JPWO2023067947A5 - - Google Patents
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- Publication number
- JPWO2023067947A5 JPWO2023067947A5 JP2023555032A JP2023555032A JPWO2023067947A5 JP WO2023067947 A5 JPWO2023067947 A5 JP WO2023067947A5 JP 2023555032 A JP2023555032 A JP 2023555032A JP 2023555032 A JP2023555032 A JP 2023555032A JP WO2023067947 A5 JPWO2023067947 A5 JP WO2023067947A5
- Authority
- JP
- Japan
- Prior art keywords
- supply
- pipe
- purge gas
- flow rate
- purge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021172598 | 2021-10-21 | ||
| PCT/JP2022/034096 WO2023067947A1 (ja) | 2021-10-21 | 2022-09-12 | パージシステム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023067947A1 JPWO2023067947A1 (https=) | 2023-04-27 |
| JPWO2023067947A5 true JPWO2023067947A5 (https=) | 2024-06-07 |
Family
ID=86059057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023555032A Pending JPWO2023067947A1 (https=) | 2021-10-21 | 2022-09-12 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20250226254A1 (https=) |
| JP (1) | JPWO2023067947A1 (https=) |
| CN (1) | CN117882182A (https=) |
| TW (1) | TWI899511B (https=) |
| WO (1) | WO2023067947A1 (https=) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005167168A (ja) * | 2003-12-02 | 2005-06-23 | Dan-Takuma Technologies Inc | パージバルブおよび保管装置 |
| JP5716968B2 (ja) * | 2012-01-04 | 2015-05-13 | 株式会社ダイフク | 物品保管設備 |
| JP6087161B2 (ja) * | 2012-02-03 | 2017-03-01 | 東京エレクトロン株式会社 | 基板収容容器のパージ方法 |
| KR101903441B1 (ko) * | 2014-06-16 | 2018-10-02 | 무라다기카이가부시끼가이샤 | 퍼지 장치, 퍼지 시스템, 퍼지 방법 및 퍼지 시스템에 있어서의 제어 방법 |
| JP6856015B2 (ja) * | 2017-12-20 | 2021-04-14 | 株式会社ダイフク | 保管設備 |
-
2022
- 2022-09-12 WO PCT/JP2022/034096 patent/WO2023067947A1/ja not_active Ceased
- 2022-09-12 CN CN202280058010.3A patent/CN117882182A/zh active Pending
- 2022-09-12 US US18/700,352 patent/US20250226254A1/en active Pending
- 2022-09-12 JP JP2023555032A patent/JPWO2023067947A1/ja active Pending
- 2022-10-14 TW TW111138940A patent/TWI899511B/zh active
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