JP3486761B2 - Continuous heat treatment equipment - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for continuously heat-treating a plate-like object to be processed which is composed of electronic / optical parts such as liquid crystal displays and optical devices.

In this specification, left and right of FIG. 1 are referred to as left and right, the lower side of FIG. 2 is referred to as the front, and the opposite side is referred to as the rear.

[0003]

2. Description of the Related Art As a continuous heat treatment apparatus of this type, first and second heat treatment chambers extending in the vertical direction are provided in a furnace in parallel with each other through a partition wall, and a lower end portion of the first heat treatment chamber is covered. The processed material inlet is formed, the processed material outlet is formed at the lower end of the second heat treatment chamber, and the communication opening is formed at the upper end of the partition wall for communicating the two heat treatment chambers with each other. An upper feed transfer device is provided for holding one by one the workpieces sent from the inlet of the workpiece and sending the workpieces upward intermittently, and the first heat treatment chamber through the communication port in the second heat treatment chamber. A lower feed transfer device that holds the objects to be processed sent in one by one and sends them downward downward intermittently is provided. At the upper end of the furnace, the upper feed transfer device reaches the upper end of the first heat treatment chamber. The second object is received through the communication port as well as receiving the object to be processed. Fed into the heat treatment chamber, and transverse feed conveyor device is provided to further pass under the feed conveying device,
Each of the upper feed transport device and the lower feed transport device is provided with a plurality of pairs of a vertically elevating and lowering rotating rod that is vertically movable and rotatable about an axis, and a vertical rotating rod that is freely rotatable about an axis. Are provided at the front and rear, left and right of each heat treatment chamber, and the workpiece supporting claws supporting the front and rear ends of the workpiece in the same direction are fixed around the lifting and lowering rotating rods and the rotating rods. Some are known (see Japanese Patent Publication No. 63-52307).

[0004]

However, in the conventional apparatus, the object to be processed is only supported at the front and rear ends thereof during the conveyance by the upper and lower conveying apparatuses. There is a problem that the front and rear intermediate portions of the processed product bend downward. For example, in the case of a glass substrate for a liquid crystal display, it is necessary to bond two glass substrates with a micron-order gap (cell gap) for injecting liquid crystal between them being present. If it is bent, there is a problem that the accuracy of the cell gap cannot be obtained. Further, in the case of a large-sized glass substrate, there is a problem that stress is applied due to the flexure to generate microcracks or cracks, and when the microcracks or cracks are present, the glass substrate is broken due to a temperature difference. Further, when the size of the plate-shaped object to be processed becomes small, it is necessary to prepare a tray, place the object to be processed on this tray, and support the tray with the supporting claws for conveyance. Then, the tray is also heated, and there is a problem that the heating efficiency is deteriorated and the temperatures of the contact surface and the non-contact surface of the object to be treated become uneven.

An object of the present invention is to provide a continuous heat treatment apparatus which solves the above problems.

[0006]

In a first continuous heat treatment apparatus according to the present invention, first and second heat treatment chambers extending in the vertical direction are provided in a furnace in parallel with each other through partition walls.
A treatment object inlet is formed at a lower end portion of the first heat treatment chamber, a treatment object outlet is formed at a lower end portion of the second heat treatment chamber, and a communication port for communicating both heat treatment chambers at an upper end portion of the partition wall. In the first heat treatment chamber, there is provided an upper feed transfer device that holds the plate-shaped objects to be processed fed from the object inlet one by one and intermittently moves them upward. A lower feed transfer device that holds the plate-like objects that have been sent from the first heat treatment chamber through the communication port inside the chamber one by one and intermittently feeds them downward is provided at the upper end of the furnace. The horizontal feed transfer device receives the plate-shaped object that has been sent to the upper end of the first heat treatment chamber by the upper feed transfer device, sends it to the second heat treatment chamber through the communication port, and further transfers it to the lower feed transfer device. In the continuous heat treatment equipment provided, the upper feed The apparatus and the lower feeding and conveying apparatus are composed of a movable rack and a fixed rack, which are provided in front of and behind each heat treatment chamber so as to face each other, and the movable rack has a height from an inlet to an object to be communicated and a vertical direction. And a movable rack body that is movable in the front-rear direction, and a plurality of forks that are provided in the movable rack body at intervals in the up-down direction and are long in the front-rear direction and are arranged at intervals in the left-right direction. The fixed rack is composed of a support fork group, and the fixed rack is provided with a fixed rack main body having a height from the workpiece inlet to the communication opening, and a plurality of fixed racks are vertically spaced from each other, and are horizontally spaced. And a workpiece supporting fork group composed of a plurality of forks long in the front-rear direction, which are arranged at a distance from each other. And click, in which each fork of the workpiece support fork group fixed rack is disposed at a position shifted in the lateral direction.

