JPWO2024209529A1 - - Google Patents
Info
- Publication number
- JPWO2024209529A1 JPWO2024209529A1 JP2025512235A JP2025512235A JPWO2024209529A1 JP WO2024209529 A1 JPWO2024209529 A1 JP WO2024209529A1 JP 2025512235 A JP2025512235 A JP 2025512235A JP 2025512235 A JP2025512235 A JP 2025512235A JP WO2024209529 A1 JPWO2024209529 A1 JP WO2024209529A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/013912 WO2024209529A1 (ja) | 2023-04-04 | 2023-04-04 | コーティング方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2024209529A1 true JPWO2024209529A1 (https=) | 2024-10-10 |
| JPWO2024209529A5 JPWO2024209529A5 (https=) | 2025-11-05 |
Family
ID=92971565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025512235A Pending JPWO2024209529A1 (https=) | 2023-04-04 | 2023-04-04 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPWO2024209529A1 (https=) |
| CN (1) | CN120882896A (https=) |
| WO (1) | WO2024209529A1 (https=) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2592311B2 (ja) * | 1988-10-19 | 1997-03-19 | 富士写真フイルム株式会社 | 光磁気記録媒体の製造方法及び製造装置 |
| EP1153155B1 (de) * | 1998-12-15 | 2005-01-19 | Balzers Aktiengesellschaft | Planetensystem-werkstückträger und verfahren zur oberflächenbehandlung von werkstücken |
| CN112771200A (zh) * | 2019-03-12 | 2021-05-07 | 株式会社爱发科 | 成膜方法 |
-
2023
- 2023-04-04 JP JP2025512235A patent/JPWO2024209529A1/ja active Pending
- 2023-04-04 WO PCT/JP2023/013912 patent/WO2024209529A1/ja not_active Ceased
- 2023-04-04 CN CN202380096555.8A patent/CN120882896A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024209529A1 (ja) | 2024-10-10 |
| CN120882896A (zh) | 2025-10-31 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20250821 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20250821 |