JPWO2021240620A5

JPWO2021240620A5 -

Info

Publication number: JPWO2021240620A5
Application number: JP2022527296A
Authority: JP
Filing date: 2020-05-25
Publication date: 2022-08-15
Anticipated expiration: 2040-05-25

Claims

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a mechanical booster pump;
a positive displacement dry vacuum pump;
a joint pipe connecting the front-stage pump exhaust port, which is the pump exhaust port of the mechanical booster pump, and the rear-stage pump intake port, which is the pump intake port of the dry vacuum pump;
a silencer that reduces noise when the exhaust is discharged from the latter-stage pump exhaust port, which is the pump exhaust port of the dry vacuum pump;
and
The mechanical booster pump and the dry vacuum pump are arranged in such a manner that the front-stage pump exhaust port of the mechanical booster pump and the rear-stage pump intake port of the dry vacuum pump face each other at a predetermined interval,
The silencer is arranged between the front-stage pump exhaust port of the mechanical booster pump and the rear-stage pump intake port of the dry vacuum pump so as to surround the outer periphery of the joint pipe. Vacuum pump.

In the evacuation apparatus according to claim 11,
The silencer is
a silencer case integrally formed with the joint pipe;
a plurality of silencer compartments arranged in a state surrounding the joint pipe inside the silencer case;
an exhaust passage that communicates with the rear-stage pump exhaust port and that allows the exhaust to flow sequentially through each of the muffling compartments;
Evacuator equipped with.

In the evacuation apparatus according to claim 12,
The dry vacuum pump is arranged horizontally,
The mechanical booster pump is arranged horizontally above the dry vacuum pump,
The rear-stage pump intake port and the rear-stage pump exhaust port of the dry vacuum pump are open at an upper portion of the dry vacuum pump facing the mechanical booster pump,
The front-stage pump exhaust port of the mechanical booster pump is open at a lower portion of the mechanical booster pump facing the rear-stage pump intake port of the dry vacuum pump,
The upper end opening of the joint pipe of the silencer case is connected to the front-stage pump exhaust port of the mechanical booster pump, and the lower end opening of the joint pipe is connected to the rear-stage pump intake port of the dry vacuum pump, A vacuum evacuation apparatus, wherein an exhaust passage inlet of the exhaust passage is connected to the post-stage pump exhaust port of the dry vacuum pump.

In the evacuation apparatus according to claim 13,
The said silencer case is a vacuum exhaust apparatus attached to the pump casing of the said dry vacuum pump or the said mechanical booster pump via the vibration-absorbing material.

In the evacuation apparatus according to claim 12,
The vacuum exhaust device, wherein the silencer case is made of a material having higher thermal conductivity than pump casings of the dry vacuum pump and the mechanical booster pump.

In the evacuation apparatus according to claim 12,
The silencer comprises, as the noise-reducing compartment, a compartment having an expansion chamber structure arranged upstream in the flow direction of the exhaust gas, and a compartment having a sound absorbing structure arranged downstream.

In the evacuation apparatus according to claim 11,
The silencer is an evacuation device having a drain mechanism for discharging condensed water generated in the sound deadening compartment to the outside.

In the evacuation apparatus according to claim 11,
The silencer has a gas ballast mechanism including a ballast gas passage for introducing ballast gas from the outside to a ballast gas inlet of the dry vacuum pump and a check valve.