WO2023106196A1 - 分析装置及び分析方法 - Google Patents

分析装置及び分析方法 Download PDF

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Publication number
WO2023106196A1
WO2023106196A1 PCT/JP2022/044356 JP2022044356W WO2023106196A1 WO 2023106196 A1 WO2023106196 A1 WO 2023106196A1 JP 2022044356 W JP2022044356 W JP 2022044356W WO 2023106196 A1 WO2023106196 A1 WO 2023106196A1
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Prior art keywords
laser light
light source
laser
light sources
component
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English (en)
French (fr)
Japanese (ja)
Inventor
康輔 塚谷
浩平 堀田
知己 山本
琢也 井戸
享司 渋谷
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Horiba Ltd
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Horiba Ltd
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Priority to US18/704,822 priority Critical patent/US20250389643A1/en
Priority to KR1020247013596A priority patent/KR20240117528A/ko
Priority to JP2023566268A priority patent/JPWO2023106196A1/ja
Priority to EP22904127.2A priority patent/EP4446728A4/en
Priority to CN202280071723.3A priority patent/CN118251589A/zh
Publication of WO2023106196A1 publication Critical patent/WO2023106196A1/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G01J3/108—Arrangements of light sources specially adapted for spectrometry or colorimetry for measurement in the infrared range
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
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    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0052—Gaseous halogens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J2001/4242—Modulated light, e.g. for synchronizing source and detector circuit
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G01J2003/102—Plural sources
    • G01J2003/104—Monochromatic plural sources
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G01J2003/102—Plural sources
    • G01J2003/106—Plural sources the two sources being alternating or selectable, e.g. in two ranges or line:continuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J3/433—Modulation spectrometry; Derivative spectrometry
    • G01J2003/4334—Modulation spectrometry; Derivative spectrometry by modulation of source, e.g. current modulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N2021/3148—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths using three or more wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N2021/3155—Measuring in two spectral ranges, e.g. UV and visible
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/396—Type of laser source
    • G01N2021/399—Diode laser
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers

Definitions

  • the present invention relates to an analysis apparatus and an analysis method used, for example, for component analysis of gas.
  • an analysis device using a light source such as a laser in order to measure a plurality of components contained in a sample, a measurement cell containing the sample and a plurality of lasers as a light source for irradiating the measurement cell with laser light are used. It is known to have a light source and a photodetector for detecting light transmitted through the measuring cell.
  • the driving voltage of a plurality of quantum cascade lasers, which are laser light sources is controlled, and the oscillation wavelength of each quantum cascade laser is made to correspond to a different measurement target component. , which analyzes a plurality of components to be measured in a short time by one analyzer by oscillating pulses at mutually different timings.
  • the above-described analysis device uses quantum cascade lasers as a plurality of laser light sources, the components that can be analyzed by the analysis device are limited to those that include absorption spectrum peaks in the oscillation wavelength range of the quantum cascade laser. .
  • the present invention has been made in view of the problems described above, and its main object is to enable analysis of many types of components in a short period of time in an analyzer using a laser light source.
  • the analysis apparatus is an analysis apparatus that irradiates a measurement cell into which a sample is introduced with light, detects the light that has passed through the measurement cell, and analyzes the component to be measured contained in the sample.
  • a first laser light source that is a quantum cascade laser, a second laser light source that is an interband cascade laser, and a third laser light source that is a semiconductor laser other than a quantum cascade laser and an interband cascade laser.
  • a laser light source a photodetector for detecting light emitted from each laser light source and passing through the measurement cell; .
  • the laser light source since a plurality of different types of semiconductor lasers are used as the laser light source, it is possible to increase the range of selection of the oscillation wavelength of the laser light compared to the case where a plurality of semiconductor lasers of the same type are used as the laser light source. , more types of components can be analyzed.
  • each laser light source is pulse-oscillated at different timings, it is possible to measure with other laser light sources while the pulse of one laser light source is turned off. can be analyzed. As a result, the analysis time can be shortened, and the power consumption can be reduced as compared with the case where each laser light source is oscillated with continuous wave (CW).
  • the quantum cascade laser due to its characteristics, consumes a large amount of power and generates a large amount of heat when oscillated by CW.
  • a quantum cascade laser is a semiconductor laser that uses intersubband transitions due to a multi-stage quantum well structure, and can mainly oscillate mid-infrared light of 4 to 20 ⁇ m.
  • An interband cascade laser is a semiconductor laser that uses interband transition of a multistage PN junction with a quantum well structure, and can mainly oscillate mid-infrared light of 3 to 5 ⁇ m.
  • Semiconductor lasers other than quantum cascade lasers and interband cascade lasers are semiconductor lasers using interband transition of a single PN junction with a quantum well structure, and mainly emit ultraviolet light, visible light or near-infrared light of 0.3 to 3 ⁇ m. It is capable of oscillating external light.
