JPWO2024177122A1 - - Google Patents

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Publication number
JPWO2024177122A1
JPWO2024177122A1 JP2024549751A JP2024549751A JPWO2024177122A1 JP WO2024177122 A1 JPWO2024177122 A1 JP WO2024177122A1 JP 2024549751 A JP2024549751 A JP 2024549751A JP 2024549751 A JP2024549751 A JP 2024549751A JP WO2024177122 A1 JPWO2024177122 A1 JP WO2024177122A1
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JP
Japan
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Application number
JP2024549751A
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Japanese (ja)
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JP7797678B2 (ja
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Priority claimed from JP2023026471A external-priority patent/JP7300565B1/ja
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Classifications

    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C5/00Alloys based on noble metals
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05Metallic powder characterised by the size or surface area of the particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/07Metallic powder characterised by particles having a nanoscale microstructure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/10Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
    • B22F1/107Metallic powder containing lubricating or binding agents; Metallic powder containing organic material containing organic material comprising solvents, e.g. for slip casting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/14Treatment of metallic powder
    • B22F1/142Thermal or thermo-mechanical treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/14Treatment of metallic powder
    • B22F1/145Chemical treatment, e.g. passivation or decarburisation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20Direct sintering or melting
    • B22F10/28Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30Process control
    • B22F10/34Process control of powder characteristics, e.g. density, oxidation or flowability
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/02Compacting only
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10Sintering only
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10Sintering only
    • B22F3/1003Use of special medium during sintering, e.g. sintering aid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/04Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/16Making metallic powder or suspensions thereof using chemical processes
    • B22F9/18Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
    • B22F9/20Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from solid metal compounds
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/04Making non-ferrous alloys by powder metallurgy
    • C22C1/0466Alloys based on noble metals
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C30/00Alloys containing less than 50% by weight of each constituent
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/02Compacting only
    • B22F2003/023Lubricant mixed with the metal powder
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2301/00Metallic composition of the powder or its coating
    • B22F2301/25Noble metals, i.e. Ag Au, Ir, Os, Pd, Pt, Rh, Ru
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2304/00Physical aspects of the powder
    • B22F2304/05Submicron size particles
    • B22F2304/054Particle size between 1 and 100 nm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00Methods or apparatus for measurement or analysis of nanostructures
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nanotechnology (AREA)
  • Automation & Control Theory (AREA)
  • Plasma & Fusion (AREA)
  • Powder Metallurgy (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Physical Vapour Deposition (AREA)
JP2024549751A 2023-02-22 2024-02-21 成形体、焼成体、およびそれらの製造方法 Active JP7797678B2 (ja)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2023026471A JP7300565B1 (ja) 2023-02-22 2023-02-22 貴金属合金粉末およびその製造方法
JP2023106367 2023-06-28
JP2023106369 2023-06-28
JP2023106369 2023-06-28
JP2023106367 2023-06-28
PCT/JP2024/006397 WO2024177122A1 (ja) 2023-02-22 2024-02-21 成形体、焼成体、およびそれらの製造方法

Publications (2)

Publication Number Publication Date
JPWO2024177122A1 true JPWO2024177122A1 (https=) 2024-08-29
JP7797678B2 JP7797678B2 (ja) 2026-01-13

Family

ID=92500900

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2024538502A Active JP7700383B2 (ja) 2023-02-22 2024-02-21 スパッタリングターゲットおよびその製造方法
JP2024549751A Active JP7797678B2 (ja) 2023-02-22 2024-02-21 成形体、焼成体、およびそれらの製造方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2024538502A Active JP7700383B2 (ja) 2023-02-22 2024-02-21 スパッタリングターゲットおよびその製造方法

Country Status (6)

