JPWO2024241936A1 - - Google Patents
Info
- Publication number
- JPWO2024241936A1 JPWO2024241936A1 JP2025522321A JP2025522321A JPWO2024241936A1 JP WO2024241936 A1 JPWO2024241936 A1 JP WO2024241936A1 JP 2025522321 A JP2025522321 A JP 2025522321A JP 2025522321 A JP2025522321 A JP 2025522321A JP WO2024241936 A1 JPWO2024241936 A1 JP WO2024241936A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023086028 | 2023-05-25 | ||
| PCT/JP2024/017598 WO2024241936A1 (ja) | 2023-05-25 | 2024-05-13 | 基板処理方法及び基板処理装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2024241936A1 true JPWO2024241936A1 (https=) | 2024-11-28 |
Family
ID=93589181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025522321A Pending JPWO2024241936A1 (https=) | 2023-05-25 | 2024-05-13 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2024241936A1 (https=) |
| KR (1) | KR20260016511A (https=) |
| CN (1) | CN121219097A (https=) |
| TW (1) | TW202513208A (https=) |
| WO (1) | WO2024241936A1 (https=) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000005893A (ja) * | 1998-06-26 | 2000-01-11 | Mitsubishi Heavy Ind Ltd | レーザ加工装置 |
| JP2006281268A (ja) * | 2005-03-31 | 2006-10-19 | Hitachi Via Mechanics Ltd | レーザ加工機 |
| JP2007190560A (ja) * | 2006-01-17 | 2007-08-02 | Miyachi Technos Corp | レーザ加工装置 |
| JP2012170985A (ja) * | 2011-02-22 | 2012-09-10 | Disco Corp | レーザ加工装置 |
| JP2016131997A (ja) * | 2015-01-19 | 2016-07-25 | パナソニックＩｐマネジメント株式会社 | レーザ切断光学ユニット及びレーザ切断装置 |
| JP7304433B2 (ja) | 2019-12-26 | 2023-07-06 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
-
2024
- 2024-05-13 KR KR1020257042373A patent/KR20260016511A/ko active Pending
- 2024-05-13 WO PCT/JP2024/017598 patent/WO2024241936A1/ja not_active Ceased
- 2024-05-13 CN CN202480032016.2A patent/CN121219097A/zh active Pending
- 2024-05-13 JP JP2025522321A patent/JPWO2024241936A1/ja active Pending
- 2024-05-16 TW TW113118121A patent/TW202513208A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024241936A1 (ja) | 2024-11-28 |
| CN121219097A (zh) | 2025-12-26 |
| TW202513208A (zh) | 2025-04-01 |
| KR20260016511A (ko) | 2026-02-03 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20251111 |