JPWO2021240620A5 - - Google Patents

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Publication number
JPWO2021240620A5
JPWO2021240620A5 JP2022527296A JP2022527296A JPWO2021240620A5 JP WO2021240620 A5 JPWO2021240620 A5 JP WO2021240620A5 JP 2022527296 A JP2022527296 A JP 2022527296A JP 2022527296 A JP2022527296 A JP 2022527296A JP WO2021240620 A5 JPWO2021240620 A5 JP WO2021240620A5
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JP
Japan
Prior art keywords
pump
dry vacuum
silencer
vacuum pump
delete
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022527296A
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English (en)
Japanese (ja)
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JP7350398B2 (ja
JPWO2021240620A1 (https=
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Priority claimed from PCT/JP2020/020620 external-priority patent/WO2021240620A1/ja
Publication of JPWO2021240620A1 publication Critical patent/JPWO2021240620A1/ja
Publication of JPWO2021240620A5 publication Critical patent/JPWO2021240620A5/ja
Application granted granted Critical
Publication of JP7350398B2 publication Critical patent/JP7350398B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2022527296A 2020-05-25 2020-05-25 サイレンサ付き真空排気装置 Active JP7350398B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/020620 WO2021240620A1 (ja) 2020-05-25 2020-05-25 サイレンサ付き真空排気装置

Publications (3)

Publication Number Publication Date
JPWO2021240620A1 JPWO2021240620A1 (https=) 2021-12-02
JPWO2021240620A5 true JPWO2021240620A5 (https=) 2022-08-15
JP7350398B2 JP7350398B2 (ja) 2023-09-26

Family

ID=78723046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022527296A Active JP7350398B2 (ja) 2020-05-25 2020-05-25 サイレンサ付き真空排気装置

Country Status (2)

Country Link
JP (1) JP7350398B2 (https=)
WO (1) WO2021240620A1 (https=)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5454309A (en) * 1977-10-07 1979-04-28 Hitachi Ltd Silencer for use in a displacement fluid machine
JPS6047892U (ja) * 1983-09-09 1985-04-04 株式会社　アンレット ル−ツブロワ−用サイレンサ−
JPH021512Y2 (https=) * 1985-07-03 1990-01-16
JP2510903Y2 (ja) * 1989-03-24 1996-09-18 株式会社 神戸製鋼所 スクリュ式真空ポンプ用消音器
JPH0716070Y2 (ja) * 1990-03-19 1995-04-12 オリオン機械株式会社 多段式ベーンポンプ
JPH11270326A (ja) * 1998-03-25 1999-10-05 Taiko Kikai Industries Co Ltd ドレン回収機能付き吐出サイレンサ
DE10212940A1 (de) * 2002-03-22 2003-10-02 Leybold Vakuum Gmbh Exzenterpumpe und Verfahren zum Betrieb dieser Pumpe
JP2004100594A (ja) * 2002-09-10 2004-04-02 Toyota Industries Corp 真空ポンプ装置
JP2008163905A (ja) * 2006-12-29 2008-07-17 Orion Mach Co Ltd ポンプ装置
JP2014194211A (ja) * 2013-03-01 2014-10-09 Aisan Ind Co Ltd 電動バキュームポンプ
DE202016001950U1 (de) * 2016-03-30 2017-07-03 Leybold Gmbh Vakuumpumpe

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