JPWO2021192296A1 - - Google Patents

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Publication number
JPWO2021192296A1
JPWO2021192296A1 JP2022510394A JP2022510394A JPWO2021192296A1 JP WO2021192296 A1 JPWO2021192296 A1 JP WO2021192296A1 JP 2022510394 A JP2022510394 A JP 2022510394A JP 2022510394 A JP2022510394 A JP 2022510394A JP WO2021192296 A1 JPWO2021192296 A1 JP WO2021192296A1
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2022510394A
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Japanese (ja)
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JPWO2021192296A5 (https=
JP7431400B2 (ja
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Publication of JP7431400B2 publication Critical patent/JP7431400B2/ja
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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/227Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a Schottky barrier
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/206Electrodes for devices having potential barriers

Landscapes

  • Light Receiving Elements (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
JP2022510394A 2020-03-27 2020-03-27 電磁波検出器、電磁波検出器アレイ、および電磁波検出器の製造方法 Active JP7431400B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/014284 WO2021192296A1 (ja) 2020-03-27 2020-03-27 電磁波検出器、電磁波検出器アレイ、および電磁波検出器の製造方法

Publications (3)

Publication Number Publication Date
JPWO2021192296A1 true JPWO2021192296A1 (https=) 2021-09-30
JPWO2021192296A5 JPWO2021192296A5 (https=) 2022-10-05
JP7431400B2 JP7431400B2 (ja) 2024-02-15

Family

ID=77891606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022510394A Active JP7431400B2 (ja) 2020-03-27 2020-03-27 電磁波検出器、電磁波検出器アレイ、および電磁波検出器の製造方法

Country Status (4)

Country Link
US (1) US20230057648A1 (https=)
JP (1) JP7431400B2 (https=)
CN (1) CN115315818B (https=)
WO (1) WO2021192296A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023097598A1 (zh) * 2021-12-02 2023-06-08 京东方科技集团股份有限公司 光电传感器和基板
WO2025046162A1 (en) * 2023-08-25 2025-03-06 Aalto University Foundation Sr Spectrometer
CN119421511B (zh) * 2025-01-02 2025-05-30 国科大杭州高等研究院 一种PbSe薄膜肖特基结探测器、制备方法及其应用

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170256667A1 (en) * 2016-03-02 2017-09-07 Gwangju Institute Of Science And Technology Graphene-semiconductor schottky junction photodetector of having tunable gain
CN108155267A (zh) * 2017-12-08 2018-06-12 浙江大学 一种基于肖特基-mos混合结构的光致负阻器件
JP2019002852A (ja) * 2017-06-16 2019-01-10 株式会社豊田中央研究所 電磁波検出器およびその製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101479395B1 (ko) * 2013-03-08 2015-01-05 경희대학교 산학협력단 그래핀-부도체-반도체의 구조를 갖는 투과 다이오드, 투과 트랜지스터, 투과 광다이오드 및 투과 광트랜지스터
CN104393093B (zh) * 2014-11-13 2017-02-01 北京工业大学 应用石墨烯的高探测率氮化镓基肖特基型紫外探测器
US12538537B2 (en) * 2014-12-23 2026-01-27 Kyocera Sld Laser, Inc. Manufacturable gallium containing electronic devices
US9900539B2 (en) * 2015-09-10 2018-02-20 Canon Kabushiki Kaisha Solid-state image pickup element, and image pickup system
CN105679857B (zh) * 2016-01-20 2017-03-22 浙江大学 一种基于硅量子点/石墨烯/硅异质结构的光电传感器
WO2018012076A1 (ja) * 2016-07-12 2018-01-18 三菱電機株式会社 電磁波検出器及び電磁波検出器アレイ
US10121926B2 (en) * 2016-08-22 2018-11-06 Shahid Rajaee Teacher Training University Graphene-based detector for W-band and terahertz radiations
CN108281454B (zh) * 2018-01-29 2021-01-19 杭州紫元科技有限公司 一种基于二维材料薄膜/绝缘层/半导体结构的电荷耦合器件
US20190305157A1 (en) * 2018-04-02 2019-10-03 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Photodetector
KR20220030939A (ko) * 2019-07-12 2022-03-11 소니 세미컨덕터 솔루션즈 가부시키가이샤 광 검출 장치

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170256667A1 (en) * 2016-03-02 2017-09-07 Gwangju Institute Of Science And Technology Graphene-semiconductor schottky junction photodetector of having tunable gain
JP2019002852A (ja) * 2017-06-16 2019-01-10 株式会社豊田中央研究所 電磁波検出器およびその製造方法
CN108155267A (zh) * 2017-12-08 2018-06-12 浙江大学 一种基于肖特基-mos混合结构的光致负阻器件

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
AMIRMAZLAGHANI, MINA ET AL.: "Graphene-Si Schottky IR Detector", IEEE JOURNAL OF QUANTUM ELECTRONICS, vol. 49, JPN6020022058, 2013, pages 589 - 594, XP011511927, ISSN: 0005212168, DOI: 10.1109/JQE.2013.2261472 *
WANG, XIAOJUAN ET AL.: "Study on the graphene/silicon Schottky diodes by transferring graphene transparent electrodes on sil", THIN SOLID FILMS, vol. 592, JPN6020022057, 25 June 2015 (2015-06-25), pages 281 - 286, XP055862406, ISSN: 0005212167 *

Also Published As

Publication number Publication date
WO2021192296A1 (ja) 2021-09-30
JP7431400B2 (ja) 2024-02-15
CN115315818B (zh) 2025-02-25
CN115315818A (zh) 2022-11-08
US20230057648A1 (en) 2023-02-23

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