JP2014010371A - Display device and method of manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a display device with high brightness or reflectivity, which is capable of displaying images in color, has a high aperture ratio, color reproducibility, contrast, resolution, and light utilization efficiency, has a small number of components, is easily miniaturized, made thinner, and manufactured in an integrated form through a simple manufacturing process, and has simple wiring.SOLUTION: A display device comprises a plurality of arrayed display elements, each of which includes: a plurality of movable parts each having a movable electrode, whose tilt angles modulate the area of incidence of display light, provided in respective three or more directions parallel to a display screen to reflect or absorb the display light in different wavelength bands; a plurality of first fixed electrodes which are provided in three or more directions parallel to the display screen and are connected to wiring located at least in different layers placed in parallel with the display screen; a transparent second fixed electrode provided on the image display side; and drive means which modulates the tilt angles of the movable parts by pivoting the movable parts. The drive means modulates the area of incidence of the display light to each movable part to modulate wavelength bands to be reflected or absorbed, thereby modulating the display.

Description

  The present invention relates to a display device and a method for manufacturing the display device.

Conventionally, transmissive liquid crystal displays, CRT displays, FEDs, plasma displays, organic EL displays and the like are known as color light emitting display devices. A transmissive liquid crystal display mainly has a structure for modulating the presence or absence of light incident on a color filter having a fixed color. Both the CRT display and the FED have a structure that modulates whether or not electrons are incident on a phosphor having a fixed color. The plasma display mainly has a structure that modulates the presence or absence of the incidence of ultraviolet rays on a phosphor having a fixed color. An organic EL display mainly has a structure for modulating the presence or absence of light emission of a light emitting layer having a fixed color.

Therefore, both of these can display only two colors of black or other one color in the smallest one display element. For example, when three types of display elements of red, green, and blue are prepared for one pixel, for example, when expressing red, red is emitted and the other two display elements are made black to express red with one pixel. Therefore, luminance, aperture ratio, and color reproduction ability are low. The same applies to the other colors. In addition, for example, since all red, green, and blue are emitted to express white, the brightness of white is low and the contrast is low. In addition, since the three display elements are combined to form one pixel, display is performed with pixels that are three times as large as the display elements, and the resolution is low. Further, in the transmissive liquid crystal display, since a polarizing plate having a light transmittance of about 40% is used, the light utilization efficiency is low, so that the luminance is low and the number of parts is large. These display a light-emitting display.

Recently, research on color reflective display devices that perform reflective display with high visibility and low power consumption has been actively conducted. Electrophoresis method, toner migration method, twist ball method, bistable nematic liquid crystal method Etc. are known. All of these are structures that modulate the presence or absence of incident reflected light to color particles with fixed colors or color filters with fixed colors in color display.

Accordingly, both of these can display only two colors of black or another color, or white or another color in the smallest one display element. For example, when three types of display elements of red / black, green / black, and blue / black are prepared for one pixel, for example, when expressing red, red is reflected and the other two display elements are made black. Since one pixel represents red, the reflectance, aperture ratio, and color reproduction ability are low. The same applies to the other colors. In addition, for example, since all red, green, and blue are reflected to express white, the reflectance of white is low and the contrast is low. In addition, since the three display elements are combined to form one pixel, display is performed with pixels that are three times as large as the display elements, and the resolution is low. Further, in the bistable nematic liquid crystal system, since a polarizing plate having a light transmittance of about 40% is used, the light utilization rate is low, so that the reflectance is further low and the number of parts is large.

An optical interference system is also known as a color reflection type display device. This is mainly because, in color display, the reflected light is reflected by the distance between a thin film that can be modulated to a binary value with a minimum one display element fixed and the reflection film. Is a structure that modulates the light into two colors of white and color or black.

Since the wavelength of the reflected light that expresses the color is amplified, the reflectance is better than when color particles or color filters are used, but only the black or the other one color can be displayed on the smallest display element. For example, when three types of display elements of red, green, and blue are prepared for one pixel, for example, when expressing red, red is reflected and the other two display elements are made black to express red with one pixel. To do. Even if 100% reflectivity is achieved with only the red display element, the red display element has an area of only one third and a low aperture ratio, so the reflectivity is higher than one third per pixel. Cannot be achieved. Naturally the color reproduction ability is also low. The same applies to the other colors. In addition, since the three display elements are combined to form one pixel, display is performed with pixels that are three times as large as the display elements, and the resolution is low. In the reflective display device, the reflectance is substantially proportional to the area of incident external light on the display element. Therefore, the color reflective display device described above has a single color reflectance of 3 because the color of the display element is divided into three. It is limited to less than 1 / minute.

Cholesteric liquid crystal type, guest-host type liquid crystal type, ECB type liquid crystal type and the like are known as color reflection type display devices capable of displaying three or more colors in one minimum display element. These cholesteric liquid crystal systems have a helical structure composed of rod-like molecules, and modulate the display using cholesteric liquid crystals that selectively reflect visible light near a specific wavelength when the helical pitch is in the optical wavelength order. Structure. In the guest-host type liquid crystal system, the dichroic dye is dissolved in the liquid crystal that is the solvent, the liquid crystal molecular orientation is controlled by the electric field, and the orientation direction of the dye molecules is changed at the same time, and the anisotropy of the extinction coefficient in the dichroic dye This is a structure that modulates the display by using. The ECB type liquid crystal system has a structure in which the retardation is changed by a voltage applied to liquid crystal molecules and the display color is modulated by a birefringence effect in combination with a retardation film.

However, in the cholesteric liquid crystal type and the guest-host type liquid crystal type, in order to display full color, it is necessary to laminate three monochromatic liquid crystal layers, resulting in low reflectance. In addition, since the ECB type liquid crystal system uses a polarizing plate having a light transmittance of about 40%, the reflectance is low and the number of parts is large. In the reflective display device, since the display light amount depends on the external light amount, the low reflectance as described above is a very big problem.

On the other hand, a mechanical matrix system is known as a color reflection type display device that can display three or more colors in one minimum display element and has a high reflectance. This is a structure in which one pixel is mainly composed of a cube having a side of several centimeters, and four colors are given to the four surfaces, and the other two surfaces are rotated as axes. In addition, the method disclosed in Japanese Patent Laid-Open No. 56-150786 (erasure of rights) is also known, in which pixels are formed in pellets (plates) instead of cubes, a plurality of pellets of multiple colors are stacked, and these are stepped. It is a structure that displays four or more colors by making the screen overlapped. However, these are all said to be unsuitable for downsizing due to their complicated structures, and are mainly intended for large display boards such as billboards and bulletin boards in plazas.

A movable film system shown in Patent Document 1 is known as a reflective display device that can be miniaturized and can display three or more colors in one minimum display element and has high reflectance. This mainly has a white fixing part, a cyan, magenta, and yellow color film that can be inserted into and withdrawn from the white fixing part, and a support in a cantilever state that supports the color film perpendicular to the surface of the color film. The color film is driven so as to be exposed or hidden from the white fixing portion by bending the support.

The movable film system can be miniaturized and can display white, black, cyan, magenta, yellow, red, blue, and green on the smallest single display element, and reflectivity, aperture ratio, and color reproduction in white and color. High ability and high contrast. In addition, the resolution may be higher than that of a single pixel composed of a plurality of display elements. However, in order to bend the support to facilitate driving the film, it is necessary to make the support 10 to 100 times as long as one display element. As a result, the support becomes thicker perpendicular to the display screen, making it difficult to reduce the thickness. is there. Therefore, it does not have a flat shape and is difficult to be integrated and manufactured.

On the other hand, the method shown in Patent Document 1 (14th and 15th paragraphs, FIG. 32) can be thinned. In this method, a movable part with electrodes is moved between a fixed electrode and an electrostatic force by an electrostatic force so that two colors can be displayed. In other words, different colors are applied to the front and back of the movable part, and colors are also applied to the fixed electrodes, and two colors are displayed by moving the movable part. One side of the movable part and one of the fixed electrodes may be mirrored with an aluminum thin film.

With this method, only the length of the fixed electrode or the movable portion of one display element becomes thicker perpendicular to the display screen, so that the thickness can be reduced. However, this method can display only three colors by using two colors or two movable parts in one minimum display element. For example, when one type of display element capable of displaying three colors of red / green / blue is prepared, white and black cannot be displayed and the contrast is extremely low.

As another example, when three types of display elements capable of displaying three colors of red / white / black, green / white / black, and blue / white / black are prepared in one pixel, red, green, and blue are displayed. Although it is possible to express, for example, when expressing red, the red is reflected and the other two display elements are made white or black to express red with one pixel, so the aperture ratio and the color reproduction ability are low. The same applies to green and blue. Further, when displaying the above color, one pixel is formed by combining the three display elements, so that the display is performed with pixels three times as large as the display elements, and the resolution is low. In this case, since three types of display elements are prepared, the manufacturing process is complicated accordingly.

JP-A-8-271933 (14th and 15th paragraphs, FIG. 32)

Sort out the above problems. Conventional color light emitting display devices have low luminance, aperture ratio, color reproduction capability, contrast, and resolution. In the case of a transmissive liquid crystal display, since the light use efficiency is low, the luminance is low and the number of parts is large. In a color reflective display device, a method using color particles or a color filter has low reflectance, aperture ratio, color reproduction capability, contrast, and resolution. The bistable nematic liquid crystal system has a lower reflectivity and a higher number of parts due to its lower light utilization efficiency. The light interference method has low reflectivity, aperture ratio, color reproduction capability, and resolution. In the cholesteric liquid crystal system, guest-host liquid crystal system, and ECB liquid crystal system, the reflectance is low. Further, the ECB type liquid crystal system has a lower light utilization rate and a larger number of parts.
The mechanical matrix method and the method disclosed in Japanese Patent Application Laid-Open No. 56-150786 are not suitable for downsizing. In the movable film system, it is difficult to reduce the thickness, and it is difficult to integrate and manufacture. In the method of Patent Document 1 (14th, 15th paragraph, FIG. 32), one display element cannot display four or more colors, and white and black cannot be displayed, and the contrast is extremely low, or the aperture ratio or color Either the reproducibility or resolution is low and the manufacturing process is complicated.

The present invention has been devised in view of the above-described problems, and is a color light emitting display with high luminance, aperture ratio, color reproduction capability, contrast, resolution, and light utilization efficiency, or reflectance, aperture. High color rate, color reproducibility, contrast, resolution, light utilization efficiency, and any color reflective display that can display 4 colors or more on a single display element is possible. An object of the present invention is to provide a display device that can be easily manufactured, integrated and manufactured, and has a simple manufacturing process.

In order to achieve the above object, the present invention is a display device including a display screen in which a plurality of display elements are arranged, and each display element modulates an area on which display light is incident according to a change in tilt angle. It is possible to modulate a tilt angle by rotating a plurality of movable parts, each of which is provided in at least three directions parallel to the display screen and reflecting or absorbing the display light in different wavelength bands. Driving means, and modulating the display by modulating the wavelength band of the display light reflected or absorbed by the movable part by modulating the area where the display light is incident on the movable part by the driving means. And

Further, the present invention is characterized in that the movable part is formed by etching, lift-off or mask vapor deposition.

Here, display light means light for display. For example, it includes outside light and backlight light.

Therefore, according to the first aspect of the present invention, since the display device can perform display by the light reflected from the display light or the light not absorbed in the display light, the driving means is movable. The display can be modulated by modulating the wavelength band of the display light reflected or absorbed by the part.

At this time, since the area where the display light is incident on the movable part is modulated by modulating the tilt angle, for example, the incidence of the display light on the movable part is decreased to increase the incidence of the display light on another movable part. Since it is possible to select which movable portion the display light is incident on, it is possible to provide a configuration in which many colors can be displayed with the smallest one display element.

Moreover, since each said display element has the said movable part prepared in three or more directions, the said movable part can be provided on the edge | side of the two-dimensional figure of phase dimension 2, for example, and space can be used efficiently. Since many movable parts can be provided, a configuration capable of displaying many colors in the smallest one display element can be obtained. Further, for example, since the smallest one display element can be provided with three or more movable parts, it is possible to provide a configuration capable of displaying many colors in the smallest one display element.

Further, since the driving means can modulate the tilt angle by rotating the movable part, for example, the movable part can be provided in a small space, and a large number of the movable parts can be provided in one minimum display element. Since it can be provided, a structure capable of displaying many colors in the smallest one display element can be obtained. For example, since the movable part can be provided in a small space, it can be configured so as not to be thickly perpendicular to the display screen. Further, for example, since it is rotated, a simple configuration can be achieved.

As described above, the display device according to the present invention can be configured to display a large number of colors with a minimum of one display element, so that luminance, aperture ratio, color reproduction capability, contrast, resolution, and light utilization efficiency are achieved. High color light emitting display or high reflectance, aperture ratio, color reproducibility, contrast, resolution, light use efficiency, and color reflective display that can display 4 colors or more in one display element. Thus, the number of parts is small and the manufacturing process can be simplified. In addition, since the configuration can be simple, the configuration can be easily reduced in size. In addition, since it can be configured so as not to be thick perpendicular to the display screen, it can be easily reduced in thickness and can be easily integrated and manufactured.

