JP2010113067A - Optical deflector array - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical deflector array in which a large area of driving electrodes is given for tilting movable parts around axes perpendicularly intersecting with the raw of the array, and driving efficiency is improved. <P>SOLUTION: The optical deflector array includes: a supporting member; movable parts; reflection faces provided on at least one face of the movable parts; movable part counter electrodes provided on the faces opposite to the reflection faces of the movable parts; at least a pair of elastic members which are connected to the supporting member and the movable parts and tiltably support the movable parts around an axis which perpendicularly intersects at least with the array direction; first driving electrodes which tilt the movable parts around an axis which perpendicularly intersects with the array direction; and a first voltage control means which individually controls the voltages applied on the respective first driving electrodes, wherein the first driving electrodes are formed between the adjacent axes and stranding the adjacent movable parts, the first voltage control means, when tilting the movable parts, applies predetermined voltage difference between the adjacent first driving electrodes. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an optical deflector array in which a plurality of optical deflectors are arranged close to each other in a one-dimensional array.

  In the optical communication field, the video field, etc., an optical switch for switching the path of an optical signal using the MEMS technology is used. An optical deflector array in which optical deflectors for deflecting light are arrayed is used for the optical switch. An optical deflector array is disclosed in Patent Document 1, for example. This optical deflector array will be described with reference to FIG. FIG. 13 is a diagram showing a perspective configuration of a conventional optical polarizer array 900.

  The support member 921 is formed in a pillar shape having a certain thickness. The gimbal frame 908 is formed in a frame shape having a smaller thickness than the support member so as to surround the outer periphery of the upper surface of the support member. The movable plate 903 is formed in a frame shape having a thickness equivalent to that of the support member 921 so as to surround the outer periphery of the gimbal frame 908. The reflection surface 905 is formed on the entire upper surface of the movable plate 903. A hinge 904 connecting the support member and the gimbal frame 908 supports the gimbal frame 908 so as to be tiltable in the θy direction. A hinge 902 connecting the gimbal frame 908 and the movable plate 903 supports the movable plate 903 so as to be tiltable in the θx direction.

  The drive electrodes 911 to 914 are arranged only in the facing region directly below the movable plate 903, and four drive electrodes 911 to 914 are formed for one movable plate 903. A movable part drive electrode (not shown) of the movable plate 903 is connected to the GND potential, and an appropriate voltage is applied to each of the four drive electrodes 911 to 914 independently. An electrostatic attractive force is generated by a potential difference generated between the movable plate 903 and the drive electrodes 911 to 914, and the movable plate 903 is tilted about two axes (x axis and y axis) by the force. In the optical deflector array 900 in which the optical deflectors 901 are arranged close to each other, the distance between the movable plates 903 is narrow, and the distance between the drive electrodes 911 to 914 directly below the adjacent movable plates 903 is also increased. It is narrowly formed.

  At the same time, a shield wall (not shown) for preventing crosstalk is disposed between the adjacent drive electrodes 911 to 914 immediately below the movable plate 903, so that the drive electrodes 911 to 914 existing at positions facing one movable plate 903 are It is formed in a region sandwiched between two shield walls.

US Pat. No. 6,934,439 (FIGS. 9 to 11)

  However, in the optical polarizer array 900 of Patent Document 1, drive electrodes 911 to 914 that tilt the movable portion 903 around an axis (y axis) orthogonal to the array direction (x axis direction) are sandwiched between shield walls. Since it is formed in a limited region, there is a problem that the electrode area is reduced and the driving efficiency is poor.

  The present invention has been made in view of the above, and an optical polarizer array that can increase the electrode area of a drive electrode that inclines a movable portion around an axis orthogonal to the direction in which the optical deflectors are arranged, and can improve drive efficiency. The purpose is to provide.

  In order to solve the above-described problems and achieve the object, the present invention provides an optical deflector array in which a plurality of optical deflectors are closely arranged in a one-dimensional array, a support member, a movable part, A reflection surface provided on at least one surface of the movable portion; a movable portion counter electrode provided on a surface opposite to the reflection surface of the movable portion; and the support member and the movable portion, At least one pair of elastic members that tiltably support the movable portion around an axis orthogonal to the array direction, a first drive electrode that tilts the movable portion around an axis orthogonal to the array direction, and the first First voltage control means for individually controlling a voltage to be applied to each drive electrode, and the first drive electrode extends between adjacent shafts and spans adjacent movable parts. Formed in the first voltage Control means, when tilting the movable part can provide an optical deflector array, wherein applying a predetermined potential difference between adjacent said first driving electrode.

  Further, according to a preferred aspect of the present invention, the movable parts of the optical deflectors located at both ends of the plurality of optical deflectors arranged in an array are selected from the movable parts located at both ends. On the side where the adjacent movable part does not exist, it has a second drive electrode arranged in a region facing the movable part counter electrode, and the first voltage control means is provided with respect to the second drive electrode. It is desirable to individually apply a voltage and drive the movable parts of the optical deflectors located at both ends by a potential difference between the first drive electrode and the second drive electrode.

  According to a preferred aspect of the present invention, the first drive electrode and / or the second drive electrode is configured such that the length of the drive electrode in the direction perpendicular to the array direction is the movable in the direction perpendicular to the array direction. It is desirable that the length is longer than the length of the portion.

  According to a preferred aspect of the present invention, a third drive electrode for tilting the movable portion around an axis along the array direction and a second voltage for individually controlling the voltage applied to each of the third drive electrodes. It is desirable to have the voltage control means.

  According to the optical deflector array of the present invention, since the first drive electrode is provided between the axes of the adjacent movable parts and over the adjacent movable parts, the arrangement direction of the optical deflectors It is possible to increase the electrode area of the drive electrode that inclines the movable portion around an axis orthogonal to the drive axis, thereby improving the drive efficiency.

  Further, in order to incline the movable part, a predetermined potential difference is applied between the adjacent first drive electrodes by the first voltage control means, so that a large electrostatic force is generated near the end part away from the rotation center of the movable part. By generating the attractive force, it is possible to increase the torque that can be used to incline the movable part and improve the driving efficiency.

Embodiments according to the present invention will be described below in detail with reference to the drawings. In addition, this invention is not limited by this embodiment.
(First embodiment)
(Constitution)
A configuration of the optical deflector array 101 of the present embodiment will be described with reference to FIGS. FIG. 1A is a diagram showing a top surface configuration of the optical deflector array 101, and FIG. 1B is a diagram showing a cross-sectional configuration along the line AA ′ in FIG. In the coordinate system of FIG. 1A, as shown in FIG. 1A, the horizontal direction of the paper is defined as the x axis, the vertical direction is defined as the y axis, and the depth direction is defined as the z axis, and rotation around the x axis is defined as θx. , Rotation around the y axis is defined as θy. In the coordinate system of FIG. 1B, as shown in FIG. 1B, the horizontal direction of the page is defined as the x axis, the vertical direction is defined as the z axis, and the depth direction is defined as the y axis.