  • the analysis device is configured such that the light source control section causes the laser light sources to pulse-oscillate at the same oscillation cycle.
  • the light intensity signals corresponding to the respective laser light sources are sequentially output from the photodetector with the same time difference in each oscillation cycle, so that signal processing is facilitated and each component can be analyzed in a shorter time.
  • the analysis device is configured to detect light emitted from each laser light source and passing through the measurement cell with the photodetectors fewer than the number of the laser light sources. More preferably, the single photodetector is configured to detect the emitted light that has passed through the measurement cell. In this way, the photodetector can be shared among a plurality of laser light sources, so that the configuration of the device can be simplified and the size of the analysis device can be reduced.
  • each laser light source may be configured to emit laser light with oscillation wavelengths corresponding to different components to be measured.
  • the photodetector In order to detect light from a plurality of laser light sources with a single photodetector, it is preferable to have sensitivity to the oscillation wavelength of each laser light source. is preferred. In this case, in order to increase the response speed of the photodetector and analyze multiple components in a short time with a small number of photodetectors, it is preferable that the photodetector uses a quantum photoelectric element, Especially preferred is one that uses InAsSb or HgCdTe as a detection element.
  • the driving current and the driving voltage of the laser light source are changed at a predetermined frequency, so that the oscillation wavelength of the laser light output from the laser light source is adjusted to the peak of the component to be measured. It is often modulated to the center (wavelength sweep).
  • a base current or voltage for modulation (a value equal to or lower than a threshold value for pulse oscillation), which is different from a constant pulse current or pulse voltage for pulse oscillation of a quantum cascade laser, which is a laser light source, is set to a predetermined value. Modulation of the oscillation wavelength of a laser light source is described by varying the frequency.
  • the analysis device includes the first laser light source and the second laser light source or the third laser light source, and the light source control unit controls the base current or base voltage for modulation of the first laser light source to a predetermined value.
  • the frequency By changing the frequency, the oscillation wavelength of the first laser light source is modulated, and by changing the base current or base voltage for modulation of the second laser light source or the third laser light source at a predetermined frequency, the It is preferably configured to modulate the oscillation wavelength of the second laser light source or the third laser light source.
  • each laser light source By driving the second laser light source, which is an interband cascade laser, or the third laser light source, which is another semiconductor laser, in the same manner as the first laser light source, which is a quantum cascade laser, each laser light source , and the oscillation wavelength can be sufficiently modulated.
  • the reason why such a case is rare is that the quantum cascade laser has a relatively high driving power due to the difference in the operating principle of various laser light sources.
  • the wavelength modulation of interband cascade lasers and other semiconductor lasers has a relatively low drive power, so the temperature change of the element due to changes in the base current etc. is large. It has been found that the effect of the wavelength change on the wavelength modulation is reduced.
  • the present inventors have found that in interband cascade lasers and other semiconductor lasers, changes in the drive current for laser oscillation, etc., have a relatively large effect on wavelength modulation due to changes in the carrier density of the device. It was found that the wavelength modulation range can be widened by utilizing this effect.
  • the analysis device may include the first laser light source and the second laser light source or the third laser light source, and the light source control unit may control the base current for modulating the first laser light source.
  • the base voltage at a predetermined frequency by changing the base voltage at a predetermined frequency, the oscillation wavelength of the first laser light source is modulated, and the peak value of the pulse current or pulse voltage for pulse oscillation of the second laser light source or the third laser light source is adjusted.
  • the oscillation wavelength of the second laser light source or the third laser light source may be modulated by changing the frequency at a predetermined frequency.
  • the oscillation wavelength of the first laser light source which is a quantum cascade laser
  • the oscillation wavelength of the second laser light source which is an interband cascade laser
  • the third laser light source which is another semiconductor laser.
  • the oscillation wavelength can be modulated by changing the base value of the drive current or the like.
  • the second laser light source or the third laser light source which is dominated by the wavelength modulation effect due to the carrier density change of the element due to its characteristics, can be oscillated by changing the peak value of the drive current, that is, the pulse current. Wavelength modulation can be performed.
  • the component to be measured includes at least HCl and/or HF
  • the light source control unit sets the oscillation wavelength of one of the laser light sources to correspond to the optical absorption spectrum of HCl.
  • the oscillation wavelength of one of the laser light sources is preferably modulated so as to correspond to the light absorption spectrum of HF.
  • a concentration calculation unit that calculates the concentration of the component to be measured based on the output signal of the photodetector is provided, and the concentration calculation unit is 3.30 ⁇ m or more and 3.64 ⁇ m or less when measuring the concentration of HCl.
  • the concentration is calculated based on the absorption of HCl and the concentration of HF is measured, it is preferable to calculate the concentration based on the absorption of HF at 2.39 ⁇ m or more and 2.65 ⁇ m or less.
  • the second laser light source emits laser light having an oscillation wavelength including wavelengths of 3.30 ⁇ m to 3.64 ⁇ m.