A second continuous heat treatment apparatus according to the present invention is
In the first continuous heat treatment apparatus, the fixed rack main body has a height from the workpiece inlet to the communication port, which is different from the fixed rack of the first continuous heat treatment apparatus described above. And a plurality of workpiece support plates provided in the vertical direction with a space provided in the vertical direction between the workpiece support plates of the fixed rack and the fork of the workpiece support fork group of the movable rack. A plurality of notches are formed from the tip of the movable rack so that the forks of the movable rack can pass through the movable rack in the vertical direction when the movable rack is closest to the fixed rack.

In the second continuous heat treatment apparatus, the object support plate may be provided with a heating means.

[0009]

According to the first continuous heat treatment apparatus of the present invention, the plate-like object to be carried into the first heat treatment chamber through the object inlet is conveyed upward in the first heat treatment chamber as follows. At the same time, it is conveyed downward in the second heat treatment chamber and is discharged through the object outlet. In advance, the movable rack and the fixed rack of the upper feed transport device are set to the most distant state.
Further, the workpiece supporting fork groups of the movable rack and the workpiece supporting fork groups of the fixed rack are vertically displaced from each other, and the tips of the workpiece supporting fork groups are flat. It is in a separated state when viewed from. Then, first, the plate-like object to be processed is placed on the lowest object-to-be-processed object supporting fork group of the fixed rack of the upper feeding and conveying device by an appropriate carrying-in means. Then, the movable rack is brought close to the fixed rack, and the processed object supporting fork group thereof enters below the processed object supporting fork group of the fixed rack. Then, the movable rack is raised until each of the workpiece supporting fork groups is above the workpiece supporting fork group of the fixed rack immediately above, and the workpiece is supported at the lowermost stage of the movable rack. It can be transferred to the fork group. Then, the movable rack is separated to the farthest position with respect to the fixed rack. The movable rack is then raised until its respective object support fork group is above each object support fork group of the fixed rack immediately above. The movable rack is then brought to the position closest to the fixed rack. Then, the movable rack is lowered until each of the workpiece supporting fork groups thereof is below each of the workpiece supporting fork groups of the fixed rack immediately below, and the workpiece is the second object from the bottom of the fixed rack. It is replaced on the processed product support fork group. Then, the movable rack is moved to the farthest position with respect to the fixed rack, then lowered, and returned to the initial state. By repeating such operations, the plate-shaped object is conveyed to the uppermost object-supporting fork group of the fixed rack of the upper feed conveying device.

Then, the lateral feed transfer device receives the plate-shaped object to be processed, sends it into the second heat treatment chamber through the communication port, and further receives it on the uppermost object-supporting fork group of the fixed rack of the lower feed transfer device. hand over. At this time, the movable rack and the fixed rack of the lower feeding / conveying device are set to the farthest state. Further, the workpiece supporting fork groups of the movable rack and the workpiece supporting fork groups of the fixed rack are vertically displaced from each other, and the tips of the workpiece supporting fork groups are flat. It is in a separated state when viewed from. Then, first, the movable rack of the lower feed / conveyance device is raised, and the processed object supporting fork group reaches above the processed object supporting fork group of the fixed rack. Then, the movable rack is brought close to the fixed rack, and the processed object supporting fork group thereof enters below the processed object supporting fork group of the fixed rack. Then, the movable rack is lifted until each of the workpiece supporting fork groups is above the workpiece supporting fork group of the fixed rack immediately above, and the workpiece is moved to the workpiece supporting fork group of the movable rack. Can be replaced. Then, the movable rack is separated to the farthest position with respect to the fixed rack. The movable rack is then lowered until each of the workpiece support fork groups thereof is below the workpiece support fork group of the fixed rack immediately below. The movable rack is then brought to the position closest to the fixed rack. Then, the movable rack is lowered until each of the workpiece support fork groups is below the workpiece support fork group of the fixed rack immediately below, and the workpiece is the second rack from the top of the fixed rack. It is replaced on the processed product support fork group. Then, the movable rack is separated to the farthest position with respect to the fixed rack, and returns to the initial state. By repeating such an operation, the plate-shaped object to be processed is conveyed to the uppermost object-supporting fork group in the fixed rack of the lower feeding and conveying device. After that, the plate-shaped object to be processed is carried out of the second heat treatment chamber through the object to be processed outlet by an appropriate carrying-out means.

Then, the forks of the workpiece supporting fork group of the movable racks of the upper feed transporting apparatus and the lower feed transporting apparatus and the forks of the workpiece supporting fork group of the fixed rack are arranged at positions displaced in the left-right direction. Therefore, even when the movable rack moves up and down in the state of being closest to the fixed rack, these forks do not interfere with each other.