  In the optical deflector array 101 of this embodiment shown in FIGS. 1A and 1B, the movable portions 1 to 5 of the optical deflector are arranged in a line in the x-axis direction (that is, the array direction). It is configured. Since the optical deflector of the present embodiment has the same shape and configuration as each other, the description will focus on the movable portion 2 and the θy drive electrodes b and c shown in FIGS. 1 (a) and 1 (b).

  A wiring board 11 shown in FIG. 1B is a plate-like board that forms the bottom surface of the optical deflector array 101, and has rigidity that does not deform due to external factors (for example, a sufficient thickness). Have). Wiring board 11 is formed of an insulating material, and in the present embodiment, it is made of a glass material or the like. Furthermore, θy drive electrodes b to e are formed on the wiring board 11. A wiring 13 is further formed on the wiring substrate 11, and the θy drive electrodes b to e are electrically connected to the voltage control means 15 provided outside via the wiring 13.

The shape of the θy drive electrodes b to e is a long rectangle with respect to the x-axis direction as shown in FIG. The θy drive electrodes b to e and the wiring 13 are integrally formed from the same material, and are formed by patterning Al formed by sputtering, for example.
In the present embodiment, the first drive electrode in this specification refers to the θy drive electrodes b to e. The spacer 17 shown in FIG. 1B is provided to form a gap in the z-axis direction between movable parts 1 to 5 and θy drive electrodes b to e, which will be described later, on the outer periphery of the wiring board 11. It has a frame shape formed along.

  The material of the spacer 17 is desirably a material having a thermal expansion coefficient close to that of the wiring substrate 11 or the like, and further desirably has conductivity. A mirror substrate 19 shown in FIG. 1B is connected to the frame-shaped support member 21 formed on the spacer 17, the movable parts 1 to 5 provided in the support member 21, and the support member 21. And a θy hinge 23 which supports 5 in a tiltable (rotatable) manner in at least the θy direction. As shown in FIG. 1A, a pair of θy hinges 23a and 23b (23) are provided in the y-axis direction for one movable part 1 to 5, and the movable part is formed by a pair of θy hinges 23a and 23b. 1 to 5 can be inclined in the θy direction. The elastic member in this specification means the θy hinge 23 in the present embodiment.

  The mirror substrate 19 is integrally formed from the same conductor or semiconductor material, and the material is preferably silicon containing impurities. The reflection surface 25 is provided on the upper surface of the movable parts 1 to 5, and when the present optical deflector array 101 is used in the optical communication field, it is formed of a metal having a high reflectance with respect to near infrared light typified by Au. In the case of using the present optical deflector array 101 in the image field or the like, it is desirable that the optical deflector array 101 be formed of a metal such as Al having a high reflectance with respect to the entire visible light region. A movable portion counter electrode 26 is provided on the surface of the movable portions 1 to 5 opposite to the reflecting surface 25.

  In this specification, the fact that the optical deflectors are closely arranged in a one-dimensional manner means that the fill factor in the x-axis direction between the reflecting surfaces provided in the adjacent movable parts is high (the adjacent interval is narrow). is doing.

  As shown in FIGS. 1A and 1B, the θy drive electrode b includes an opposing position in the z-axis direction of the movable part 1 and the z-axis direction of the movable part 2 adjacent to the movable part 1. Is disposed at a position straddling the movable parts 1 and 2 so as to include a facing position facing each other. The θy drive electrode c is disposed at a position across the movable parts 2 and 3 so as to include the opposed position of the movable part 2 and also include the opposed position of the adjacent movable part 3.

  In other words, the θy drive electrode b (c) is disposed at a position facing the region extending between the adjacent movable parts 1, 2 (2, 3), and two θy drive electrodes b are located at the position opposed to the movable part 2. , C are arranged. Similarly, θy drive electrodes c and d are arranged at positions facing the movable part 3, and θy drive electrodes d and e are arranged at positions opposed to the movable part 4. Only one θy drive electrode b is disposed at a position facing the movable portion 1 located at the end of the optical deflector array 101. Similarly, only one θy drive electrode e is disposed at a position facing the movable portion 5. As described above, the optical deflector array 101 shown in FIGS. 1A and 1B includes the five movable portions 1 to 5 and the four θy drive electrodes b to e.

The movable portion counter electrode 26 of each of the movable portions 1 to 5 is connected to the GND potential by wiring (not shown) between the voltage control means 15 via the θy hinge 23, the support member 21, and the spacer 17. Yes.
In this specification, the axis orthogonal to the array direction of the array indicates the y axis in the present embodiment, and the array direction of the array indicates the x axis in the present embodiment. In the present embodiment, the optical deflector in the present specification refers to a movable part having a reflecting surface and supported so as to be capable of tilting, and one or two θy drive electrodes are arranged at positions opposed to the movable part. It shows the unit that is.

(Operating principle)
The operation principle of the optical deflector array 101 of this embodiment will be described with reference to FIGS. 2A is a diagram showing a cross-sectional configuration in which the movable parts 1 to 5 are inclined with respect to one voltage application pattern, and FIG. 2B is a movable part with respect to another voltage application pattern. It is a figure which shows the cross-sectional structure of a mode that 1 thru | or 5 inclined.
In the optical deflector array 101 shown in FIGS. 2A and 2B, the movable portion counter electrode 26 of the movable portions 1 to 5 is connected to the GND potential. A predetermined voltage can be individually applied to the θy drive electrodes b, c, d, and e. As shown in FIG. 2 (a), the movable parts 2, 3, and 4 are inclined in the θy direction due to the difference in electrostatic attraction generated by the voltage applied to the two θy drive electrodes including the opposing positions of the movable parts. Is done. Therefore, when the applied voltages of the two θy drive electrodes are the same, the inclination of the movable portion does not occur, and only when there is a difference, the movable portion is inclined so as to be drawn toward a larger voltage value.

  The distance between the movable parts 1 to 5 and the θy drive electrodes b to e is three times the displacement amount displaced in the z-axis direction when the movable parts 1 to 5 are tilted to the maximum so as not to disturb the tilt of the movable part. The above is desirable.

  FIG. 2A shows the inclination of the movable parts 1 to 5 when the voltage values of the θy drive electrodes b to e are applied so that b = c <d = e. The movable part 2 is not inclined because the applied voltages of the θy drive electrodes b and c at the opposite positions are the same. The movable portion 3 is inclined toward the θy drive electrode d because there is a difference in the applied voltages of the θy drive electrodes c and d at the opposing positions and the θy drive electrode d has a larger voltage value. . The movable part 4 is not inclined because the applied voltages of the θy drive electrodes d and e at the opposite positions are the same.

