JPWO2022014329A1 - - Google Patents
Info
- Publication number
- JPWO2022014329A1 JPWO2022014329A1 JP2022536236A JP2022536236A JPWO2022014329A1 JP WO2022014329 A1 JPWO2022014329 A1 JP WO2022014329A1 JP 2022536236 A JP2022536236 A JP 2022536236A JP 2022536236 A JP2022536236 A JP 2022536236A JP WO2022014329 A1 JPWO2022014329 A1 JP WO2022014329A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020119743 | 2020-07-13 | ||
JP2020119743 | 2020-07-13 | ||
PCT/JP2021/024724 WO2022014329A1 (ja) | 2020-07-13 | 2021-06-30 | 液処理装置、液供給機構、液処理方法及びコンピュータ記憶媒体 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2022014329A1 true JPWO2022014329A1 (ja) | 2022-01-20 |
JP7434564B2 JP7434564B2 (ja) | 2024-02-20 |
Family
ID=79555470
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022536236A Active JP7434564B2 (ja) | 2020-07-13 | 2021-06-30 | 液処理装置、液供給機構、液処理方法及びコンピュータ記憶媒体 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7434564B2 (ja) |
KR (1) | KR20230038232A (ja) |
CN (1) | CN115769152A (ja) |
WO (1) | WO2022014329A1 (ja) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007102754A (ja) * | 2005-09-09 | 2007-04-19 | Advance Denki Kogyo Kk | 流量制御装置 |
JP5337541B2 (ja) | 2009-03-12 | 2013-11-06 | 東京エレクトロン株式会社 | 処理液供給機構、処理液供給方法、液処理装置、および記憶媒体 |
JP5045741B2 (ja) * | 2009-12-25 | 2012-10-10 | 東京エレクトロン株式会社 | 薬液供給ノズル及び薬液供給方法 |
JP6932626B2 (ja) * | 2017-09-15 | 2021-09-08 | 株式会社マンダム | ノズルユニット、ならびにそれを備える二液吐出器 |
JP6995547B2 (ja) | 2017-09-22 | 2022-01-14 | 株式会社Screenホールディングス | 薬液生成方法、薬液生成装置および基板処理装置 |
-
2021
- 2021-06-30 JP JP2022536236A patent/JP7434564B2/ja active Active
- 2021-06-30 KR KR1020237004496A patent/KR20230038232A/ko active Search and Examination
- 2021-06-30 WO PCT/JP2021/024724 patent/WO2022014329A1/ja active Application Filing
- 2021-06-30 CN CN202180047390.6A patent/CN115769152A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
WO2022014329A1 (ja) | 2022-01-20 |
CN115769152A (zh) | 2023-03-07 |
JP7434564B2 (ja) | 2024-02-20 |
KR20230038232A (ko) | 2023-03-17 |
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