JPWO2023210167A5 - - Google Patents
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- Publication number
- JPWO2023210167A5 JPWO2023210167A5 JP2023561231A JP2023561231A JPWO2023210167A5 JP WO2023210167 A5 JPWO2023210167 A5 JP WO2023210167A5 JP 2023561231 A JP2023561231 A JP 2023561231A JP 2023561231 A JP2023561231 A JP 2023561231A JP WO2023210167 A5 JPWO2023210167 A5 JP WO2023210167A5
- Authority
- JP
- Japan
- Prior art keywords
- diamond film
- niobium carbide
- layer
- film deposition
- niobium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims 23
- UNASZPQZIFZUSI-UHFFFAOYSA-N methylidyneniobium Chemical compound [Nb]#C UNASZPQZIFZUSI-UHFFFAOYSA-N 0.000 claims 18
- 229910003460 diamond Inorganic materials 0.000 claims 17
- 239000010432 diamond Substances 0.000 claims 17
- 239000000758 substrate Substances 0.000 claims 17
- 238000000151 deposition Methods 0.000 claims 13
- 230000008021 deposition Effects 0.000 claims 12
- 238000000034 method Methods 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 5
- 229910052758 niobium Inorganic materials 0.000 claims 5
- 239000010955 niobium Substances 0.000 claims 5
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 3
- 229910052799 carbon Inorganic materials 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 3
- 229910052751 metal Inorganic materials 0.000 claims 3
- 239000000126 substance Substances 0.000 claims 3
- 150000001722 carbon compounds Chemical class 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010899 nucleation Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 239000002356 single layer Substances 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024002365A JP2024036357A (ja) | 2022-04-26 | 2024-01-11 | ダイヤモンド膜堆積基板、およびダイヤモンド膜堆積基板の製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022072370 | 2022-04-26 | ||
| JP2022072370 | 2022-04-26 | ||
| PCT/JP2023/008214 WO2023210167A1 (ja) | 2022-04-26 | 2023-03-06 | ダイヤモンド膜堆積基板、およびダイヤモンド膜堆積基板の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024002365A Division JP2024036357A (ja) | 2022-04-26 | 2024-01-11 | ダイヤモンド膜堆積基板、およびダイヤモンド膜堆積基板の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023210167A1 JPWO2023210167A1 (https=) | 2023-11-02 |
| JP7421018B1 JP7421018B1 (ja) | 2024-01-23 |
| JPWO2023210167A5 true JPWO2023210167A5 (https=) | 2024-04-08 |
Family
ID=88518538
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023561231A Active JP7421018B1 (ja) | 2022-04-26 | 2023-03-06 | ダイヤモンド膜堆積基板、およびダイヤモンド膜堆積基板の製造方法 |
| JP2024002365A Pending JP2024036357A (ja) | 2022-04-26 | 2024-01-11 | ダイヤモンド膜堆積基板、およびダイヤモンド膜堆積基板の製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024002365A Pending JP2024036357A (ja) | 2022-04-26 | 2024-01-11 | ダイヤモンド膜堆積基板、およびダイヤモンド膜堆積基板の製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20250277306A1 (https=) |
| EP (1) | EP4516973A1 (https=) |
| JP (2) | JP7421018B1 (https=) |
| WO (1) | WO2023210167A1 (https=) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2938552B2 (ja) * | 1990-10-17 | 1999-08-23 | 富士通株式会社 | コーティング膜の製造方法およびコーティング膜の製造装置 |
| JP2002265296A (ja) * | 2001-03-09 | 2002-09-18 | Kobe Steel Ltd | ダイヤモンド薄膜及びその製造方法 |
| JP4581998B2 (ja) * | 2003-05-26 | 2010-11-17 | 住友電気工業株式会社 | ダイヤモンド被覆電極及びその製造方法 |
| JP4456378B2 (ja) | 2004-02-24 | 2010-04-28 | ペルメレック電極株式会社 | 導電性ダイヤモンド電極の製造方法 |
| JP4851376B2 (ja) * | 2007-03-23 | 2012-01-11 | 東海旅客鉄道株式会社 | ダイヤモンド膜の合成に用いる導電性基体の前処理方法及びダイヤモンド膜の製造方法 |
| KR101480023B1 (ko) * | 2014-05-29 | 2015-01-07 | 주식회사 아벡테크 | 다이아몬드 전극 및 그 제조 방법 |
-
2023
- 2023-03-06 US US18/859,148 patent/US20250277306A1/en active Pending
- 2023-03-06 JP JP2023561231A patent/JP7421018B1/ja active Active
- 2023-03-06 EP EP23795915.0A patent/EP4516973A1/en active Pending
- 2023-03-06 WO PCT/JP2023/008214 patent/WO2023210167A1/ja not_active Ceased
-
2024
- 2024-01-11 JP JP2024002365A patent/JP2024036357A/ja active Pending
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