  Further, if a voltage is applied stepwise to each θy drive electrode b, c, d, e as shown in FIG. 2B, the movable parts 2, 3, 4 can be inclined in the same direction. FIG. 2B shows the inclination of each movable part when the voltage value of each θy drive electrode is applied so that b <c <d <e. Regarding the θy drive electrodes b to e at the positions opposed to the movable parts 2, 3, and 4, for any two adjacent drive electrodes, the θy drive electrode on the right side of the drawing (for example, the θy drive electrodes b and c, Since a larger voltage value is applied to the θy drive electrode c), an electrostatic attractive force is generated that tilts each of the movable parts 1 to 5 to the right side of the figure. Therefore, all the movable parts 2, 3, and 4 are inclined to the right side of the figure.

  The tilt method in FIG. 2 (b) has the advantage that tilting in the same direction is possible, but the maximum voltage may increase because the voltage is applied stepwise, and the maximum voltage is fixed. If it is, the tilt angle may be reduced.

  In the case of FIGS. 2A and 2B, there is only one θy drive electrode b (e) at the opposite position of the movable portion 1 (5) at both ends of the array, so that a voltage is applied to the θy drive electrodes b and e. In the state where is applied, the movable portion 1 (5) continues to be inclined toward the center side of the array. Therefore, the inclination angle of the movable parts 1 and 5 can be controlled when moving toward the center of the array, but the inclination to the opposite side cannot be controlled.

Next, the voltage control means of this embodiment will be described with reference to FIGS. FIG. 3A is a block diagram showing one voltage control system, and FIG. 3B is a block diagram showing another voltage control system.
In FIG. 3A, an amplifier 31 is individually connected to each of the four θy drive electrodes b, c, d, and e, and these are connected to one controller 41. The connection between each amplifier 31 and the controller 41 is connected by a wiring 43. The voltage value output from the controller 41 is amplified by each amplifier 31, and the applied voltage is applied to each θy drive electrode b, c, d, e. The controller 41 can independently set the voltage value to be output to each amplifier 31 and can output the voltage to each amplifier 31 simultaneously. The applied voltage in this case may be a DC voltage or an AC voltage. However, in the case of an AC voltage, it is desirable to set the frequency of the AC voltage higher than the natural frequency of the movable parts 1 to 5 with respect to the θy inclination direction.

  In FIG. 3B, voltage holding means 47 formed of a capacitor 45 or the like is individually connected to each of the four θy drive electrodes b, c, d, and e, and these are connected via a switch 49. The amplifier 51 is connected to the controller 53.

  Here, the voltage holding means means that when the state in which the voltage is applied is interrupted, the voltage that has been applied so far is confined to the driving electrodes b, c, d, e by the capacitor 45 for a certain period of time. Is defined as the mechanism that is held. Each voltage holding means 47 and the switch 49 are connected by a wiring 55. The switch 49 can be controlled from the controller 53, and the switch 49 and the controller 53 are connected by a switch control wiring 57.

  The voltage value output from the controller 53 is amplified by the amplifier 51, and the applied voltage is applied to the θy drive electrodes b, c, d, and e selected by switching the switch 49 under the control of the controller 53. The voltage applied to each θy drive electrode b, c, d, e can be set independently by the controller 53, and can be applied to any θy drive electrode by controlling the switch 49. Since each θy drive electrode b, c, d, e has a voltage holding means 47, the voltage applied to the θy drive electrode b, c, d, e even when the switch 49 is switched and the supply of voltage is stopped. Is held for a certain time, and the movable parts 1 to 5 are kept in an inclined state. In this way, the θy drive electrodes b, c, d, and e are sequentially selected by switching the switch 49, and the applied voltage is input to the θy drive electrodes b, c, d, and e. Within the time when the voltage is held by the voltage holding means 47, the voltage is applied again to the drive electrodes b, c, d, e. In this case, the applied voltage is preferably a DC voltage.

  When comparing FIGS. 3A and 3B, the voltage control system of FIG. 3A can simultaneously apply a voltage to each of the drive electrodes b, c, d, and e, so that high-speed control is possible. Although it has an advantage, there is a possibility that the same number of amplifiers 31 as the number of drive electrodes b, c, d, and e are required, which may be expensive. The voltage control system of FIG. 3B has the advantage that a circuit can be formed with a smaller number of amplifiers 51 than the number of drive electrodes b, c, d, e, but each drive electrode b, c, d is advantageous. , E may not be simultaneously applied to e, and therefore, control may be delayed.

(Action / Effect)
The optical deflector array 101 of the present embodiment is composed of electrostatically driven optical deflectors arranged close to one line. The electrostatic drive referred to here will be described with reference to FIGS. FIG. 4A is a diagram showing an image of electrostatic attraction generation in conventional electrostatic driving, and FIG. 4B is a diagram showing an image of electrostatic attraction generation in electrostatic driving of the present embodiment. .

  The electrostatic drive refers to a drive in which a different voltage is applied to the movable portion counter electrode and the θy drive electrode of the movable portion, and the optical deflector is tilted by an electrostatic attractive force generated by a given potential difference. The driveability of electrostatic drive is determined by the torque that is the product of the generated electrostatic attractive force and the distance from the center of rotation of the movable part to the point where the attractive force is generated.

  Here, the electrostatic attractive force is generated between the electrodes of the opposing flat plates (for example, 71 and 72 in FIG. 4A) as shown in FIG. 4, but only the linear attractive force f1 as shown in FIG. 4A. Instead, as shown in FIG. 4 (b), an oblique attractive force f2 called a fringe effect and a surrounding attractive force are generated. That is, as shown in FIG. 4B, in the case of the structure having the drive electrode c arranged across the position where the movable parts 1 and 2 are opposed to each other, the vicinity of the ends 1a and 2a of the movable parts 1 and 2 The attractive force is concentrated, and a large attractive force is generated as compared with the vicinity of the rotation centers 1b and 2b.

  Therefore, in the configuration as shown in FIG. 4B, the θy drive electrode c is disposed so as to face and straddle the end portions 1a and 2a of the movable portions 1 and 2 with respect to the z-axis direction. The torque (force × distance) used to incline the movable parts 1 and 2 is increased by generating a large attractive force in the vicinity of the end parts 1a and 2a away from the rotation centers 1b and 2b of the parts 1 and 2. As a result, the driving efficiency (inclination angle per unit voltage) can be improved.

The torque is given by the following equation (1).
T = ∫F (x) dx (1)
In Equation (1), T represents torque, and F (x) represents electrostatic attraction expressed as a function of distance from the center of rotation. Dx indicates the distance from the center of rotation.
Note that since the expression (1) represents only the torque in a certain cross section (cross section by the xz plane) as shown in FIG. 4, it is necessary to accurately integrate in the depth (y-axis) direction of the figure. is there. From formula (1), it can be seen that a large attractive force is generated at 1a (2a) away from the center of rotation, whereby the torque becomes larger than the increment of the attractive force.

