JP7756232B2 - 回折格子の製造方法および回折格子 - Google Patents

回折格子の製造方法および回折格子

Info

Publication number
JP7756232B2
JP7756232B2 JP2024500998A JP2024500998A JP7756232B2 JP 7756232 B2 JP7756232 B2 JP 7756232B2 JP 2024500998 A JP2024500998 A JP 2024500998A JP 2024500998 A JP2024500998 A JP 2024500998A JP 7756232 B2 JP7756232 B2 JP 7756232B2
Authority
JP
Japan
Prior art keywords
diffraction grating
metal film
film
sinusoidal
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2024500998A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023157475A5 (enrdf_load_stackoverflow
JPWO2023157475A1 (enrdf_load_stackoverflow
Inventor
健太 八重樫
功 内田
宇紀 青野
佳定 江畠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Corp filed Critical Hitachi High Tech Corp
Publication of JPWO2023157475A1 publication Critical patent/JPWO2023157475A1/ja
Publication of JPWO2023157475A5 publication Critical patent/JPWO2023157475A5/ja
Application granted granted Critical
Publication of JP7756232B2 publication Critical patent/JP7756232B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP2024500998A 2022-02-18 2022-12-23 回折格子の製造方法および回折格子 Active JP7756232B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022024158 2022-02-18
JP2022024158 2022-02-18
PCT/JP2022/047761 WO2023157475A1 (ja) 2022-02-18 2022-12-23 回折格子の製造方法および回折格子

Publications (3)

Publication Number Publication Date
JPWO2023157475A1 JPWO2023157475A1 (enrdf_load_stackoverflow) 2023-08-24
JPWO2023157475A5 JPWO2023157475A5 (enrdf_load_stackoverflow) 2024-10-21
JP7756232B2 true JP7756232B2 (ja) 2025-10-17

Family

ID=87578027

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024500998A Active JP7756232B2 (ja) 2022-02-18 2022-12-23 回折格子の製造方法および回折格子

Country Status (2)

Country Link
JP (1) JP7756232B2 (enrdf_load_stackoverflow)
WO (1) WO2023157475A1 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016093039A1 (ja) 2014-12-09 2016-06-16 コニカミノルタ株式会社 検出チップおよび検出方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54153051A (en) * 1978-05-22 1979-12-01 Nec Corp Scanning optical system
JPS55157705A (en) * 1979-05-29 1980-12-08 Nec Corp Production of blazed grating
JPS584173A (ja) * 1981-06-30 1983-01-11 Dainippon Printing Co Ltd ホログラム情報シ−トの製造法
JPH02244003A (ja) * 1989-03-16 1990-09-28 Nec Corp 反射型格子レンズ及びその製造方法
JP2002098820A (ja) * 2000-09-21 2002-04-05 Nippon Sheet Glass Co Ltd 反射型回折格子
JP2016065967A (ja) * 2014-09-24 2016-04-28 大日本印刷株式会社 光学部材用版の製造方法、光学部材用ロール版の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016093039A1 (ja) 2014-12-09 2016-06-16 コニカミノルタ株式会社 検出チップおよび検出方法

Also Published As

Publication number Publication date
WO2023157475A1 (ja) 2023-08-24
JPWO2023157475A1 (enrdf_load_stackoverflow) 2023-08-24

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