CN120882896A - 涂覆方法 - Google Patents

涂覆方法

Info

Publication number
CN120882896A
CN120882896A CN202380096555.8A CN202380096555A CN120882896A CN 120882896 A CN120882896 A CN 120882896A CN 202380096555 A CN202380096555 A CN 202380096555A CN 120882896 A CN120882896 A CN 120882896A
Authority
CN
China
Prior art keywords
rotation
revolution
tool
axis
coating method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380096555.8A
Other languages
English (en)
Chinese (zh)
Inventor
胁真宏
城御堂浩美
森聪史
下尾崎大作
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Publication of CN120882896A publication Critical patent/CN120882896A/zh
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CN202380096555.8A 2023-04-04 2023-04-04 涂覆方法 Pending CN120882896A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/013912 WO2024209529A1 (ja) 2023-04-04 2023-04-04 コーティング方法

Publications (1)

Publication Number Publication Date
CN120882896A true CN120882896A (zh) 2025-10-31

Family

ID=92971565

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380096555.8A Pending CN120882896A (zh) 2023-04-04 2023-04-04 涂覆方法

Country Status (3)

Country Link
JP (1) JPWO2024209529A1 (https=)
CN (1) CN120882896A (https=)
WO (1) WO2024209529A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2592311B2 (ja) * 1988-10-19 1997-03-19 富士写真フイルム株式会社 光磁気記録媒体の製造方法及び製造装置
EP1153155B1 (de) * 1998-12-15 2005-01-19 Balzers Aktiengesellschaft Planetensystem-werkstückträger und verfahren zur oberflächenbehandlung von werkstücken
CN112771200A (zh) * 2019-03-12 2021-05-07 株式会社爱发科 成膜方法

Also Published As

Publication number Publication date
WO2024209529A1 (ja) 2024-10-10
JPWO2024209529A1 (https=) 2024-10-10

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