  In addition, an optical deflector array in which optical deflectors are arranged close to each other has an inclination angle of another adjacent movable part due to an electrostatic attraction generated by a drive electrode disposed at a position opposite to the movable part counter electrode of a certain movable part. There is a possibility that the change will occur, and the change becomes more significant as the distance between the movable part and the adjacent drive electrode is shorter. This phenomenon will be called electrostatic attraction interference.

  As described in the background art above, in an optical deflector array in which optical deflectors are generally arranged close to each other, a drive electrode is formed in an opposing region immediately below each movable part. This is to control the inclination angle of each movable part independently. In particular, in the drive electrode in which the movable part is inclined with respect to the direction orthogonal to the array direction, the drive electrode can be formed because the drive electrode is also present at a position opposite to another movable part adjacent to one movable part. However, the driving efficiency is deteriorated. In order to improve the driving efficiency, I want to make the driving electrode as large as possible, but when the driving electrode is enlarged, the distance between the adjacent driving electrode is reduced, and the electrostatic attractive force by the driving electrode provided immediately below the adjacent movable part, There is a possibility that interference with electrostatic attraction by a drive electrode provided immediately below one movable part is likely to occur. This is inconvenient when the movable part is controlled independently and precisely only by the drive electrode provided immediately below the movable part. Therefore, in the prior art, the drive electrode provided immediately below the adjacent movable part is provided with shield walls on both sides to prevent interference from the drive electrodes of the movable parts on both sides, and the area where the shield wall is formed Therefore, the area for forming the drive electrode is limited.

  As shown in FIG. 2, in this embodiment, the θy drive electrodes b to e that incline the movable parts 1 to 5 in the θy direction are arranged at positions that extend over the adjacent movable parts. For example, the movable part 2 has two θy drive electrodes b and c at the opposite positions, the inclination angle is controlled by the potential difference between them, and the adjacent movable part 3 is also arranged at two opposite positions θy. The tilt angle is controlled by the potential difference between the drive electrodes c and d. That is, in FIG. 2, the θy drive electrodes b, c, d, e are arranged at opposing positions across the adjacent movable parts with respect to the five movable parts 1, 2, 3, 4, 5 arranged close to each other. Thus, it is possible to obtain an effect that the inclination of the three movable parts 2, 3, 4 in the θy direction can be controlled by voltage control to the four θy drive electrodes b, c, d, e.

  Further, a similar configuration in which θy drive electrodes b, c, d, e are arranged at opposed positions across adjacent movable parts with respect to five movable parts 1, 2, 3, 4, 5 arranged in close proximity. Accordingly, it is possible to obtain an effect that the electrostatic attractive force interference between the adjacent θy drive electrodes does not occur in the movable parts 2, 3, and 4.

  Since the θy drive electrodes b, c, d and e extend beyond the end portions (for example, 1a and 2a in FIG. 4) of the movable portions 1 to 5 with respect to the y-axis direction, the movable portion 1 In order for the movable parts 1 to 5 to incline due to the generation of a large attractive force in the vicinity of the end parts (for example, 1a and 2a in FIG. 4) away from the rotation centers (for example, 1b and 2b in FIG. 4). This has the effect that the torque (force × distance) used is increased, and the effect of improving the driving efficiency (tilt angle per unit voltage) can be obtained.

  In this embodiment, the θy hinge 23 is shown as a straight bar. However, like the bent member such as meander, any one that can be elastically deformed to support the movable parts 1 to 5 so as to be inclined at least to θy can be used. It ’s fine. The cross section of the θy hinge 23 regarding the xz plane is not limited to a rectangle, but may be an ellipse or a polygon. The upper surface shape of the movable parts 1 to 5 is not limited to a rectangle, but may be an ellipse or a polygon.

  The cross-sectional shape of the movable parts 1 to 5 with respect to the xz plane is not limited to a rectangle but may be any shape that can be produced by a semiconductor manufacturing process such as an ellipse or a polygon. The shape of the reflecting surface 25 is not only the same as the upper surface shape of the movable parts 1 to 5, but can take any shape different from the upper surface shape of the movable parts 1 to 5. The material of the reflecting surface 25 is not limited to Au and Al, but may be any material that can ensure a desired reflectance such as other metals and dielectric films. The material of the θy hinge 23 is not limited to Si, and any material that can be elastically deformed, such as silicon nitride, polysilicon, and polyimide, may be used.

  Further, although the wiring board 11 is illustrated as a plate-like member equivalent to the outer peripheral shape of the support member 21, the wiring substrate 11 may of course not be equivalent to the outer shape of the support member 21, and may be in a region including the opposed positions of the movable parts 1 to 5. Any shape can be used as long as the drive electrodes b to e can be arranged. Furthermore, in the present embodiment, although illustrated as an array in which five movable parts 1 to 5 are arranged, of course, the number of movable parts may be five or more or five or less. Although the support member 21 is illustrated so as to surround the outer periphery of the array, the shape is not limited as long as the end portion of the θy hinge 23 not connected to the movable portions 1 to 5 can be fixed to the support member 21. The shape of the θy drive electrodes b to e is not limited to a rectangle, but may be any shape that can be produced by a semiconductor manufacturing process such as an ellipse or a polygon.

(Modification)
The modification of 1st Embodiment is demonstrated using Fig.5 (a), (b), Fig.6 (a), (b). Since most of the modification is the same as that of the first embodiment, different parts will be mainly described here. FIG. 5A is a diagram illustrating a top surface configuration of the optical deflector array 201, and FIG. 5B is a diagram illustrating a cross-sectional configuration along the line AA ′ in FIG. 5A. FIG. 6A is a diagram showing a cross-sectional configuration of the inclination of the movable portions 1 to 5 with respect to one voltage application pattern, and FIG. 6B is a diagram showing the inclination of the movable portions 1 to 5 with respect to another voltage application pattern. It is a figure which shows the cross-sectional structure of a mode.

  In the first embodiment shown in FIG. 1, the θy drive electrode is not provided on the side where the adjacent movable part does not exist with respect to the movable parts 1 and 5 located at both ends of the optical deflector array 101. As shown, in this modification, θy drive electrodes a and f adjacent to θy drive electrodes b and d are also formed on the side where movable portions 1 and 5 located at both ends of the array do not have adjacent movable portions. . That is, the θy drive electrode a is arranged on the wiring substrate 11 in a region including the facing position on the side where the adjacent movable portion of the movable portion 1 does not exist. In addition, the θy drive electrode f is disposed on the wiring substrate 11 in a region including the facing position on the side where the movable portion 5 does not have the adjacent movable portion. In this specification, the second drive electrode indicates the θy drive electrodes a and f in the present modification, and the θy drive electrodes a and f are the same voltage control means (the first voltage control means as the θy drive electrodes b, c, d, and e). Drive voltage controlled by a single voltage control means 15.