According to the second continuous heat treatment apparatus of the present invention, the plate-like object carried into the first heat treatment chamber through the object inlet is treated in the same manner as in the case of the first continuous heat treatment apparatus. It is conveyed upward in the first heat treatment chamber and downward in the second heat treatment chamber, and is conveyed out through the object outlet. When the movable rack moves up and down at a plurality of positions in the horizontal direction corresponding to the forks of the workpiece support fork group of the movable rack on the workpiece support plate of the fixed rack, with the movable rack closest to the fixed rack. Since a plurality of notches through which the fork of the movable rack can pass are formed from its tip, when the movable rack moves up and down in the state of being closest to the fixed rack, the object to be processed of the movable rack is Each fork of the support fork group passes through each notch of the workpiece support plate of the fixed rack, and as a result, the workpiece support fork group of the movable rack and the workpiece support plate of the fixed rack do not interfere with each other. .

Further, in the second continuous heat treatment apparatus of the present invention, when the object support plate is provided with the heating means, while the plate object is transferred as described above, the upper feed transfer is carried out. The heat treatment is performed by heating only by the object support plate of the apparatus and the lower feed conveying device, or by heating by the object support plate and other appropriate heating means.

[0014]

Embodiments of the present invention will be described below with reference to the drawings.

1 to 3 show the overall construction of the continuous heat treatment apparatus of the present invention, and FIGS. 4 to 8 show the construction of the essential parts thereof.
Further, FIG. 9 shows the operation of the upper feed transport device.

1 to 3, the continuous heat treatment apparatus comprises a vertical furnace (1). In the furnace (1), first and second heat treatment chambers (2) and (3) extending in the vertical direction are provided in parallel via a partition wall (4). An object inlet (5) is formed at the lower end of the first heat treatment chamber (2) on the right side, and an object outlet (6) is formed at the lower end of the second heat treatment chamber (3) on the left side. A communication port (7) is formed at the upper end of the partition wall (4) to connect the heat treatment chambers (2) and (3) to each other. Then, a plate-like object to be processed (S) is carried into the first heat treatment chamber (2) one by one through the object to be processed inlet (5) by an appropriate carrying-in device (not shown). . In addition, the object to be processed is passed through the object outlet (6) by an appropriate carry-out device (not shown).
(S) is carried out one by one from the second heat treatment chamber (3).

An atmosphere circulation path (8) is formed in the furnace (1) from the rear side to the right side of the first heat treatment chamber (2). An atmosphere inlet (9) is formed on the right side wall of the first heat treatment chamber (2), and an atmosphere outlet (11) is formed on the rear wall thereof. Further, an atmosphere circulation path (12) is formed from the rear side to the left side of the second heat treatment chamber (3). An atmosphere inlet (13) is formed on the left side wall of the second heat treatment chamber (3), and an atmosphere outlet (14) is formed on the rear wall thereof. The heater (15) is installed inside each circulation path (8) (12).
And the blower (16) are arranged, and the high-temperature atmosphere heated by the heater (15) is blown by the blower (16) to each circulation path (8) (12).
After that, the heat treatment chambers (2) and (3) are circulated. In addition, the atmosphere inlet (9) in each heat treatment room (2) (3)
A HEPA filter (17) is arranged so as to cover (13). Then, before the high temperature atmosphere is blown onto the object (S) to be processed in each heat treatment chamber (2) (3), the HEPA filter (1
It is designed to be cleaned by 7).

Inside the first heat treatment chamber (2), the object inlet (5)
An upper feed transfer device (18) that holds the processed objects (S) sent from each one by one and sends them upward intermittently is provided, and a communication port (7) is provided in the second heat treatment chamber (3). Through the first heat treatment room
There is a lower-feeding conveyor device (19) that holds the workpieces (S) sent from (2) one by one and feeds them downward downward intermittently, and feeds them to the upper end of the furnace (1). The object to be processed (S) sent to the upper end of the first heat treatment chamber (2) by the transfer device (18)
The second heat treatment chamber through the communication port (7)
A lateral feed transport device (21) for feeding to (3) and delivering to the lower feed transport device (19) is provided.

The upper feed transfer device (18) is provided in the first heat treatment chamber (2).
It is composed of a movable rack (22) and a fixed rack (23) which are provided to face each other in the front and rear. Mobile Rack (22)
Is provided with a movable rack body (24) having a height from the object inlet (5) to the communication port (7) and movable in the up-down direction and the front-rear direction. Movable rack body (24) is left and right 1
It has a pair of legs (25), each of which (25) is a furnace
It is passed through an elongated hole (26) formed in the bottom wall of (1) in the front-rear direction. An object support fork group (28) consisting of a plurality of stainless steel pipe forks (27) fixed to the movable rack body (24) at a distance in the left-right direction and extending rearward is provided at an interval in the vertical direction. There are multiple. Fixed rack
(23) is provided along the rear wall of the first heat treatment chamber (2) and has a fixed rack body (29) having a height from the object inlet (5) to the communication port (7). . Fixed rack body (29)
Has a pair of columns (31) on the left and right, and these columns (3
1) penetrates the bottom wall of the furnace (1) and extends downward, the lower end of which
It is fixed to the base frame (32) fixed to the floor surface of the room where (1) is installed. An object support fork group (3) made up of a plurality of fork (33) made of stainless steel pipe and fixed in the fixed rack body (29) at intervals in the left-right direction and long in the front-rear direction.
A plurality of 4) are provided at intervals in the vertical direction.

