JPWO2022239800A1 - - Google Patents

Info

Publication number
JPWO2022239800A1
JPWO2022239800A1 JP2023521222A JP2023521222A JPWO2022239800A1 JP WO2022239800 A1 JPWO2022239800 A1 JP WO2022239800A1 JP 2023521222 A JP2023521222 A JP 2023521222A JP 2023521222 A JP2023521222 A JP 2023521222A JP WO2022239800 A1 JPWO2022239800 A1 JP WO2022239800A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023521222A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022239800A1 publication Critical patent/JPWO2022239800A1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
    • G01N15/0227—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging using imaging, e.g. a projected image of suspension; using holography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
    • G01N15/0211—Investigating a scatter or diffraction pattern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Electro-optical investigation, e.g. flow cytometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Electro-optical investigation, e.g. flow cytometers
    • G01N15/1434—Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G01N2015/1029—
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/073—Investigating materials by wave or particle radiation secondary emission use of a laser

Landscapes

  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2023521222A 2021-05-13 2022-05-11 Pending JPWO2022239800A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021081726 2021-05-13
PCT/JP2022/019944 WO2022239800A1 (ja) 2021-05-13 2022-05-11 パーティクルモニタシステム、パーティクルモニタ方法およびモニタ装置

Publications (1)

Publication Number Publication Date
JPWO2022239800A1 true JPWO2022239800A1 (ja) 2022-11-17

Family

ID=84029197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023521222A Pending JPWO2022239800A1 (ja) 2021-05-13 2022-05-11

Country Status (6)

Country Link
US (1) US20240068921A1 (ja)
JP (1) JPWO2022239800A1 (ja)
KR (1) KR20240007662A (ja)
CN (1) CN117321404A (ja)
TW (1) TW202301400A (ja)
WO (1) WO2022239800A1 (ja)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3317880B2 (ja) * 1997-07-25 2002-08-26 日本電気株式会社 パーティクルモニタ装置
JP3112002B2 (ja) * 1998-11-19 2000-11-27 日本電気株式会社 パーティクルモニタ装置
JP2009231562A (ja) * 2008-03-24 2009-10-08 Tokyo Electron Ltd 観測用基板及び観測システム
JP5474609B2 (ja) 2010-03-02 2014-04-16 東京エレクトロン株式会社 パーティクル数計測方法
JP6114129B2 (ja) * 2013-07-09 2017-04-12 株式会社ニューフレアテクノロジー パーティクル測定方法
JP6966858B2 (ja) * 2017-03-30 2021-11-17 倉敷紡績株式会社 性状測定装置及び性状測定方法
JP2019067942A (ja) * 2017-10-02 2019-04-25 国立研究開発法人産業技術総合研究所 材料評価装置

Also Published As

Publication number Publication date
US20240068921A1 (en) 2024-02-29
TW202301400A (zh) 2023-01-01
WO2022239800A1 (ja) 2022-11-17
KR20240007662A (ko) 2024-01-16
CN117321404A (zh) 2023-12-29

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Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20240312