  FIG. 6A shows the inclinations of the movable parts 1 to 5 when the voltage values of the respective θy drive electrodes are applied so that a = b = c <d = e = f. The movable portion 1 is not inclined because the applied voltages of the θy drive electrodes a and b at the opposite positions are the same. The movable part 2 is not inclined because the applied voltages of the θy drive electrodes b and c at the opposite positions are the same. The movable portion 3 is inclined toward the θy drive electrode d because there is a difference in the applied voltages of the θy drive electrodes c and d at the opposing positions and the θy drive electrode d has a larger voltage value. . The movable part 4 is not inclined because the applied voltages of the θy drive electrodes d and e at the opposite positions are the same. The movable portion 5 is not inclined because the applied voltages of the θy drive electrodes e and f at the opposite positions are the same.

  Further, as shown in FIG. 6B, if a voltage is applied stepwise to each θy drive electrode a, b, c, d, e, f, the movable parts 1, 2, 3, 4, 5 are moved in the same direction. It is also possible to incline. FIG. 6B shows the inclination of each movable part when the voltage value of each θy drive electrode is applied so that a <b <c <d <e <f. The two θy drive electrodes a, b, c, d, e, and f at the positions facing the movable parts 1, 2, 3, 4, and 5 all have a larger voltage value than the θy drive electrode on the right side of the figure. Since the voltage is applied, an electrostatic attractive force is generated to incline the movable parts a, b, c, d, e, and f to the right side of the figure. Therefore, all of the movable parts 1, 2, 3, 4, 5 are inclined to the right side of the figure.

  Furthermore, the electrode length in the y-axis direction of each θy drive electrode a, b, c, d, e, f is longer than the length in the y-axis direction of the movable parts 1, 2, 3, 4, 5 (See FIG. 5 (a)). In this specification, the drive electrodes controlled by the first voltage control means indicate the θy drive electrodes a, b, c, d, e, and f in this embodiment. In FIGS. 2A and 2B, only three movable parts b, c, and d in the optical deflector array 101 can be controlled. In the modified example, θy drive electrodes a and With the configuration having f, it is possible to obtain an effect that the inclination in the θy direction of all five movable parts 1 to 5 can be controlled.

The effect of further improving the driving efficiency can be obtained by the action that the y-axis direction length of the θy driving electrode is long and the area for generating the electrostatic attractive force is increased.
Further, the configuration in which the length of the θy drive electrode in the y-axis direction is increased can provide an effect that the allowable width for the positional deviation of the θy drive electrode with respect to the movable portion in the y-axis direction can be increased.

<Second Embodiment>
(Constitution)
A first example and a second example of the second embodiment will be described with reference to FIGS. 7A, 7B, 8A, and 8B. Since the second embodiment is almost the same as the first embodiment, only the different parts will be described here. FIG. 7A is a diagram illustrating a top surface configuration of the optical deflector array 301 according to the first example of the second embodiment in which driving efficiency in the θy direction is prioritized, and FIG. 7B is a diagram illustrating FIG. It is a figure which shows the cross-sectional structure along line AA 'of a). FIG. 8A is a diagram illustrating a top surface configuration of the optical deflector array 401 according to the second example of the second embodiment in which the driving efficiency in the θx direction is prioritized, and FIG. It is a figure which shows the cross-sectional structure along line AA 'of a).

  Both the first example shown in FIG. 7 and the second example shown in FIG. 8 have θx drive electrodes 61, 63, 65. In the first example of the second embodiment shown in FIG. 7, the θx drive electrodes 61, 63, 65 are connected to the movable parts 2, 3, 4 having two θy drive electrodes b, c, d, e. On the other hand, it is a drive electrode formed on the wiring substrate 11 in a region including the facing position of the movable parts 2, 3, 4. Each pair (61a, 61b) is provided. Each θx drive electrode 61, 63, 65 is electrically connected to a voltage control means (not shown) that is different from the voltage control means 15 for controlling the θy drive electrodes b to e provided outside via wiring, although not shown. It is connected to the. Therefore, since an appropriate voltage different from the θy drive electrodes b to e is supplied to the θx drive electrodes 61, 63, and 65, it is necessary to form them physically apart from the θy drive electrodes b to e. The θy hinge 69 is formed of a bent hinge so that the movable parts 2 to 4 can be easily inclined in the θy direction and the θx direction.

  As shown in FIG. 7A, the θx drive electrodes 61, 63, 65 are formed in a rectangular shape that is long with respect to the y-axis, and between the two θy drive electrodes (b and c, c and d, and d and e). ).

  The second example of the second embodiment shown in FIG. 8 differs from the first example of the second embodiment shown in FIG. 7 with the θx drive electrodes 61, 63, 65 and the θy drive electrodes b, c, The forms in which the shapes and arrangement of d and e are different are shown. As shown in FIG. 8A, the θx drive electrodes 61, 63, and 65 are formed in a long rectangle with respect to the x axis, and the θy drive electrodes b, c, and d formed in a long rectangle with respect to the x axis. , E are arranged therebetween.

(Operating principle)
The operation principle of the θy drive electrodes b, c, d, and e of the first and second examples of the second embodiment is the same as that of the first embodiment described above. Therefore, only the operation principle of the θx drive electrodes 61, 63, 65 will be described. Similarly to the θy drive electrodes b, c, d, and e, the θx drive electrodes 61, 63, and 65 apply different voltages to the θx drive electrodes 61, 63, and 65, and a potential difference between the adjacent θx drive electrodes 61, 63, and 65 is obtained. It is a drive electrode for performing electrostatic drive type drive which generates electrostatic attraction by giving. 7 and 8, a pair of θx drive electrodes 61, 63, 65 are arranged one by one in the upper and lower directions in the y-axis direction in each of the movable parts 2, 3, 4 in the region including the facing position, The inclination in the θx direction occurs due to the difference in electrostatic attraction generated by the applied voltage value. The applied voltage may be a DC voltage or an AC voltage.

(Action / Effect)
The second embodiment not only has the operations and effects described above in the first embodiment, but also has the θx drive electrodes 61, 63, 65 arranged, thereby allowing the movable parts 2 to 4 to move to θx. The electrostatic attractive force for tilting in the direction can be generated and tilting in the θx direction is also possible, so that the movable parts 2 to 4 can tilt in the biaxial (x-axis, y-axis) directions. The effect of becoming can be obtained.

  In the first example shown in FIG. 7, the θx drive electrodes 61, 63, 65 are formed in a rectangular shape whose length in the x-axis direction is shorter than the length in the y-axis direction. The length in the y-axis direction immediately below the movable part is large, that is, the area of the θy drive electrode directly below the movable part can be ensured, and an effect that the inclination in the θy direction can be efficiently performed can be obtained. In the second example shown in FIG. 8, the θx drive electrodes 61, 63, 65 are formed in a rectangle whose length in the x-axis direction is longer than the length in the y-axis direction. A large area can be secured, and an effect that the tilting in the θx direction can be performed efficiently can be obtained.