As shown in FIG. 4, the movable rack (22) and the fixed rack (23) are provided on the upper surfaces of all the forks (27) (33) constituting the workpiece supporting fork groups (28) (34). Has a plurality of protrusions (27a) (33a) formed at intervals in the front-rear direction. The forks (2) forming the workpiece supporting fork groups (28) (34) of the movable rack (22) and the fixed rack (23)
7) The length in the front-rear direction of (33) is the maximum plate-like object to be heat-treated by this continuous heat-treatment device.
It is better to make it longer than the width of (S) in the front-rear direction. Further, the forks (27) of the workpiece supporting fork group (28) of the movable rack (22) and the forks (33) of the workpiece supporting fork group (34) of the fixed rack (23) are arranged in the left-right direction. It is arranged at a position deviated from (see FIG. 2).

The lower feed transport device (19) is an upper feed transport device (1
The configuration is exactly the same as that of 8), and the same portions are denoted by the same reference numerals and description thereof is omitted.

The lateral transporting device (21) is provided with a moving bar (35) which is long in the left-right direction and movable in the left-right direction. The transfer bar (35) is the fixed rack body of the fixed rack (23).
It is located above (29). Both ends of the moving bar (35)
The furnace (1) passes through the holes (36) formed in the left and right side walls of the furnace (1).
It extends outside. An object holding member (38) is fixed to a portion of the moving bar (35) existing in the furnace (1) through a bracket (37) protruding downward. Workpiece holding member (38)
Comprises a rod-shaped member (39) extending in the left-right direction and a plurality of stainless steel pipe forks (41) provided in the rod-shaped member (39) at intervals in the left-right direction and extending forward. Although illustration is omitted, a plurality of protrusions are formed on the upper surface of each fork (41) at intervals in the length direction. Workpiece holding member (3
8) is the uppermost object supporting fork group of the fixed rack (23)
It is located above the (34), and the distance between the workpiece holding member (38) and the uppermost workpiece supporting fork group (34) of the fixed rack (23) is adjacent to the fixed rack (23). It is equal to the space between the matching object support fork groups (34). The number of forks (41) of the workpiece holding member (38) is the same as the number of forks (33) of the workpiece supporting fork group (34) of the fixed rack (23), and adjacent forks (41). The interval between them is equal to the interval between the adjacent forks (33) of the workpiece supporting fork group (34) of the fixed rack (23). Further, the tip of the fork (41) of the workpiece holding member (38) is fixed to the fixed rack (2
The fork (33) of the workpiece supporting fork group (34) of 3) is on the same vertical plane as the tip of the fork (33).

The drive mechanism for the movable rack (22) of the upper feed transfer device (18) is provided outside the furnace (1) as follows.

As shown in FIGS. 5 and 6, a pair of rising walls (42) long in the front-rear direction are fixedly provided on the base frame (32) at intervals in the left-right direction. 42)
A horizontal support plate (43) for supporting the movable rack (22) is disposed above the. Guide rails (44) extending in the vertical direction are fixed to the front and rear ends of the outer surface in the left-right direction of both rising walls (42). A pair of hanging walls (45), which are long in the front-rear direction, are arranged on the lower surface of the horizontal support plate (43) in the left-right direction and are positioned outside the rising walls (42) in the left-right direction.
Are fixedly provided, and sliders (46) that slide in the up-down direction along the guide rails (44) are fixed to the surfaces of the hanging walls (45) that face each other. Both ends of the horizontal rotary shaft (47) extending in the left-right direction are both raised walls (4
It is rotatably supported by 2). One end of the rotary shaft (47) is connected to the drive shaft of the motor (48) via a speed reducer (not shown). Further, a cam (49) is fixed around the center of the length of the rotating shaft (47). Cam on the underside of the horizontal support plate (43).
A cam follower (51) that moves up and down by the rotation of (49) is rotatably attached via a bracket (52). Then, the rotating shaft (47) is rotated by the motor (48) to rotate the cam (49), which causes the cam follower (5) to rotate.
The horizontal support plate (43) is moved up and down via 1).