3 is a three-dimensional perspective view of the display element 10. FIG. FIG. 3 is a three-dimensional perspective separation perspective view of the display element 10. 4 is a front perspective view of the display element 10 and the substrate group 7 provided around the display element 10 from the image display side direction. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 1 is a schematic overall layout diagram of a display device 100 according to an embodiment of the present invention. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. It is sectional drawing which showed the process of manufacturing the fixed insulation part 3 and the 2nd fixed electrode 4 by an etching. It is sectional drawing which showed the process of manufacturing the fixed insulation part 3 and the 2nd fixed electrode 4 by lift-off. It is sectional drawing which showed the process of manufacturing the fixed insulation part 3 and the 2nd fixed electrode 4 by mask vapor deposition. It is sectional drawing which showed the process of manufacturing hinge 8a by an etching. It is sectional drawing which showed the process of manufacturing hinge 8a by lift-off. It is sectional drawing which showed the process of manufacturing hinge 8a by mask vapor deposition. It is sectional drawing which showed the process of manufacturing movable electrode 1a1 and movable insulation part 1a2 by an etching. It is sectional drawing which showed the process of manufacturing movable electrode 1a1 and movable insulation part 1a2 by lift-off. It is sectional drawing which showed the process of manufacturing movable electrode 1a1 and movable insulation part 1a2 by mask vapor deposition. It is sectional drawing which showed the process of manufacturing a casting_mold | template with a photoresist. It is sectional drawing which showed the process of manufacturing 1st fixed electrode 2a-2d by plating. It is a three-dimensional perspective separation perspective view of the display element 10 of Modification 1 according to the embodiment of the present invention. It is sectional drawing of the board | substrate group provided around the display element 10 of the modification 1 which concerns on embodiment of this invention, and the display element 10. FIG. It is sectional drawing of the board | substrate group provided around the display element 10 of the modification 1 which concerns on embodiment of this invention, and the display element 10. FIG. It is a three-dimensional perspective separation perspective view of the display element 10 of Modification 2 according to the embodiment of the present invention. It is sectional drawing of the board | substrate group 7 with which the display element 10 of the modification 2 which concerns on embodiment of this invention, and the display element 10 was equipped. It is sectional drawing of the board | substrate group 7 with which the display element 10 of the modification 3 which concerns on embodiment of this invention, and the display element 10 was equipped. It is sectional drawing of the board | substrate group 7 with which the display element 10 of the modification 4 which concerns on embodiment of this invention, and the display element 10 was equipped. It is a general | schematic whole layout figure of the display apparatus 100 in the modification 5 which concerns on embodiment of this invention. It is sectional drawing of the board | substrate group 7 with which the display element 10 of the modification 5 which concerns on embodiment of this invention, and the display element 10 was equipped. It is a schematic whole layout figure of the display apparatus 100 in the modification 6 which concerns on embodiment of this invention. It is a three-dimensional perspective view of a regular triangular prism display element 49 of Modification 6 according to the embodiment of the present invention. It is sectional drawing of the board | substrate group 7 with which the display element 10 of the modification 7 which concerns on embodiment of this invention, and the display element 10 was equipped. It is a three-dimensional perspective view of mechanical hinges 53a to 53d, movable parts 1a to 1d, and second substrates 6a to 6d of Modification 7 according to the embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to the following description, and it will be easily understood by those skilled in the art that modes and details can be variously changed without departing from the spirit and scope of the present invention. Therefore, the present invention should not be construed as being limited to the description of the embodiments below. Note that in the structure of the present invention described below, the same portions or portions having similar functions are denoted by the same reference numerals in different drawings, and description thereof is not repeated. In all of the drawings, the solid arrow indicates the image display side of the display device according to the present invention.

Hereinafter, the configuration of the present embodiment will be described with reference to FIGS.

FIG. 5 is a schematic overall layout diagram of the display device 100 according to the embodiment of the present invention. Referring to FIG. 5, the display device 100 according to the present invention includes a transparent substrate 12 and a display in which a plurality of substantially square columnar display elements 10 formed on the opposite side of the image display side of the transparent substrate 12 are arranged in a matrix. The element array 11, the substrate group 7 that is stacked on the image display side to fill the gap between the display elements 10, and the light intensity that emits white light formed on the opposite side of the image display side of the display element array 11 can be modulated. And a backlight 9.

FIG. 1 is a three-dimensional perspective view of the display element 10. FIG. 2 is a three-dimensional perspective separation perspective view of the display element 10. Referring to FIGS. 1 and 2, the display element 10 includes movable portions 1a to 1d which are inner side portions arranged side by side on substantially square sides, and each side of a substantially square that is slightly larger than the movable portions 1a to 1d. The outer side portion arranged side by side is surrounded by first fixed electrodes 2a to 2d made of a conductive material, and is made of an elastomer material connected to the side edges of the movable portions 1a to 1d in the image display side direction. The hinges 8a to 8d are provided. The hinges 8a to 8d may be made of either a conductive elastomer material or an insulating elastomer material. The display element 10 includes a fixed insulating portion 3 made of a substantially square plate-like transparent insulating material at the bottom on the image display side, and a substantially square plate-like transparent conductive material on the image display side of the fixed insulating portion 3. The second fixed electrode 4 is provided.

FIG. 3 is a front perspective view of the display element 10 and the substrate group 7 provided around the display element 10 from the image display side direction. FIG. 4 is a cross-sectional view of the display element 10 and the substrate group 7 provided around the display element 10. 4 is a cross-sectional view as viewed from the direction of the arrow of dashed-dotted line I to I in FIG. 3, and FIG. 4 of FIG. 4 is a cross-sectional view as viewed from the direction of the arrow of dashed-dotted line II to II in FIG. Yes. Referring to FIG. 4, the substrate group 7 includes a first substrate 5 and second substrates 6a to 6d that are sequentially stacked from the image display side. The fixed insulating portion 3 and the second fixed electrode 4 are connected to the first substrate 5, and the second fixed electrode 4 is powered by a wiring (not shown) built in the first substrate 5 or disposed on the surface. (Not shown). The movable parts 1a to 1d are transparent electrodes of cyan, magenta and yellow which are provided on the movable electrodes 1a1 to 1d1 made of a transparent conductive material and the first fixed electrodes 2a to 2d of the movable electrodes 1a1 to 1d1. Movable insulating portions 1a2 to 1d2 made of a conductive material and a white opaque insulating material. The movable electrodes 1a1 to 1d1 and the movable insulating portions 1a2 to 1d2 are connected to the second substrates 6a to 6d by hinges 8a to 8d. The movable electrodes 1a1 to 1d1 are embedded in hinges 8a to 8d made of a conductive elastomer material or hinges 8a to 8d made of an insulating elastomer material (not shown) and arranged on the surface, and second substrates 6a to 6d. 6d is electrically connected to a power source by wiring (not shown) built in or disposed on the surface. The first fixed electrodes 2a to 2d are electrically connected to a power source by wiring (not shown) built in the second substrates 6a to 6d or disposed on the surface.

The movable portions 1a to 1d are in a so-called cantilever state that can rotate at least perpendicularly or at least parallel to the display screen with the hinges 8a to 8d, which are fixed bases, as rotation axes. The movable portions 1a to 1d are provided on at least four sides parallel to the display screen of the display element 10, and the wide area surface is rotatable to an inclination angle perpendicular to the display screen. This is expressed as the inclination angle of. Further, the movable portions 1a to 1d rotate in the image display side direction from the first tilt angle, so that the wide surface provided on the bottom of the image display side of the display element 10 can be rotated to an tilt angle parallel to the display screen. This inclination angle is expressed as a second inclination angle. In the movable portions 1a to 1d, the display light incident area decreases at the first tilt angle, and the display light incident area increases at the second tilt angle.

The first fixed electrodes 2a to 2d, the second fixed electrode 4 and the like correspond to the driving means in the embodiment of the present invention.

Hereinafter, the operation of this embodiment configured as described above will be described with reference to FIGS. 1 and 6 to 34.

First, an operation example of the movable parts 1a to 1d of the present embodiment will be described with reference to the drawings.

21, 22, and 23 are three-dimensional perspective views of the movable portions 1 a to 1 d and the first fixed electrodes 2 a to 2 d, the fixed insulating portion 3, and the second fixed electrode 4. 9 and 6 are sectional views of the display element 10 and the substrate group 7 provided around the display element 10. FIG. 9, FIG. Ia, FIG. Iab, FIG. Iabc and FIG. 6 are cut planes as viewed from the direction of the arrows of the dashed line I to I in FIG. The cut surface seen from the direction of the arrow of dashed-dotted line II to II in FIG. 3 is shown.

First, as an example, an operation for holding the movable portion 1a at the first tilt angle will be described. 1, FIG. I, and FIG. II show when all the movable parts 1a to 1d are at the first tilt angle. At this time, for example, if a voltage of opposite polarity is continuously applied sufficiently to the movable electrode 1a1 and the first fixed electrode 2a, the capacitor is interposed between the movable electrode 1a1 and the first fixed electrode 2a with the movable insulating portion 1a2 interposed therebetween. Therefore, the movable portion 1a can maintain the first tilt angle even if the application of the voltage is stopped thereafter.

Here believed movable electrode 1a1 faces the first fixed electrodes 2a length c, the width l, the thickness of the movable insulating portion 1a2 a, the voltage of the movable electrode 1a1 _{v 1,} the first fixed electrode 2a When the voltage is v ₂ and the dielectric constant of the movable insulating portion 1a2 is ε ₁ , the holding force F ₁ by the capacitor at this time can be obtained by Equation 1.

Next, the operation | movement which rotates the movable part 1a from a 1st inclination angle to a 2nd inclination angle as an example is demonstrated. At this time, for example, if a voltage having the same polarity is applied from the power source to the movable electrode 1a1 and the first fixed electrode 2a and a voltage having the opposite polarity to the movable electrode 1a1 is applied to the second fixed electrode 4, the movable portion 1a is A repulsive force is generated in the first fixed electrode 2a, and an attractive force is generated in the movable portion 1a and the second fixed electrode 4. Then, the hinge 8a is bent by elastic deformation, and the movable portion 1a can rotate toward the image display side with the hinge 8a as a rotation axis, approach the second fixed electrode 4, and rotate to the second tilt angle.

FIG. 6 shows the time when the movable portion 1a is in the middle of the first tilt angle and the second tilt angle. Here, a capacitor formed by the movable electrode 1a1 and the second fixed electrode 4 is considered. Here, the distance from the hinge 8a of the movable electrode 1a1 facing the second fixed electrode 4 is x, the width is l, the thickness of the fixed insulating part 3 is b, the dielectric constant in air is ε ₀ , and the fixed insulating part 3 Is the dielectric constant ε ₂ , the angle between the movable portion 1a and the first fixed electrode 2a is θ, the deflection amount of the hinge 8a bent by elastic deformation, that is, the shortest distance between the movable electrode 1a1 and the fixed insulating portion 3 is d ₁ . To do. Here, if dx is a minute distance, the capacitance C ₁ (x) dx of the minute capacitor from x to x + dx is obtained by Equation 2.

Here, assuming that the movable electrode 1a1 has a length c and is opposed to the second fixed electrode 4, the voltage of the movable electrode 1a1 is v ₃ , and the voltage of the second fixed electrode 4 is v ₄ . 2 The electrostatic energy W ₁ of the capacitor formed by the fixed electrode 4 is obtained by Equation 3.

Therefore, the torque T ₁ (θ) per θ of the movable portion 1a generated by the capacitor formed by the movable electrode 1a1 and the second fixed electrode 4 is obtained by Equation 4.

Next, the operation | movement which hold | maintains the movable part 1a to a 2nd inclination angle as an example is demonstrated. FIGS. 21, Ia, and IIa illustrate the case where the movable portion 1a is at the second inclination angle and the movable portions 1b, 1c, and 1d are at the first inclination angle. At this time, for example, if a voltage having a reverse polarity is continuously applied to the movable electrode 1a1 and the second fixed electrode 4, the capacitor is interposed between the movable electrode 1a1 and the second fixed electrode 4 with the fixed insulating portion 3 interposed therebetween. Therefore, the movable portion 1a can maintain the second tilt angle even if the application of the voltage is stopped thereafter.

Here, assuming that the movable electrode 1a1 has a length c and a width l and is opposed to the second fixed electrode 4, the voltage of the movable electrode 1a1 is v ₅ , and the voltage of the second fixed electrode 4 is v _{6. 5} and the voltage v ₃ are preferably of the same polarity, and the holding force F ₂ by the capacitor at this time is obtained by Equation 5.

Next, as an example, an operation for rotating the movable portion 1a from the second tilt angle to the first tilt angle will be described. At this time, for example, if a voltage having the opposite polarity is applied from the power source to the movable electrode 1a1 and the first fixed electrode 2a and a voltage having the same polarity as the movable electrode 1a1 is applied to the second fixed electrode 4, the movable portion 1a is An attractive force is generated in the first fixed electrode 2a, and a repulsive force is generated in the movable portion 1a and the second fixed electrode 4. Then, the hinge 8a bends due to elastic deformation, and the movable portion 1a can rotate in the direction parallel to the display screen with the hinge 8a as a rotation axis to approach the first fixed electrode 2a and rotate to the first tilt angle. .

