JPWO2023157475A5 - - Google Patents
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- Publication number
- JPWO2023157475A5 JPWO2023157475A5 JP2024500998A JP2024500998A JPWO2023157475A5 JP WO2023157475 A5 JPWO2023157475 A5 JP WO2023157475A5 JP 2024500998 A JP2024500998 A JP 2024500998A JP 2024500998 A JP2024500998 A JP 2024500998A JP WO2023157475 A5 JPWO2023157475 A5 JP WO2023157475A5
- Authority
- JP
- Japan
- Prior art keywords
- metal film
- forming
- film
- diffraction grating
- photoresist film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims 9
- 239000002184 metal Substances 0.000 claims 9
- 229920002120 photoresistant polymer Polymers 0.000 claims 8
- 238000000034 method Methods 0.000 claims 7
- 238000004519 manufacturing process Methods 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 5
- 230000001681 protective effect Effects 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 238000007772 electroless plating Methods 0.000 claims 1
- 238000009713 electroplating Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022024158 | 2022-02-18 | ||
| PCT/JP2022/047761 WO2023157475A1 (ja) | 2022-02-18 | 2022-12-23 | 回折格子の製造方法および回折格子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023157475A1 JPWO2023157475A1 (enrdf_load_stackoverflow) | 2023-08-24 |
| JPWO2023157475A5 true JPWO2023157475A5 (enrdf_load_stackoverflow) | 2024-10-21 |
Family
ID=87578027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024500998A Pending JPWO2023157475A1 (enrdf_load_stackoverflow) | 2022-02-18 | 2022-12-23 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2023157475A1 (enrdf_load_stackoverflow) |
| WO (1) | WO2023157475A1 (enrdf_load_stackoverflow) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54153051A (en) * | 1978-05-22 | 1979-12-01 | Nec Corp | Scanning optical system |
| JPS55157705A (en) * | 1979-05-29 | 1980-12-08 | Nec Corp | Production of blazed grating |
| JPH02244003A (ja) * | 1989-03-16 | 1990-09-28 | Nec Corp | 反射型格子レンズ及びその製造方法 |
| JP2002098820A (ja) * | 2000-09-21 | 2002-04-05 | Nippon Sheet Glass Co Ltd | 反射型回折格子 |
| JP2016065967A (ja) * | 2014-09-24 | 2016-04-28 | 大日本印刷株式会社 | 光学部材用版の製造方法、光学部材用ロール版の製造方法 |
| US10254228B2 (en) * | 2014-12-09 | 2019-04-09 | Konica Minolta, Inc. | Detection chip and detection method |
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2022
- 2022-12-23 WO PCT/JP2022/047761 patent/WO2023157475A1/ja active Application Filing
- 2022-12-23 JP JP2024500998A patent/JPWO2023157475A1/ja active Pending