CN116209636B - 光扫描装置、其驱动方法及图像描绘系统 - Google Patents

光扫描装置、其驱动方法及图像描绘系统

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Publication number
CN116209636B
CN116209636B CN202180059125.XA CN202180059125A CN116209636B CN 116209636 B CN116209636 B CN 116209636B CN 202180059125 A CN202180059125 A CN 202180059125A CN 116209636 B CN116209636 B CN 116209636B
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CN
China
Prior art keywords
axis
angle detection
pair
mirror portion
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202180059125.XA
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English (en)
Chinese (zh)
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CN116209636A (zh
Inventor
菱沼庆一
直野崇幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
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Fujifilm Corp
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Publication date
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Publication of CN116209636A publication Critical patent/CN116209636A/zh
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
CN202180059125.XA 2020-07-31 2021-07-26 光扫描装置、其驱动方法及图像描绘系统 Active CN116209636B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020130627 2020-07-31
JP2020-130627 2020-07-31
PCT/JP2021/027606 WO2022025012A1 (ja) 2020-07-31 2021-07-26 光走査装置、その駆動方法、及び画像描画システム

Publications (2)

Publication Number Publication Date
CN116209636A CN116209636A (zh) 2023-06-02
CN116209636B true CN116209636B (zh) 2026-02-03

Family

ID=80036455

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180059125.XA Active CN116209636B (zh) 2020-07-31 2021-07-26 光扫描装置、其驱动方法及图像描绘系统

Country Status (5)

Country Link
US (1) US20230176361A1 (https=)
EP (1) EP4191318B1 (https=)
JP (1) JP7505004B2 (https=)
CN (1) CN116209636B (https=)
WO (1) WO2022025012A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12306399B2 (en) * 2021-02-09 2025-05-20 Beijing Voyager Technology Co., Ltd. System and method for driving a two-axis scanning mirror using drivers of different types
JP7770970B2 (ja) * 2022-03-25 2025-11-17 富士フイルム株式会社 光走査装置、光走査装置の駆動方法、及び画像描画システム
WO2025204467A1 (ja) * 2024-03-28 2025-10-02 富士フイルム株式会社 ミラー駆動装置及び光走査装置
WO2026070413A1 (ja) * 2024-09-26 2026-04-02 富士フイルム株式会社 ミラー装置及び光走査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011150071A (ja) * 2010-01-20 2011-08-04 Denso Corp 光走査装置
JP2012237788A (ja) * 2011-05-10 2012-12-06 Konica Minolta Advanced Layers Inc 光走査装置およびそれを備えた画像投影装置

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JP2002236009A (ja) * 2001-02-08 2002-08-23 Mitsubishi Electric Corp 角度センサ
JP2003043405A (ja) * 2001-08-02 2003-02-13 Hitachi Via Mechanics Ltd スキャナ装置
CN100368864C (zh) * 2005-04-18 2008-02-13 精工爱普生株式会社 光扫描装置、其控制方法及图像显示装置
US7562573B2 (en) * 2005-07-21 2009-07-21 Evigia Systems, Inc. Integrated sensor and circuitry and process therefor
JP2010256862A (ja) * 2009-04-01 2010-11-11 Seiko Epson Corp ミラーデバイス駆動制御装置およびプロジェクター
JP5343903B2 (ja) 2010-03-18 2013-11-13 株式会社豊田中央研究所 光偏向装置
JP5769941B2 (ja) 2010-09-10 2015-08-26 日本信号株式会社 アクチュエータの駆動装置
JP6020719B2 (ja) 2013-05-30 2016-11-02 株式会社村田製作所 生体センサ
JP2015014691A (ja) 2013-07-04 2015-01-22 パイオニア株式会社 表示制御装置
JP6946708B2 (ja) * 2016-06-20 2021-10-06 株式会社リコー 制御装置、画像投影装置、および制御方法
US10145680B2 (en) 2016-08-12 2018-12-04 Microvision, Inc. Devices and methods for providing depth mapping with scanning laser image projection
JP6874321B2 (ja) 2016-10-14 2021-05-19 富士通株式会社 距離測定装置、距離測定方法、及び距離測定プログラム
JP7143056B2 (ja) 2016-12-08 2022-09-28 Ｍｍｉセミコンダクター株式会社 静電容量型トランスデューサシステム、静電容量型トランスデューサ及び、音響センサ
JP6929198B2 (ja) 2017-10-31 2021-09-01 太陽ホールディングス株式会社 感光性樹脂組成物、ドライフィルム、硬化物、半導体素子、プリント配線板および電子部品
JP2020020916A (ja) * 2018-07-31 2020-02-06 矢崎総業株式会社 光走査素子

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011150071A (ja) * 2010-01-20 2011-08-04 Denso Corp 光走査装置
JP2012237788A (ja) * 2011-05-10 2012-12-06 Konica Minolta Advanced Layers Inc 光走査装置およびそれを備えた画像投影装置

Also Published As

Publication number Publication date
JP7505004B2 (ja) 2024-06-24
EP4191318B1 (en) 2025-03-12
WO2022025012A1 (ja) 2022-02-03
EP4191318A1 (en) 2023-06-07
CN116209636A (zh) 2023-06-02
JPWO2022025012A1 (https=) 2022-02-03
US20230176361A1 (en) 2023-06-08
EP4191318A4 (en) 2024-01-17

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