JPWO2021192017A1 - - Google Patents

Info

Publication number
JPWO2021192017A1
JPWO2021192017A1 JP2022509817A JP2022509817A JPWO2021192017A1 JP WO2021192017 A1 JPWO2021192017 A1 JP WO2021192017A1 JP 2022509817 A JP2022509817 A JP 2022509817A JP 2022509817 A JP2022509817 A JP 2022509817A JP WO2021192017 A1 JPWO2021192017 A1 JP WO2021192017A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022509817A
Other languages
Japanese (ja)
Other versions
JP7385003B2 (en
JPWO2021192017A5 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021192017A1 publication Critical patent/JPWO2021192017A1/ja
Publication of JPWO2021192017A5 publication Critical patent/JPWO2021192017A5/ja
Application granted granted Critical
Publication of JP7385003B2 publication Critical patent/JP7385003B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP2022509817A 2020-03-24 2020-03-24 Optical filtering devices, optical microscopes and defect observation equipment Active JP7385003B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/012940 WO2021192017A1 (en) 2020-03-24 2020-03-24 Light filtering device, optical microscope, and defect observation apparatus

Publications (3)

Publication Number Publication Date
JPWO2021192017A1 true JPWO2021192017A1 (en) 2021-09-30
JPWO2021192017A5 JPWO2021192017A5 (en) 2022-11-02
JP7385003B2 JP7385003B2 (en) 2023-11-21

Family

ID=77891170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022509817A Active JP7385003B2 (en) 2020-03-24 2020-03-24 Optical filtering devices, optical microscopes and defect observation equipment

Country Status (4)

Country Link
JP (1) JP7385003B2 (en)
KR (1) KR20220136419A (en)
TW (1) TW202204883A (en)
WO (1) WO2021192017A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024009340A1 (en) * 2022-07-04 2024-01-11 株式会社日立ハイテク Optical filtering device and mems shutter
KR20240105544A (en) * 2022-12-28 2024-07-08 주식회사 큐빛바이오 Lens module, optical device and 3d image collection method using the same

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62289807A (en) * 1986-05-22 1987-12-16 シ−メンス、アクチエンゲゼルシヤフト Optical type image processor
JPH1039239A (en) * 1996-07-18 1998-02-13 Ricoh Co Ltd Spatial light modulation element
US5784190A (en) * 1995-04-27 1998-07-21 John M. Baker Electro-micro-mechanical shutters on transparent substrates
JPH11271650A (en) * 1998-03-24 1999-10-08 Fuji Photo Film Co Ltd Array type exposure element and plane type display
KR20060046844A (en) * 2004-11-12 2006-05-18 한국과학기술원 Light valve having movable thin film and display apparatus using thereof
JP2010113067A (en) * 2008-11-05 2010-05-20 Olympus Corp Optical deflector array
WO2012105055A1 (en) * 2011-02-04 2012-08-09 株式会社日立製作所 Optical filtering method, device therefor, substrate-defect inspection method, and apparatus therefor
JP2014010371A (en) * 2012-06-29 2014-01-20 Takahisa Yamaguchi Display device and method of manufacturing the same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5867736B2 (en) 2011-02-04 2016-02-24 株式会社日立製作所 Optical filtering device, defect inspection method and apparatus
JP2019132637A (en) 2018-01-30 2019-08-08 株式会社日立ハイテクノロジーズ Defect observation device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62289807A (en) * 1986-05-22 1987-12-16 シ−メンス、アクチエンゲゼルシヤフト Optical type image processor
US5784190A (en) * 1995-04-27 1998-07-21 John M. Baker Electro-micro-mechanical shutters on transparent substrates
JPH1039239A (en) * 1996-07-18 1998-02-13 Ricoh Co Ltd Spatial light modulation element
JPH11271650A (en) * 1998-03-24 1999-10-08 Fuji Photo Film Co Ltd Array type exposure element and plane type display
KR20060046844A (en) * 2004-11-12 2006-05-18 한국과학기술원 Light valve having movable thin film and display apparatus using thereof
JP2010113067A (en) * 2008-11-05 2010-05-20 Olympus Corp Optical deflector array
WO2012105055A1 (en) * 2011-02-04 2012-08-09 株式会社日立製作所 Optical filtering method, device therefor, substrate-defect inspection method, and apparatus therefor
JP2014010371A (en) * 2012-06-29 2014-01-20 Takahisa Yamaguchi Display device and method of manufacturing the same

Also Published As

Publication number Publication date
JP7385003B2 (en) 2023-11-21
WO2021192017A1 (en) 2021-09-30
KR20220136419A (en) 2022-10-07
TW202204883A (en) 2022-02-01

Similar Documents

Publication Publication Date Title
BR112023005462A2 (en)
BR112023012656A2 (en)
BR112021014123A2 (en)
BR112022009896A2 (en)
BR112023009656A2 (en)
JPWO2021192017A1 (en)
BR112022024743A2 (en)
BR112023006729A2 (en)
BR102021018859A2 (en)
BR112023008622A2 (en)
BR102020022030A2 (en)
BR112023011738A2 (en)
BR112023016292A2 (en)
BR112023004146A2 (en)
BR112023011539A2 (en)
BR112023011610A2 (en)
BR112023008976A2 (en)
BR102021020147A2 (en)
BR102021018926A2 (en)
BR102021018167A2 (en)
BR102021017576A2 (en)
BR102021016837A2 (en)
BR102021016551A2 (en)
BR102021016375A2 (en)
BR112021017747A2 (en)

Legal Events

Date Code Title Description
A529 Written submission of copy of amendment under article 34 pct

Free format text: JAPANESE INTERMEDIATE CODE: A5211

Effective date: 20220728

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220728

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230620

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230728

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230926

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230929

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20231107

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20231109

R150 Certificate of patent or registration of utility model

Ref document number: 7385003

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150