Guide rails (53) extending in the front-rear direction are fixed to the left and right edges of the upper surface of the horizontal support plate (43). Between both guide rails (53),
Two brackets (54) projecting upward are fixed to the upper surface of the horizontal support plate (43) at intervals in the front-rear direction, and a ball screw shaft (5) extending in the front-rear direction is attached to these brackets (54).
5) is rotatably supported. One end of the ball screw shaft (55) is connected to the drive shaft of the motor (56). The connecting plate (57) is stopped between the lower end surfaces of the legs (25) of the movable rack body (24), and the front and rear ends of the left and right edges of the connecting plate (57) are
A slider (58) that slides in the front-rear direction on the guide rail (53) is fixed. Further, a ball nut (59) fitted to the ball screw shaft (55) via a ball is provided on the lower surface of the connecting plate (57). When the ball screw shaft (55) is rotated by the motor (56), the movable rack (22) is moved in the front-rear direction by the action of the ball screw shaft (55) and the ball nut (59). .

The drive mechanism of the movable rack (22) of the lower feed transport device (19) has the same structure as the drive mechanism of the movable rack (22) of the upper feed transport device (18).

The drive mechanism of the lateral feed conveying device (21) is provided outside the furnace as follows.

As shown in FIGS. 7 and 8, a support member (61) extending in the left-right direction is fixed to the upper surface of the top wall of the furnace (1). The left and right ends of the support member (61) project beyond the left and right ends of the top wall of the furnace (1). Guide rails (62) extending in the left-right direction are fixed to both front and rear edges of a lower surface of a portion of the support member (61) projecting to the left and right sides from the top wall of the furnace (1). In addition, both guide rails (62) on the lower surface of the portion of the support member (61) protruding to the right of the top wall of the furnace (1)
Two brackets (63) projecting downward at a distance in the left-right direction are fixed in the space between them, and a ball screw shaft (64) extending in the left-right direction is rotatably supported by these brackets (63). ing. The right end of the ball screw shaft (64) is
It is connected to the drive shaft of 5). Sliders (67) that slide left and right along the guide rails (62) via brackets (66) on both the left and right ends of the moving bar (35).
Is fixed. Further, a ball nut (68) fitted to the ball screw shaft (64) via a ball is provided on the upper surface of the right end portion of the moving bar (35). Then, by rotating the ball screw shaft (64) with the motor (65), the movement bar is moved by the action of the ball screw shaft (64) and the ball nut (68).
(35) is designed to move left and right. In FIG. 7, the right front guide rail (62), bracket (66) and slider (67) are omitted.

In such a structure, the plate-like object (S) carried into the first heat treatment chamber (2) through the object inlet (5) by an appropriate carrying-in means (not shown) is as follows. And then heat-treated in the furnace (1), and from the second heat-treatment chamber (3) by means of an appropriate carry-out means (not shown)
It will be carried out through (6).