Country Link
EP (2) EP4671408A1 (https=)
JP (2) JP7700383B2 (https=)
KR (2) KR20250138766A (https=)
CN (2) CN120530223A (https=)
TW (1) TW202438698A (https=)
WO (2) WO2024177122A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08325602A (ja) * 1995-05-31 1996-12-10 Tanaka Kikinzoku Internatl Kk 高結晶パラジウム粉末及び高結晶銀パラジウム合金粉末の製造方法
JPH10102105A (ja) * 1996-09-25 1998-04-21 Taiheiyo Kinzoku Kk 金属微粉末の製造方法
WO2018154292A1 (en) * 2017-02-23 2018-08-30 Swansea University Multicomponent metallic alloys
WO2021020377A1 (ja) * 2019-07-29 2021-02-04 国立大学法人京都大学 合金ナノ粒子、合金ナノ粒子の集合体、触媒および合金ナノ粒子の製造方法
WO2022132883A1 (en) * 2020-12-15 2022-06-23 University Of Maryland, College Park Multi-element compound nanoparticles, and systems and methods of making and use thereof

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3191434B2 (ja) 1992-08-12 2001-07-23 三菱マテリアル株式会社 銀および銅を含む貴金属混合粉末の焼結方法
JPH10102106A (ja) * 1996-09-30 1998-04-21 Tanaka Kikinzoku Kogyo Kk ロジウム粉末の製造方法
JP4007702B2 (ja) 1998-10-05 2007-11-14 株式会社フルヤ金属 薄膜形成用スパッタリングターゲット材およびそれを用いて形成されて成る薄膜、および光学記録媒体
US7235143B2 (en) * 2002-08-08 2007-06-26 Praxair S.T. Technology, Inc. Controlled-grain-precious metal sputter targets
JPWO2005056851A1 (ja) * 2003-12-10 2007-12-13 田中貴金属工業株式会社 反射率維持特性に優れた銀合金
JP4616033B2 (ja) 2005-02-21 2011-01-19 株式会社フルヤ金属 スパークプラグ用電極チップ
JP6108064B2 (ja) 2012-08-24 2017-04-05 三菱マテリアル株式会社 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法
JP6311912B2 (ja) 2012-10-17 2018-04-18 三菱マテリアル株式会社 Cu−Ga二元系スパッタリングターゲット及びその製造方法
WO2021112004A1 (ja) * 2019-12-02 2021-06-10 三菱マテリアル株式会社 Ag合金スパッタリングターゲット
JP7854354B2 (ja) 2022-07-12 2026-05-01 田中貴金属工業株式会社 Co-Cr-Pt-酸化物系スパッタリングターゲット
JP7300565B1 (ja) * 2023-02-22 2023-06-29 田中貴金属工業株式会社 貴金属合金粉末およびその製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08325602A (ja) * 1995-05-31 1996-12-10 Tanaka Kikinzoku Internatl Kk 高結晶パラジウム粉末及び高結晶銀パラジウム合金粉末の製造方法
JPH10102105A (ja) * 1996-09-25 1998-04-21 Taiheiyo Kinzoku Kk 金属微粉末の製造方法
WO2018154292A1 (en) * 2017-02-23 2018-08-30 Swansea University Multicomponent metallic alloys
WO2021020377A1 (ja) * 2019-07-29 2021-02-04 国立大学法人京都大学 合金ナノ粒子、合金ナノ粒子の集合体、触媒および合金ナノ粒子の製造方法
WO2022132883A1 (en) * 2020-12-15 2022-06-23 University Of Maryland, College Park Multi-element compound nanoparticles, and systems and methods of making and use thereof

Also Published As

Publication number Publication date
JPWO2024177123A1 (https=) 2024-08-29
CN120529978A (zh) 2025-08-22
JP7700383B2 (ja) 2025-06-30
EP4671408A1 (en) 2025-12-31
TW202440249A (zh) 2024-10-16
WO2024177123A1 (ja) 2024-08-29
WO2024177122A1 (ja) 2024-08-29
JP7797678B2 (ja) 2026-01-13
CN120530223A (zh) 2025-08-22
KR20250137170A (ko) 2025-09-17
TW202438698A (zh) 2024-10-01
KR20250138766A (ko) 2025-09-22
EP4670870A1 (en) 2025-12-31

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