JPWO2022091769A1 - - Google Patents

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Publication number
JPWO2022091769A1
JPWO2022091769A1 JP2022552280A JP2022552280A JPWO2022091769A1 JP WO2022091769 A1 JPWO2022091769 A1 JP WO2022091769A1 JP 2022552280 A JP2022552280 A JP 2022552280A JP 2022552280 A JP2022552280 A JP 2022552280A JP WO2022091769 A1 JPWO2022091769 A1 JP WO2022091769A1
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JP
Japan
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JP2022552280A
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Japanese (ja)
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JPWO2022091769A5 (https=
JP7304534B2 (ja
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Priority to JP2023097873A priority Critical patent/JP7607225B2/ja
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Publication of JP7304534B2 publication Critical patent/JP7304534B2/ja
Priority to JP2024176515A priority patent/JP2025010160A/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
    • G01J3/513—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters having fixed filter-detector pairs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/10—Circuitry of solid-state image sensors [SSIS]; Control thereof for transforming different wavelengths into image signals
    • H04N25/11—Arrangement of colour filter arrays [CFA]; Filter mosaics
    • H04N25/13—Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements
    • H04N25/135—Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements based on four or more different wavelength filter elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/182—Colour image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/804—Containers or encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings
    • H10F39/8053—Colour filters
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H10F39/8063—Microlenses
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F99/00—Subject matter not provided for in other groups of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G01J2003/2826—Multispectral imaging, e.g. filter imaging
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Optical Filters (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Studio Devices (AREA)
JP2022552280A 2020-10-30 2021-10-12 光検出装置、構造体の製造方法、および光検出装置の製造方法 Active JP7304534B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2023097873A JP7607225B2 (ja) 2020-10-30 2023-06-14 光検出装置
JP2024176515A JP2025010160A (ja) 2020-10-30 2024-10-08 光検出装置

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2020182110 2020-10-30
JP2020182110 2020-10-30
JP2021155972 2021-09-24
JP2021155972 2021-09-24
PCT/JP2021/037711 WO2022091769A1 (ja) 2020-10-30 2021-10-12 光検出装置、構造体の製造方法、および光検出装置の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023097873A Division JP7607225B2 (ja) 2020-10-30 2023-06-14 光検出装置

Publications (3)

Publication Number Publication Date
JPWO2022091769A1 true JPWO2022091769A1 (https=) 2022-05-05
JPWO2022091769A5 JPWO2022091769A5 (https=) 2022-11-24
JP7304534B2 JP7304534B2 (ja) 2023-07-07

Family

ID=81383742

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2022552280A Active JP7304534B2 (ja) 2020-10-30 2021-10-12 光検出装置、構造体の製造方法、および光検出装置の製造方法
JP2023097873A Active JP7607225B2 (ja) 2020-10-30 2023-06-14 光検出装置
JP2024176515A Withdrawn JP2025010160A (ja) 2020-10-30 2024-10-08 光検出装置

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2023097873A Active JP7607225B2 (ja) 2020-10-30 2023-06-14 光検出装置
JP2024176515A Withdrawn JP2025010160A (ja) 2020-10-30 2024-10-08 光検出装置

Country Status (5)

Country Link
US (1) US12557414B2 (https=)
EP (1) EP4239682A4 (https=)
JP (3) JP7304534B2 (https=)
CN (1) CN116324351A (https=)
WO (1) WO2022091769A1 (https=)

Families Citing this family (6)

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CN113167649B (zh) 2019-01-16 2024-07-12 松下知识产权经营株式会社 光检测装置、光检测系统及滤光器阵列
WO2021241122A1 (ja) * 2020-05-29 2021-12-02 パナソニックＩｐマネジメント株式会社 フィルタアレイおよび光検出システム
US20230197866A1 (en) * 2021-12-16 2023-06-22 Attollo Engineering, LLC Electron-photon barrier in photodetectors
EP4492103A4 (en) * 2022-03-11 2025-06-25 Panasonic Intellectual Property Management Co., Ltd. Light detection device, light detection system, and filter array
TW202431623A (zh) * 2022-09-16 2024-08-01 日商索尼半導體解決方案公司 光檢測裝置及電子機器
CN118943154B (zh) * 2024-10-12 2025-01-24 武汉楚兴技术有限公司 一种图像传感器结构、制作方法及电子设备

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US20190377109A1 (en) * 2018-06-08 2019-12-12 Commissariat à l'énergie atomique et aux énergies alternatives Image sensor comprising an array of interference filters
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Publication number Priority date Publication date Assignee Title
JPH02130433A (ja) * 1987-10-26 1990-05-18 Siemens Ag 高分解分光用装置
US6031653A (en) * 1997-08-28 2000-02-29 California Institute Of Technology Low-cost thin-metal-film interference filters
JP2008035047A (ja) * 2006-07-27 2008-02-14 Matsushita Electric Ind Co Ltd カメラ部品およびカメラと、カメラ部品の製造方法
JP2008070437A (ja) * 2006-09-12 2008-03-27 Matsushita Electric Ind Co Ltd 干渉フィルタ、液晶ディスプレイ、エレクトロルミネッセンスディスプレイ、プロジェクション表示装置
JP2008170979A (ja) * 2006-12-13 2008-07-24 Matsushita Electric Ind Co Ltd 固体撮像装置、その製造方法およびカメラ
US20100053755A1 (en) * 2006-12-29 2010-03-04 Nanolambda, Inc. Plasmonic fabry-perot filter
JP2008177362A (ja) * 2007-01-18 2008-07-31 Matsushita Electric Ind Co Ltd 固体撮像装置およびカメラ
JP2009004680A (ja) * 2007-06-25 2009-01-08 Panasonic Corp 固体撮像装置およびカメラ
JP2014533355A (ja) * 2011-11-04 2014-12-11 アイメックＩｍｅｃ センサアレイ上に多重隣接画像コピーを投影するためのミラーを備えたスペクトルカメラ
JP2016513240A (ja) * 2013-01-29 2016-05-12 ヴァイアヴィ・ソリューションズ・インコーポレイテッドＶｉａｖｉ Ｓｏｌｕｔｉｏｎｓ Ｉｎｃ． 可変光学フィルターおよびそれに基づく波長選択型センサー
US20150229851A1 (en) * 2014-02-12 2015-08-13 Xerox Corporation Hyperspectral single pixel imager with fabry perot filter
US20160148963A1 (en) * 2014-11-21 2016-05-26 Lumilant, Inc. Multi-layer extraordinary optical transmission filter systems, devices, and methods
JP2016114683A (ja) * 2014-12-12 2016-06-23 日本放送協会 フィルタ及び撮像装置
JP2018511822A (ja) * 2015-03-09 2018-04-26 テクノロギアン トゥトキムスケスクス ヴェーテーテー オイ ファブリペロー干渉計のためのミラープレート、およびファブリペロー干渉計
WO2018070431A1 (ja) * 2016-10-11 2018-04-19 凸版印刷株式会社 光学デバイス、表示体、カラーフィルタ、および、光学デバイスの製造方法
JP2018137284A (ja) * 2017-02-20 2018-08-30 ソニーセミコンダクタソリューションズ株式会社 センサ、固体撮像装置及び電子装置
WO2018193986A1 (ja) * 2017-04-17 2018-10-25 凸版印刷株式会社 固体撮像素子及びその製造方法
US20190377109A1 (en) * 2018-06-08 2019-12-12 Commissariat à l'énergie atomique et aux énergies alternatives Image sensor comprising an array of interference filters
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