Here, a capacitor formed by the movable electrode 1a1 and the first fixed electrode 2a is considered. Here, the distance from the hinge 8a of the movable electrode 1a1 facing the second fixed electrode 4 is x, the width is 1, and the deflection amount of the hinge 8a bent by elastic deformation, that is, the first fixed electrode 2a and the movable insulating portion 1a2. And d ₂ is the shortest distance between and. Here, if dx is a minute distance, the capacitance C ₂ (x) dx of the minute capacitor from x to x + dx is obtained by Equation 6.

Here, assuming that the movable electrode 1a1 has a length c and is opposed to the first fixed electrode 2a, and the voltage of the movable electrode 1a1 is v ₇ and the voltage of the first fixed electrode 2a is v ₈ , the movable electrode 1a1 and the first fixed electrode 2a The electrostatic energy W ₂ of the capacitor formed by one fixed electrode 2 a is obtained by Equation 7.

Therefore, the torque T ₂ (θ) per θ of the movable portion 1a generated by the capacitor formed by the movable electrode 1a1 and the first fixed electrode 2a is obtained by Expression 8.

Next, as an example, the operation of laminating the movable portion 1b to the second tilt angle when the movable portion 1a is already at the second tilt angle will be described. FIGS. 21, Ia, and IIa illustrate the case where the movable portion 1a is at the second inclination angle and the movable portions 1b, 1c, and 1d are at the first inclination angle. At this time, for example, if a voltage having the same polarity is applied from the power source to the movable electrode 1b1 and the first fixed electrode 2b and a voltage having a polarity opposite to that of the movable electrode 1b1 is applied to the movable electrode 1a1, A repulsive force is generated in the fixed electrode 2b, and an attractive force is generated in the movable portion 1b and the movable electrode 1a1. Then, the hinge 8b is bent due to elastic deformation, and the movable portion 1b can rotate toward the image display side with the hinge 8b as a rotation axis to approach the movable portion 1a and rotate to the second tilt angle. In this case it is desirable that the voltage v ₁ applied to the movable electrode 1a1 in order to hold the voltage and the movable portion 1a to be applied to the movable electrode 1b1 to second inclination angle was in the opposite polarity.

Next, as an example, an operation will be described in which the movable portion 1b also holds the stack at the second tilt angle when the movable portion 1a is already at the second tilt angle. FIGS. 22, Iab, and IIab show the cases where the movable parts 1a and 1b are at the second inclination angle and the movable parts 1c and 1d are at the first inclination angle. At this time, for example, if a voltage of opposite polarity is continuously applied sufficiently to the movable electrode 1b1 and the movable electrode 1a1, a capacitor is formed between the movable electrode 1b1 and the movable electrode 1a1 with the movable insulating portion 1a2 interposed therebetween. After that, even if the voltage application is stopped, the movable portion 1b can maintain the second tilt angle. At this time, it is desirable that the voltage applied to the movable electrode 1b1 and the voltage applied to the movable electrode 1b1 to rotate and move the movable portion 1b to the second tilt angle have the same polarity.

Next, an operation for resetting the stacking of the movable part 1b from the second inclination angle to the first inclination angle when the movable part 1a is already at the second inclination angle will be described as an example. At this time, for example, if a voltage having the opposite polarity is applied from the power source to the movable electrode 1b1 and the first fixed electrode 2b and a voltage having the same polarity as the movable electrode 1b1 is applied to the movable electrode 1a1, An attractive force is generated in the fixed electrode 2b, and a repulsive force is generated in the movable portion 1b and the movable electrode 1a1. Then, the hinge 8b bends due to elastic deformation, and the movable portion 1b can rotate in the direction parallel to the display screen with the hinge 8b as a rotation axis to approach the first fixed electrode 2b and rotate to the first tilt angle. . At this time, it is desirable that the voltage applied to the movable electrode 1b1 and the voltage applied to the movable electrode 1b1 in order to hold the stack of the movable portion 1b at the second tilt angle are opposite in polarity.

Next, as an example, the operation of laminating the movable part 1c to the second tilt angle when the movable part 1a and the movable part 1b are already at the second tilt angle will be described. FIGS. 22, Iab, and IIab show the cases where the movable parts 1a and 1b are at the second inclination angle and the movable parts 1c and 1d are at the first inclination angle. At this time, for example, if a voltage having the same polarity is applied from the power source to the movable electrode 1c1 and the first fixed electrode 2c and a voltage having a polarity opposite to that of the movable electrode 1c1 is applied to the movable electrode 1b1, A repulsive force is generated in the fixed electrode 2c, and an attractive force is generated in the movable portion 1c and the movable electrode 1b1. Then, the hinge 8c bends due to elastic deformation, and the movable portion 1c can rotate toward the image display side with the hinge 8c as a rotation axis to approach the movable portion 1b and rotate to the second tilt angle. At this time, it is desirable that the voltage applied to the movable electrode 1c1 and the voltage applied to the movable electrode 1b1 in order to hold the stack of the movable portion 1b at the second tilt angle are opposite in polarity.

Next, as an example, an operation will be described in which the movable portion 1c also holds the stack at the second tilt angle when the movable portion 1a and the movable portion 1b are already at the second tilt angle. 23, Iabc, and IIabc illustrate the cases where the movable portions 1a, 1b, and 1c are at the second tilt angle and the movable portion 1d is at the first tilt angle. At this time, for example, if a voltage of opposite polarity is continuously applied to the movable electrode 1c1 and the movable electrode 1b1, a capacitor is formed between the movable electrode 1c1 and the movable electrode 1b1 across the movable insulating portion 1b2. After that, even if the voltage application is stopped, the movable portion 1c can maintain the second tilt angle. At this time, it is desirable that the voltage applied to the movable electrode 1c1 and the voltage applied to the movable electrode 1c1 to rotate and move the movable portion 1c to the second tilt angle have the same polarity.

Next, an operation for resetting the stacking of the movable portion 1c from the second inclination angle to the first inclination angle when the movable portion 1a and the movable portion 1b are already at the second inclination angle will be described as an example. At this time, for example, if a voltage having opposite polarity is applied from the power source to the movable electrode 1c1 and the first fixed electrode 2c and a voltage having the same polarity as that of the movable electrode 1c1 is applied to the movable electrode 1b1, the movable portion 1c and the first An attractive force is generated in the fixed electrode 2c, and a repulsive force is generated in the movable portion 1c and the movable electrode 1b1. Then, the hinge 8c bends due to elastic deformation, and the movable portion 1c can rotate in the direction parallel to the display screen with the hinge 8c as a rotation axis to approach the first fixed electrode 2c and rotate to the first tilt angle. . At this time, it is desirable that the voltage applied to the movable electrode 1c1 and the voltage applied to the movable electrode 1c1 in order to keep the movable portion 1c stacked at the second tilt angle are opposite in polarity.

That is, when the movable parts 1a to 1d are at the first inclination angle, the movable parts 1a to 1d are sufficiently applied if voltages having opposite polarities are continuously applied to the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d. Can hold the first tilt angle. When the movable portions 1a to 1d are at the first tilt angle, voltages having the same polarity are applied to the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d, and the electrodes on the image display side are opposite to the movable electrodes 1a1 to 1d1. If the voltage of the polarity of is applied, the movable parts 1a to 1d can rotate to the second tilt angle. Further, when the movable parts 1a to 1d are at the second inclination angle, the movable parts 1a to 1d are in the first state if a voltage having the opposite polarity is continuously applied to the movable electrodes 1a1 to 1d1 and the electrode on the image display side. 2 tilt angles can be maintained. In addition, when the movable portions 1a to 1d are at the second tilt angle, voltages having the same polarity are applied to the movable electrodes 1a1 to 1d1 and the electrodes on the image display side, and the first fixed electrodes 2a to 2d have opposite polarities to the movable electrodes. When a voltage is applied, the movable parts 1a to 1d can rotate to the first tilt angle.

That is, the movable portion 1a can be rotated to the first or second inclination angle by the change of the electrostatic force by changing the polarity of the voltage applied to the movable electrode 1a1, the first fixed electrode 2a, and the second fixed electrode 4, and held. The movable electrodes 1a1 to 1d1, the first fixed electrodes 2a to 2d, and the movable portions 1a to 1d having the same structure can be shared in common.

The operation of rotating to the first tilt angle and the operation of resetting the stacking are desirably performed after resetting the stacking of the movable portions 1b to 1d stacked later.

In the above holding operation, when the holding power is weakened due to the electrical energy loss of the capacitor over time, an additional voltage may be applied.

24 to 34 are three-dimensional perspective views of the movable parts 1a to 1d, the first fixed electrodes 2a to 2d, the fixed insulating part 3, and the second fixed electrode 4. FIG. 7 to 8 and FIGS. 10 to 20 are sectional views of the display element 10 and the substrate group 7 provided around the display element 10. 10 to 20, Iabd, Iac, Iacd, Iad, Ib, Ibc, Ibcd, Ibd, Ic, Icd, and Id are the directions of the dashed line I to I in FIG. The cut surface seen from FIG. 7 to 8 and FIGS. 10 to 20 are taken along the alternate long and short dash line in FIG. 3. FIG. IIabd, FIG. IIac, FIG. IIacd, FIG. IIad, IIb, IIbc, IIbcd, IIbd, IIc, IIcd, and IId The cut surface seen from the arrow direction from II to II is shown. 7 to 20 sequentially show how the movable parts 1a to 1d are rotated or stacked at the second tilt angle, and the same reference numerals indicate the same state.

The display element 10 can achieve the following states by way of example in the same manner as the above operation. FIGS. 24, Iabd, and IIabd show the cases where the movable portions 1a, 1b, and 1d are at the second tilt angle and the movable portion 1c is at the first tilt angle. 25, Iac, and IIac show the cases where the movable parts 1a and 1c are at the second inclination angle and the movable parts 1b and 1d are at the first inclination angle. 26, Iacd, and IIacd show the movable portions 1a, 1c, and 1d at the second tilt angle and the movable portion 1b at the first tilt angle. 27, Iad, and IIad show the cases where the movable parts 1a and 1d are at the second inclination angle and the movable parts 1b and 1c are at the first inclination angle. 28, Ib, and IIb show the case where the movable portion 1b is at the second inclination angle and the movable portions 1a, 1c, and 1d are at the first inclination angle. 29, Ibc, and IIbc show the cases where the movable portions 1b and 1c are at the second inclination angle and the movable portions 1a and 1d are at the first inclination angle. FIGS. 30, Ibcd, and IIbcd show the movable portions 1b, 1c, and 1d at the second tilt angle and the movable portion 1a at the first tilt angle. FIG. 31, FIG. Ibd, and FIG. IIbd show the cases where the movable parts 1b and 1d are at the second inclination angle and the movable parts 1a and 1c are at the first inclination angle. 32, Ic, and IIc show the case where the movable portion 1c is at the second inclination angle and the movable portions 1a, 1b, and 1d are at the first inclination angle. FIGS. 33, Icd, and IIcd show the movable portions 1c and 1d at the second tilt angle and the movable portions 1a and 1b at the first tilt angle. 34, Id, and IId show the case where the movable portion 1d is at the second inclination angle and the movable portions 1a, 1b, and 1c are at the first inclination angle.

Next, an example of the optical operation of this embodiment will be mainly described.

As described above, since the movable insulating portions 1a2 to 1c2 are made of a transparent insulating material of cyan, magenta, and yellow, the color can be displayed when the second inclination angle is reached, and the red color is obtained by stacking the two colors. Green blue can be displayed, and black can be displayed by stacking three colors. Further, in a display other than black, a light-emitting display can be performed by causing the backlight 9 to emit light, and a reflective display can be performed when the movable insulating portion 1d2 is made of a white opaque insulating material at a second tilt angle.

That is, when all the movable parts 1a to 1d are at the first tilt angle, the backlight is caused to emit light and white light emitting display can be performed. When the movable portion 1a is at the second tilt angle and the movable portions 1b, 1c, and 1d are at the first tilt angle, the backlight 9 is caused to emit light so that a cyan light emitting display can be performed. When the movable portions 1a and 1b are at the second tilt angle and the movable portions 1c and 1d are at the first tilt angle, the backlight 9 is caused to emit light and blue light emitting display can be performed. When the movable parts 1a, 1b and 1c are at the second inclination angle and the movable part 1d is at the first inclination angle, black display can be performed. When the movable portions 1a, 1b, and 1d are at the second tilt angle and the movable portion 1c is at the first tilt angle, blue reflective display can be performed. When the movable portions 1a and 1c are at the second tilt angle and the movable portions 1b and 1d are at the first tilt angle, the backlight 9 is caused to emit light and a green light emitting display can be performed. When the movable portions 1a, 1c, and 1d are at the second tilt angle and the movable portion 1b is at the first tilt angle, green reflective display can be performed. When the movable parts 1a and 1d are at the second inclination angle and the movable parts 1b and 1c are at the first inclination angle, cyan reflective display can be performed. When the movable portion 1b is at the second tilt angle and the movable portions 1a, 1c, and 1d are at the first tilt angle, the backlight 9 is caused to emit light so that a magenta light-emitting display can be performed. When the movable portions 1b and 1c are at the second tilt angle and the movable portions 1a and 1d are at the first tilt angle, the backlight 9 is caused to emit light and a red light emitting display can be performed. When the movable portions 1b, 1c, and 1d are at the second tilt angle and the movable portion 1a is at the first tilt angle, a red reflective display can be performed. When the movable portions 1b and 1d are at the second tilt angle and the movable portions 1a and 1c are at the first tilt angle, a magenta reflective display can be performed. When the movable portion 1c is at the second tilt angle and the movable portions 1a, 1b, and 1d are at the first tilt angle, the backlight 9 is caused to emit light and a yellow light emitting display can be performed. When the movable portions 1c and 1d are at the second tilt angle and the movable portions 1a and 1b are at the first tilt angle, a yellow reflective display can be performed. When the movable portion 1d is at the second tilt angle and the movable portions 1a, 1b, and 1c are at the first tilt angle, white reflective display can be performed.