  • the third laser light source emits laser light with oscillation wavelengths including wavelengths of 2.39 ⁇ m to 2.65 ⁇ m.
  • the analysis method of the present invention is an analysis method in which a measurement cell into which a sample has been introduced is irradiated with light, the light that has passed through the measurement cell is detected, and a component to be measured contained in the sample is analyzed.
  • a first laser light source that is a quantum cascade laser
  • a second laser light source that is an interband cascade laser
  • a third laser light source that is a semiconductor laser other than the quantum cascade laser and the interband cascade laser.
  • the light sources are pulse-oscillated at mutually different timings, and the light emitted from each laser light source and passed through the measurement cell is detected by a photodetector.
  • FIG. 1 is an overall schematic diagram of an analysis device according to an embodiment of the present invention
  • FIG. It is a functional block diagram of the signal processing device in the same embodiment. It is a figure which shows the drive current (voltage) and modulation signal of the 1st laser light source in the same embodiment. It is a figure which shows the drive current (voltage) and modulation signal of the 2nd laser light source in the same embodiment. It is a figure which shows the drive current (voltage) and modulation signal of the 3rd laser light source in the same embodiment.
  • FIG. 4 is a schematic diagram showing a method of modulating a laser oscillation wavelength in the same embodiment; It is a schematic diagram which shows the measurement principle by pseudo-continuous oscillation.
  • FIG. 4 is a schematic diagram showing an example of pulse oscillation timings and light intensity signals of a plurality of laser light sources in the embodiment; It is a schematic diagram which shows the structure of the signal separation part of the same embodiment. It is a figure which shows an example of the sample hold circuit of the same embodiment.
  • 5 is a time-series graph showing an example of an oscillation wavelength, light intensity I(t), logarithmic intensity L(t), feature signal F i (t), and correlation value S i in the same embodiment.
  • FIG. 10 is a diagram showing a conceptual diagram of concentration calculation using single correlation values and sample correlation values according to the same embodiment;
  • This analysis device 100 detects one or more types of measurement target components (here, for example, CO, CO 2 , N 2 O, NO, NO 2 , H 2 O, SO 2 , CH 4 , NH 3 , HF, HCl, H 2 S, HBr, HCN, etc.), and as shown in FIG. 1, a photodetector 3 provided on the optical path of the laser light transmitted through the measurement cell 1 and receiving the laser light, and the output signal of the photodetector 3.
  • a signal processing device 4 is provided for receiving a certain light intensity signal and calculating the concentration of the component to be measured based on the value thereof.
  • the cell 1 is made of a transparent material such as quartz, calcium fluoride, barium fluoride, etc., which hardly absorbs light in the absorption wavelength band of the component to be measured, and has a light entrance/exit port. Although not shown, the cell 1 is provided with an inlet port for introducing gas into the interior and an outlet port for discharging the internal gas. introduced within.
  • the laser light source 2 can modulate (change) the oscillation wavelength with a given current (or voltage).
  • the analysis device 100 of the present embodiment includes a plurality of semiconductor lasers having different oscillation wavelength ranges as the plurality of laser light sources 2, and specifically, a quantum cascade laser (QCL).
  • QCL quantum cascade laser
  • the quantum cascade laser which is the first laser light source 2a, is a semiconductor laser that uses intersubband transition due to a multi-stage quantum well structure, and oscillates laser light with a specific wavelength in the wavelength range of about 4 ⁇ m to about 20 ⁇ m.
  • the interband cascade laser which is the second laser light source 2b, is a semiconductor laser using interband transition of a multistage PN junction with a quantum well structure, and oscillates laser light of a specific wavelength in a wavelength range of about 3 ⁇ m to about 5 ⁇ m. It is something to do.
  • the third laser light source 2c is a semiconductor laser using a single PN junction interband transition with a quantum well structure, and can mainly oscillate ultraviolet light, visible light, and near-infrared light of 0.3 to 3 ⁇ m. It is a semiconductor laser that can The third laser light source 2c of this embodiment is a near-infrared laser diode that oscillates laser light with a specific wavelength in the wavelength range of approximately 1 ⁇ m to approximately 3 ⁇ m.
  • the photodetector 3 uses a quantum-type photoelectric element with good responsiveness, and in this embodiment, InAsSb is used as the detection element.
  • the detection element is not limited to this, and HgCdTe, InGaAs, PbSe, or the like may be used.
  • InAsSb which has sensitivity in a wide wavelength range
  • the light emitted from the plurality of laser light sources 2a to 2c and passing through the measurement cell 1 is detected by a single (common) photodetector. 3 is configured to detect. If the intensity of the laser light passing through the measuring cell 1 is high and the linearity of the photodetector 3 affects the measurement, a light intensity adjusting mechanism such as an optical attenuator may be provided on the optical path of the laser light. .
