JPWO2023127023A1 - - Google Patents

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Publication number
JPWO2023127023A1
JPWO2023127023A1 JP2022558572A JP2022558572A JPWO2023127023A1 JP WO2023127023 A1 JPWO2023127023 A1 JP WO2023127023A1 JP 2022558572 A JP2022558572 A JP 2022558572A JP 2022558572 A JP2022558572 A JP 2022558572A JP WO2023127023 A1 JPWO2023127023 A1 JP WO2023127023A1
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JP
Japan
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Application number
JP2022558572A
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Japanese (ja)
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JP7275407B1 (ja
JPWO2023127023A5 (https=
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Publication of JP7275407B1 publication Critical patent/JP7275407B1/ja
Publication of JPWO2023127023A1 publication Critical patent/JPWO2023127023A1/ja
Publication of JPWO2023127023A5 publication Critical patent/JPWO2023127023A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/01Manufacture or treatment
    • H10D48/021Manufacture or treatment of two-electrode devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/81Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/60Schottky-barrier diodes 
JP2022558572A 2021-12-27 2021-12-27 炭化珪素半導体装置、電力変換装置および炭化珪素半導体装置の製造方法 Active JP7275407B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/048577 WO2023127023A1 (ja) 2021-12-27 2021-12-27 炭化珪素半導体装置、電力変換装置および炭化珪素半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP7275407B1 JP7275407B1 (ja) 2023-05-17
JPWO2023127023A1 true JPWO2023127023A1 (https=) 2023-07-06
JPWO2023127023A5 JPWO2023127023A5 (https=) 2023-11-29

Family

ID=86332454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022558572A Active JP7275407B1 (ja) 2021-12-27 2021-12-27 炭化珪素半導体装置、電力変換装置および炭化珪素半導体装置の製造方法

Country Status (2)

Country Link
JP (1) JP7275407B1 (https=)
WO (1) WO2023127023A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117293191B (zh) * 2023-11-24 2024-03-08 山东大学 一种版图结构、半导体器件和其制造方法
CN117673158A (zh) * 2024-01-31 2024-03-08 深圳天狼芯半导体有限公司 碳化硅mosfet及其制备方法、芯片

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6100194A (en) * 1998-06-22 2000-08-08 Stmicroelectronics, Inc. Silver metallization by damascene method
US8203823B2 (en) * 2008-01-11 2012-06-19 Oh Young Joo Metal capacitor and manufacturing method thereof
JP2010129585A (ja) * 2008-11-25 2010-06-10 Toyota Motor Corp 半導体装置の製造方法
JP5707709B2 (ja) * 2009-03-23 2015-04-30 富士電機株式会社 半導体装置の製造方法
WO2014156791A1 (ja) * 2013-03-29 2014-10-02 富士電機株式会社 半導体装置および半導体装置の製造方法
JP6168370B2 (ja) * 2015-12-17 2017-07-26 ローム株式会社 SiC電界効果トランジスタ
JP6584966B2 (ja) * 2016-01-12 2019-10-02 株式会社東芝 半導体装置、半導体装置の製造方法、インバータ回路、駆動装置、車両、及び昇降機
WO2021014570A1 (ja) * 2019-07-23 2021-01-28 三菱電機株式会社 炭化珪素半導体装置、電力変換装置および炭化珪素半導体装置の製造方法
JP7443926B2 (ja) * 2020-05-15 2024-03-06 株式会社デンソー 半導体装置およびその製造方法

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Publication number Publication date
JP7275407B1 (ja) 2023-05-17
WO2023127023A1 (ja) 2023-07-06

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