In all the above light emitting displays, the light intensity can be modulated by modulating the light intensity of the backlight 9.

Hereinafter, the example of the material of this embodiment is demonstrated.

Examples of transparent conductive materials such as the movable electrodes 1a1 to 1d1 and the second fixed electrode 4 include Sn such as In oxide (ITO) doped with Sn oxide, Sn oxide (FTO) doped with F, etc. In view of low resistance, Zn oxide doped with Al oxide (AZO) or the like can easily form a transparent conductive film with good optical characteristics and electrical characteristics by a vacuum film forming method. Preferably, other materials include Zn oxide doped with Ga (GZO), oxides of Ti, Mo, W, Ce, Zr, Mg hydroxide, conductive polymers, etc., or modifications of these materials or these materials. Although the material which combined 1 type or multiple types can also be used, it is not limited to these.

Examples of conductive materials that do not need to be transparent, such as the first fixed electrodes 2a to 2d, include simple metals such as Al, Cu, Au, Ag, Ni, Cr, Fe, Mo, Ti, W, Ta, or alloys. Are preferable from the viewpoint of electrical conductivity, workability, etc., and other materials include Sn, Pd, Co, Pt, ITO, Si, Ru, Rh, Re, Os, Hf, Ir, Nb, other metals, alloys, Phosphorus alloy, SnAg, SnAgCu, CoWP, CoWB, CoWBP, NiP, AuCu, silicide, graphite, stainless steel, conductive polymer, solder material, conductive oxide or semiconductor oxide or Ru oxide, Ir oxide, Rh oxidation Conductive materials or semiconductor materials selected from the group consisting of mixed oxides such as oxides, Ti oxides, or mixtures of the above metal oxides such as Ta oxides, or Serial material combining one or more of the transparent conductive material like materials, etc., or these variants or these materials can also be used but not limited thereto.

When an insulating elastomer material is used as the elastomer material such as the hinges 8a to 8d, for example, polyester resin, polyamide resin, acrylic resin, polyurethane resin, ethylene-vinyl acetate resin, ethylene-ethyl acrylate resin, polyimide resin, bismalimide resin , Styrene resin, polyvinyl chloride resin, polyisobutylene resin, polyethylene resin, polypropylene resin, epoxy silicone resin, epoxy resin, silicone resin, fluororesin, fluorosilicone resin, or butadiene rubber, butyl rubber, styrene butadiene rubber, nitrile Synthetic rubber such as rubber, isoprene rubber, chloroprene rubber, ethylene propylene rubber, silicone rubber, etc., natural rubber, etc., or a variant thereof or one of these materials Materials combining several, but can also be used these materials by adding a plasticizer to adjust the elastic modulus, and the like.

When a conductive elastomer material is used as the elastomer material such as the hinges 8a to 8d, for example, a conductive polymer, or conductive particles using the insulating elastomer material as a binder, a wire mesh, a conductive woven fabric, or a non-woven material. Or a conductive polymer can be mixed. Specific examples of the conductive particles include carbon, Cu, Cu alloy, Ni, Ti, Au, Ag and the like processed into particles, or alloys thereof, and inorganic particles or polymer particles such as core material or glass beads. A conductive particle having a metal conductive layer formed on the surface thereof by plating, vapor deposition, or the like, or a deformed body thereof or a material combining one or more of these materials can also be used, but is not limited thereto.

Transparent insulating materials such as the movable insulating portions 1a2 to 1d2 and the fixed insulating portion 3 include polyester resins such as polyethylene terephthalate (PET), polyamide resins, polyimide resins, styrene resins, polycarbonate resins, and polymethyl methacrylate resins. , Polyethylene resins, polypropylene resins, polyethersulfone resins, polytetrafluoroethylene resins, polyphenylsulfite resins, and other organic polymers and copolymers thereof, or glass, carbon fiber, mica, Si oxide, Si nitride, Inorganic materials such as Al nitride are preferable in terms of processability, heat resistance, transparency, or the like, or a deformed body or a material combining one or more of these materials can be used, but is not limited thereto. Not.

Hereinafter, an example of the manufacturing method of the present embodiment will be described with reference to the drawings with reference to FIGS.

First, an example of a manufacturing method by etching, lift-off, and mask deposition of the fixed insulating portion 3 and the second fixed electrode 4 will be described separately with reference to the drawings.

FIG. 35 is a cross-sectional view showing a process of manufacturing the fixed insulating portion 3 and the second fixed electrode 4 by etching. FIGS. Ie to Ii show cut surfaces as viewed from the direction of the arrows of dashed-dotted lines I to I in FIG. 3, and FIGS. IIe to IIi show the cut surfaces as viewed from the direction of the arrows of dashed-dotted lines II to II in FIG.

Referring to FIG. Ie and FIG. IIe, the transparent substrate 12 and the first substrate 5 having the opening and the wiring electrically connected to the portion facing the opening are laminated on the transparent substrate 12 and the whole is transparent. A conductive material is deposited, the second fixed electrode 4 is formed in the opening, and the first transparent conductive layer 13 is formed on the first substrate 5.

Referring to FIGS. If and IIf, a transparent insulating material is deposited on the entire surface, the fixed insulating portion 3 is formed on the second fixed electrode 4, and the first transparent insulating layer 14 is formed on the first transparent conductive layer 13. It is formed.

Referring to FIGS. Ig and IIg, the first etching mask 15 is selectively formed only on the opening, that is, the fixed insulating portion 3.

Referring to FIGS. Ih and IIh, the first transparent conductive layer 13 and the first transparent insulating layer 14 are selectively etched except for the second fixed electrode 4 and the fixed insulating portion 3 protected by the first etching mask 15. And removed.

Referring to FIGS. Ii and IIi, the first etching mask 15 is removed, and the second fixed electrode 4 and the fixed insulating part 3 remain.

FIG. 36 is a cross-sectional view showing a process of manufacturing the fixed insulating portion 3 and the second fixed electrode 4 by lift-off. FIGS. Ij to Im show cut surfaces as viewed from the direction of the arrows of dashed-dotted lines I to I in FIG. 3, and FIGS. IIj to IIm show the cut surfaces as viewed from the direction of the arrows of dashed-dotted lines II to II in FIG.

Referring to FIG. Ij and FIG. IIj, the opening is formed in the transparent substrate 12 and the first substrate 5 provided thereon with the opening and the wiring electrically connected to the portion facing the opening. A first lift-off mask 16 is selectively deposited only on the first substrate 5 except for. The first lift-off mask 16 preferably has a reverse taper at the portion facing the opening to facilitate lift-off in a later process.

Referring to FIGS. Ik and IIk, a transparent conductive material is deposited on the entire surface, the second fixed electrode 4 is formed in the opening, and the second transparent conductive layer 17 is formed on the first lift-off mask 16. It is desirable that the portion facing the opening of the first lift-off mask 16 is not covered.

Referring to FIGS. 11 and II, a transparent insulating material is deposited on the entire surface, and the fixed insulating portion 3 is formed on the second fixed electrode 4 and the second transparent insulating layer 18 is formed on the second transparent conductive layer 17. It is formed. It is desirable that the portion facing the opening of the first lift-off mask 16 is not covered.

Referring to FIGS. Im and IIm, the first lift-off mask 16 is removed, and at the same time, the second transparent conductive layer 17 and the second transparent insulating layer 18 are simultaneously removed, leaving the second fixed electrode 4 and the fixed insulating portion 3. .

FIG. 37 is a cross-sectional view showing a process of manufacturing the fixed insulating portion 3 and the second fixed electrode 4 by mask vapor deposition. FIGS. In to Ip show cut planes as viewed from the direction of the arrows of dashed-dotted lines I to I in FIG. 3, and FIGS. IIn to IIp show the cut planes as viewed from the directions of the dashed-dotted lines II to II in FIG.

Referring to FIG. In and FIG. IIn, an opening is formed in the transparent substrate 12 and the first substrate 5 provided thereon with the opening and the wiring electrically connected to the portion facing the opening. The first vapor deposition mask 19 is selectively prepared except for the portion, that is, only on the first substrate 5.

Referring to FIGS. Io and IIo, a transparent conductive material and a transparent insulating material are vapor-deposited through a first vapor deposition mask 19, and the second fixed electrode 4 and the fixed electrode 4 are selectively fixed only to the opening except for the first substrate 5. The insulating part 3 is formed by being laminated.

Referring to FIGS. Ip and IIp, the first deposition mask 19 is removed, and the second fixed electrode 4 and the fixed insulating part 3 remain.

Next, an example of a manufacturing method in the etching of the hinge 8a, lift-off, and mask deposition will be described separately with reference to the drawings.

FIG. 38 is a cross-sectional view showing a process of manufacturing the hinge 8a by etching. FIGS. Iq to It show cutting planes as viewed from the direction of the arrows of dashed-dotted lines I to I in FIG. 3, and FIGS. IIq to IIt show cutting planes as viewed from the direction of the arrows of dashed-dotted lines II to II in FIG.

Referring to FIGS. Iq and IIq, a conductive elastomer material is deposited on the second substrate 6a having an opening and a wiring electrically connected to a portion facing the opening, and the hinge 8a and the hinge 8a. The first conductive elastomer layer 20 is formed on the entire surface except for a certain place.

Referring to FIGS. Ir and IIr, the second etching mask 21 is selectively formed only on the hinge 8a.

Referring to FIGS. Is and IIs, the first conductive elastomer layer 20 is selectively etched and removed except for the hinge 8 a protected by the second etching mask 21.

Referring to FIGS. It and IIt, the second etching mask 21 is removed and the hinge 8a remains.

FIG. 39 is a cross-sectional view showing a process of manufacturing the hinge 8a by lift-off. FIGS. Iu to Iw show cut surfaces as viewed from the direction of the arrows of dashed-dotted lines I to I in FIG. 3, and FIGS. IIu to IIw show the cut surfaces as viewed from the direction of the arrows of dashed-dotted lines II to II in FIG.

Referring to FIGS. Iu and IIu, the second substrate 6a having the opening and the wiring electrically connected to the portion facing the opening is selectively selected as a whole except where the hinge 8a should be. A second lift-off mask 22 is deposited. The second lift-off mask 22 preferably has a reverse tapered shape at the portion facing the hinge 8a so that the lift-off mask 22 is easily lifted off in a later process.

Referring to FIGS. Iv and IIv, a conductive elastomer material is deposited on the entire surface, and a second conductive elastomer layer 23 is formed on the hinge 8 a and the second lift-off mask 22. It is desirable that the portion of the second lift-off mask 22 that faces the hinge 8a is not covered.

Referring to FIGS. Iw and IIw, the second lift-off mask 22 is removed, and at the same time, the second conductive elastomer layer 23 is simultaneously removed, leaving the hinge 8a.

FIG. 40 is a cross-sectional view showing a process of manufacturing the hinge 8a by mask vapor deposition. FIGS. Ix to Iz show cut surfaces as viewed from the direction of the arrows of dashed-dotted lines I to I in FIG. 3, and FIGS. IIx to IIz show the cut surfaces as viewed from the direction of the arrows of dashed-dotted lines II to II in FIG.

Referring to FIGS. Ix and IIx, only on the second substrate 6a having the opening and the wiring electrically connected to the portion facing the opening, except where the hinge 8a should be. A second vapor deposition mask 24 is selectively prepared.

Referring to FIGS. Iy and IIy, the conductive elastomer material is deposited through the second deposition mask 24, and only the hinge 8a is selectively formed.

Referring to FIGS. Iz and IIz, the second deposition mask 24 is removed and the hinge 8a remains.

Next, an example of a manufacturing method in sacrificial layer etching and etching, sacrificial layer etching and lift-off, sacrificial layer etching and mask deposition of the movable electrode 1a1 and the movable insulating portion 1a2 will be described separately with reference to the drawings.

FIG. 41 is a cross-sectional view showing a process of manufacturing the movable electrode 1a1 and the movable insulating portion 1a2 by sacrificial layer etching and etching. FIGS. Ief to Iek show cut surfaces as viewed from the direction of the dashed line I to I in FIG. 3, and FIGS. IIef to IIek show the cut surfaces as viewed from the direction of the dashed line II to II in FIG.

Referring to FIG. Ief and FIG. IIef, the opening, the hinge 8a, and the portion of the hinge 8a that faces the opening are provided on the second substrate 6a that is electrically connected to the portion that faces the hinge 8a. A first sacrificial layer 25 is selectively deposited on the entire surface except for.

Referring to FIGS. Ieg and IIeg, a transparent conductive material and a cyan transparent insulating material are deposited on the entire surface, and the movable electrode 1a1 and the movable insulating portion 1a2 are formed on the first sacrificial layer 25 in the opening. A third transparent conductive layer 26 and a first cyan transparent insulating layer 27 are stacked on the substrate 6a and the first sacrificial layer 25 on the hinge 8a.

