JPWO2022157934A1 - - Google Patents

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Publication number
JPWO2022157934A1
JPWO2022157934A1 JP2022576907A JP2022576907A JPWO2022157934A1 JP WO2022157934 A1 JPWO2022157934 A1 JP WO2022157934A1 JP 2022576907 A JP2022576907 A JP 2022576907A JP 2022576907 A JP2022576907 A JP 2022576907A JP WO2022157934 A1 JPWO2022157934 A1 JP WO2022157934A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022576907A
Other languages
Japanese (ja)
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JP7476987B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of JPWO2022157934A1 publication Critical patent/JPWO2022157934A1/ja
Application granted granted Critical
Publication of JP7476987B2 publication Critical patent/JP7476987B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68Shapes or dispositions thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/40Arrangements for thermal protection or thermal control involving heat exchange by flowing fluids
    • H10W40/47Arrangements for thermal protection or thermal control involving heat exchange by flowing fluids by flowing liquids, e.g. forced water cooling
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/60Securing means for detachable heating or cooling arrangements, e.g. clamps
    • H10W40/611Bolts or screws
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Dicing (AREA)
JP2022576907A 2021-01-22 2021-01-22 半導体装置および半導体装置の製造方法 Active JP7476987B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/002281 WO2022157934A1 (ja) 2021-01-22 2021-01-22 半導体装置および半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPWO2022157934A1 true JPWO2022157934A1 (https=) 2022-07-28
JP7476987B2 JP7476987B2 (ja) 2024-05-01

Family

ID=82549616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022576907A Active JP7476987B2 (ja) 2021-01-22 2021-01-22 半導体装置および半導体装置の製造方法

Country Status (5)

Country Link
US (1) US12424500B2 (https=)
JP (1) JP7476987B2 (https=)
CN (1) CN116711072A (https=)
DE (1) DE112021006881T5 (https=)
WO (1) WO2022157934A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116711072A (zh) * 2021-01-22 2023-09-05 三菱电机株式会社 半导体装置及半导体装置的制造方法
JP7689194B2 (ja) * 2021-10-06 2025-06-05 デンカ株式会社 放熱部材

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005033140A (ja) * 2003-07-11 2005-02-03 Nissan Motor Co Ltd 半導体装置
JP2010192708A (ja) * 2009-02-18 2010-09-02 Hitachi Ltd 半導体パワーモジュール、電力変換装置、および、半導体パワーモジュールの製造方法
JP2015073012A (ja) * 2013-10-03 2015-04-16 富士電機株式会社 半導体装置
JP2017126681A (ja) * 2016-01-15 2017-07-20 カルソニックカンセイ株式会社 半導体ユニット

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51112279A (en) 1975-03-28 1976-10-04 Hitachi Ltd Semiconductor device
JP3346657B2 (ja) 1994-09-09 2002-11-18 京セラ株式会社 半導体素子収納用パッケージ
US7117930B2 (en) * 2002-06-14 2006-10-10 Thermal Corp. Heat pipe fin stack with extruded base
JP4806803B2 (ja) * 2003-10-21 2011-11-02 Dowaメタルテック株式会社 金属−セラミックス接合基板およびその製造方法
KR101077378B1 (ko) * 2010-06-23 2011-10-26 삼성전기주식회사 방열기판 및 그 제조방법
US8872332B2 (en) * 2012-04-30 2014-10-28 Infineon Technologies Ag Power module with directly attached thermally conductive structures
DE112015000253B4 (de) * 2014-07-18 2023-06-29 Fuji Electric Co., Ltd. Halbleitervorrichtung
JP6406121B2 (ja) * 2015-05-14 2018-10-17 三菱電機株式会社 高周波高出力デバイス
WO2017175612A1 (ja) * 2016-04-04 2017-10-12 三菱電機株式会社 パワーモジュール、パワー半導体装置及びパワーモジュール製造方法
DE112017002999B4 (de) * 2016-06-16 2022-03-24 Mitsubishi Electric Corporation Halbleiter-montage-wärmeabführungs-basisplatte und herstellungsverfahren für dieselbe
JP6818768B2 (ja) * 2017-01-13 2021-01-20 三菱電機株式会社 金属−セラミックス接合基板及びその製造方法
US11232991B2 (en) * 2017-02-23 2022-01-25 Mitsubishi Electric Corporation Semiconductor apparatus
JP6399272B1 (ja) * 2017-09-05 2018-10-03 三菱電機株式会社 パワーモジュール及びその製造方法並びに電力変換装置
JP2019096797A (ja) * 2017-11-27 2019-06-20 三菱電機株式会社 半導体装置および電力変換装置
CN111052357B (zh) * 2018-03-20 2023-12-19 富士电机株式会社 半导体装置
DE112019007915T5 (de) * 2019-11-27 2022-09-08 Mitsubishi Electric Corporation Halbleitermodul
CN116711072A (zh) * 2021-01-22 2023-09-05 三菱电机株式会社 半导体装置及半导体装置的制造方法
JP7482815B2 (ja) * 2021-03-09 2024-05-14 三菱電機株式会社 半導体装置および半導体装置の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005033140A (ja) * 2003-07-11 2005-02-03 Nissan Motor Co Ltd 半導体装置
JP2010192708A (ja) * 2009-02-18 2010-09-02 Hitachi Ltd 半導体パワーモジュール、電力変換装置、および、半導体パワーモジュールの製造方法
JP2015073012A (ja) * 2013-10-03 2015-04-16 富士電機株式会社 半導体装置
JP2017126681A (ja) * 2016-01-15 2017-07-20 カルソニックカンセイ株式会社 半導体ユニット

Also Published As

Publication number Publication date
US20230352354A1 (en) 2023-11-02
JP7476987B2 (ja) 2024-05-01
WO2022157934A1 (ja) 2022-07-28
US12424500B2 (en) 2025-09-23
DE112021006881T5 (de) 2023-11-09
CN116711072A (zh) 2023-09-05

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