  • the signal processing device 4 comprises an analog electric circuit comprising buffers, amplifiers, etc., a digital electric circuit comprising a CPU, memory, etc., and an AD converter, a DA converter, etc., which mediate between the analog/digital electric circuits. be.
  • the signal processing device 4 performs light source control for controlling the output of each laser light source 2 as shown in FIG. 5, a signal separation unit 7 for separating the signal for each laser light source 2 from the light intensity signal obtained by the photodetector 3, and the signal for each laser light source 2 separated by the signal separation unit 7, and receive the value is calculated to calculate the concentration of the component to be measured.
  • the light source control unit 5 pulse-oscillates each of the plurality of laser light sources 2a to 2c and modulates the oscillation wavelength of the laser light at a predetermined frequency. Further, the light source control unit 5 controls the plurality of laser light sources 2a to 2c so that they have oscillation wavelengths corresponding to different components to be measured. pulse oscillation.
  • the light source control unit 5 outputs a current (or voltage) control signal to control the current source (or voltage source) of each of the laser light sources 2a to 2c so that the drive current of the current source (or voltage source) is (driving voltage) is set to be equal to or higher than a predetermined threshold for pulse oscillation.
  • the light source control unit 5 operates the laser light sources 2a to 2c by quasi-continuous pulse oscillation with a predetermined pulse width (for example, 10 to 100 ns, duty ratio of 5%) that is repeated at a predetermined cycle (for example, 0.5 to 5 MHz). Oscillate (pseudo CW).
  • the light source control unit 5 of this embodiment is configured to modulate the oscillation wavelengths of the laser light sources 2a to 2c by different control methods.
  • the light source control unit 5 controls the current source (or voltage source) of the first laser light source 2a as shown in FIG. is changed at a predetermined frequency to generate a change in the temperature of the element, thereby sweeping the oscillation wavelength of the first laser light source 2a.
  • the light source control unit 5 keeps the peak value of the pulse current (pulse voltage) for pulse oscillation of the current source (or voltage source) of the first laser light source 2a constant without changing it.
  • the light source control unit 5 controls the current sources (or voltage sources) of the second laser light source 2b and the third laser light source 2c, and controls the oscillation threshold value for pulse oscillation.
  • the light source controller 5 changes the base current (base voltage) of the current source (or voltage source) of the second laser light source 2b at a predetermined frequency.
  • the light source controller 5 keeps the base current of the current source (or voltage source) of the third laser light source 2c at a constant value or 0 without changing it.
  • the oscillation wavelength of the laser light from each of the laser light sources 2a to 2c is modulated around the peak of the light absorption spectrum of the component to be measured, as shown in FIG.
  • the modulation signal that changes the drive current is a signal that changes in a triangular wave, a sawtooth wave, or a sine wave, and has a frequency of, for example, 0.1 to 10 kHz. 3 to 5 show examples in which the modulated signal changes in a triangular waveform.
  • the light source control unit 5 controls the plurality of laser light sources 2a to 2c to have oscillation wavelengths corresponding to different components to be measured.
  • the light source controller 5 controls the first laser light source 2a.
  • the oscillation wavelength is modulated so as to correspond to the light absorption spectrum of each component.
  • the light source controller 5 modulates the oscillation wavelength of the second laser light source 2b so as to correspond to the optical absorption spectrum of HCl. Specifically, the light source control unit 5 sets the wavelength modulation range of the laser light of the second laser light source 2b to preferably 3.30 ⁇ m or more and 3.64 ⁇ m or less, more preferably 3.3355 ⁇ m, 3.3546 ⁇ m, or 3.3746 ⁇ m. , 3.5728 ⁇ m, or 3.6026 ⁇ m. Such modulation can reduce the interfering effects of H 2 O (water) and/or CH 4 (methane) and improve the accuracy of measuring the concentration of low concentrations of HCl.
  • H 2 O water
  • CH 4 methane
  • the light source controller 5 modulates the oscillation wavelength of the third laser light source 2c so as to correspond to the optical absorption spectrum of HF. Specifically, the light source control unit 5 sets the wavelength modulation range of the laser light of the second laser light source 2c to preferably 2.39 ⁇ m or more and 2.65 ⁇ m or less, more preferably 2.3958 ⁇ m, 2.4138 ⁇ m, and 2.4331 ⁇ m. , 2.4538 ⁇ m, or 2.6398 ⁇ m. By modulating in this way, the interfering effects of CO2 (carbon dioxide), CO (carbon monoxide), H2O (water) and/or CH4 (methane) can be reduced, and low concentrations of HF can improve the measurement accuracy of the concentration of
  • the light intensity signal obtained by the photodetector 3 by quasi-continuous oscillation of one laser light source 2 in this way is as shown in FIG. In this way, a light absorption spectrum (absorption signal) can be obtained for the entire pulse train.