  The configuration other than the θy hinge 69 and the θx drive electrodes 61, 63, 65 of the second embodiment is the same as that of the first embodiment described above. The θy hinge 69 is a bent hinge, but any elastically deformable member that supports the movable parts 1 to 5 so as to be tiltable about two axes in the θx direction and the θy direction may be used. One pair of x drive electrodes 61, 63, 65 is provided for each of the movable parts 2 to 4. However, one of the x drive electrodes 61, 63, 65 may be shifted from the center of each of the movable parts. The cross section of the θx drive electrodes 61, 63, 65 by the zx plane is not limited to a rectangle, but may be an ellipse or a polygon.

(Modification)
A modification of the first example of the second embodiment shown in FIGS. 7A and 7B will be described with reference to FIGS. 9A and 9B. Since most parts of the modification are the same as those of the first example of the second embodiment, different parts will be mainly described here.
FIG. 9A is a diagram showing a top surface configuration of the optical deflector array 501, and FIG. 9B is a diagram showing a cross-sectional configuration along line AA ′ in FIG. 9A.

  In the coordinate system of FIG. 9A, as shown in FIG. 9A, the horizontal direction of the page is defined as the x axis, the vertical direction is defined as the y axis, and the depth direction is defined as the z axis, and the rotation about the x axis is defined as θx. , Rotation around the y axis is defined as θy. In the coordinate system of FIG. 9B, as shown in FIG. 9B, the horizontal direction of the page is defined as the x axis, the vertical direction is defined as the z axis, and the depth direction is defined as the y axis.

  In this modification, the θy drive electrodes a and f are also formed on the side of the optical deflector array 501 on the side where there are no adjacent movable parts of the movable parts 1 and 5. That is, the θy drive electrode a is disposed on the wiring substrate 11 in a region including the facing position in the z direction on the side where the movable portion 1 is not adjacent to the movable portion. In addition, the θy drive electrode f is disposed on the wiring substrate 11 in a region including the facing position on the side where the movable portion 5 does not have the adjacent movable portion. In the present embodiment, the second drive electrode in this specification indicates the θy drive electrodes a and f, and the θy drive electrodes a and f are controlled by the same voltage control means 15 as the θy drive electrodes b, c, d and e. Drive electrode.

Furthermore, the electrode length in the y-axis direction of each θy drive electrode a, b, c, d, e, f is longer than the length of the movable parts 1 to 5 in the y-axis direction.
Further, θx drive electrodes 60 and 66 are formed for the movable portions 1 and 5 at both ends of the optical deflector array 501, respectively. Each θx drive electrode 60, 66 is electrically connected to a voltage control means (not shown) for controlling the θx drive electrodes 61, 63, 65 provided outside via a wiring (not shown). Therefore, an appropriate voltage different from the θy drive electrodes a to f is supplied to the θx drive electrodes 60, 61, 63, 65, and 66, and the movable parts 1 to 5 are inclined in the θx direction.
In the present embodiment, the drive electrodes controlled by the first voltage control means in this specification indicate θy drive electrodes a, b, c, d, e, and f.

  In the optical deflector array 301 of FIG. 7, only the three movable parts 2, 3, and 4 can be controlled in the θy direction. However, in this modification, θy drive electrodes a and f are connected to both ends of the optical deflector array 501. With the configuration having the θx drive electrodes 60 and 66, it is possible to obtain an effect that the inclinations in the θy direction and the θx direction of all five movable parts 1 to 5 can be controlled.

Further, in this modified example, the configuration in which the y-axis direction length of the θy drive electrodes a to f is long and the area for generating the electrostatic attractive force is increased, and the effect of further improving the drive efficiency can be obtained.
Further, since the length of the θy drive electrodes a to f is increased in the y-axis direction, an effect of increasing the allowable width for the positional deviation of the θy drive electrodes a to f in the y-axis direction with respect to the movable parts 1 to 5 can be increased. Can be obtained.

  Further, in the second example of the second embodiment shown in FIG. 7, when the θx drive electrodes 61, 63, 65 are formed in a rectangle whose length in the x-axis direction is longer than the length in the y-axis direction. As the length in the x-axis direction is increased, electrostatic attraction interference occurs between adjacent θx drive electrodes (for example, 61 and 63), and crosstalk occurs at the inclination angle in the θx direction of adjacent movable parts. appear. However, in the case of the modification of the first example of the second embodiment shown in FIG. 9, the θy drive electrodes b to e existing at intermediate positions between the adjacent θx drive electrodes 60, 61, 63, 65, 66. And the movable parts 1 to 5 have an effect that an electric field is formed, so that an effect of reducing crosstalk between the θx drive electrodes can be obtained.

<Third Embodiment>
(Constitution)
An optical deflector array according to the first and second examples of the third embodiment will be described with reference to FIGS. 10 (a), 10 (b), 11 (a), and 11 (b). The optical deflector arrays 601 and 701 according to the first example and the second example of the third embodiment are the optical deflector arrays 301 and 401 according to the first example and the second example of the second embodiment. Since most parts are the same except for the mirror substrate and the mirror substrate, different mirror substrates will be mainly described here.

FIG. 10A is a diagram illustrating a top surface configuration of the optical deflector array 601 according to the first example of the third embodiment in which driving efficiency in the θy direction is prioritized, and FIG. 10B is a diagram illustrating FIG. It is a figure which shows the cross-sectional structure along line AA 'of a), and FIG.10 (c) is a figure which shows the cross-sectional structure along line BB' of FIG.10 (a).
FIG. 11A is a diagram illustrating a top surface configuration of an optical deflector array 701 according to the second example of the third embodiment in which driving efficiency in the θx direction is prioritized, and FIG. 11B is a diagram illustrating FIG. It is a figure which shows the cross-sectional structure along line AA 'of a).

  The optical deflector array 601 in FIG. 10 and the optical deflector array 701 in FIG. 11 have a configuration in which a θx hinge 81 and a gimbal frame 83 are further added to the optical deflector arrays 301 and 401 in the second embodiment described above. It has become. The optical deflector 601 of the first example in FIG. 10 and the optical deflector 701 of the second example in FIG. 11 have the same shape of the mirror substrate 19, and the θx drive electrode formed on the wiring substrate 11. And only the shape and arrangement of the θy drive electrodes are different.