As shown in FIG. 9, the movable rack (22) of the upper feed transfer device (18) is at the farthest position from the fixed rack (23). Further, the movable rack (22) of the upper feed transfer device (18) is in the lowered position, and the workpiece support fork group (28) thereof is
The fixed rack (23) is located slightly below the workpiece support fork group (34). At this time, there is a gap between the tip of the workpiece supporting fork group (28) of the movable rack (22) and the workpiece supporting fork group (34) of the fixed rack (23) when seen from a plane. There is. In this state, first, the plate-shaped object to be processed (S)
Is carried by the carrying-in means through the workpiece inlet (5) and onto the workpiece supporting fork group (34) at the lowest stage of the fixed rack (23) (step A) (see FIG. 9 (a)). Then,
The motor (56) rotates the ball screw shaft (55), and the ball screw shaft (55) and ball nut (59) work to move the movable rack.
(22) to the rear and move the movable rack (22) to the fixed rack (2
3) The processing object supporting fork group (28) is brought closest to the processing object supporting fork group (34) of the fixed rack (23) (step B) (see FIG. 9 (b)). . Then, the rotary shaft (47) is rotated by the motor (48), and the horizontal support plate (43) is lifted by the action of the cam (49) and the cam follower (51), so that the movable rack (22) is processed. The object supporting fork group (28) is lifted up to above the object supporting fork group (34) of the fixed rack (23) immediately above, and the plate-shaped object (S) is covered by the movable rack (22). Processed object support fork group (28)
Replace on top (step C) (see FIG. 9 (c)). Then, by rotating the ball screw shaft (55) with the motor (56), the movable rack (22) is moved forward by the action of the ball screw shaft (55) and the ball nut (59), and the movable rack is moved.
(22) is most separated from the fixed rack (23) (step D) (see FIG. 9 (d)). Then, the rotary shaft (47) is rotated by the motor (48), and the horizontal support plate (43) is lifted by the action of the cam (49) and the cam follower (51), so that the movable rack (22) is processed. The object supporting fork group (28) is raised until it comes above the object supporting fork group (34) of the fixed rack (23) immediately above (step E) (see FIG. 9 (e)). The rising distance of the movable rack (22) in step E is set to be slightly larger than the rising distance of the movable rack (22) in step C. Then, by rotating the ball screw shaft (55) with the motor (56), the ball screw shaft
The movable rack (22) is moved rearward by the action of (55) and the ball nut (59) to bring the movable rack (22) closest to the fixed rack (23) so that the workpiece support fork group (28) is moved. The fixed rack (23) is brought right below the workpiece supporting fork group (34) (step F) (see FIG. 9 (f)). Then, the motor (4
The rotary shaft (47) is rotated by 8) and the horizontal support plate (43) is lowered by the action of the cam (49) and the cam follower (51), so that the movable rack (22) is supported by the workpiece supporting fork group. (28) is lowered until it comes below the workpiece supporting fork group (34) of the fixed rack (23) immediately below, and the plate-shaped workpiece (S)
Is transferred to the second to-be-processed object supporting fork group (34) from the bottom of the fixed rack (23) (step G) (see FIG. 9 (g)). The descending distance of the movable rack (22) in step G is the same as the ascending distance of the movable rack (22) in step E.
It is equal to the distance obtained by subtracting the rising distance of the movable rack (22) in. The motor (56) then drives the ball screw shaft (55).
By rotating, the movable rack (22) is moved forward by the action of the ball screw shaft (55) and the ball nut (59), and the movable rack (22) is separated most from the fixed rack (23) (step H ) (See FIG. 9 (h)). Then, the motor (4
The rotary shaft (47) is rotated by 8) and the horizontal support plate (43) is lowered by the action of the cam (49) and the cam follower (51), so that the movable rack (22) is supported by the workpiece supporting fork group. Lower (28) until it is below the workpiece support fork group (34) of the fixed rack (23) immediately below (step I).
(See FIG. 9 (i)). In this way, the movable rack (22) and the fixed rack (23) return to the state shown in FIG. 9 (a), and wait for the next plate-like object (S) to be loaded. The operation from step A to step I is set as one cycle, and by repeating this cycle, the plate-shaped object to be processed (S) is moved upward in the first heat treatment chamber (2) by the upper feed transfer device (18). It is transported intermittently.

A plate-like object to be processed by the lower feed conveying device (19)
To convey (S) downward in the second heat treatment chamber (3), the operations of steps A to I described above are carried out in the reverse manner.
In addition, it is performed by repeating the cycle of performing steps I → A in this order.

From the upper feed transport device (18) to the lateral feed transport device (2
Handing over the plate-like object (S) to 1)
Transfer of the plate-like object (S) from the first heat treatment chamber (2) to the second heat treatment chamber (3) according to 1), and the plate from the lateral feed transport device (21) to the lower feed transport device (19) Delivery of the object to be processed (S) is performed as follows. When the movable rack (22) and the fixed rack (23) of the upper feed transport device (18) are in the state shown in Fig. 9 (a), the motor (65) rotates the ball screw shaft (64) to move the moving bar. (35) is moved to the left by the action of the ball screw shaft (64) and the ball nut (68), and the workpiece holding member (38) moves to the fixed rack (2) of the upper feed transfer device (18).
It stands by at a position just above the uppermost workpiece support fork group (34) in 3). And the upper feed transport device
While the (18) performs the above-described 1-cycle operation, the plate-shaped cover placed on the uppermost workpiece support fork group (34) of the fixed rack (23) of the upper feed transfer device (18). Treated (S)
Are transferred onto the object holding member (38). Then, the motor (65) rotates the ball screw shaft (64), and the action of the ball screw shaft (64) and the ball nut (68) moves the moving bar (35) to the right, thereby holding the workpiece holding member. (38) is brought to a position right above the uppermost object-supporting fork group (34) in the fixed rack (23) of the lower feeding / conveying device (19). Then, while the lower feed conveying device (19) performs the above-described operation of one cycle, the plate-shaped object to be treated (S) placed on the object holding member (38) is moved to the lower feed conveying device ( The fixed rack (23) of (19) is transferred to the uppermost workpiece support fork group (34).

As described above, the plate-shaped object to be processed which has been carried into the first heat treatment chamber (2) through the object to be processed inlet (5)
While (S) is carried out from the object outlet (6) of the second heat treatment chamber (3), the high temperature atmosphere heated by the heater (15) blows the blower.
The high temperature atmosphere circulated in the heat treatment chambers (2) and (3) and the circulation paths (8) and (12) by the (16) and cleaned by the HEPA filter (17) is sprayed on the object (S) to be treated. Thus, the object to be processed (S) is subjected to an appropriate heat treatment.