Referring to FIGS. Ieh and IIeh, the third etching mask 28 is selectively formed only on the movable insulating portion 1a2.

Referring to FIGS. Iei and IIei, the third transparent conductive layer 26 and the first cyan transparent insulating layer 27 are selectively etched except for the movable electrode 1a1 and the movable insulating portion 1a2 protected by the third etching mask 28. And removed.

Referring to FIGS. Iej and IIej, the third etching mask 28 is removed, and the movable electrode 1a1, the movable insulating portion 1a2, and the first sacrificial layer 25 remain.

Referring to FIGS. Iek and IIek, the first sacrificial layer 25 is removed, and the movable electrode 1a1 and the movable insulating portion 1a2 are separated from the portion other than the portion connected to the hinge 8a, and are rotatable about the hinge 8a. .

FIG. 42 is a cross-sectional view illustrating a process of manufacturing the movable electrode 1a1 and the movable insulating portion 1a2 by sacrificial layer etching and lift-off. FIGS. Iel to Ieo show cut planes as viewed from the direction of the dashed line I to I in FIG. 3, and FIGS. IIel to IIeo show the cut planes as viewed from the direction of the dashed line II to II in FIG.

Referring to FIG. Iel and FIG. IIel, the opening, the hinge 8a, and the portion of the hinge 8a that faces the opening are provided in the second substrate 6a that is electrically connected to the portion that faces the hinge 8a. A second sacrificial layer 29 is selectively deposited on the entire surface except for.

Referring to FIGS. Iem and IIem, a third lift-off mask 30 is selectively deposited only on the second sacrificial layer 29 on the second substrate 6a and the hinge 8a. The third lift-off mask 30 preferably has a reverse taper at the portion facing the opening to facilitate lift-off in a later process.

Referring to FIGS. Ien and IIen, a transparent conductive material and a cyan transparent insulating material are deposited on the entire surface, and the movable electrode 1a1 and the movable insulating portion 1a2 are formed on the second sacrificial layer 29 in the opening. A fourth transparent conductive layer 31 and a second cyan transparent insulating layer 32 are stacked on the lift-off mask 30. It is desirable that the portion where the third lift-off mask 30 faces the movable insulating portion 1a2 is not covered.

Referring to FIGS. Ieo and IIeo, the second sacrificial layer 29 and the third lift-off mask 30 are removed, and at the same time, the fourth transparent conductive layer 31 and the second cyan transparent insulating layer 32 are also removed, and the movable electrode 1a1 and the movable electrode 1a1 are movable. The insulating portion 1a2 remains, and at the same time, the movable electrode 1a1 and the movable insulating portion 1a2 are separated from portions other than the portion connected to the hinge 8a, and are rotatable about the hinge 8a as a rotation axis.

FIG. 43 is a cross-sectional view showing a process of manufacturing the movable electrode 1a1 and the movable insulating portion 1a2 by sacrificial layer etching and mask vapor deposition. FIGS. Iep to Iet show cut planes as viewed from the direction of the arrows of dashed-dotted lines I to I in FIG. 3, and FIGS. IIep to IIet show the cut planes as viewed from the directions of the dashed-dotted lines II to II in FIG.

Referring to FIGS. Iep and IIep, the opening, the hinge 8a, and the portion of the hinge 8a that faces the opening are provided on the second substrate 6a that is electrically connected to the portion that faces the hinge 8a. A third sacrificial layer 33 is selectively deposited on the entire surface except for.

Referring to FIGS. Ieq and IIeq, the third deposition mask 34 is selectively prepared except for the opening, that is, only on the third sacrificial layer 33 on the second substrate 6a and the hinge 8a.

Referring to FIGS. Ier and IIer, a transparent conductive material and a cyan transparent insulating material are deposited through a third deposition mask 34, and the movable electrodes 1a1 and 1a are selectively deposited only on the third sacrificial layer 33 in the opening. The movable insulating portion 1a2 is formed by being laminated.

Referring to FIGS. Ies and IIes, the third deposition mask 34 is removed.

Referring to FIGS. Iet and IIet, the third sacrificial layer 33 is removed, the movable electrode 1a1 and the movable insulating portion 1a2 remain, and at the same time, the movable electrode 1a1 and the movable insulating portion 1a2 are from other than the portion connected to the hinge 8a. It is separated and becomes rotatable about the hinge 8a as a rotation axis.

The transparent conductive material constituting the second fixed electrode 4 and the first transparent conductive layer 13, the hinge 8 a and the first conductive elastomer layer 20, the movable electrode 1 a 1, and the third transparent conductive layer 26 when made of a conductive elastomer material. For example, PVD (physical vapor deposition) such as sputtering and vacuum deposition, CVD (chemical vapor deposition) such as PECVD (plasma chemical vapor deposition), spray coating, etc. Method, powder coating method, dip coating method, spin coating method, roller coating method, die coating method, blade coating method, bar coating method, LPD (liquid phase growth method) such as electrolytic plating, electroless plating and sol-gel method, ALD (Atomic Layer Growth Method) or the like may be used, but is not limited thereto.

The fixed insulating portion 3 and the first transparent insulating layer 14, the hinge 8a made of an insulating elastomer material, the movable insulating portion 1a2 and the transparent insulating material or insulating elastomer material constituting the first cyan transparent insulating layer 27, For example, PVD such as sputtering and vacuum deposition, CVD such as PECVD, spray coating method, powder coating method, dip coating method, spin coating method, roller coating method, die coating method, blade coating, etc. Although not limited to these methods, LPD such as a bar coating method, sol-gel method, thermal oxidation, FHD (flame hydrolysis deposition), or the like may be used.

As the first etching mask 15, the second etching mask 21, and the third etching mask 28, for example, a resist formed by photolithography, SiO ₂ formed by thermal oxidation of patterned polysilicon, sputtering, vacuum deposition, or the like. of PVD, CVD, such as PECVD, _SiN patterning with such a film to photolithography and etching, etc. FHD, SiC, SiO 2, Pt , Ti, TiW, TiN, Al, Cr, Au, Ni, and other hard material such as Or you may use the material which combined these deformation bodies or 1 or multiple types of these materials, but it is not limited to these.

As a method of etching and removing the first transparent conductive layer 13 and the first transparent insulating layer 14, the first conductive elastomer layer 20, the third transparent conductive layer 26 and the first cyan transparent insulating layer 27, for example, wet etching, Dry etching such as plasma etching or RIE (reactive ion etching) may be used, but is not limited thereto. As an etchant for wet etching, for example, an organic solvent is used when etching an organic polymer, and an acidic aqueous solution such as ferric chloride aqueous solution, iodic acid aqueous solution, aqua regia, or oxalic acid aqueous solution is used when etching ITO or the like. However, it is not limited to these.

As a method for removing the first etching mask 15, the second etching mask 21, and the third etching mask 28, for example, wet etching, dry etching such as plasma etching or RIE, etching such as physical etching, mechanical polishing, chemical polishing, CMP (chemical mechanical polishing), CP (contact planarization), polishing such as laser polishing, or FIB (focused ion beam method) may be used, but is not limited thereto. For example, when wet etching is performed on SiO ₂ or the like, for example, hydrofluoric acid or the like may be used as an etchant, but is not limited thereto.

The first lift-off mask 16, the second lift-off mask 22, and the third lift-off mask 30 may be, for example, a resist formed by photolithography, but are not limited thereto. As a method for removing these, for example, wet etching, dry etching such as plasma etching or RIE, etching such as physical etching, mechanical polishing, chemical polishing, CMP (chemical mechanical polishing), CP (contact flattening), laser polishing, etc. Polishing such as FIB (focused ion beam method) or the like may be used, but is not limited thereto. In order to avoid lift-off of other parts as an etchant for wet etching, it is desirable to have a sufficiently weak action. For example, when etching an organic polymer, an organic solvent such as diluted acetone may be used. It is not limited.

In order to facilitate lift-off, the portion facing the opening of the first lift-off mask 16, the portion facing the hinge 8a of the second lift-off mask 22, and the portion facing the opening of the third lift-off mask 30 are not coated. It is desirable. Such second fixed electrode 4 and second transparent conductive layer 17, fixed insulating portion 3 and second transparent insulating layer 18, hinge 8a and second conductive elastomer layer 23, movable electrode 1a1 and fourth transparent conductive layer 31, As a method for depositing the transparent conductive material, transparent insulating material, conductive elastomer material, and cyan transparent insulating material constituting the movable insulating portion 1a2 and the second cyan transparent insulating layer 32, for example, PVD such as sputtering or vacuum evaporation Spray coating method, powder coating method, dip coating method, spin coating method, roller coating method, die coating method, blade coating method, bar coating method and the like may be used, but are not limited thereto.

In addition, as the 1st vapor deposition mask 19, the 2nd vapor deposition mask 24, and the 3rd vapor deposition mask 34, although the thing containing a metal etc. may be used, for example, it is not limited to these.

As a method of depositing a transparent conductive material, a transparent insulating material, a conductive elastomer material, or a cyan transparent insulating material through the first vapor deposition mask 19, the second vapor deposition mask 24, or the third vapor deposition mask 34, for example, sputtering or vacuum Although PVD etc., such as vapor deposition, may be used, it is not limited to these.

As the first sacrificial layer 25, the second sacrificial layer 29, and the third sacrificial layer 33, any material may be used depending on the application as long as it can be removed faster than other portions. For example, poly Si, Al, AlSi, AlCu, AlSiCu, amorphous Si, polycrystalline Si, porous Si, Si dioxide, etc. that can be removed with a strong alkaline solution such as TMAH, hydrogen fluoride vapor or mixed aqueous solution with ammonium fluoride Diluted with acetic acid, such as PSG, BPSG, etc., which can be removed with hydrofluoric acid or hydrofluoric acid buffer solution, Ti, etc., which can be removed with a mixed solution of hydrofluoric acid and hydrogen peroxide, etc. SiGe that can be removed with hydrofluoric acid, etc., Si nitride that can be removed with hot phosphoric acid, etc., resist that can be removed with ozone ashing, plasma ashing, etc., polyvinyl alcohol, cellulose, pullulan, polyvinyl that can be removed with water or hot water, etc. Pyrrolidone homopolymers and copolymers, water-soluble resins such as gelatin, polyhydrostyrene, or alkali Metal oxides, carbonates, sulfates or hydroxides, alkaline earth metal oxides, carbonates, sulfates or hydroxides, etc., or variants or one or more of these materials A combination of materials may be used, but is not limited thereto.

Moreover, in the said manufacturing process, although the transparent substrate 12, the 1st board | substrate 5, and the 2nd board | substrate 6a are manufactured and arrange | positioned before each said manufacturing process, this 2nd board | substrate 6a is each said manufacturing process before each said manufacturing process. It may be arranged in any position after each manufacturing process, and may be manufactured before each manufacturing process, during each manufacturing process, or after each manufacturing process.

The hinges 8b to 8d, the movable electrodes 1b1 to 1d1, and the movable insulating parts 1b2 to 1d2 are similarly laminated and manufactured by applying the manufacturing process of the hinge 8a, the movable electrode 1a1, and the movable insulating part 1a2. At this time, the sacrificial layer may be removed once as described above, and the next step may be performed. However, in the stage of manufacturing the movable electrodes 1a1 to 1c1 and the movable insulating portions 1a2 to 1c2, the step of removing the sacrificial layer is performed. It is possible to omit all the sacrificial layers at the same time after manufacturing the hinges 8a to 8d, the movable electrodes 1a1 to 1d1, and the movable insulating portions 1a2 to 1d2 all at the same time.

Next, an example of a method for manufacturing the first fixed electrodes 2a to 2d by electroforming will be described with reference to the drawings.

FIG. 44 is a cross-sectional view showing a process of manufacturing a mold using a photoresist. FIGS. Ieu to Iew show cut surfaces as viewed from the direction of the dashed line I to I in FIG. 3, and FIGS. IIeu to IIew show the cut surfaces as viewed from the direction of the dashed line II to II in FIG.

Referring to FIGS. Ieu and IIeu, the second substrate 6a having a movable portion 1d, hinges 8a to 8d, and wiring electrically connected to a portion facing the place where the first fixed electrodes 2a to 2d should be. A thick film resist layer 35 is deposited at ˜6d.

Referring to FIGS. Iev and IIev, a photomask 36 in which a light shielding film is selectively formed on a place where the first fixed electrodes 2a to 2d should be prepared. Thereafter, the thick film resist layer 35 excluding the place where the first fixed electrodes 2a to 2d should be located is selectively exposed from above.

  Referring to FIG. Iew and FIG. IIew, the thick resist layer 35 is developed, the unexposed thick resist layer 35 is removed, and the thick resist layer 35 other than the place where the first fixed electrodes 2a to 2d should be is used as a template. Remain as.

FIG. 45 is a cross-sectional view illustrating a process of manufacturing the first fixed electrodes 2a to 2d by plating. FIGS. Iex to Iey show cut surfaces as viewed from the direction of the dashed line I to I in FIG. 3, and FIGS. IIex to IIey show the cut surfaces as viewed from the direction of the dashed line II to II in FIG.

Referring to FIG. Iex and FIG. IIex, the thick film resist layer 35 other than the place where the first fixed electrodes 2a to 2d, which are the templates, should be plated, and only the first fixed electrodes 2a to 2d are selectively formed. .

