JPWO2022034636A1 - - Google Patents
Info
- Publication number
- JPWO2022034636A1 JPWO2022034636A1 JP2022542523A JP2022542523A JPWO2022034636A1 JP WO2022034636 A1 JPWO2022034636 A1 JP WO2022034636A1 JP 2022542523 A JP2022542523 A JP 2022542523A JP 2022542523 A JP2022542523 A JP 2022542523A JP WO2022034636 A1 JPWO2022034636 A1 JP WO2022034636A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
- H10D30/66—Vertical DMOS [VDMOS] FETs
- H10D30/665—Vertical DMOS [VDMOS] FETs having edge termination structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
- H10D12/01—Manufacture or treatment
- H10D12/031—Manufacture or treatment of IGBTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/028—Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs
- H10D30/0291—Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs of vertical DMOS [VDMOS] FETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
- H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]
- H10D62/106—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
- H10D62/126—Top-view geometrical layouts of the regions or the junctions
- H10D62/127—Top-view geometrical layouts of the regions or the junctions of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
- H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
- H10D62/8325—Silicon carbide
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2020/030578 WO2022034636A1 (ja) | 2020-08-11 | 2020-08-11 | 炭化珪素半導体装置および電力変換装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022034636A1 true JPWO2022034636A1 (https=) | 2022-02-17 |
| JPWO2022034636A5 JPWO2022034636A5 (https=) | 2022-10-26 |
| JP7332812B2 JP7332812B2 (ja) | 2023-08-23 |
Family
ID=80247785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022542523A Active JP7332812B2 (ja) | 2020-08-11 | 2020-08-11 | 炭化珪素半導体装置および電力変換装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12520550B2 (https=) |
| JP (1) | JP7332812B2 (https=) |
| CN (1) | CN116137935B (https=) |
| DE (1) | DE112020007503T5 (https=) |
| WO (1) | WO2022034636A1 (https=) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011100877A (ja) * | 2009-11-06 | 2011-05-19 | Toshiba Corp | 半導体装置及びその製造方法 |
| JP2015115452A (ja) * | 2013-12-11 | 2015-06-22 | 三菱電機株式会社 | 半導体装置 |
| WO2015166754A1 (ja) * | 2014-05-01 | 2015-11-05 | 三菱電機株式会社 | 半導体装置 |
| WO2017169086A1 (ja) * | 2016-03-30 | 2017-10-05 | 三菱電機株式会社 | 半導体装置およびその製造方法、電力変換装置 |
| JP2018046162A (ja) * | 2016-09-14 | 2018-03-22 | 富士電機株式会社 | 炭化珪素半導体装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5719167B2 (ja) * | 2010-12-28 | 2015-05-13 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| WO2015189929A1 (ja) | 2014-06-11 | 2015-12-17 | 株式会社日立製作所 | 半導体装置、パワーモジュール、電力変換装置および半導体装置の製造方法 |
| US11063122B2 (en) * | 2016-11-01 | 2021-07-13 | Mitsubishi Electric Corporation | Silicon carbide semiconductor device and power conversion device |
| CN206490069U (zh) * | 2017-01-24 | 2017-09-12 | 深圳基本半导体有限公司 | 一种宽禁带半导体器件 |
| WO2018155553A1 (ja) | 2017-02-24 | 2018-08-30 | 三菱電機株式会社 | 炭化珪素半導体装置および電力変換装置 |
| DE112018006456B4 (de) * | 2017-12-19 | 2024-09-05 | Mitsubishi Electric Corporation | Siliciumcarbid-Halbleitereinheit und Leistungswandler |
-
2020
- 2020-08-11 US US18/008,448 patent/US12520550B2/en active Active
- 2020-08-11 DE DE112020007503.6T patent/DE112020007503T5/de active Pending
- 2020-08-11 WO PCT/JP2020/030578 patent/WO2022034636A1/ja not_active Ceased
- 2020-08-11 JP JP2022542523A patent/JP7332812B2/ja active Active
- 2020-08-11 CN CN202080104747.5A patent/CN116137935B/zh active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011100877A (ja) * | 2009-11-06 | 2011-05-19 | Toshiba Corp | 半導体装置及びその製造方法 |
| JP2015115452A (ja) * | 2013-12-11 | 2015-06-22 | 三菱電機株式会社 | 半導体装置 |
| WO2015166754A1 (ja) * | 2014-05-01 | 2015-11-05 | 三菱電機株式会社 | 半導体装置 |
| WO2017169086A1 (ja) * | 2016-03-30 | 2017-10-05 | 三菱電機株式会社 | 半導体装置およびその製造方法、電力変換装置 |
| JP2018046162A (ja) * | 2016-09-14 | 2018-03-22 | 富士電機株式会社 | 炭化珪素半導体装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US12520550B2 (en) | 2026-01-06 |
| WO2022034636A1 (ja) | 2022-02-17 |
| DE112020007503T5 (de) | 2023-06-07 |
| CN116137935B (zh) | 2024-11-01 |
| JP7332812B2 (ja) | 2023-08-23 |
| CN116137935A (zh) | 2023-05-19 |
| US20230215921A1 (en) | 2023-07-06 |
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