In the above embodiment, the upper feed transport device (1
8), movable racks (22) of the lower feed transport device (19), and forks (27) (33) that form the workpiece support fork groups (28) (34) of the fixed rack (23), and lateral feed transport The forks (41) of the workpiece holding member (38) of the device (21) are each made of stainless steel pipe, but they may be made of ceramics. In this case, metal contamination of the plate-shaped object to be processed which may occur when the forks (27) (33) (41) are made of metal is prevented. Further, in the above embodiment, the movable rack (22) of the upper feed transport device (18) and the lower feed transport device (19).
And fixed rack (23) workpiece support fork group (28) (3
Protrusions (27a) and (33a) are formed on the upper surfaces of the forks (27) and (33) that form part (4), and the fork (41) of the workpiece holding member (38) of the lateral transport device (21). Therefore, the contact area between the plate-shaped object to be processed (S) and the forks (27), (33) and (41) becomes smaller, and the forks (27), (33) and (41) and the plate-shaped object to be processed (S) become smaller. The amount of heat transfer between them decreases. Therefore, the plate-shaped object
The temperature difference between the contact portion and the non-contact portion of the forks (27), (33) and (41) in (S) becomes extremely small, and the entire plate-shaped object (S) can be heated uniformly. However, all the forks (27) (33) (41) mentioned above have protrusions (27a) on the top surface.
It is not necessary to form (33a).

In the above embodiment, all forks (2
The inside of the stainless steel pipes 7), (33) and (41) may be used as an atmosphere passage, and the atmosphere outlet may be formed at the tip of the projection of the forks (27) (33) (41). In this case, it becomes possible to support the plate-like object (S) in a non-contact state,
The plate-shaped object to be treated (S) is heated more uniformly.

FIG. 10 shows another embodiment of the present invention.

In FIG. 10, the fixed racks (23) of the upper feed transport device (18) and the lower feed transport device (19) are fixed at a height from the workpiece inlet (5) to the communication port (7). The rack main body (29) is provided with a plurality of workpiece support plates (70) made of aluminum (including aluminum alloy) at intervals in the vertical direction. Object support plate
Workpiece supporting fork group of movable rack (22) in (70)
When the movable rack (22) moves vertically at a plurality of positions in the left-right direction corresponding to the forks (27) of (28), the movable rack (22) moves to the vertical direction with the movable rack (22) closest to the fixed rack (23). A plurality of notches (71) through which the fork (27) can pass are formed from its tip. Further, a surface heater (72) (heating means) for heating the plate-shaped object (S) is attached to the lower surface of the object-supporting plate (70).

In the apparatus of this embodiment, by means of an appropriate carrying-in means (not shown), the first object is introduced through the workpiece inlet (5).
The plate-shaped object (S) carried into the heat treatment chamber (2) is
The object to be processed is conveyed in the furnace in the same manner as in the above-mentioned embodiment. When the movable rack (22) moves up and down in the state of being closest to the fixed rack (23), each fork (27) of the workpiece support fork group (28) of the movable rack (22) is Workpiece support plate
It passes through each notch (71) formed in (70).

In the other embodiment, the plate-shaped object to be treated
While the (S) is being transferred in the furnace (1), the upper feed transfer device (18)
Further, the heat treatment is performed by being heated by the heat generated by the surface heater (72) through the workpiece support plate (70) of the fixed rack (23) of the lower feed / transport device (19). Therefore, it is not necessary to form the atmosphere circulation path in the furnace (1) as in the case of the first embodiment, and the heater, the blower and the HE are installed.
The PA filter becomes unnecessary. Further, when heat-treating the plate-shaped object (S) by another method, other appropriate heating means is required, but such heating means is also unnecessary.

In the other embodiment, the heat treatment of the plate-shaped object to be treated (S) is performed not only by the object supporting plate (70) but also by the object supporting plate (70). Alternatively, the heating may be performed in combination with the heating by the same method as in the first embodiment.

Furthermore, in the other embodiment, the heat treatment of the plate-like object (S) may be carried out only by the same method as in the case of the first embodiment. In this case, the surface heater (72) is unnecessary.

[0042]

As described above, according to the first and second continuous heat treatment apparatuses of the present invention, the workpiece supporting fork groups of the movable racks of the upper feed transport apparatus and the lower feed transport apparatus,
In addition, since the plate-shaped object is carried in the furnace by being supported by the to-be-processed object supporting fork group of the fixed rack or the object supporting plate, the plate-shaped object is conveyed during the transfer by the upper feed transfer device and the lower feed transfer device. Deflection of the processed material is prevented.

Further, according to the two continuous heat treatment devices, even when the size of the plate-shaped object to be processed becomes small, it is possible to place the object on the object supporting fork group or the object supporting plate. Therefore, it is not necessary to prepare a tray unlike the conventional device, and the problem when using the tray,
That is, it is possible to prevent the problem that the heating efficiency deteriorates and the temperature of the contact surface of the object to be contacted with the tray and the non-contact surface of the object become non-uniform.

