JPWO2022230577A5 - - Google Patents
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- JPWO2022230577A5 JPWO2022230577A5 JP2023517200A JP2023517200A JPWO2022230577A5 JP WO2022230577 A5 JPWO2022230577 A5 JP WO2022230577A5 JP 2023517200 A JP2023517200 A JP 2023517200A JP 2023517200 A JP2023517200 A JP 2023517200A JP WO2022230577 A5 JPWO2022230577 A5 JP WO2022230577A5
- Authority
- JP
- Japan
- Prior art keywords
- diagram showing
- present
- schematic configuration
- configuration diagram
- ttv
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025062160A JP2025102965A (ja) | 2021-04-28 | 2025-04-04 | 積層構造体、半導体装置及び下地基板 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021076657 | 2021-04-28 | ||
| JP2021076657 | 2021-04-28 | ||
| PCT/JP2022/015911 WO2022230577A1 (ja) | 2021-04-28 | 2022-03-30 | 積層構造体、半導体装置及び積層構造体の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025062160A Division JP2025102965A (ja) | 2021-04-28 | 2025-04-04 | 積層構造体、半導体装置及び下地基板 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022230577A1 JPWO2022230577A1 (https=) | 2022-11-03 |
| JPWO2022230577A5 true JPWO2022230577A5 (https=) | 2024-01-26 |
| JP7663680B2 JP7663680B2 (ja) | 2025-04-16 |
Family
ID=83847408
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023517200A Active JP7663680B2 (ja) | 2021-04-28 | 2022-03-30 | 積層構造体、半導体装置及び積層構造体の製造方法 |
| JP2025062160A Pending JP2025102965A (ja) | 2021-04-28 | 2025-04-04 | 積層構造体、半導体装置及び下地基板 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025062160A Pending JP2025102965A (ja) | 2021-04-28 | 2025-04-04 | 積層構造体、半導体装置及び下地基板 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20240250115A1 (https=) |
| EP (1) | EP4332279A4 (https=) |
| JP (2) | JP7663680B2 (https=) |
| KR (1) | KR20240000497A (https=) |
| CN (2) | CN117321256A (https=) |
| TW (2) | TWM633282U (https=) |
| WO (1) | WO2022230577A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM633935U (zh) * | 2021-04-07 | 2022-11-11 | 日商信越化學工業股份有限公司 | 積層體的製造系統、積層體以及半導體裝置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101159658B1 (ko) * | 2006-12-28 | 2012-06-25 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 사파이어 기판 연마 방법 |
| JP5793732B2 (ja) | 2011-07-27 | 2015-10-14 | 高知県公立大学法人 | ドーパントを添加した結晶性の高い導電性α型酸化ガリウム薄膜およびその生成方法 |
| US10090388B2 (en) | 2014-03-31 | 2018-10-02 | Flosfia Inc. | Crystalline multilayer structure and semiconductor device |
| JP7053539B2 (ja) * | 2019-08-02 | 2022-04-12 | 信越化学工業株式会社 | 積層体、半導体膜、半導体装置、半導体システム及び積層体の製造方法 |
-
2022
- 2022-03-22 TW TW111202820U patent/TWM633282U/zh unknown
- 2022-03-22 TW TW111110480A patent/TW202242209A/zh unknown
- 2022-03-30 EP EP22795493.0A patent/EP4332279A4/en active Pending
- 2022-03-30 CN CN202280030633.XA patent/CN117321256A/zh active Pending
- 2022-03-30 US US18/287,939 patent/US20240250115A1/en active Pending
- 2022-03-30 CN CN202220709474.3U patent/CN221421215U/zh active Active
- 2022-03-30 KR KR1020237036427A patent/KR20240000497A/ko not_active Withdrawn
- 2022-03-30 WO PCT/JP2022/015911 patent/WO2022230577A1/ja not_active Ceased
- 2022-03-30 JP JP2023517200A patent/JP7663680B2/ja active Active
-
2025
- 2025-04-04 JP JP2025062160A patent/JP2025102965A/ja active Pending
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