JPWO2022025012A1 - - Google Patents

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Publication number
JPWO2022025012A1
JPWO2022025012A1 JP2022540306A JP2022540306A JPWO2022025012A1 JP WO2022025012 A1 JPWO2022025012 A1 JP WO2022025012A1 JP 2022540306 A JP2022540306 A JP 2022540306A JP 2022540306 A JP2022540306 A JP 2022540306A JP WO2022025012 A1 JPWO2022025012 A1 JP WO2022025012A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2022540306A
Other languages
Japanese (ja)
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JP7505004B2 (ja
JPWO2022025012A5 (https=
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Publication of JPWO2022025012A1 publication Critical patent/JPWO2022025012A1/ja
Publication of JPWO2022025012A5 publication Critical patent/JPWO2022025012A5/ja
Application granted granted Critical
Publication of JP7505004B2 publication Critical patent/JP7505004B2/ja
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
JP2022540306A 2020-07-31 2021-07-26 光走査装置、その駆動方法、及び画像描画システム Active JP7505004B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020130627 2020-07-31
JP2020130627 2020-07-31
PCT/JP2021/027606 WO2022025012A1 (ja) 2020-07-31 2021-07-26 光走査装置、その駆動方法、及び画像描画システム

Publications (3)

Publication Number Publication Date
JPWO2022025012A1 true JPWO2022025012A1 (https=) 2022-02-03
JPWO2022025012A5 JPWO2022025012A5 (https=) 2023-05-25
JP7505004B2 JP7505004B2 (ja) 2024-06-24

Family

ID=80036455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022540306A Active JP7505004B2 (ja) 2020-07-31 2021-07-26 光走査装置、その駆動方法、及び画像描画システム

Country Status (5)

Country Link
US (1) US20230176361A1 (https=)
EP (1) EP4191318B1 (https=)
JP (1) JP7505004B2 (https=)
CN (1) CN116209636B (https=)
WO (1) WO2022025012A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12306399B2 (en) * 2021-02-09 2025-05-20 Beijing Voyager Technology Co., Ltd. System and method for driving a two-axis scanning mirror using drivers of different types
JP7770970B2 (ja) * 2022-03-25 2025-11-17 富士フイルム株式会社 光走査装置、光走査装置の駆動方法、及び画像描画システム
WO2025204467A1 (ja) * 2024-03-28 2025-10-02 富士フイルム株式会社 ミラー駆動装置及び光走査装置
WO2026070413A1 (ja) * 2024-09-26 2026-04-02 富士フイルム株式会社 ミラー装置及び光走査装置

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090140356A1 (en) * 2005-07-21 2009-06-04 Evigia Systems, Inc. Integrated sensor and circuitry and process therefor
JP2011150071A (ja) * 2010-01-20 2011-08-04 Denso Corp 光走査装置
JP2011197233A (ja) * 2010-03-18 2011-10-06 Toyota Central R&D Labs Inc 光偏向装置
JP2012055852A (ja) * 2010-09-10 2012-03-22 Nippon Signal Co Ltd:The アクチュエータの駆動装置
JP2012237788A (ja) * 2011-05-10 2012-12-06 Konica Minolta Advanced Layers Inc 光走査装置およびそれを備えた画像投影装置
WO2014192624A1 (ja) * 2013-05-30 2014-12-04 株式会社村田製作所 生体センサ
JP2015014691A (ja) * 2013-07-04 2015-01-22 パイオニア株式会社 表示制御装置
JP2018098526A (ja) * 2016-12-08 2018-06-21 オムロン株式会社 静電容量型トランスデューサシステム、静電容量型トランスデューサ及び、音響センサ
JP2019534467A (ja) * 2016-08-12 2019-11-28 マイクロビジョン，インク． レーザ画像投影の走査と共に深度マッピングを提供するための装置および方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002236009A (ja) * 2001-02-08 2002-08-23 Mitsubishi Electric Corp 角度センサ
JP2003043405A (ja) * 2001-08-02 2003-02-13 Hitachi Via Mechanics Ltd スキャナ装置
CN100368864C (zh) * 2005-04-18 2008-02-13 精工爱普生株式会社 光扫描装置、其控制方法及图像显示装置
JP2010256862A (ja) * 2009-04-01 2010-11-11 Seiko Epson Corp ミラーデバイス駆動制御装置およびプロジェクター
JP6946708B2 (ja) * 2016-06-20 2021-10-06 株式会社リコー 制御装置、画像投影装置、および制御方法
JP6874321B2 (ja) 2016-10-14 2021-05-19 富士通株式会社 距離測定装置、距離測定方法、及び距離測定プログラム
JP6929198B2 (ja) 2017-10-31 2021-09-01 太陽ホールディングス株式会社 感光性樹脂組成物、ドライフィルム、硬化物、半導体素子、プリント配線板および電子部品
JP2020020916A (ja) * 2018-07-31 2020-02-06 矢崎総業株式会社 光走査素子

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090140356A1 (en) * 2005-07-21 2009-06-04 Evigia Systems, Inc. Integrated sensor and circuitry and process therefor
JP2011150071A (ja) * 2010-01-20 2011-08-04 Denso Corp 光走査装置
JP2011197233A (ja) * 2010-03-18 2011-10-06 Toyota Central R&D Labs Inc 光偏向装置
JP2012055852A (ja) * 2010-09-10 2012-03-22 Nippon Signal Co Ltd:The アクチュエータの駆動装置
JP2012237788A (ja) * 2011-05-10 2012-12-06 Konica Minolta Advanced Layers Inc 光走査装置およびそれを備えた画像投影装置
WO2014192624A1 (ja) * 2013-05-30 2014-12-04 株式会社村田製作所 生体センサ
JP2015014691A (ja) * 2013-07-04 2015-01-22 パイオニア株式会社 表示制御装置
JP2019534467A (ja) * 2016-08-12 2019-11-28 マイクロビジョン，インク． レーザ画像投影の走査と共に深度マッピングを提供するための装置および方法
JP2018098526A (ja) * 2016-12-08 2018-06-21 オムロン株式会社 静電容量型トランスデューサシステム、静電容量型トランスデューサ及び、音響センサ

Also Published As

Publication number Publication date
JP7505004B2 (ja) 2024-06-24
EP4191318B1 (en) 2025-03-12
WO2022025012A1 (ja) 2022-02-03
EP4191318A1 (en) 2023-06-07
CN116209636A (zh) 2023-06-02
CN116209636B (zh) 2026-02-03
US20230176361A1 (en) 2023-06-08
EP4191318A4 (en) 2024-01-17

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