Further, according to the two continuous heat treatment devices,
Even when the movable racks of the upper feed transport device and the lower feed transport device move up and down in the state of being closest to the fixed rack, the workpiece support fork group of the movable rack and the workpiece support fork group of the fixed rack Alternatively, it is possible to prevent the interference with the object support plate.

Further, in the second continuous heat treatment apparatus of the present invention, when the object support plate is provided with a heating means, the upper feed transfer device and the upper feed transfer device are provided while the plate object is transferred in the furnace. It is heated by the workpiece support plate of the fixed rack of the lower feed transport device. Therefore, for the heat treatment of the plate-shaped object,
The heat generated by the heating means can be used.

[Brief description of drawings]

FIG. 1 is a vertical cross-sectional view showing the overall configuration of a continuous heat treatment apparatus according to the present invention as viewed from the front.

FIG. 2 is a horizontal sectional view of the same.

FIG. 3 is a vertical sectional view as seen from the right side.

FIG. 4 is an enlarged side view showing a part of a movable rack and a part of a fixed rack.

5 is a partially enlarged view of FIG.

6 is a sectional view taken along line VI-VI of FIG.

FIG. 7 is a partial vertical cross-sectional view of the upper part of the continuous heat treatment apparatus with a part omitted, as seen from the front.

8 is an enlarged cross-sectional view taken along the line VIII-VIII of FIG.

FIG. 9 is a diagram sequentially showing a carrying operation by the upper feed carrying device.

FIG. 10 is a plan view of a movable rack and a fixed rack showing another embodiment of the present invention.

[Explanation of symbols]

(1) furnace (2) First heat treatment room (3) Second heat treatment room (4) Partition wall (5) Workpiece entrance (6) Object outlet (7) Communication port (18) Top feed conveyor (19) Lower feed conveyor (21) Transverse transport device (22) Movable rack (23) Fixed rack (24) Movable rack body (27) Fork (28) Workpiece support fork group (29) Fixed rack body (33) Fork (34) Workpiece support fork group (70) Object support plate (71) Notch (72) Heater (heating means) (S) Plate-shaped object

Front page continuation (58) Fields surveyed (Int.Cl. ⁷ , DB name) F27B 9/26 F27B 9/02 F27D 3/12 G02F 1/13 101

Claims (3)

(57) [Claims] 1. A first and a second extending vertically in the furnace.
Heat treatment chambers are arranged in parallel with each other through a partition wall, and a workpiece inlet is formed at a lower end portion of the first heat treatment chamber and a workpiece outlet is formed at a lower end portion of the second heat treatment chamber. A communication port is formed at the upper end of the partition wall to communicate the two heat treatment chambers with each other, and the plate-like workpieces fed from the workpiece inlets are held in the first heat treatment chamber one by one to be intermittent. Is provided with an upper feed conveying device that feeds the plate-shaped workpieces from the first heat treatment chamber through the communication ports into the second heat treatment chamber one by one and intermittently moves downward. A lower feed transfer device for feeding is provided, and at the upper end of the furnace, the plate-shaped object that has been sent to the upper end of the first heat treatment chamber by the upper feed transfer device is received and the second heat treatment chamber is passed through the communication port. Side feed transport device that feeds to the bottom feed device In the continuous heat treatment equipment provided, the upper feed transport equipment and the lower feed transport equipment are composed of movable racks and fixed racks that are provided in front of and behind the respective heat treatment chambers so as to face each other. A movable rack body having a height reaching the communication port and movable in the up-down direction and the front-rear direction, and a plurality of movable rack bodies provided at intervals in the up-down direction and arranged at intervals in the left-right direction. It is composed of a workpiece support fork group consisting of multiple forks that are long in the front-rear direction, and the fixed rack has a fixed rack body with a height from the workpiece inlet to the communication port, and a vertical space between the fixed rack body and the fixed rack body. And a workpiece supporting fork group including a plurality of forks that are long in the front-rear direction and are arranged at intervals in the left-right direction. It is a continuous heat treatment apparatus is arranged at a position and the forks of the workpiece support fork group movable rack, and the forks of the workpiece support fork group fixed rack is shifted in the lateral direction. 2. The continuous heat treatment apparatus according to claim 1, wherein the fixed rack is provided with a fixed rack main body having a height from an inlet of the object to be processed to a communication opening, and a plurality of the fixed rack main bodies are vertically spaced from each other. The movable rack is arranged at the plurality of left and right positions corresponding to the forks of the workpiece supporting fork group of the movable rack in the workpiece supporting plate of the fixed rack. A continuous heat treatment apparatus in which a plurality of notches through which a fork of a movable rack can pass when moving vertically in close proximity are formed from the tip thereof. 3. The continuous heat treatment apparatus according to claim 2, wherein the object support plate is provided with heating means.