Referring to FIGS. Iey and IIey, the thick resist layer 35 is removed, and the first fixed electrodes 2a to 2d remain.

The thick resist layer 35 may be, for example, a photosensitive thick film resist made of epoxy resin such as SU8, acrylic resin, novolac resin, dry film, or the like, or may be a chemically amplified type. Alternatively, a material obtained by combining these deformation bodies or one or more of these materials may be used, but the present invention is not limited thereto.

The thick resist layer 35 may be deposited by, for example, a spin coating method, a spray coating method, or the like. The spin coating method may be repeated several times to obtain a thick film, but is not limited thereto.

In addition, as the photomask 36, for example, a transparent substrate such as glass and quartz formed with a light-shielding film such as Cr, CrO, CrF, or an emulsion mask, or a modification thereof or a combination of one or more of these materials However, it is not limited to these.

The exposure method for the thick resist layer 35 is shown as exposing without projection using an optical system such as a contact / proximity method, but a projection exposure method such as a lens projection method or a mirror projection method. However, it is not limited to these. Further, a direct drawing method may be used, and in this case, the photomask 36 can be omitted. In addition, ultraviolet rays, X-rays, electron beams, ion beams, laser beams, and the like may be used for exposure, but are not limited thereto.

As a method of leaving the thick film resist layer 35 other than the place where the first fixed electrodes 2a to 2d should be as a template, a method of deep RIE with polyimide using O ₂ or the like may be used. The phenomenon process can be omitted.

In addition, as a method for forming the first fixed electrodes 2a to 2d by plating, for example, electrolytic plating capable of high-speed thick film plating may be used, but the method is not limited thereto. In addition, in order to perform electroplating on a non-metallic mold such as a resist, it is necessary to attach a conductive seed layer to the surface, and the second substrates 6a to 6d can be used as the conductive seed layer, sputtering, vapor deposition, CVD, etc. A conductive seed layer formed by ion plating, electroless plating, SAM (self-assembled monomolecular film) formation, or the like may be used, but is not limited thereto.

For example, ozone ashing or plasma ashing may be used as a method for removing the thick resist layer 35, but is not limited thereto.

In addition, the fixed insulating part 3 and the second fixed electrode 4, the hinges 8a to 2d, the movable electrodes 1a1 to 1d1, the movable insulating parts 1a2 to 1d2, and the first fixed electrodes 2a to 2d are limited to the above manufacturing method because there are various manufacturing methods. Not. For example, it may be selectively produced by a printing method such as photolithography or an inkjet method, a nozzle printing method, or the like. In this case, etching, lift-off, mask vapor deposition, and electroforming can be omitted. Moreover, you may combine at least one part of the said manufacturing method. The order of manufacturing is not limited to the above description. For example, the manufacturing order may be reversed or in any order. Further, each of them may not be laminated and manufactured as described above, but may be manufactured in separate layers and then bonded by wafer bonding or the like.

Hereinafter, the effect of this embodiment which operates as described above will be described in general.

In the present embodiment, since the display light includes both external light and backlight light, both display of reflection type display and light emission type display are possible. In addition, since the rotating operation and the holding operation are performed by the electrostatic force acting on the same electrode, the circuit is simple. The movable parts 1a to 1d are respectively connected to the second substrates 6a to 6d, the first fixed electrodes 2a to 2d are respectively connected to the second substrates 6a to 6d, and the second fixed electrode 4 is connected to the first substrate 5. Since they are electrically connected, it is not necessary to provide more than two types of wiring on one second substrate 6a to 6d and first substrate 5, and the wiring is simple.

Hereinafter, each element and effect of this embodiment will be described individually.

In the present embodiment, the display light includes outside light. Therefore, for example, it is possible to obtain a reflective display with good visibility and low power consumption by external light.

In the present embodiment, the backlight 9 is provided in a direction opposite to the image display side direction of the display element 10, and the display light includes backlight light. Therefore, for example, a configuration in which light-emitting display can be performed by backlight light can be achieved.

In the present embodiment, the backlight 9 can modulate the light intensity. Therefore, for example, the light intensity can be modulated in the light emitting display.

In the present embodiment, the movable parts 1a to 1d rotate at least perpendicularly to the display screen. Therefore, for example, the movable parts 1a to 1d can be provided in a smaller space. For example, a simpler configuration can be achieved.

In the present embodiment, the movable portions 1a to 1d increase the area on which the display light is incident due to a change in the tilt angle that rotates at least in the image display side direction. Therefore, for example, the movable parts 1a to 1d can be configured to have a wide viewing angle without obstructing the field of view at an inclination angle at which the area on which the display light is incident is reduced.

In the present embodiment, the movable parts 1a to 1d include a color transparent part. Therefore, for example, when the movable parts 1a to 1d are stacked, a configuration capable of displaying more colors can be provided. Further, for example, when the backlight 9 is provided, it is possible to have a configuration capable of absorbing a backlight of a specific wavelength band and transmitting a backlight light of another specific wavelength band to enable color light emission type display.

In the present embodiment, the movable portions 1a to 1d include cyan, magenta, and yellow portions. For this reason, for example, the three primary colors of cyan, magenta, and yellow can be displayed. In addition, for example, when the movable parts 1a to 1d include a color transparent part, the two primary parts of red, green, and blue light can be displayed by stacking two movable parts 1a to 1d. A configuration with high reproducibility can be achieved. In addition, for example, when the movable parts 1a to 1d include a color transparent part, it is possible to display a color close to black by stacking three movable parts 1a to 1d, and to have a structure with higher contrast. be able to.

In the present embodiment, the movable parts 1a to 1d include a white part. Therefore, for example, the white portions of the movable portions 1a to 1d reflect outside light, so that a reflective display with good visibility and low power consumption can be achieved. Further, for example, a configuration capable of displaying paper white can be achieved, and a configuration with higher contrast can be achieved. Further, for example, when the movable portions 1a to 1d including the color transparent portion are stacked in the image display side direction of the movable portions 1a to 1d including the white portion, a configuration capable of color reflection display is provided without the color reflection portion. Can be.

In the present embodiment, a plurality of movable parts 1a to 1d are stacked perpendicular to the display screen. Therefore, for example, when the movable parts 1a to 1d include a color transparent part, a configuration capable of displaying more colors can be provided. In addition, for example, when the movable parts 1a to 1d include a white part and a color transparent part, the color reflection type display can be achieved without stacking by providing the color reflection part.

In the present embodiment, the movable parts 1a to 1d are cantilever beams. Therefore, for example, the movable parts 1a to 1d can be configured to be rotatable with a simple structure.

In the present embodiment, the display element 10 has hinges 8a to 8d. Therefore, for example, the movable portions 1a to 1d can be configured to be rotatable repeatedly with the hinges 8a to 8d as the rotation axis.

In the present embodiment, each of the movable parts 1a to 1d is provided in at least four directions parallel to the display screen. Therefore, for example, the movable parts 1a to 1d can be provided on the sides of the quadrangle, and since the smallest one display element 10 can be provided with the many movable parts 1a to 1d, the smallest one display element 10 can further include A configuration capable of displaying many colors can be obtained.

In the present embodiment, the movable parts 1a to 1d are provided side by side on each side of a substantially square shape. Therefore, for example, when the area where the display light is incident increases, the movable parts 1a to 1d can cover the substantially square without a substantial gap, and have a configuration with higher luminance or reflectance, aperture ratio, color reproduction capability, and contrast. be able to.

In the present embodiment, the movable parts 1a to 1d are provided on the sides of a two-dimensional figure of phase dimension 2 filled in a plane. Therefore, for example, it can be set as the structure which can use a space efficiently by plane filling.

In the present embodiment, the driving means can modulate the tilt angle by rotating the movable parts 1a to 1d by electrostatic force. Therefore, for example, the size can be reduced, and the smaller the size, the stronger the force and the faster the modulation speed.

In the present embodiment, the movable portions 1a to 1d include movable electrodes 1a1 to 1d1, and the display element 10 includes a plurality of first fixed electrodes 2a to 2d each provided in three or more directions parallel to at least the display screen. The display element 10 has at least a transparent second fixed electrode 4 at least in the image display side direction.

In the present embodiment, the first fixed electrodes 2a to 2d are provided on the sides of a two-dimensional figure having a phase dimension of 2 filled in a plane.

In the present embodiment, the first fixed electrodes 2a to 2d are provided side by side on the substantially square sides.

In the present embodiment, the inclination angles of the movable parts 1a to 1d can be held by electrostatic attraction by a capacitor. Therefore, for example, since the electrostatic attraction force by the capacitor is proportional to the facing area, a configuration having a strong holding force can be achieved. Further, for example, since the holding force is an electrostatic attraction force by a capacitor, it can be configured to be turned on and off.

In the present embodiment, it is possible to form a capacitor between the movable parts 1a to 1d and the first fixed electrodes 2a to 2d and hold the inclination angles of the movable parts 1a to 1d by electrostatic attraction force.

In the present embodiment, the movable portions 1a to 1d have movable insulating portions 1a2 to 1d2 in the direction opposite to the rotation direction of the movable electrodes 1a1 to 1d1 in the image display side direction. Therefore, for example, the movable insulating portions 1a2 to 1d2 can be colored.

In the present embodiment, it is possible to form a capacitor between the movable parts 1a to 1d and the second fixed electrode 4 and maintain the inclination angles of the movable parts 1a to 1d by electrostatic attraction force.

In the present embodiment, the display element 10 includes the fixed insulating portion 3 that is at least transparent in the direction opposite to the image display side direction of the second fixed electrode 4.

In the manufacturing method of the present embodiment, the movable parts 1a to 1d are formed by etching, lift-off, or mask vapor deposition. Therefore, for example, it can be manufactured more compactly.

In the manufacturing method of the present embodiment, the movable parts 1a to 1d are formed in a state where a plurality of the movable parts 1a to 1d are stacked vertically to the display screen. Therefore, for example, it can be manufactured by a simple process.

In the manufacturing method of the present embodiment, the movable parts 1a to 1d are separated from parts other than the connected parts by sacrificial layer etching.

Hereinafter, with reference to FIGS. 46 to 58, Modifications 1 to 7 according to the present embodiment will be described.

[Modification 1]
First, the configuration of Modification 1 according to the present embodiment will be described with reference to the drawings.

FIG. 46 is a three-dimensional perspective separation perspective view of the display element 10 of Modification 1 according to the embodiment of the present invention. FIG. 47 is a cross-sectional view of the display element 10 of Modification 1 and the substrate group 7 provided around the display element 10 according to the embodiment of the present invention. FIG. 48 is a cross-sectional view of the display element 10 of Modification 1 and the substrate group 7 provided around the display element 10 according to the embodiment of the present invention. 46 is FIG. 2, FIG. 47 is FIG. 4, FIG. 48 is Iez to Iezabc, and FIGS. IIez to IIezabc are instead of the movable electrodes 1 a 1 to 1 d 1 in the configurations of FIGS. I to Iabc and II to IIabc of FIG. The following are provided. A movable color transparent electrode and a movable color opaque electrode 37a made of a transparent conductive material of cyan, magenta and yellow, and a white opaque conductive material, except for the side end opposite to the side of the hinges 8a to 8d. ~ 37d. Also, at the side edge opposite to the hinge 8a-8d side direction, the cyan, magenta, yellow, thicker than the movable color transparent electrode and the movable color opaque electrode 37a-37d perpendicular to the hinge 8a-8d direction. Movable insulating stoppers 38a to 38d made of a transparent insulating material of color and an opaque insulating material of white are provided. Further, the movable insulating portions 1a2 to 1d2 and the fixed insulating portion 3 are not provided. In addition, the movable color transparent electrode and the movable color opaque electrode 37a to 37d are built in the hinges 8a to 8d or disposed on the surface (not shown), and are disposed in the second substrates 6a to 6d or disposed on the surface ( (Not shown) is electrically connected to the power source.

At this time, the movable portions 1a to 1d are rotatable about the hinges 8a to 8d as rotation axes at the first or second inclination angle, respectively. When the movable parts 1a to 1d are at the first or second inclination angle, the movable insulating stoppers 38a to 38d are kept in contact with each other and supported, and the movable color transparent electrode and the movable color are removed except for the movable insulating stoppers 38a to 38d. The opaque electrodes 37a to 37d and the second fixed electrodes 4 are not in contact with each other.

Next, an operation example of Modification 1 according to the present embodiment will be mainly described.

Referring to FIG. 48 as an example, when the movable portions 1a to 1d are at the first or second tilt angle in the holding operation, the movable color transparent electrodes and the movable color opaque electrodes 37a to 37d and the second fixed electrodes 4 are connected to each other. The voltage of the opposite polarity is continuously applied sufficiently. Then, except for the movable insulating stoppers 38a to 38d, in order to form a non-contact capacitor in which the insulating portion is not inserted between the electrodes, the movable portions 1a to 1d have the first or second tilt angle even if the voltage application is stopped thereafter. Can hold. That is, the movable parts 1a to 1d can be held by a non-contact capacitor in which no insulating part is inserted between the electrodes at the first or second tilt angle.

In order to increase the insulation resistance of the capacitor, the inside of the display element 10 may be evacuated or filled with gas.

Next, elements and effects of the first modification according to the present embodiment will be mainly described.