  A mirror substrate 19 shown in FIGS. 10B and 11B includes a frame-shaped support member 21 formed on the spacer 17, movable portions 1 to 5 provided in the support member 21, and each movable member. A frame-like gimbal frame 83 provided so as to surround the outer periphery of the plate-like member 91 facing the wiring board 11 of the parts 1 to 5 and each gimbal frame 83 connected to the support member 21 can be inclined at least in the θy direction. The θy hinge 23 is supported, and the θx hinge 81 is connected to the gimbal frame 83 and supports the movable parts 1 to 5 so as to be inclined at least in the θx direction. It is desirable that the θx hinge 81 and the gimbal frame 83 are integrally formed from the same material as the plate-like member 91, the θy hinge 23, and the support member 21 of the movable parts 1 to 5. A movable portion counter electrode (not shown) is formed on the surface of the gimbal frame 83 facing the wiring substrate 11 and is connected to the GND potential. Similarly, a movable portion counter electrode (not shown) is also formed on the surface of the plate-like member 91 facing the wiring substrate 11, and is connected to the GND potential.

  As shown in FIGS. 10 (a) and 11 (a), a pair of θx hinges 81a and 81b are provided in the x-axis direction with respect to the movable parts 1 to 5, respectively, and the pair of θx hinges 81a and 81b are provided. The movable parts 1 to 5 can be inclined in the θx direction. In addition, a pair of θy hinges 23a and 23b are provided in the y-axis direction with respect to one gimbal frame 83, and the movable parts 1 to 5 are moved in the θy direction through the inclination of the gimbal frame 83 by the pair of θy hinges 23a and 23b. Can be tilted. Note that the elastic member in this specification means the θx hinge 81 and the θy hinge 23 in this embodiment.

  Usually, the optical deflector having the gimbal frame 83 has a structure capable of tilting in two axes in the θx direction and the θy direction. However, since the movable parts 1 to 5 become smaller by adding the gimbal frame 83, the optical deflector is placed on the movable part. Since the reflecting surface 25 to be formed is small and the interval between the reflecting surfaces is widened, the fill factor is lowered. Therefore, as shown in FIGS. 10B and 11B, in the first example of this embodiment, the movable parts 1 to 5 are plate-shaped formed in the same layer as the gimbal frame 83 and the θx hinge 81. A plate-like member that is a unit composed of a member 91, a column 93 fixed on the plate-like member 91, and another plate-like member 95 further fixed on the column 93. A reflection surface 25 is formed on the entire upper surface of 95.

As shown in FIGS. 10A and 11A, by taking the shape of the movable parts 1 to 5, the optical deflector array 601 and the second example of the first example of the present embodiment are used. The optical deflector array 701 in the example has a shape in which the reflecting surface 25 covers the gimbal frame 83, and can move the movable parts 1 to 5 in the θx direction and the θy direction without reducing the fill factor. Realized.
The shape and arrangement of the θx drive electrodes 61, 63, 65 and θy drive electrodes b to e in the first example of the present embodiment shown in FIG. 10 are the first example of the second embodiment shown in FIG. It is the same. The shape and arrangement of the θx drive electrodes 61, 63, 65 and θy drive electrodes b to e of the second example of the present embodiment shown in FIG. 11 are the second example of the second embodiment shown in FIG. It is the same.

(Operating principle)
Since the θx drive electrodes 61, 63, and 65 are the same as those in the second embodiment described above, only the θy drive electrodes b to e will be described here. The θy drive electrodes b to e of the third embodiment are still electrostatic drive type drive electrodes as in the second embodiment. The difference from the second embodiment is that electrostatic attraction is generated. It becomes only the place to do. Specifically, in the first and second embodiments described above, the electrostatic attractive force is generated by the potential difference generated between the θy drive electrode and the movable part. , Θy drive electrodes b to e and a potential difference generated between the movable portion counter electrode (not shown) provided on the gimbal frame 83 generates an electrostatic attractive force.

(Action / Effect)
The optical deflector array 601 of the first example of the third embodiment and the optical deflector array 701 of the second example are the same as the optical deflector arrays of the first embodiment and the second embodiment described above. In addition to having the function and effect, the torsional rigidity in both the θx and θy directions can be set independently without lowering the fill factor by having the θx hinge 81, the gimbal frame 83, and the large reflecting surface 25. The effect that the drive efficiency in both the θx and θy directions can be improved can be obtained.

  Further, the θy hinge 23 as shown in FIGS. 10 and 11 is generated between the θy drive electrodes b to e and the gimbal frame 83 when the support member 21 and the gimbal frame 83 are connected in the y-axis direction. Since the electrostatic attractive force acts as a force for tilting the movable parts 1 to 5 in the θy direction, the driving force (FIG. 4B) acting on the part far from the rotation center (θy hinge 23) causes the electrostatic attractive force to move in the θy direction. The driving efficiency is improved.

  In the present embodiment, the θx hinge 81 is a straight bar. However, as long as it is elastically deformable to support the movable parts 1 to 5 so as to be inclined at least in the θx direction, such as a bent shape such as meander. . Similarly, although the θy hinge 23 is a straight bar, it may be any elastically deformable one that supports the gimbal frame so as to be inclined at least in the θy direction, such as a bent shape such as meander. The cross section along the xz plane of the θx hinge 81 is not limited to a rectangle, but may be an ellipse or a polygon. The cross section along the xz plane of the θy hinge is not limited to a rectangle, but may be an ellipse or a polygon. Although the gimbal frame 83 is a square frame, it may be oval or polygonal. Moreover, the shape which is not frame shapes, such as U shape, may be sufficient.

(Modification)
A modification of the first example of the third embodiment shown in FIGS. 10A and 10B will be described with reference to FIGS. Since this modification is almost the same as the first example of the third embodiment, only the different parts will be described here.

  FIG. 12A is a diagram showing a top surface configuration of an optical deflector array 801 according to a modification of the first example of the third embodiment, and FIG. 12B is a line A- in FIG. It is a figure which shows the cross-sectional structure along A '.

In this modification, the θy drive electrodes a and f are also formed on the side where the movable portions a and f adjacent to the movable portions a and f at both ends of the optical deflector array 801 do not exist (support member 21). That is, the θy drive electrode a is disposed on the wiring substrate 11 in a region including the facing position on the side where the movable portion 1 is not adjacent to the movable portion. In addition, the θy drive electrode f is disposed on the wiring substrate 11 in a region including the facing position on the side where the movable portion 5 does not have the adjacent movable portion. The second drive electrode in this specification indicates the θy drive electrodes a and f in this modification, and the θy drive electrodes a and f are the same voltage control means 15 as the θy drive electrodes b, c, d, and e. Drive electrode to be controlled.
Furthermore, the electrode length in the y-axis direction of each θy drive electrode a, b, c, d, e, f is longer than the length of the movable parts 1 to 5 in the y-axis direction.

  Further, θx drive electrodes 60 and 66 are formed for the movable portions 1 and 5 at both ends of the optical deflector array 801, respectively. Each θx drive electrode 60, 66 is electrically connected to a voltage control means (not shown) for controlling the θx drive electrodes 61, 63, 65 provided outside via a wiring (not shown). Accordingly, an appropriate voltage different from the θy drive electrodes b to e is supplied to the θx drive electrodes 60, 61, 63, 65, and 66, and the movable parts 1 to 5 are inclined in the θx direction.

