JPWO2023106026A5 - - Google Patents
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- Publication number
- JPWO2023106026A5 JPWO2023106026A5 JP2023566177A JP2023566177A JPWO2023106026A5 JP WO2023106026 A5 JPWO2023106026 A5 JP WO2023106026A5 JP 2023566177 A JP2023566177 A JP 2023566177A JP 2023566177 A JP2023566177 A JP 2023566177A JP WO2023106026 A5 JPWO2023106026 A5 JP WO2023106026A5
- Authority
- JP
- Japan
- Prior art keywords
- imaging device
- wiring
- peripheral circuit
- intermediate layer
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 claims 19
- 230000000903 blocking effect Effects 0.000 claims 7
- 230000002093 peripheral effect Effects 0.000 claims 7
- 230000004888 barrier function Effects 0.000 claims 5
- 229910052782 aluminium Inorganic materials 0.000 claims 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 3
- 238000006243 chemical reaction Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021199024 | 2021-12-08 | ||
| PCT/JP2022/041782 WO2023106026A1 (ja) | 2021-12-08 | 2022-11-09 | 撮像装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023106026A1 JPWO2023106026A1 (https=) | 2023-06-15 |
| JPWO2023106026A5 true JPWO2023106026A5 (https=) | 2024-08-22 |
Family
ID=86730383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023566177A Pending JPWO2023106026A1 (https=) | 2021-12-08 | 2022-11-09 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20240321916A1 (https=) |
| JP (1) | JPWO2023106026A1 (https=) |
| CN (1) | CN118266083A (https=) |
| WO (1) | WO2023106026A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025197634A1 (ja) * | 2024-03-22 | 2025-09-25 | パナソニックＩｐマネジメント株式会社 | 基板および撮像装置ならびにこれらの製造方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002164381A (ja) * | 2000-11-28 | 2002-06-07 | Sony Corp | 半導体装置及びその製造方法 |
| JP2002367956A (ja) * | 2001-04-06 | 2002-12-20 | Seiko Epson Corp | 半導体装置の電極パッド及びその製造方法 |
| JP2006294798A (ja) * | 2005-04-08 | 2006-10-26 | Fuji Photo Film Co Ltd | 半導体装置およびその製造方法 |
| JP2012114197A (ja) * | 2010-11-24 | 2012-06-14 | Panasonic Corp | 固体撮像装置及びその製造方法 |
| JP6233717B2 (ja) * | 2012-12-28 | 2017-11-22 | パナソニックＩｐマネジメント株式会社 | 固体撮像装置およびその製造方法 |
| JP2016033980A (ja) * | 2014-07-31 | 2016-03-10 | キヤノン株式会社 | 撮像デバイス、撮像装置および撮像システム |
| KR102491580B1 (ko) * | 2015-12-15 | 2023-01-25 | 삼성전자주식회사 | 이미지 센서 및 그 제조 방법 |
| JP2019016667A (ja) * | 2017-07-05 | 2019-01-31 | ソニーセミコンダクタソリューションズ株式会社 | 撮像素子および撮像装置 |
| JP7645477B2 (ja) * | 2019-10-28 | 2025-03-14 | パナソニックＩｐマネジメント株式会社 | 撮像装置 |
-
2022
- 2022-11-09 CN CN202280076350.9A patent/CN118266083A/zh active Pending
- 2022-11-09 WO PCT/JP2022/041782 patent/WO2023106026A1/ja not_active Ceased
- 2022-11-09 JP JP2023566177A patent/JPWO2023106026A1/ja active Pending
-
2024
- 2024-05-23 US US18/672,455 patent/US20240321916A1/en active Pending
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