JP7350398B2 - サイレンサ付き真空排気装置 - Google Patents

サイレンサ付き真空排気装置 Download PDF

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Publication number
JP7350398B2
JP7350398B2 JP2022527296A JP2022527296A JP7350398B2 JP 7350398 B2 JP7350398 B2 JP 7350398B2 JP 2022527296 A JP2022527296 A JP 2022527296A JP 2022527296 A JP2022527296 A JP 2022527296A JP 7350398 B2 JP7350398 B2 JP 7350398B2
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JP
Japan
Prior art keywords
pump
silencer
exhaust
dry vacuum
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022527296A
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English (en)
Japanese (ja)
Other versions
JPWO2021240620A1 (https=
JPWO2021240620A5 (https=
Inventor
一 黒澤
遼 小平
誠也 宮原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kashiyama Industries Ltd
Original Assignee
Kashiyama Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kashiyama Industries Ltd filed Critical Kashiyama Industries Ltd
Publication of JPWO2021240620A1 publication Critical patent/JPWO2021240620A1/ja
Publication of JPWO2021240620A5 publication Critical patent/JPWO2021240620A5/ja
Application granted granted Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06—Silencing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP2022527296A 2020-05-25 2020-05-25 サイレンサ付き真空排気装置 Active JP7350398B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/020620 WO2021240620A1 (ja) 2020-05-25 2020-05-25 サイレンサ付き真空排気装置

Publications (3)

Publication Number Publication Date
JPWO2021240620A1 JPWO2021240620A1 (https=) 2021-12-02
JPWO2021240620A5 JPWO2021240620A5 (https=) 2022-08-15
JP7350398B2 true JP7350398B2 (ja) 2023-09-26

Family

ID=78723046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022527296A Active JP7350398B2 (ja) 2020-05-25 2020-05-25 サイレンサ付き真空排気装置

Country Status (2)

Country Link
JP (1) JP7350398B2 (https=)
WO (1) WO2021240620A1 (https=)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004100594A (ja) 2002-09-10 2004-04-02 Toyota Industries Corp 真空ポンプ装置
JP2005520988A (ja) 2002-03-22 2005-07-14 ライボルト　ヴァークウム　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング 偏心型ポンプおよび該ポンプを運転するための方法
JP2008163905A (ja) 2006-12-29 2008-07-17 Orion Mach Co Ltd ポンプ装置
JP2019510166A (ja) 2016-03-30 2019-04-11 レイボルド ゲーエムベーハー 消音器を備えた真空ポンプ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5454309A (en) * 1977-10-07 1979-04-28 Hitachi Ltd Silencer for use in a displacement fluid machine
JPS6047892U (ja) * 1983-09-09 1985-04-04 株式会社　アンレット ル−ツブロワ−用サイレンサ−
JPH021512Y2 (https=) * 1985-07-03 1990-01-16
JP2510903Y2 (ja) * 1989-03-24 1996-09-18 株式会社 神戸製鋼所 スクリュ式真空ポンプ用消音器
JPH0716070Y2 (ja) * 1990-03-19 1995-04-12 オリオン機械株式会社 多段式ベーンポンプ
JPH11270326A (ja) * 1998-03-25 1999-10-05 Taiko Kikai Industries Co Ltd ドレン回収機能付き吐出サイレンサ
JP2014194211A (ja) * 2013-03-01 2014-10-09 Aisan Ind Co Ltd 電動バキュームポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005520988A (ja) 2002-03-22 2005-07-14 ライボルト　ヴァークウム　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング 偏心型ポンプおよび該ポンプを運転するための方法
JP2004100594A (ja) 2002-09-10 2004-04-02 Toyota Industries Corp 真空ポンプ装置
JP2008163905A (ja) 2006-12-29 2008-07-17 Orion Mach Co Ltd ポンプ装置
JP2019510166A (ja) 2016-03-30 2019-04-11 レイボルド ゲーエムベーハー 消音器を備えた真空ポンプ

Also Published As

Publication number Publication date
JPWO2021240620A1 (https=) 2021-12-02
WO2021240620A1 (ja) 2021-12-02

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