JPWO2025004904A5 - - Google Patents
Info
- Publication number
- JPWO2025004904A5 JPWO2025004904A5 JP2025529663A JP2025529663A JPWO2025004904A5 JP WO2025004904 A5 JPWO2025004904 A5 JP WO2025004904A5 JP 2025529663 A JP2025529663 A JP 2025529663A JP 2025529663 A JP2025529663 A JP 2025529663A JP WO2025004904 A5 JPWO2025004904 A5 JP WO2025004904A5
- Authority
- JP
- Japan
- Prior art keywords
- radiation
- group
- halogen
- onium cation
- sensitive composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023107108 | 2023-06-29 | ||
| PCT/JP2024/022037 WO2025004904A1 (ja) | 2023-06-29 | 2024-06-18 | 感放射線性組成物、パターン形成方法及び感放射線性酸発生剤 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2025004904A1 JPWO2025004904A1 (https=) | 2025-01-02 |
| JPWO2025004904A5 true JPWO2025004904A5 (https=) | 2026-04-01 |
Family
ID=93939024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025529663A Pending JPWO2025004904A1 (https=) | 2023-06-29 | 2024-06-18 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20260104642A1 (https=) |
| JP (1) | JPWO2025004904A1 (https=) |
| KR (1) | KR20260029441A (https=) |
| TW (1) | TW202500545A (https=) |
| WO (1) | WO2025004904A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025187697A1 (ja) * | 2024-03-07 | 2025-09-12 | 東京応化工業株式会社 | レジスト組成物、レジストパターン形成方法、化合物、酸発生剤、酸拡散制御剤及び高分子化合物 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7759740B2 (ja) * | 2021-06-15 | 2025-10-24 | 東京応化工業株式会社 | レジスト組成物及びレジストパターン形成方法 |
-
2024
- 2024-06-18 WO PCT/JP2024/022037 patent/WO2025004904A1/ja not_active Ceased
- 2024-06-18 KR KR1020257042339A patent/KR20260029441A/ko active Pending
- 2024-06-18 JP JP2025529663A patent/JPWO2025004904A1/ja active Pending
- 2024-06-24 TW TW113123362A patent/TW202500545A/zh unknown
-
2025
- 2025-12-17 US US19/422,540 patent/US20260104642A1/en active Pending
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