In Modification 1 according to the present embodiment, the movable portions 1a to 1d have movable insulating stoppers 38a to 38d, and the movable insulating stoppers 38a to 38d are in contact with each other and supported by a capacitor with a distance between the electrodes. The inclination angle of the movable parts 1a to 1d can be held by the suction force. Therefore, for example, since the movable insulating stoppers 38a to 38d are provided, it is possible to reduce the cost by using less material than using the movable insulating portions 1a2 to 1d2 and the fixed insulating portion 3. In addition, since the movable parts 1a to 1d can be held freely by a non-contact capacitor in which the insulating part is not inserted between the electrodes, the surface of the insulating part is charged and the holding power is reduced as compared with the state in which the movable part is in contact with the insulating part. It can be configured to prevent.

[Modification 2]
First, a configuration of Modification 2 according to the present embodiment will be described with reference to the drawings.

FIG. 49 is a three-dimensional perspective separation perspective view of the display element 10 of Modification 2 according to the embodiment of the present invention. FIG. 50 is a cross-sectional view of the display element 10 of Modification 2 and the substrate group 7 provided around the display element 10 according to the embodiment of the present invention. 49 is provided in FIG. 2, and FIG. 50 is provided with the following at the center and side edges instead of the movable electrodes 1a1 to 1d1 and the movable insulating portions 1a2 to 1d2 in the configuration of FIG. The central portion includes movable color transparent portions 43a to 43c and a movable white opaque portion 43d made of a transparent material of cyan, magenta, and yellow and a white opaque material. At the side end, there are movable electromagnets 39a-39d whose magnetic pole faces are parallel to the directions of the hinges 8a-8d on the opposite side to the directions of the hinges 8a-8d, and magnetic poles on the three sides without the movable electromagnets 39a-39d Movable permanent magnets 42a to 42d whose surfaces are parallel to the directions of the hinges 8a to 8d are provided. Further, instead of the first fixed electrodes 2a to 2d, first fixed permanent magnets 40a to 40d having magnetic pole faces in the direction of the movable parts 1a to 1d are provided. Further, instead of the fixed insulating portion 3 and the second fixed electrode 4, a fixed transparent portion 44 made of a transparent material provided at the center portion and a magnetic pole surface provided at four side edges perpendicular to the image display side direction are displayed. A second fixed permanent magnet 41 is provided in the direction opposite to the side direction. The movable electromagnets 39a to 39d are built in the movable color transparent portions 43a to 43c and the movable white opaque portion 43d, or are arranged on the surface and the hinges 8a to 8d or the hinges 8a to 8d. It is electrically connected to the power source by the arranged wiring (not shown) and the wiring (not shown) built in or on the surface of the second substrates 6a to 6d.

At this time, the movable portions 1a to 1d are rotatable about the hinges 8a to 8d as rotation axes at the first or second inclination angle, respectively. When the movable portions 1a to 1d are at the first tilt angle, the movable electromagnets 39a to 39d and the movable permanent magnets 42a to 42d and the first fixed permanent magnets 40a to 40d are brought closer to each other. Further, when only one of the movable portions 1a to 1d is at the second tilt angle, the movable electromagnets 39a to 39d and the movable permanent magnets 42a to 42d and the second fixed permanent magnet 41 are brought closer to each other. Further, when two or more of the movable parts 1a to 1d are stacked at the second inclination angle, the movable electromagnets 39a to 39c of the movable parts 1a to 1c close to the image display side direction and the movable parts 1b to far from the image display side direction. The 1d movable permanent magnets 42b to 42d are movable permanent magnets 42a to 42c of the movable parts 1a to 1c close to the image display side direction, and the movable electromagnets 39b to 39d and the movable permanent magnets of the movable parts 1b to 1d far from the image display side direction. 42b-42d approaches.

The first fixed permanent magnets 40a to 40d have a magnetic pole surface facing the movable electromagnets 39a to 39d and the movable permanent magnets 42a to 42d, a magnetic pole surface facing the image display side of the second fixed permanent magnet 41, and the movable permanent magnet. It is desirable that the polarities of the magnetic pole faces in the direction opposite to the direction of the first fixed permanent magnets 40a to 40d in 42a to 42d are the same.

The first fixed permanent magnets 40a to 40d, the second fixed permanent magnet 41, and the like correspond to the driving means of the second modification according to the present embodiment of the present invention.

Next, an operation example of Modification 2 according to the present embodiment will be mainly described.

First, as an example, an operation of holding only one of the movable parts 1a to 1d at the first tilt angle will be described. When the movable parts 1a to 1d are at the first inclination angle, the first inclination angle can be maintained by the attractive force generated by the magnetic force between the movable permanent magnets 42a to 42d and the first fixed permanent magnets 40a to 40d.

Next, the operation | movement which rotates only one movable part 1a-1d from a 1st inclination angle to a 2nd inclination angle as an example is demonstrated. At this time, for example, a voltage is applied to each of the movable electromagnets 39a to 39d so that the magnetic pole surfaces of the opposed movable electromagnets 39a to 39d and the first fixed permanent magnets 40a to 40d have the same polarity. Then, the repulsive force due to the magnetic force of the movable electromagnets 39a to 39d and the first fixed permanent magnets 40a to 40d and the resultant force of the attractive force due to the magnetic force of the movable electromagnets 39a to 39d and the second fixed permanent magnet 41 are the same as the movable permanent magnets 42a to 42d. When the movable parts 1a to 1d such as attractive force due to the magnetic force with the fixed permanent magnets 40a to 40d become larger than the force that holds the movable parts 1a to 1d at the first inclination angle, the movable parts 1a to 1d can rotate to the second inclination angle.

Next, the operation | movement which hold | maintains only one of movable part 1a-1d to a 2nd inclination angle as an example is demonstrated. For example, when the movable parts 1a to 1d are at the second inclination angle, the second inclination angle can be maintained by the attractive force generated by the magnetic force between the second fixed permanent magnet 41 and the movable permanent magnets 42a to 42d.

Next, as an example, an operation of rotating only one of the movable parts 1a to 1d from the second tilt angle to the first tilt angle will be described. At this time, for example, a reverse voltage is applied to each of the movable electromagnets 39a to 39d. Then, the repulsive force due to the magnetic force between the movable electromagnets 39a to 39d and the second fixed permanent magnet 41 and the resultant force of the attractive force due to the magnetic force between the movable electromagnets 39a to 39d and the first fixed permanent magnets 40a to 40d are combined with the second fixed permanent magnet 41 and the movable permanent magnet. When the force of holding the movable parts 1a to 1d, such as the attractive force due to the magnetic force with the magnets 42a to 42d, becomes larger than the force that holds the second inclination angle, the movable parts 1a to 1d can rotate to the first inclination angle.

Next, as an example, the operation of rotating and laminating the movable parts 1b to 1d to the second inclination angle when any of the movable parts 1a to 1c is already at the second inclination angle will be described. For example, a voltage is applied to the movable electromagnets 39b to 39d to be stacked later so that the magnetic pole surfaces of the movable electromagnets 39b to 39d and the first fixed permanent magnets 40b to 40d facing each other have the same polarity. Then, a repulsive force is generated by the magnetic force between the first fixed permanent magnets 40b to 40d, and an attractive force is generated between the movable permanent magnets 42a to 42c that are already at the second tilt angle, so that the movable layering is performed later. The parts 1b to 1d can be stacked at the second tilt angle.

Next, as an example, when any one of the movable parts 1a to 1c is already at the second inclination angle, the operation for holding the laminated parts at the second inclination angle for the movable parts 1b to 1d laminated later will be described. At this time, for example, the movable permanent magnets 42a to 42c of the movable parts 1a to 1c that are already at the second inclination angle and the movable permanent magnets 42b to 42d of the movable parts 1b to 1d that are laminated later are laminated later. The movable parts 1b to 1d can hold the stack at the second tilt angle.

Next, as an example, when any one of the movable parts 1a to 1c is already at the second tilt angle, the stacking of the movable parts 1b to 1d stacked later is reset from the second tilt angle to the first tilt angle. Will be described. At this time, for example, a reverse voltage is applied to the movable electromagnets 39b to 39d of the movable portions 1b to 1d stacked later. Then, repulsive force due to magnetic force is generated between the movable permanent magnets 42a to 42c of the movable portions 1a to 1c that are already at the second inclination angle, and attractive force due to magnetic force is generated between the first fixed permanent magnets 40b to 40d. The movable parts 1b to 1d stacked later can reset the stacking to an inclination angle of 1.

That is, the movable parts 1a to 1d are changed by the electromagnetic force change by changing the magnetic force of the permanent magnets of the movable permanent magnets 42a to 42c and the first fixed permanent magnets 40b to 40d and the polarity of the voltage applied to the movable electromagnets 39a to 39d. It can be rotated to the first or second tilt angle, can be held, and can be stacked.

Next, elements and effects of Modification 2 according to the present embodiment will be mainly described.

In the second modification according to the present embodiment, the driving means can modulate the tilt angle by rotating the movable parts 1a to 1d by electromagnetic force. Moreover, the modification 2 which concerns on this embodiment can hold | maintain the inclination angle of movable part 1a-1d with a magnetic force. Therefore, for example, the movable color transparent portions 43a to 43c and the movable white opaque portion 43d are the central portions, and the movable electromagnets 39a to 39d and the movable permanent magnets 42a to 42d are provided at the edges, and the fixed transparent portion 44 is the center. In the case where the second fixed permanent magnet 41 is provided at the side edge as a part, the movable color transparent parts 43a to 43c, the movable white opaque part 43d, and the fixed transparent part 44 do not need to use transparent electrodes, and the cost is low. be able to. Moreover, since the movable parts 1a to 1d can be rotated and stacked by electromagnetic force, it is sufficient to apply a voltage to the movable electromagnets 39a to 39d, the electric circuit is simple, the repulsive force is strong, the drive voltage is low, and the output is linear and strong. Can be configured. Moreover, since it is possible to hold | maintain movable part 1a-1d with magnetic force, it can be set as the structure by which the fall by the passage of time of holding force is very small.

[Modification 3]
Next, a configuration of Modification 3 according to the present embodiment will be mainly described with reference to the drawings.

51 is a cross-sectional view of the display element 10 and the substrate group 7 provided around the display element 10 in Modification 3 according to the embodiment of the present invention. In FIG. 51, instead of the hinges 8a to 8d in the configuration of FIG. 4, a high expansion coefficient layer having a high thermal expansion coefficient and a low expansion coefficient layer having a lower thermal expansion coefficient than the high expansion coefficient layer are stacked. Bimetals 45a to 45d that connect the second substrates 6a to 6d and the movable portions 1a to 1d perpendicularly to the side direction are provided. In addition, if the high expansion coefficient layers in the bimetals 45a to 45d are provided in the image display side direction, it is desirable that the movable parts 1a to 1d be at the second inclination angle in a state where no current flows through the high expansion coefficient layer. If the rate layer is provided in the direction opposite to the image display side direction, it is desirable that the movable portions 1a to 1d be at the first tilt angle in a state where no current is passed through the high expansion rate layer. In addition, the high expansion coefficient layers of the bimetals 45a to 45d are electrically connected to a power source by wiring (not shown) built in the second substrates 6a to 6d or disposed on the surface.

At this time, the movable parts 1a to 1d are rotatable at the first or second tilt angle with the bimetals 45a to 45d as the rotation axis, respectively.

The bimetals 45a to 45d and the like correspond to the driving means of the third modification according to the present embodiment of the present invention.

Next, an operation example of Modification 3 according to the present embodiment will be mainly described.

First, as an example, an operation for holding only one of the movable parts 1a to 1d at an inclination angle in a state where no current is passed through the high expansion coefficient layer will be described. For example, when a high expansion coefficient layer in which no current flows is provided in the image display side direction and the movable portions 1a to 1d are at the second inclination angle, voltages having opposite polarities are applied to the movable electrodes 1a1 to 1d1 and the second fixed electrode 4. Is continuously applied sufficiently. Then, since the capacitor is formed between the movable electrodes 1a1 to 1d1 and the second fixed electrode 4 with the fixed insulating portion 3 interposed therebetween, the movable portions 1a to 1d can hold the second inclination angle thereafter. Further, when the high expansion coefficient layer in which no current flows is provided in the direction opposite to the image display side direction and the movable portions 1a to 1d are at the first inclination angle, the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d are provided. The reverse polarity voltage is continuously applied sufficiently. Then, since the capacitor is formed between the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d with the movable insulating portions 1a2 to 1d2 interposed therebetween, the movable portions 1a to 1d can thereafter maintain the first inclination angle.

Next, as an example, an operation of rotating only one of the movable parts 1a to 1d to an inclination angle in a state where a current is passed through the high expansion coefficient layer will be described. When a current flows from the power source to the high expansion coefficient layers of the bimetals 45a to 45d, the high expansion coefficient layers thermally expand due to Joule heat, and the movable parts 1a to 1d can rotate to the low expansion coefficient layer side. For example, if the high expansion coefficient layer is provided in the image display side direction, the movable parts 1a to 1d can approach the first fixed electrodes 2a to 2d and rotate to the first inclination angle with the bimetals 45a to 45d as the rotation axis. If the high expansion coefficient layer is provided in the direction opposite to the image display side direction, the movable parts 1a to 1d can approach the second fixed electrode 4 and rotate to the second inclination angle with the bimetals 45a to 45d as the rotation axis.