  • the light source control unit 5 causes the laser light sources 2a to 2c to pulse-oscillate at mutually different timings. Specifically, as shown in FIG. 8, each of the laser light sources 2a to 2c sequentially pulse-oscillates, and one pulse of each of the other laser light sources 2 is included in one cycle of pulse oscillation of one laser light source 2. FIG. That is, adjacent pulses of one laser light source 2 include one pulse of each of the other laser light sources 2 . At this time, the pulses of the plurality of laser light sources 2 are oscillated so as not to overlap each other.
  • the signal separator 7 separates the signals of the plurality of laser light sources 2a to 2c from the light intensity signal obtained by the photodetector 3.
  • the signal separator 7 of the present embodiment includes a plurality of sample-and-hold circuits 71 provided corresponding to the plurality of laser light sources 2a to 2c, and the light intensity separated by the sample-and-hold circuits 71. and an AD converter 72 for digitally converting the signal.
  • the sample hold circuit 71 and AD converter 72 may be one common to the plurality of laser light sources 2a to 2c.
  • the sample hold circuit 71 detects the light intensity signal from the photodetector 3 at a timing synchronized with the timing of pulse oscillation of the laser light source 2 based on the sampling signal synchronized with the corresponding current (or voltage) control signal of the laser light source 2 . , separates and holds the corresponding laser light source 2 signal.
  • An example of the sample and hold circuit 71 is shown in FIG. 10, but it is not limited to this.
  • the sample hold circuit 71 is configured to separate and hold the signal corresponding to the latter half of the pulse oscillation of the laser light source 2 .
  • the opening/closing timing of the switch SW of the sample-and-hold circuit 71 synchronizes with the pulse oscillation timing of the laser light source 2 and holds the signal corresponding to the latter half of the pulse oscillation.
  • the sample-and-hold circuit 71 separates the signal at a predetermined sampling point in the latter half (for example, at 80 to 90 ns), as shown in FIG.
  • a predetermined sampling point in the latter half for example, at 80 to 90 ns
  • the signal processing unit 6 calculates the concentration of the component to be measured corresponding to each laser light source 2 .
  • the signal processing unit 6 is composed of a logarithm operation unit 61, a correlation value calculation unit 62, a storage unit 63, a concentration calculation unit 64, and the like.
  • the logarithmic calculator 61 performs logarithmic calculation on the light intensity signal, which is the output signal of the photodetector 3 .
  • the function I(t) representing the change over time of the light intensity signal obtained by the photodetector 3 becomes "light intensity I(t)" in FIG. logarithmic intensity L(t)".
  • the correlation value calculator 62 calculates correlation values between an intensity-related signal related to the intensity of the sample light and a plurality of predetermined feature signals.
  • a feature signal is a signal for extracting a waveform feature of an intensity-related signal by taking a correlation with the intensity-related signal.
  • the feature signal for example, a sine wave signal or various signals matching waveform features desired to be extracted from other intensity-related signals can be used.
  • the correlation value calculator 62 calculates correlation values between an intensity-related signal related to the intensity of the sample light and a plurality of feature signals that provide a correlation different from a sine wave signal (sine function) with respect to the intensity-related signal. Calculate Here, the correlation value calculator 62 uses the logarithmically calculated optical intensity signal (logarithmic intensity L(t)) as the intensity-related signal.
  • the correlation value calculator 62 calculates the correlation value S Find i . Further, the correlation value calculator 62 calculates the reference correlation value R Find i . Then, the correlation value calculator 62 calculates a sample correlation value S i ′ by subtracting the reference correlation value R i from the correlation value S i as shown in the above equation (Equation 1). As a result, the offset contained in the sample correlation value is removed, the correlation value is proportional to the concentrations of the measurement target component and the interfering component, and the measurement error can be reduced. Note that the configuration may be such that the reference correlation value is not subtracted.
  • the acquisition timing of the reference light is simultaneous with the sample light, before or after the measurement, or any timing.
  • the reference light intensity-related signal or the reference correlation value may be acquired in advance and stored in the storage unit 63 .
  • a method of obtaining reference light simultaneously is, for example, to provide two photodetectors 3 and split the modulated light from the laser light source 2 by a beam splitter or the like, one for sample light measurement and the other for reference light. It is conceivable to use it for optical measurement.
  • the correlation value calculator 62 uses, as the plurality of feature signals F i (t), a function that makes it easier to capture the waveform feature of the logarithmic intensity L(t) than a sine function.
  • a sample gas containing a measurable component (eg SO 2 ) and one interfering component (eg H 2 O) it is conceivable to use two or more feature signals F 1 (t), F 2 (t).
  • the two feature signals F 1 (t) and F 2 (t) for example, a function based on a Lorentz function close to the shape of the absorption spectrum and a differential function of the function based on the Lorentz function can be used. can be considered.
  • a function based on the Voigt function, a function based on the Gaussian function, or the like can be used instead of the function based on the Lorentz function.
  • the offset of the feature signal so that the DC component is removed, that is, the feature signal becomes zero when integrated over the modulation period.
