JPWO2021192753A1 - - Google Patents

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Publication number
JPWO2021192753A1
JPWO2021192753A1 JP2022509414A JP2022509414A JPWO2021192753A1 JP WO2021192753 A1 JPWO2021192753 A1 JP WO2021192753A1 JP 2022509414 A JP2022509414 A JP 2022509414A JP 2022509414 A JP2022509414 A JP 2022509414A JP WO2021192753 A1 JPWO2021192753 A1 JP WO2021192753A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022509414A
Other languages
Japanese (ja)
Other versions
JP7633703B2 (ja
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Publication date
Application filed filed Critical
Publication of JPWO2021192753A1 publication Critical patent/JPWO2021192753A1/ja
Application granted granted Critical
Publication of JP7633703B2 publication Critical patent/JP7633703B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/46—Attachment of sealing rings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/005—Particular materials for seats or closure elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Lift Valve (AREA)
  • Fluid-Driven Valves (AREA)
  • Polarising Elements (AREA)
  • Details Of Valves (AREA)
  • Valve Housings (AREA)
JP2022509414A 2020-03-26 2021-02-18 バルブ装置 Active JP7633703B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2020055687 2020-03-26
JP2020055687 2020-03-26
JP2020055686 2020-03-26
JP2020055686 2020-03-26
PCT/JP2021/006213 WO2021192753A1 (ja) 2020-03-26 2021-02-18 バルブ装置

Publications (2)

Publication Number Publication Date
JPWO2021192753A1 true JPWO2021192753A1 (https=) 2021-09-30
JP7633703B2 JP7633703B2 (ja) 2025-02-20

Family

ID=77892502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022509414A Active JP7633703B2 (ja) 2020-03-26 2021-02-18 バルブ装置

Country Status (4)

Country Link
US (1) US20230175598A1 (https=)
JP (1) JP7633703B2 (https=)
TW (1) TWI807271B (https=)
WO (1) WO2021192753A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119554441B (zh) * 2024-11-08 2025-11-28 上海皓固机械工业有限公司 一种可更换型膜片密封组件结构以及隔膜阀

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06193747A (ja) * 1992-12-25 1994-07-15 Hitachi Metals Ltd メタルダイアフラム弁
WO2013084744A1 (ja) * 2011-12-06 2013-06-13 株式会社フジキン ダイヤフラム弁
JP2015036563A (ja) * 2013-08-12 2015-02-23 株式会社フジキン ダイヤフラム弁
WO2019193978A1 (ja) * 2018-04-06 2019-10-10 株式会社フジキン バルブ装置および流体制御装置、流体制御方法、半導体製造装置及び半導体製造方法

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63115970A (ja) * 1986-10-31 1988-05-20 Motoyama Seisakusho:Kk ダイヤフラム弁
US4867201A (en) * 1989-03-06 1989-09-19 Harsco Corporation Parallel-motion dual-diaphragm valve
JPH0427274U (https=) * 1990-06-29 1992-03-04
JPH086828B2 (ja) * 1991-08-09 1996-01-29 株式会社ベンカン メタルダイヤフラム弁
JP3505589B2 (ja) * 1992-04-20 2004-03-08 清原 まさ子 管継手用リテーナ
US5335691A (en) * 1992-05-26 1994-08-09 Nupro Company High pressure diaphragm valve
US5215286A (en) * 1992-05-26 1993-06-01 Nupro Company High pressure diaphragm valve
JP3280119B2 (ja) * 1993-06-02 2002-04-30 清原 まさ子 ダイヤフラム弁
JP3372091B2 (ja) * 1993-11-15 2003-01-27 株式会社本山製作所 ダイヤフラム弁構造
JP3017398B2 (ja) * 1994-06-29 2000-03-06 株式会社本山製作所 ダイヤフラム弁構造及びガス配管系
US6073646A (en) * 1996-09-30 2000-06-13 Benkan Corporation Gas controlling device for integration
JP2000193007A (ja) * 1998-12-22 2000-07-14 Fukoku Co Ltd 板バネ一体型コアおよびその製造方法
EP1300619B1 (en) * 2000-06-05 2006-08-02 Fujikin Incorporated Orifice-built-in valve
JP4700234B2 (ja) * 2001-07-31 2011-06-15 株式会社フジキン ダイヤフラム弁
US20030042459A1 (en) * 2001-08-29 2003-03-06 Gregoire Roger J. Unitary diaphragm and seat assembly
JP4119275B2 (ja) * 2003-02-18 2008-07-16 忠弘 大見 真空排気系用のダイヤフラム弁
JP3861206B2 (ja) * 2003-12-08 2006-12-20 株式会社フジキン 流体制御器
US6997440B2 (en) * 2004-03-29 2006-02-14 Tescom Corporation Packless valve apparatus
EP2003379A1 (en) * 2007-06-12 2008-12-17 Luxembourg Patent Company S.A. High pressure diaphragm valve with exchangeable seat assembly
US8245727B2 (en) * 2009-06-26 2012-08-21 Pamela Mooney, legal representative Flow control valve and method of use
JP5243513B2 (ja) * 2010-10-25 2013-07-24 Ｃｋｄ株式会社 流体制御弁の弁座構造
JP5802532B2 (ja) * 2011-12-05 2015-10-28 株式会社フジキン ダイヤフラム弁およびダイヤフラム弁用シートホルダユニット
KR102207127B1 (ko) * 2013-02-01 2021-01-22 스와겔로크 컴패니 용접된 다이어프램 시트 캐리어를 갖는 다이어프램 밸브
JP6221426B2 (ja) * 2013-07-05 2017-11-01 アイシン精機株式会社 流体制御弁
KR102341939B1 (ko) * 2017-11-30 2021-12-22 가부시키가이샤 후지킨 밸브 장치, 이 밸브 장치를 사용한 유체제어장치 및 반도체 제조 장치
JP7045839B2 (ja) * 2017-12-08 2022-04-01 株式会社キッツエスシーティー 流体制御バルブ
KR102453794B1 (ko) * 2018-07-24 2022-10-12 가부시키가이샤 후지킨 밸브 장치, 유체 제어 장치, 유체 제어 방법, 반도체 제조 장치 및 반도체 제조 방법
CN112534166A (zh) * 2018-07-31 2021-03-19 株式会社富士金 阀装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06193747A (ja) * 1992-12-25 1994-07-15 Hitachi Metals Ltd メタルダイアフラム弁
WO2013084744A1 (ja) * 2011-12-06 2013-06-13 株式会社フジキン ダイヤフラム弁
JP2015036563A (ja) * 2013-08-12 2015-02-23 株式会社フジキン ダイヤフラム弁
WO2019193978A1 (ja) * 2018-04-06 2019-10-10 株式会社フジキン バルブ装置および流体制御装置、流体制御方法、半導体製造装置及び半導体製造方法

Also Published As

Publication number Publication date
JP7633703B2 (ja) 2025-02-20
KR20220140821A (ko) 2022-10-18
US20230175598A1 (en) 2023-06-08
WO2021192753A1 (ja) 2021-09-30
TW202138704A (zh) 2021-10-16
TWI807271B (zh) 2023-07-01

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