In this specification, the drive electrodes controlled by the first voltage control means indicate the θy drive electrodes a, b, c, d, e, and f in this embodiment.
In the first example of the third embodiment in FIG. 10, only the three movable parts 2 to 4 in the optical deflector array 601 can be controlled. However, according to this modification, both ends of the optical deflector array 801 are controlled. The configuration in which the θy drive electrodes a and f and the θx drive electrodes 60 and 66 are provided with the above-described configuration makes it possible to control the inclinations of all five movable parts 1 to 5 in the θy direction and the θx direction. .

  Compared with the first example of the third embodiment, according to the present modification, the y-axis direction length of the θy drive electrode is long and the area for generating electrostatic attraction increases, thereby further increasing the driving efficiency. The effect of improvement can be obtained. Further, the effect that the length of the θy drive electrode in the y-axis direction becomes longer can provide an effect that the allowable width of the displacement of the θy drive electrodes a to f with respect to the movable parts 1 to 5 in the y-axis direction can be increased. .

  Further, in the second example of the second embodiment shown in FIG. 7, when the θx drive electrodes 61, 63, 65 are formed in a rectangle whose length in the x-axis direction is longer than the length in the y-axis direction. As the length in the x-axis direction increases, electrostatic attraction interference occurs between adjacent θx drive electrodes, and crosstalk occurs at the θx inclination angle of the adjacent movable parts 1 to 5. In the case of this modification shown in FIG. 2, an electric field is formed between the θy drive electrodes b to e existing at the intermediate position between the θx drive electrodes 60, 61, 63, 65, and 66 and the movable parts 1 to 5. Therefore, an effect that crosstalk between the θx drive electrodes is reduced can be obtained.

(A) is a figure which shows the upper surface structure of the optical deflector array of 1st Embodiment, (b) is a figure which shows the cross-sectional structure along line A-A 'of Fig.1 (a). (A) is a figure which shows the cross-sectional structure that a movable part inclines with respect to one voltage application pattern, (b) shows the cross-sectional structure that a movable part inclines with respect to another voltage application pattern. FIG. (A) is a block diagram showing one voltage control system, (b) is a block diagram showing another voltage control system. (A) is a figure which shows the image of the electrostatic attraction generation in the conventional electrostatic drive, (b) is a figure which shows the image of the electrostatic attraction generation in the electrostatic drive of this Embodiment. (A) is a figure which shows the upper surface structure of the optical deflector array of the modification of 1st Embodiment, (b) is a figure which shows the cross-sectional structure along line AA 'of Fig.5 (a). is there. (A) is a figure which shows the cross-sectional structure of the mode of inclination of the movable part with respect to one voltage application pattern, and FIG. 6 is a figure which shows the cross-sectional structure of the mode of inclination of the movable part with respect to another voltage application pattern. (A) is a figure which shows the upper surface structure of the optical deflector array which concerns on the 1st example of 2nd Embodiment giving priority to the drive efficiency to (theta) y direction, (b) is a line A of FIG. 7 (a). It is a figure which shows the cross-sectional structure along -A '. (A) is a figure which shows the upper surface structure of the optical deflector array which concerns on the 2nd example of 2nd Embodiment giving priority to the drive efficiency to (theta) x direction, (b) is a line A of Fig.8 (a). It is a figure which shows the cross-sectional structure along -A '. (A) is a figure which shows the upper surface structure of the optical deflector array of the modification of the 1st example of 2nd Embodiment, (b) is a cross section along line AA 'of Fig.9 (a). It is a figure which shows a structure. (A) is a figure which shows the upper surface structure of the optical deflector array which concerns on the 1st example of 3rd Embodiment giving priority to the drive efficiency to (theta) y direction, (b) is a line A of FIG. 10 (a). FIG. 10C is a diagram showing a cross-sectional configuration along line BB ′ in FIG. 10A. (A) is a figure which shows the upper surface structure of the optical deflector array which concerns on the 2nd example of 3rd Embodiment which gave priority to the drive efficiency to (theta) x direction, (b) is line A of FIG. 11 (a). It is a figure which shows the cross-sectional structure along -A '. (A) is a figure which shows the upper surface structure of the optical deflector array which concerns on the modification of the 1st example of 3rd Embodiment, FIG.12 (b) is line AA 'of Fig.12 (a). It is a figure which shows the cross-sectional structure along. It is a figure which shows the isometric view structure of the conventional optical polarizer array.

Explanation of symbols

1, 2, 3, 4, 5 Movable part 11 Wiring board 13 Wiring 15 Voltage control means (first voltage control means)
17 spacer 19 mirror substrate 21 support member 23 θy hinge (elastic member)
25 Reflecting surface 26 Movable part counter electrode 45 Capacitor 47 Voltage holding means 49 Switch 51 Amplifier 53 Controller 55 Wiring 57 Switch control wiring 60, 61, 63, 65, 66 θx drive electrode (third drive electrode)
69 θy hinge (elastic member)
81 θx hinge (elastic member)
83 Gimbal frame 101, 201, 301, 401, 501, 601, 701, 801 Optical deflector array a, f θy drive electrode (second drive electrode)
b, c, d, e θy drive electrode (first drive electrode)

Claims (4)

In an optical deflector array in which a plurality of optical deflectors are arranged close to each other in a one-dimensional array,
A support member;
Moving parts;
A reflective surface provided on at least one surface of the movable part;
A movable portion counter electrode provided on a surface of the movable portion opposite to the reflecting surface;
At least one pair of elastic members coupled to the support member and the movable portion and supporting the movable portion so as to be inclined at least about an axis orthogonal to the array direction;
A first drive electrode for inclining the movable part around an axis orthogonal to the array direction;
First voltage control means for individually controlling the voltage applied to each of the first drive electrodes;
Have
The first drive electrode is formed so as to straddle the adjacent movable parts between the adjacent shafts,
The first voltage control means provides a predetermined potential difference between the adjacent first drive electrodes when the movable portion is tilted, the optical deflector array. About the movable part of the optical deflector located at both ends of the plurality of optical deflectors arranged in an array,
On the side where the adjacent movable part does not exist among the movable parts located at both ends, the second drive electrode disposed in a region facing the movable part counter electrode,
The first voltage control means individually applies a voltage to the second drive electrode,
2. The optical deflector array according to claim 1, wherein the movable portion of the optical deflector positioned at both ends is driven by a potential difference between the first drive electrode and the second drive electrode. 3. .   In the first drive electrode and / or the second drive electrode, the length of the drive electrode in the direction orthogonal to the array direction is longer than the length of the movable part in the direction orthogonal to the array direction. The optical deflector array according to claim 1 or 2, characterized in that A third drive electrode for inclining the movable part about an axis along the array direction;
4. The optical deflector array according to claim 1, further comprising second voltage control means for individually controlling a voltage applied to each of the third drive electrodes.

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