  • the DC component of the intensity-related signal may be removed, or the DC component of both the feature signal and the intensity-related signal may be removed.
  • actual measurement values of the absorption signals of the component to be measured and/or the interference component, or their imitations may be used as the characteristic signals.
  • the feature of the logarithmic intensity L(t) can be more efficiently It is possible to extract and improve the accuracy of the concentration obtained by the simultaneous equations described later.
  • the storage unit 63 stores the unit concentrations of the measurement target component and each interference component obtained from the respective intensity-related signals and the plurality of feature signals F i (t) when the measurement target component and each interference component exist alone. It stores a single correlation value that is a winning correlation value.
  • the multiple feature signals F i (t) used to obtain the single correlation value are the same as the multiple feature signals F i (t) used in the correlation value calculator 62 .
  • the storage unit 63 subtracts the reference correlation value from the correlation value when the measurement target component and each interference component exist alone, and then performs correction for conversion per unit concentration. It is desirable to store a single correlation value that As a result, the offset included in the single correlation value is removed, and the correlation value becomes proportional to the concentrations of the measurement target component and the interfering component, thereby reducing measurement errors. Note that the configuration may be such that the reference correlation value is not subtracted.
  • the concentration calculator 64 calculates the concentration of the component to be measured using the plurality of sample correlation values obtained by the correlation value calculator 62 .
  • the concentration calculator 64 calculates the concentration of the component to be measured based on the plurality of sample correlation values obtained by the correlation value calculator 62 and the plurality of single correlation values stored in the storage unit 63. It is. More specifically, the concentration calculator 64 calculates a plurality of sample correlation values obtained by the correlation value calculator 62, a plurality of single correlation values stored in the storage unit 63, and the measurement target component and each interference component. Concentrations of one or more types of components to be measured contained in the sample gas are calculated by solving simultaneous equations consisting of the concentrations.
  • the sample gas contains one component to be measured (eg SO 2 ) and one interfering component (eg H 2 O).
  • one component to be measured eg SO 2
  • one interfering component eg H 2 O
  • the light source controller 5 controls the laser light sources 2a to 2c to modulate the wavelength of the laser light at the modulation frequency and centering on the peak of the absorption spectrum of the component to be measured.
  • the reference correlation value may be measured by performing the reference measurement using the zero gas.
  • a span gas (a gas with a known component concentration) into the cell 1 to perform a reference measurement.
  • This reference measurement is performed for each of a span gas in which the component to be measured exists alone and a span gas in which the interfering component alone exists.
  • the logarithmic calculator 61 receives the output signal of the photodetector 3 and calculates the logarithmic intensity L(t). Then, the correlation value calculator 62 calculates the correlation value between the logarithmic intensity L(t) and the two feature signals F 1 (t) and F 2 (t), and subtracts the reference correlation value from the correlation value. By dividing by the concentration of the span gas, a single correlation value, which is the correlation value for each span gas per unit concentration, is calculated. Instead of calculating the single correlation value per unit concentration, the relationship between the span gas concentration and the single correlation value of the span gas may be stored.
  • the correlation value calculator 62 calculates the correlation values S 1t and S 2t of the measurement target component (see FIG. 12).
  • S 1t is the correlation value with the first feature signal
  • S 2t is the correlation value with the second feature signal.
  • the correlation value calculator 62 divides the result obtained by subtracting the reference correlation value R i from the correlation values S 1t and S 2t by the span gas concentration c t of the component to be measured, thereby obtaining the single correlation values s 1t and s 2t . calculate.
  • the span gas concentration ct of the component to be measured is input to the signal processing unit 6 in advance by a user or the like.
  • the correlation value calculator 62 calculates the correlation values S 1i and S 2i of the interference component (see FIG. 12).
  • S 1i is the correlation value with the first feature signal
  • S 2i is the correlation value with the second feature signal.
  • the correlation value calculator 62 then divides the result of subtracting the reference correlation value from the correlation values S 1i and S 2i by the span gas concentration c i of the interfering component to calculate the single correlation values s 1i and s 2i .
  • the span gas concentration ci of the interference component is input to the signal processing unit 6 in advance by a user or the like.
  • the single correlation values s 1t , s 2t , s 1i , and s 2i calculated as described above are stored in the storage unit 63 . Note that this reference measurement may be performed before product shipment, or may be performed periodically.
  • a light source control unit 5 controls each of the laser light sources 2a to 2c to modulate the wavelength of the laser light at the modulation frequency and around the peak of the absorption spectrum of the component to be measured.
  • a sample gas is then introduced into the cell 1 by an operator or automatically, and a sample measurement is performed.
  • the logarithmic calculator 61 receives the output signal of the photodetector 3 and calculates the logarithmic intensity L(t). Then, the correlation value calculator 62 calculates sample correlation values between the logarithmic intensity L(t) and the plurality of feature signals F 1 (t) and F 2 (t), and based on the correlation values, the reference correlation value R i are subtracted to calculate the sample correlation values S 1 ′ and S 2 ′ (see FIG. 12).
