JPWO2022264796A5 - - Google Patents

Download PDF

Info

Publication number
JPWO2022264796A5
JPWO2022264796A5 JP2023529753A JP2023529753A JPWO2022264796A5 JP WO2022264796 A5 JPWO2022264796 A5 JP WO2022264796A5 JP 2023529753 A JP2023529753 A JP 2023529753A JP 2023529753 A JP2023529753 A JP 2023529753A JP WO2022264796 A5 JPWO2022264796 A5 JP WO2022264796A5
Authority
JP
Japan
Prior art keywords
straight line
line portion
acceleration sensor
movable electrode
straight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023529753A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022264796A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/021988 external-priority patent/WO2022264796A1/ja
Publication of JPWO2022264796A1 publication Critical patent/JPWO2022264796A1/ja
Publication of JPWO2022264796A5 publication Critical patent/JPWO2022264796A5/ja
Pending legal-status Critical Current

Links

JP2023529753A 2021-06-16 2022-05-30 Pending JPWO2022264796A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021100295 2021-06-16
PCT/JP2022/021988 WO2022264796A1 (ja) 2021-06-16 2022-05-30 加速度センサ

Publications (2)

Publication Number Publication Date
JPWO2022264796A1 JPWO2022264796A1 (https=) 2022-12-22
JPWO2022264796A5 true JPWO2022264796A5 (https=) 2024-03-21

Family

ID=84527434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023529753A Pending JPWO2022264796A1 (https=) 2021-06-16 2022-05-30

Country Status (4)

Country Link
US (1) US20240044937A1 (https=)
JP (1) JPWO2022264796A1 (https=)
CN (1) CN117501132A (https=)
WO (1) WO2022264796A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0877255A1 (en) * 1997-05-09 1998-11-11 TMS Technologies, Inc. Micromechanical Accelerometer for Automotive Applications
US6632698B2 (en) * 2001-08-07 2003-10-14 Hewlett-Packard Development Company, L.P. Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS
CN100487461C (zh) * 2007-07-12 2009-05-13 上海交通大学 金属电容式微加速度计
JP2010210424A (ja) * 2009-03-10 2010-09-24 Panasonic Electric Works Co Ltd 加速度センサ
JP2019049434A (ja) * 2017-09-08 2019-03-28 ローム株式会社 加速度センサ
JP2021053714A (ja) * 2019-09-27 2021-04-08 セイコーエプソン株式会社 周波数調整方法、ｍｅｍｓ構造体および慣性センサー

Similar Documents

Publication Publication Date Title
JP6616617B2 (ja) バスバー
CN109285459B (zh) 一种可折叠显示面板的支撑板及可折叠显示装置
JP2014042029A5 (https=)
JP2013149237A5 (https=)
JP2016092411A5 (https=)
JP2017203656A5 (https=)
JPWO2021241320A5 (https=)
JPWO2022264796A5 (https=)
JPWO2022230958A5 (https=)
JP2003172745A5 (https=)
CN105826291B (zh) 引线框
FI4273522T3 (fi) Kiekko
US9547021B2 (en) Acceleration sensor
JP2020519449A5 (https=)
JP6374712B2 (ja) 鉄筋コンクリート造基礎梁の補強構造及び補強用ユニット
US9869691B2 (en) Spring-mass system with a small transverse displacement
CN108593059B (zh) 一种多梁式结构弹性元件
JP2013217835A (ja) 半導体物理量センサ
IT202300019974A1 (it) Metamateriale mems e dispositivo mems incorporante il metamateriale mems
KR200493497Y1 (ko) 완구 기차 조립체
CN219873781U (zh) 电池包
JPWO2022230879A5 (https=)
CN109210361B (zh) 一种二维负泊松比结构
CN223721008U (zh) 一种轻型抗弯曲的框式车架
TH2201006274A (th) อุปกรณ์สปริงขด