JPWO2024209529A5 - - Google Patents

Info

Publication number
JPWO2024209529A5
JPWO2024209529A5 JP2025512235A JP2025512235A JPWO2024209529A5 JP WO2024209529 A5 JPWO2024209529 A5 JP WO2024209529A5 JP 2025512235 A JP2025512235 A JP 2025512235A JP 2025512235 A JP2025512235 A JP 2025512235A JP WO2024209529 A5 JPWO2024209529 A5 JP WO2024209529A5
Authority
JP
Japan
Prior art keywords
rotation
axis
revolution
tool
coating method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025512235A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024209529A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/013912 external-priority patent/WO2024209529A1/ja
Publication of JPWO2024209529A1 publication Critical patent/JPWO2024209529A1/ja
Publication of JPWO2024209529A5 publication Critical patent/JPWO2024209529A5/ja
Pending legal-status Critical Current

Links

JP2025512235A 2023-04-04 2023-04-04 Pending JPWO2024209529A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/013912 WO2024209529A1 (ja) 2023-04-04 2023-04-04 コーティング方法

Publications (2)

Publication Number Publication Date
JPWO2024209529A1 JPWO2024209529A1 (https=) 2024-10-10
JPWO2024209529A5 true JPWO2024209529A5 (https=) 2025-11-05

Family

ID=92971565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025512235A Pending JPWO2024209529A1 (https=) 2023-04-04 2023-04-04

Country Status (3)

Country Link
JP (1) JPWO2024209529A1 (https=)
CN (1) CN120882896A (https=)
WO (1) WO2024209529A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2592311B2 (ja) * 1988-10-19 1997-03-19 富士写真フイルム株式会社 光磁気記録媒体の製造方法及び製造装置
EP1153155B1 (de) * 1998-12-15 2005-01-19 Balzers Aktiengesellschaft Planetensystem-werkstückträger und verfahren zur oberflächenbehandlung von werkstücken
CN112771200A (zh) * 2019-03-12 2021-05-07 株式会社爱发科 成膜方法

Similar Documents

Publication Publication Date Title
WO2014147979A1 (ja) Pvd処理装置及びpvd処理方法
RU2015115957A (ru) Способ изготовления вращательного изделия с помощью нанесения сваркой с холодным переносом металла и вращательное изделие, изготовленное указанным образом
CN104379803B (zh) 用于将涂层施加到球形构件上的方法及工作台组件
WO2011135810A1 (ja) 成膜装置
JP3458450B2 (ja) スパッタリング方法
JP6135519B2 (ja) 成膜装置
JPWO2024209529A5 (https=)
CN102770578A (zh) 成膜装置以及成膜方法
JP4992039B2 (ja) 成膜装置及び成膜方法
WO2012105313A1 (ja) 気相成長装置
KR20190136771A (ko) 연동 회전하는 회전기를 가지는 증착장치
JP5749223B2 (ja) 球状体の被膜形成方法
CN208201119U (zh) 一种化学气相沉积炉的基体支撑装置及基体旋转驱动装置
CN110863179A (zh) 一种大面积均匀沉积热障涂层的电子束物理气相沉积方法
CN101440472A (zh) 真空气相沉积装置、真空气相沉积方法和气相沉积物
JP2008007806A (ja) スパッタリング成膜装置、封止膜の製造方法及び有機el素子
TWI664305B (zh) 3d蒸鍍之公自轉鍍鍋結構
JPWO2024194994A5 (https=)
CN205077133U (zh) 用于镜片镀膜的回转架
KR101562275B1 (ko) 증착장치
JP4120255B2 (ja) 工具の成膜方法
US20110278164A1 (en) Sputtering device
CN221501228U (zh) 真空镀膜装置
JPH0765159B2 (ja) 真空蒸着装置
CN120882896A (zh) 涂覆方法