  • the concentration calculation unit 64 calculates the sample correlation values S 1 ′ and S 2 ′ calculated by the correlation value calculation unit 62, the single correlation values s 1t , s 2t , s 1i , and s 2i in the storage unit 63, and the measurement target. Solve the following system of binary equations consisting of the components and the respective concentrations C tar , C int of each interfering component.
  • the concentration C tar of the component to be measured from which the influence of interference has been removed can be determined by a simple and reliable calculation of solving the simultaneous equations of the above equation (Equation 2).
  • the interference effect can be obtained in the same way.
  • the concentration of the removed measurand can be determined.
  • Equation 3 By solving the n-dimensional simultaneous equations represented by this equation (Equation 3), it is possible to determine the concentration of each gas of the component to be measured and the interfering component.
  • the analyzer 100 of the present embodiment configured as described above, three different types of semiconductor lasers are used as the laser light sources 2a to 2c.
  • the range of selection of light oscillation wavelengths can be increased, and more types of components can be analyzed.
  • the laser light sources 2a to 2c are pulse-oscillated at mutually different timings, it is possible to perform measurement using other laser light sources while the pulses of a certain laser light source are turned off. Components can be analyzed simultaneously. Therefore, the analysis time can be shortened, and the power consumption can be reduced as compared with the case where each laser light source is oscillated by continuous wave (CW).
  • CW continuous wave
  • the logarithmic calculator 61 in each of the above-described embodiments logarithmically calculates the light intensity signal of the photodetector 3.
  • the intensity of the sample light and the reference light It is also possible to calculate the logarithm (so-called absorbance) of the ratio to the intensity of the modulated light.
  • the logarithmic calculator 61 may calculate the logarithm of the intensity of the sample light, calculate the logarithm of the intensity of the reference light, and then subtract them to calculate the absorbance. After obtaining the ratio of the intensity of , the absorbance may be calculated by taking the logarithm of the ratio.
  • the correlation value calculator 62 in each of the above embodiments calculates the correlation value between the intensity-related signal and the feature signal, but instead calculates the inner product value of the intensity-related signal and the feature signal. good too.
  • the storage unit 63 stores the single correlation value corrected using the reference correlation value.
  • the unit 64 may be configured to subtract the reference correlation value from the uncorrected single correlation value and then obtain the corrected single correlation value for conversion per unit density.
  • the plurality of feature signals are not limited to the above embodiment, and may be different functions. Further, as the feature signal, for example, a function indicating a waveform (sample spectrum) of light intensity, logarithmic intensity, or absorbance obtained by flowing a span gas of known concentration may be used. Also, when measuring the concentration of one component to be measured, at least one characteristic signal is sufficient.
  • the number of single correlation values and sample correlation values larger than the number of gas kinds is obtained using feature signals of more than n kinds, It is also possible to create simultaneous equations with a greater number of elements than the number of gas species, and determine the concentration of each component by the least squares method. Become.
  • the signal processing unit of the embodiment uses an intensity-related signal related to the intensity of the sample light and a feature signal that provides a predetermined correlation with the intensity-related signal to obtain a concentration-dependent measurement of the component to be measured. function of the correlation value calculation unit for calculating the correlation value and the concentration calculation unit for calculating the concentration of the component to be measured using the correlation value obtained by the correlation value calculation unit. may be used.
  • the oscillation wavelength of the laser light source 2 is modulated, but the oscillation wavelength of the laser light source 2 may be fixed.
  • the plurality of laser light sources 2 are pulse-oscillated with the same oscillation cycle, but the oscillation cycles of the laser light sources 2 may be different from each other.
  • the light source control unit 5 of another embodiment sets the base current (or base voltage) of the current source (or voltage source) of the second laser light source 2b to a constant value or 0 as shown in FIG.
  • the base current of the current source (or voltage source) of the third laser light source 2c may be changed at a predetermined frequency. Even in this way, if the peak value of the pulse current (or pulse voltage) of the current source (or voltage source) of each of the second laser light source 2b and the third laser light source 2c is changed at a predetermined frequency, It is possible to sufficiently modulate the oscillation wavelengths of the second laser light source 2b and the third laser light source 2c by generating a change in the carrier density of the device.
  • the light source control unit 5 controls the peak of the pulse current (or pulse voltage) for pulse oscillation of the current source (or voltage source) of the second laser light source 2b, similarly to the control of the first laser light source 2a.
  • the base current (or base voltage) of the current source (or voltage source) of the second laser light source 2b may be changed at a predetermined frequency while maintaining a constant value without changing the value. Also in this way, the oscillation wavelength can be modulated by generating a temperature change in the element of the second laser light source 2b.
  • the light source control unit 5 changes the peak value of the pulse current (or pulse voltage) for pulse oscillation of the current source (or voltage source) of the third laser light source 2c, similarly to the control of the first laser light source 2a.
