JPWO2022202396A1 - - Google Patents
Info
- Publication number
- JPWO2022202396A1 JPWO2022202396A1 JP2023509013A JP2023509013A JPWO2022202396A1 JP WO2022202396 A1 JPWO2022202396 A1 JP WO2022202396A1 JP 2023509013 A JP2023509013 A JP 2023509013A JP 2023509013 A JP2023509013 A JP 2023509013A JP WO2022202396 A1 JPWO2022202396 A1 JP WO2022202396A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
- B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021051493 | 2021-03-25 | ||
| PCT/JP2022/010829 WO2022202396A1 (ja) | 2021-03-25 | 2022-03-11 | 基板搬送装置、塗布処理装置、基板搬送方法および基板搬送プログラム |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022202396A1 true JPWO2022202396A1 (https=) | 2022-09-29 |
Family
ID=83397111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023509013A Ceased JPWO2022202396A1 (https=) | 2021-03-25 | 2022-03-11 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPWO2022202396A1 (https=) |
| TW (1) | TW202301531A (https=) |
| WO (1) | WO2022202396A1 (https=) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005132626A (ja) * | 2003-10-06 | 2005-05-26 | Sumitomo Heavy Ind Ltd | 搬送装置、塗布システム、及び検査システム |
| JPWO2005004230A1 (ja) * | 2003-07-04 | 2006-11-09 | ローツェ株式会社 | 薄板状基板の搬送装置、及びその搬送制御方法 |
| JP2008302487A (ja) * | 2007-06-11 | 2008-12-18 | Olympus Corp | 基板吸着装置及び基板搬送装置並びに外観検査装置 |
| JP2009117571A (ja) * | 2007-11-06 | 2009-05-28 | Tokyo Electron Ltd | 基板処理装置及び塗布装置及び塗布方法 |
| JP2020054973A (ja) * | 2018-10-04 | 2020-04-09 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
-
2022
- 2022-03-11 JP JP2023509013A patent/JPWO2022202396A1/ja not_active Ceased
- 2022-03-11 TW TW111108935A patent/TW202301531A/zh unknown
- 2022-03-11 WO PCT/JP2022/010829 patent/WO2022202396A1/ja not_active Ceased
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2005004230A1 (ja) * | 2003-07-04 | 2006-11-09 | ローツェ株式会社 | 薄板状基板の搬送装置、及びその搬送制御方法 |
| JP2005132626A (ja) * | 2003-10-06 | 2005-05-26 | Sumitomo Heavy Ind Ltd | 搬送装置、塗布システム、及び検査システム |
| JP2008302487A (ja) * | 2007-06-11 | 2008-12-18 | Olympus Corp | 基板吸着装置及び基板搬送装置並びに外観検査装置 |
| JP2009117571A (ja) * | 2007-11-06 | 2009-05-28 | Tokyo Electron Ltd | 基板処理装置及び塗布装置及び塗布方法 |
| JP2020054973A (ja) * | 2018-10-04 | 2020-04-09 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202301531A (zh) | 2023-01-01 |
| WO2022202396A1 (ja) | 2022-09-29 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230911 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20241119 |
|
| A045 | Written measure of dismissal of application [lapsed due to lack of payment] |
Free format text: JAPANESE INTERMEDIATE CODE: A045 Effective date: 20250325 |