JPWO2023106196A5 - - Google Patents

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Publication number
JPWO2023106196A5
JPWO2023106196A5 JP2023566268A JP2023566268A JPWO2023106196A5 JP WO2023106196 A5 JPWO2023106196 A5 JP WO2023106196A5 JP 2023566268 A JP2023566268 A JP 2023566268A JP 2023566268 A JP2023566268 A JP 2023566268A JP WO2023106196 A5 JPWO2023106196 A5 JP WO2023106196A5
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JP
Japan
Prior art keywords
laser light
light source
laser
light sources
measurement cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023566268A
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English (en)
Japanese (ja)
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JPWO2023106196A1 (https=
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Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/044356 external-priority patent/WO2023106196A1/ja
Publication of JPWO2023106196A1 publication Critical patent/JPWO2023106196A1/ja
Publication of JPWO2023106196A5 publication Critical patent/JPWO2023106196A5/ja
Pending legal-status Critical Current

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JP2023566268A 2021-12-10 2022-12-01 Pending JPWO2023106196A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021200845 2021-12-10
PCT/JP2022/044356 WO2023106196A1 (ja) 2021-12-10 2022-12-01 分析装置及び分析方法

Publications (2)

Publication Number Publication Date
JPWO2023106196A1 JPWO2023106196A1 (https=) 2023-06-15
JPWO2023106196A5 true JPWO2023106196A5 (https=) 2024-08-22

Family

ID=86730243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023566268A Pending JPWO2023106196A1 (https=) 2021-12-10 2022-12-01

Country Status (6)

Country Link
US (1) US20250389643A1 (https=)
EP (1) EP4446728A4 (https=)
JP (1) JPWO2023106196A1 (https=)
KR (1) KR20240117528A (https=)
CN (1) CN118251589A (https=)
WO (1) WO2023106196A1 (https=)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO924443L (no) * 1992-11-18 1994-05-19 Norsk Hydro As Utstyr for spektroskopisk måling av gass
JPH07277720A (ja) * 1994-03-31 1995-10-24 Sumitomo Sitix Corp 多結晶シリコンの製造における塩化水素ガス分析方法
JP2001311686A (ja) * 2000-04-28 2001-11-09 Showa Denko Kk フッ素化合物濃度の測定方法、測定装置及びフッ素化合物の製造方法
JP2004085252A (ja) * 2002-08-23 2004-03-18 Horiba Ltd ガス分析計
JP5972760B2 (ja) * 2012-11-09 2016-08-17 三菱重工業株式会社 排ガス脱硝システム、排ガス脱硝装置の再生方法及び排ガス脱硝装置の触媒交換方法
NO348517B1 (en) * 2015-06-11 2025-02-24 Neo Monitors As Gas monitor
JP2017156304A (ja) * 2016-03-04 2017-09-07 株式会社東芝 ガス検知装置
EP3401666A1 (de) * 2017-05-11 2018-11-14 Mettler-Toledo GmbH Gasmesssystem
AT520258B1 (de) * 2017-07-26 2022-02-15 Univ Wien Tech Verfahren zur spektroskopischen bzw. spektrometrischen Untersuchung einer Probe
CN109596538B (zh) 2017-10-03 2023-08-25 株式会社堀场制作所 分析装置和分析方法

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