JPWO2022113460A1 - - Google Patents
Info
- Publication number
- JPWO2022113460A1 JPWO2022113460A1 JP2021571756A JP2021571756A JPWO2022113460A1 JP WO2022113460 A1 JPWO2022113460 A1 JP WO2022113460A1 JP 2021571756 A JP2021571756 A JP 2021571756A JP 2021571756 A JP2021571756 A JP 2021571756A JP WO2022113460 A1 JPWO2022113460 A1 JP WO2022113460A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/80—Compositional purity
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020197601 | 2020-11-27 | ||
JP2020197601 | 2020-11-27 | ||
PCT/JP2021/032101 WO2022113460A1 (ja) | 2020-11-27 | 2021-09-01 | 多結晶シリコンロッド、多結晶シリコンロッドの製造方法および多結晶シリコンの熱処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP7022874B1 JP7022874B1 (ja) | 2022-02-18 |
JPWO2022113460A1 true JPWO2022113460A1 (ja) | 2022-06-02 |
Family
ID=81073867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021571756A Active JP7022874B1 (ja) | 2020-11-27 | 2021-09-01 | 多結晶シリコンロッド、多結晶シリコンロッドの製造方法および多結晶シリコンの熱処理方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20240010502A1 (ja) |
JP (1) | JP7022874B1 (ja) |
KR (1) | KR20230110743A (ja) |
CN (1) | CN116490461A (ja) |
DE (1) | DE112021006172T5 (ja) |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5189817A (ja) * | 1974-12-26 | 1976-08-06 | ||
KR100470858B1 (ko) * | 1996-05-21 | 2005-05-16 | 가부시끼가이샤 도꾸야마 | 다결정실리콘로드및그제조방법 |
WO1997044277A1 (fr) | 1996-05-21 | 1997-11-27 | Tokuyama Corporation | Barreau de silicium polycristallin et son procede de preparation |
JP5339945B2 (ja) * | 2009-02-04 | 2013-11-13 | 株式会社トクヤマ | 多結晶シリコンの製法 |
EP2703526A4 (en) * | 2012-03-23 | 2014-12-31 | Shinetsu Quartz Prod | SILICONE CONTAINER FOR BREEDING A SILICON CRYSTAL AND MANUFACTURING METHOD THEREFOR |
DE102013206436A1 (de) * | 2013-04-11 | 2014-10-16 | Wacker Chemie Ag | Reinigung von CVD-Produktionsräumen |
JP6418778B2 (ja) * | 2014-05-07 | 2018-11-07 | 信越化学工業株式会社 | 多結晶シリコン棒、多結晶シリコン棒の製造方法、および、単結晶シリコン |
WO2017221952A1 (ja) * | 2016-06-23 | 2017-12-28 | 三菱マテリアル株式会社 | 多結晶シリコンロッド及びその製造方法 |
JP7047688B2 (ja) * | 2018-09-19 | 2022-04-05 | 三菱マテリアル株式会社 | 多結晶シリコンロッドの製造方法 |
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2021
- 2021-09-01 KR KR1020237017795A patent/KR20230110743A/ko active Search and Examination
- 2021-09-01 JP JP2021571756A patent/JP7022874B1/ja active Active
- 2021-09-01 US US18/037,966 patent/US20240010502A1/en active Pending
- 2021-09-01 DE DE112021006172.0T patent/DE112021006172T5/de active Pending
- 2021-09-01 CN CN202180078110.8A patent/CN116490461A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
KR20230110743A (ko) | 2023-07-25 |
CN116490461A (zh) | 2023-07-25 |
JP7022874B1 (ja) | 2022-02-18 |
US20240010502A1 (en) | 2024-01-11 |
DE112021006172T5 (de) | 2023-10-05 |
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