JPWO2024018715A1 - - Google Patents

Info

Publication number
JPWO2024018715A1
JPWO2024018715A1 JP2023563899A JP2023563899A JPWO2024018715A1 JP WO2024018715 A1 JPWO2024018715 A1 JP WO2024018715A1 JP 2023563899 A JP2023563899 A JP 2023563899A JP 2023563899 A JP2023563899 A JP 2023563899A JP WO2024018715 A1 JPWO2024018715 A1 JP WO2024018715A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023563899A
Other languages
Japanese (ja)
Other versions
JP7442750B1 (ja
JPWO2024018715A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/016405 external-priority patent/WO2024018715A1/ja
Publication of JPWO2024018715A1 publication Critical patent/JPWO2024018715A1/ja
Priority to JP2024023534A priority Critical patent/JP7503220B2/ja
Application granted granted Critical
Publication of JP7442750B1 publication Critical patent/JP7442750B1/ja
Publication of JPWO2024018715A5 publication Critical patent/JPWO2024018715A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/82Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
    • H10D84/83Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6728Vertical TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6729Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/673Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/117Shapes of semiconductor bodies
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311Gate electrodes for field-effect devices
    • H10D64/411Gate electrodes for field-effect devices for FETs
    • H10D64/511Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/512Disposition of the gate electrodes, e.g. buried gates
    • H10D64/513Disposition of the gate electrodes, e.g. buried gates within recesses in the substrate, e.g. trench gates, groove gates or buried gates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311Gate electrodes for field-effect devices
    • H10D64/411Gate electrodes for field-effect devices for FETs
    • H10D64/511Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/517Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers
    • H10D64/518Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers characterised by their lengths or sectional shapes
JP2023563899A 2022-07-22 2023-04-26 半導体装置 Active JP7442750B1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024023534A JP7503220B2 (ja) 2022-07-22 2024-02-20 半導体装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202263391463P 2022-07-22 2022-07-22
US63/391,463 2022-07-22
PCT/JP2023/016405 WO2024018715A1 (ja) 2022-07-22 2023-04-26 半導体装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024023534A Division JP7503220B2 (ja) 2022-07-22 2024-02-20 半導体装置

Publications (3)

Publication Number Publication Date
JPWO2024018715A1 true JPWO2024018715A1 (https=) 2024-01-25
JP7442750B1 JP7442750B1 (ja) 2024-03-04
JPWO2024018715A5 JPWO2024018715A5 (https=) 2024-06-25

Family

ID=89491233

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2023563899A Active JP7442750B1 (ja) 2022-07-22 2023-04-26 半導体装置
JP2024023534A Active JP7503220B2 (ja) 2022-07-22 2024-02-20 半導体装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2024023534A Active JP7503220B2 (ja) 2022-07-22 2024-02-20 半導体装置

Country Status (2)

Country Link
JP (2) JP7442750B1 (https=)
CN (2) CN119208328B (https=)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005011986A (ja) * 2003-06-19 2005-01-13 Sanyo Electric Co Ltd 半導体装置
JP3917144B2 (ja) * 2004-04-09 2007-05-23 株式会社東芝 半導体装置
JP2007129250A (ja) * 2006-12-20 2007-05-24 Fujitsu Ltd 半導体装置
US7960788B2 (en) * 2007-01-25 2011-06-14 Taiwan Semiconductor Manufacturing Company, Ltd. Replacing symmetric transistors with asymmetric transistors
US20110233605A1 (en) * 2010-03-26 2011-09-29 Force Mos Technology Co. Ltd. Semiconductor power device layout for stress reduction
JP7131003B2 (ja) * 2018-03-16 2022-09-06 富士電機株式会社 半導体装置
TWI761740B (zh) * 2018-12-19 2022-04-21 日商新唐科技日本股份有限公司 半導體裝置
JP7539269B2 (ja) * 2020-07-31 2024-08-23 ローム株式会社 半導体装置

Also Published As

Publication number Publication date
CN117413361B (zh) 2024-08-27
JP7503220B2 (ja) 2024-06-19
CN119208328A (zh) 2024-12-27
JP2024046689A (ja) 2024-04-03
CN119208328B (zh) 2025-08-29
JP7442750B1 (ja) 2024-03-04
CN117413361A (zh) 2024-01-16

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