  • the base current (or base voltage) of the current source (or voltage source) of the third laser light source 2c may be varied at a predetermined frequency while maintaining a constant value. Also in this way, the oscillation wavelength can be modulated by generating a temperature change in the element of the third laser light source 2c.
  • the analysis device 100 of another embodiment may not include all of the first laser light source 2a, the second laser light source 2b, and the third laser light source 2c. At least two types selected from the third laser light source 2c may be provided.
  • the third laser light source 2c in the above embodiment was a laser diode that oscillates near-infrared light, but it is not limited to this. In another embodiment, the third laser light source 2c may be a laser diode that oscillates visible light or ultraviolet light.
  • the concentrations of a plurality of components to be measured contained in the sample gas are measured using a plurality of laser light sources 2.
  • other measurement items are also measured. may be
  • sample gas may be not only exhaust gas, but also air, gas during combustion, process gas generated in a chemical plant, etc., or liquid or solid.
  • the present invention can be applied not only to gases, but also to liquids and solids as components to be measured.
  • it can be used not only for the absorbance of light transmitted through a measurement target, but also for the calculation of the absorbance by reflection.
  • the same component to be measured may be analyzed using light sources with different oscillation wavelengths. As a result, the amount of information can be increased and the influence of interference can be further reduced.
  • the photodetector 3 of the above embodiment uses InAsSb as a detection element, it is not limited to this. If the detection element is sensitive to the oscillation wavelength of each of the laser light sources 2a to 2c used, the light emitted from the plurality of laser light sources 2a to 2c and passed through the measurement cell 1 is detected by a single (common) photodetector 3. can be detected by In addition to InAsSb, HgCdTe and the like can be used as such detection elements. However, HgCdTe is more expensive than InAsSb and contains environmentally hazardous substances, so it is preferable to use InAsSb as the detection element.
  • the light emitted from the plurality of laser light sources 2a to 2c and passed through the measurement cell 1 is detected by the single photodetector 3, but the present invention is not limited to this.
  • a plurality of photodetectors 3 may be provided corresponding to each laser light source 2a-2c.
  • the photodetector 3 does not have to use a quantum-type photoelectric element with excellent responsiveness, and other types such as a relatively inexpensive thermal type such as a thermopile may be used.
  • a band-pass filter or the like may be provided on the optical path of the laser light that has passed through the measurement cell 1 to separate the wavelengths of the laser light and detect them with a plurality of photodetectors 3 .
  • the signal separation section 7 is configured using an analog electric circuit (sample and hold circuit 71), but it may be configured using a digital electric circuit.
  • sample and hold circuit 71 the signal separation section 7 is configured using an analog electric circuit (sample and hold circuit 71), but it may be configured using a digital electric circuit.
  • AD converter the light intensity signal from the photodetector 3 into a digital signal by an AD converter.
  • the signal separation unit 7 may separate an offset signal, which is a signal when the pulses of the plurality of laser light sources 2a to 2c are turned off, from the light intensity signal of the photodetector 3. good.
  • the signal processing unit 6 uses this offset signal to correct the light intensity signal of the photodetector 3 in the reference measurement and sample measurement.
  • the offset signal of the photodetector 3 can be obtained almost simultaneously with the pulse oscillation, so that the change in the offset signal due to disturbance can be captured, enabling accurate analysis.
  • the analysis device 100 can be applied to a plurality of types of analysis, for example, it may be applied to analyze a plurality of different types of components, and the same component can be divided into, for example, low-concentration and high-concentration. may be applied to analyze
  • the analyzer 100 of another embodiment may be configured to cause continuous wave (CW) oscillation of one or more of the laser light sources 2a to 2c other than the quantum cascade laser.
  • the analysis device 100 of another embodiment oscillates the interband cascade laser that is the second laser light source 2b and the semiconductor laser that is the third laser light source 2c into continuous wave (CW) oscillation, and the first laser with high power consumption It may be configured such that only the quantum cascade laser, which is the light source 2a, is pulse-oscillated. In this case, it is preferable to provide a plurality of photodetectors 3 respectively corresponding to the laser light sources 2a to 2c.
  • the laser light source Even with such a configuration, different types of semiconductor lasers are used as the laser light source, so that the range of selection of the oscillation wavelength of the laser light is increased compared to the case where the same type of multiple semiconductor lasers are used as the laser light source. can be used to analyze more types of components. Further, by providing a plurality of photodetectors 3 corresponding to the respective laser light sources 2a to 2c, simultaneous measurement by the laser light sources 2a to 2c becomes possible, and a plurality of components can be analyzed simultaneously. As a result, the analysis time can be shortened, and power consumption can be reduced. Note that one or more of the laser light sources 2a to 2c may be configured to oscillate continuous wave (CW).
  • CW continuous wave
  • Analysis equipment that uses a laser light source will be able to analyze many types of components in a short period of time.

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