 through a partition wall and an object to be treated 5 is provided at the lower end of the first heat treatment chamber A material outlet 6 is formed at the lower end of the second heat treatment chamber and a communication hole 7 for communicating the first heat treatment chamber 2 and the second heat treatment chamber 3 with each other is formed at the upper end of the partition wall, There is provided an upper transfer conveying device 18 for intermittently transferring upward the plate-like objects S transferred from the object to be processed in the first heat treatment chamber one by one, Shaped object to be processed (S) transferred from the first heat treatment chamber via a sphere and intermittently transferring the object S in a downward direction, and a first transfer conveying device The plate-like object to be transferred to the upper end of the heat treatment chamber And a transverse transfer device (21) for transferring the heat to a second heat treatment chamber through a communication port and delivering the same to a lower transmission device, the continuous heat treatment device comprising: The upper transmission transport device 18 and the lower transport transport device 19 are constituted by a movable rack 22 and a fixed rack 23 which are respectively installed in the respective heat treatment chambers so as to face each other in the front- A movable rack body 24 having a height that allows the movable rack 22 to reach the communicating port 7 from the object to be processed 5 and movable in the up-and-down direction; And a plurality of fingers (27) disposed in the front and rear direction, the plurality of fingers (27) being arranged at intervals in the left and right directions, A fixed rack body (29) having a height at which the fixed rack (23) reaches the communication port (7) from the object to be processed (5); a plurality of fixed rack main bodies And a to-be-processed support fork 34 composed of a plurality of fingers 33 arranged in a spaced-apart relation and long in the anteroposterior direction, The respective fingers 27 of the to-be-processed object supporting fork 28 of the movable rack 22 and the respective fingers 33 of the to-be-processed object supporting fork 34 of the fixed rack 23 are staggered in the left- And the second heat exchanger is disposed in the second heat exchanger. The object to be processed (S) is transferred from the upper and lower openings in the heat treatment chamber one by one to the upper and lower ends of the heat treatment chamber And a carrier for intermittently moving the carrier in the vertical direction toward the other opening, The conveying device is constituted by a movable rack (22) and a fixed rack (23) which are installed so as to be opposed to each other in the front and rear in the heat treatment chamber, The movable rack 22 has a height ranging from the upper end opening to the lower end opening and is movable in the up-down direction and the back-and-forth direction. The movable rack main body 24 is provided with a plurality of vertically spaced- And a to-be-processed support fork 28 made up of a plurality of fingers 27 that are long in the anteroposterior direction and are spaced apart from each other. The fixed rack 23 is constituted by a stationary rack body 29 and an object support plate 70 provided on the stationary rack body at plural intervals in the vertical direction, In the left and right direction corresponding to the respective fingers 27 of the to-be-processed support fork 28 of the movable rack 22 on the to-be-processed support plate 70 of the fixed rack 23, the movable rack 22 Wherein a plurality of grooves (71) through which the fingers (27) of the movable rack (22) can pass when the movable rack (22) moves up and down in a state approaching the fixed rack Heat treatment apparatus. A first heat treatment chamber 2 and a second heat treatment chamber 3 extending in the vertical direction are provided side by side in the furnace 1 through a partition wall and an object to be treated 5 is provided at the lower end of the first heat treatment chamber A material outlet 6 is formed at the lower end of the second heat treatment chamber and a communication hole 7 for communicating the first heat treatment chamber and the second heat treatment chamber with each other is formed at the upper end of the partition wall, There is provided an upper transfer conveying device 18 for intermittently transferring upward the plate-like objects S transferred from the entrance of the object to be processed in the heat treatment chamber one by one, And a lower transfer conveying device 19 for intermittently transferring downward the plate-shaped objects to be processed transferred from the yarn to the upper end of the furnace, The treated water is taken And a transverse transmission device (21) for transmitting the heat to the second heat treatment chamber through a communication port and delivering the heat to a lower transmission device, the continuous heat treatment device comprising: The upper transmission transport device 18 and the lower transport transport device 19 are constituted by a movable rack 22 and a fixed rack 23 which are respectively installed in the respective heat treatment chambers so as to face each other in the front- A movable rack body 24 having a height that allows the movable rack 22 to reach the communicating port 7 from the object to be processed 5 and movable in the up-and-down direction; And a plurality of fingers 27 each having a plurality of fingers 27 that are long in the front-rear direction and are spaced apart from each other in the left-right direction. The fixed rack 23 is constituted by a stationary rack body 29 and an object support plate 70 provided on the stationary rack body at a plurality of intervals in the vertical direction, In the left and right direction corresponding to the respective fingers 27 of the fork 28 to be processed in the movable rack 22 on the to-be-processed support plate 70 of the fixed rack 23, A plurality of grooves 71 through which the fingers 27 of the movable rack 22 can pass when the movable rack 22 moves up and down with a maximum approach to the fixed rack 23 is formed from its tip Continuous heat treatment apparatus. The continuous heat treatment apparatus according to claim 3 or 4, wherein the object support plate (70) comprises a heating means (72).