JPWO2022202396A1 - - Google Patents
Info
- Publication number
- JPWO2022202396A1 JPWO2022202396A1 JP2023509013A JP2023509013A JPWO2022202396A1 JP WO2022202396 A1 JPWO2022202396 A1 JP WO2022202396A1 JP 2023509013 A JP2023509013 A JP 2023509013A JP 2023509013 A JP2023509013 A JP 2023509013A JP WO2022202396 A1 JPWO2022202396 A1 JP WO2022202396A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
- B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Coating Apparatus (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021051493 | 2021-03-25 | ||
PCT/JP2022/010829 WO2022202396A1 (ja) | 2021-03-25 | 2022-03-11 | 基板搬送装置、塗布処理装置、基板搬送方法および基板搬送プログラム |
Publications (1)
Publication Number | Publication Date |
---|---|
JPWO2022202396A1 true JPWO2022202396A1 (ja) | 2022-09-29 |
Family
ID=83397111
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023509013A Pending JPWO2022202396A1 (ja) | 2021-03-25 | 2022-03-11 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPWO2022202396A1 (ja) |
TW (1) | TW202301531A (ja) |
WO (1) | WO2022202396A1 (ja) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4426276B2 (ja) * | 2003-10-06 | 2010-03-03 | 住友重機械工業株式会社 | 搬送装置、塗布システム、及び検査システム |
JP2008302487A (ja) * | 2007-06-11 | 2008-12-18 | Olympus Corp | 基板吸着装置及び基板搬送装置並びに外観検査装置 |
JP4495752B2 (ja) * | 2007-11-06 | 2010-07-07 | 東京エレクトロン株式会社 | 基板処理装置及び塗布装置 |
JP7101583B2 (ja) * | 2018-10-04 | 2022-07-15 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
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2022
- 2022-03-11 JP JP2023509013A patent/JPWO2022202396A1/ja active Pending
- 2022-03-11 TW TW111108935A patent/TW202301531A/zh unknown
- 2022-03-11 WO PCT/JP2022/010829 patent/WO2022202396A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2022202396A1 (ja) | 2022-09-29 |
TW202301531A (zh) | 2023-01-01 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230911 |