Next, as an example, an operation of holding only one of the movable parts 1a to 1d at an inclination angle in a state where a current is passed through the high expansion coefficient layer will be described. For example, when a high expansion coefficient layer through which an electric current is applied is provided in the image display side direction and the movable parts 1a to 1d are at the first inclination angle, the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d are opposite to each other. Polarity voltage is continuously applied sufficiently. Then, a capacitor is formed between the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d with the movable insulating portions 1a2 to 1d2 sandwiched therebetween. 1a to 1d can hold the first tilt angle. In addition, when the high expansion coefficient layer through which an electric current is applied is provided in the direction opposite to the image display side direction and the movable portions 1a to 1d are at the second inclination angle, the movable electrodes 1a1 to 1d1 and the second fixed electrode 4 are reversed. The voltage of the polarity is continuously applied sufficiently. Then, in order to form a capacitor between the movable electrodes 1a1 to 1d1 and the second fixed electrode 4 with the fixed insulating part 3 interposed therebetween, even if the heat of the high expansion coefficient layer is subsequently cooled and cold contracted, the movable parts 1a to 1d The second tilt angle can be maintained.

Next, as an example, an operation of rotating only one of the movable parts 1a to 1d to an inclination angle in a state where no current is passed through the high expansion coefficient layer will be described. For example, when the high expansion coefficient layer is provided in the image display side direction and the movable parts 1a to 1d are at the first inclination angle and the heat of the high expansion coefficient is cooled, the high expansion coefficient layer is cold contracted. When the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d are grounded, the holding force by the capacitor is lost, so the movable parts 1a to 1d approach the second fixed electrode 4 with the bimetals 45a to 45d as the rotation axis. However, it can rotate to the second tilt angle. Further, when the high expansion coefficient layer is provided in the direction opposite to the image display side direction and the movable parts 1a to 1d are at the second inclination angle and the heat of the high expansion coefficient is cooled, the high expansion coefficient layer is cold-contracted. . When the movable electrodes 1a1 to 1d1 and the second fixed electrode 4 are grounded, since the holding force by the capacitor is lost, the movable parts 1a to 1d approach the first fixed electrodes 2a to 2d with the bimetal 45a to 45d as the rotation axis. However, it can rotate to the first tilt angle.

Next, as an example, the operation of rotating and laminating the movable parts 1b to 1d to the second inclination angle when any of the movable parts 1a to 1c is already at the second inclination angle will be described. For example, in the same manner as described above, when the high expansion coefficient layers of the movable portions 1b to 1d to be stacked later are provided in the image display side direction, the movable electrodes 1b1 to 1d1 and the first fixed electrodes 2b to 2d are grounded. Alternatively, when the high expansion coefficient layers of the movable parts 1b to 1d to be stacked later are provided in the direction opposite to the image display side direction, when a current is passed through the high expansion coefficient layer, the movable parts 1b to 1 to be stacked later 1d can be stacked at the second tilt angle.

Next, as an example, when any one of the movable parts 1a to 1c is already at the second inclination angle, the operation of causing the movable parts 1b to 1d to hold the stack at the second inclination angle will be described. For example, voltages having opposite polarities are continuously applied sufficiently to the movable electrodes 1a1 to 1c1 of the movable parts 1a to 1c that are already at the second inclination angle and the movable electrodes 1b1 to 1d1 of the movable parts 1b to 1d that are stacked later. Is done. Then, since the capacitor is formed by sandwiching the movable insulating portions 1a2 to 1c2 of the movable portions 1a to 1c at the second inclination angle, even if the heat of the high expansion coefficient layer is cooled and then cold contracted, the high expansion coefficient layer Even in a state where no current is passed through, the movable portions 1b to 1d to be stacked later can hold the stack at the second tilt angle.

Next, as an example, the operation of resetting the stacking of the movable parts 1b to 1d from the second inclination angle to the first inclination angle when any of the movable parts 1a to 1c is already at the second inclination angle will be described. . For example, when the high expansion coefficient layers of the movable parts 1b to 1d that are stacked later are provided in the image display side direction, thermal expansion occurs when a current is passed through the high expansion coefficient layer. Alternatively, when the high expansion coefficient layers of the movable portions 1b to 1d laminated later are provided in the direction opposite to the image display side direction, the high expansion coefficient layer is cold-shrinked when the heat of the high expansion coefficient layer is cooled. If a voltage having the same polarity as that of the movable portions 1a to 1c already at the second inclination angle is applied to the movable electrodes 1b1 to 1d1 of the movable portions 1b to 1d stacked later, the holding force by the capacitor is lost. The movable parts 1b to 1d laminated from the above can reset the lamination to the first tilt angle.

That is, the movable parts 1a to 1d can be rotated to the first or second inclination angle by the thermal expansion force or the cold contraction force caused by current flowing or not flowing through the high expansion coefficient layers of the bimetals 45a to 45d. It can be freely held and can be held by electrostatic force.

Next, elements and effects of Modification 3 according to the present embodiment will be mainly described.

In the third modification according to the present embodiment, the drive unit can modulate the tilt angle by rotating the movable parts 1a to 1d by the thermal expansion force or the cold contraction force. Therefore, for example, it can be set as a structure with a strong repulsive force and a large change amount.

[Modification 4]
Next, a configuration of Modification 4 according to the present embodiment will be mainly described with reference to the drawings.

FIG. 52 is a cross-sectional view of the display element 10 of Modification 4 and the substrate group 7 provided around the display element 10 according to the embodiment of the present invention. FIG. 52 is provided with a fixed transparent electret 46 having a semi-permanently charged surface directed in the direction opposite to the image display side direction instead of the second fixed electrode 4 in the configuration of FIG.

The first fixed electrodes 2a to 2d, the fixed transparent electret 46, and the like correspond to the driving means of the fourth modification according to this embodiment of the present invention.

Next, an operation example of Modification 4 according to the present embodiment will be mainly described.

First, as an example, an operation of holding only one of the movable parts 1a to 1d at the first tilt angle will be described. For example, if a voltage having a reverse polarity is continuously applied sufficiently to the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d, the movable insulating portion 1a2 between the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d. Since the capacitor is formed across ˜1d2, the movable portions 1a to 1d can maintain the first tilt angle even if the application of the voltage is stopped thereafter.

Next, the operation | movement which rotates only one movable part 1a-1d from a 1st inclination angle to a 2nd inclination angle as an example is demonstrated. At this time, for example, if a voltage having a polarity opposite to the polarity of the charge-carrying surface of the fixed transparent electret 46 is applied to the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d from the power source, the movable part 1a is caused by electrostatic force. ˜1d and the first fixed electrodes 2a to 2d generate repulsive force, and the movable parts 1a to 1d and the fixed transparent electret 46 generate attractive force. Then, the movable parts 1a to 1d can approach the fixed transparent electret 46 and rotate to the second inclination angle.

Next, the operation | movement which hold | maintains only one of movable part 1a-1d to a 2nd inclination angle as an example is demonstrated. At this time, for example, if a voltage having a polarity opposite to the polarity of the charged surface of the fixed transparent electret 46 is continuously applied to the movable electrodes 1a1 to 1d1, the gap between the movable electrodes 1a1 to 1d1 and the fixed transparent electret 46 is sufficient. Since the capacitor is formed across the fixed insulating portion 3, the movable portions 1a to 1d can maintain the second tilt angle even if the application of voltage is stopped thereafter.

Next, as an example, an operation of rotating only one of the movable parts 1a to 1d from the second tilt angle to the first tilt angle will be described. At this time, for example, if a voltage having the same polarity as that of the charged surface of the fixed transparent electret 46 is applied from the power source to the movable electrodes 1a1 to 1d1, and a voltage having the opposite polarity is applied to the first fixed electrodes 2a to 2d. An attractive force is generated in the movable parts 1 a to 1 d and the first fixed electrodes 2 a to 2 d by electrostatic force, and a repulsive force is generated in the movable parts 1 a to 1 d and the fixed transparent electret 46. Then, the movable parts 1a to 1d can approach the first fixed electrodes 2a to 2d and rotate to the first inclination angle.

Next, as an example, the operation of laminating the movable parts 1b to 1d to the second inclination angle when the movable parts 1a to 1c are already at the second inclination angle will be described. For example, if a voltage having a polarity opposite to that of the movable electrodes 1a1 to 1c1 having the second inclination angle is applied to the movable electrodes 1b1 to 1d1 and the first fixed electrodes 2b to 2d to be stacked later from the power source, the electrostatic force Can rotate to the second tilt angle.

Next, as an example, an operation will be described in which when the movable parts 1a to 1c are already at the second inclination angle, the movable parts 1b to 1d also hold the stack at the second inclination angle. At this time, for example, if a voltage having a polarity opposite to that of the movable electrodes 1a1 to 1c1 already at the second inclination angle is continuously applied to the movable electrodes 1b1 to 1d1 stacked later, the movable insulating portions 1b2 to 1d2 Therefore, the second tilt angle can be maintained even if the voltage application is stopped thereafter.

Next, an operation for resetting the stacking of the movable parts 1b to 1d from the second inclination angle to the first inclination angle when the movable parts 1a to 1c are already at the second inclination angle will be described as an example. At this time, for example, a voltage having the same polarity as that of the movable electrodes 1a1 to 1c1 already at the second inclination angle is applied from the power source to the movable electrodes 1b1 to 1d1 stacked later, and the first fixed electrodes 2b to 2d have the opposite polarity. If a voltage is applied, it can rotate to the first tilt angle by electrostatic force.

That is, the movable portions 1a to 1d are changed to the first or second by the change in electrostatic force by changing the charge applied to the fixed transparent electret 46 and the polarity of the voltage applied to the movable electrodes 1a1 to 1c1 and the first fixed electrodes 2b to 2d. It is possible to rotate at an inclination angle of, and it is possible to hold it and to stack it.

Next, elements and effects of Modification 4 according to the present embodiment will be mainly described.

In the modified example 4 according to the present embodiment, the driving unit can modulate the tilt angle by rotating the movable parts 1a to 1d by the electrostatic attraction force by the electret. Moreover, the modification 4 which concerns on this embodiment can hold | maintain the inclination angle of movable part 1a-1d with the electrostatic attraction force by an electret. Therefore, for example, since the fixed transparent electret 46 having a semi-permanent charge is responsible for the rotation and holding of the movable portions 1a to 1d, it is sufficient to apply a voltage only to the movable electrodes 1a1 to 1c1 and the first fixed electrodes 2b to 2d. It is simple and can be configured to save power. In addition, since the movable parts 1a to 1d can be held by the electric charge of the fixed transparent electret 46, it is possible to make a configuration in which a decrease in holding force with time is small.

[Modification 5]
Next, a configuration of Modification Example 5 according to the present embodiment will be mainly described with reference to the drawings.

FIG. 53 is a schematic overall layout diagram of the display device 100 in Modification 5 according to the embodiment of the present invention. 53 includes a black plate 48 instead of the backlight 9 in the configuration of FIG. FIG. 54 is a cross-sectional view of the display element 10 of Modification 5 and the substrate group 7 provided around the display element 10 according to the embodiment of the present invention. 54 is provided with movable color reflective insulating portions 47a to 47c made of opaque insulating materials of red, green and blue instead of the movable insulating portions 1a2 to 1c2 in the configuration of FIG.

Next, an operation example of Modification 5 according to the present embodiment will be mainly described.

The movable color reflective insulating portions 47a to 47c and the movable insulating portion 1d2 are made of opaque insulating materials of red, green, blue and white, so that only one of them has a reflective color and white color when they are at the first tilt angle. Can be displayed. Further, when all the movable parts 1a to 1d are at the first tilt angle, the black plate 48 can be seen from the image display side direction, and black can be displayed.

That is, when all the movable parts 1a to 1d are at the first tilt angle, black display can be performed. When the movable portion 1a is at the second tilt angle and the movable portions 1b, 1c, 1d are at the first tilt angle, red reflective display can be performed. When the movable portion 1b is at the second tilt angle and the movable portions 1a, 1c, and 1d are at the first tilt angle, green reflective display can be performed. When the movable portion 1c is at the second tilt angle and the movable portions 1a, 1b, and 1d are at the first tilt angle, blue reflective display can be performed. When the movable portion 1d is at the second tilt angle and the movable portions 1a, 1b, and 1c are at the first tilt angle, white reflective display can be performed.

Next, elements and effects of Modification 5 according to the present embodiment will be mainly described.

In the modification 5 which concerns on this embodiment, the movable parts 1a-1d have a color reflection part. Moreover, in the modification 5 which concerns on this embodiment, the movable parts 1a-1d contain a red, green, and blue part. Moreover, the modification 5 which concerns on this embodiment is provided with a black part in the reverse direction to the image display side direction of the display element 10. FIG. Therefore, for example, if only one movable part 1a to 1c is at the first tilt angle, a configuration in which the three primary colors of reflective light can be displayed without stacking can be achieved. Moreover, it can be set as the structure which can express black, without laminating | stacking three movable parts 1a-1c.

[Modification 6]
Next, a configuration of Modification 6 according to the present embodiment will be mainly described with reference to the drawings.

FIG. 55 is a schematic overall layout diagram of the display device 100 in Modification 6 according to the embodiment of the present invention. FIG. 55 includes a regular triangular filled display element array 50 in which a plurality of regular triangular prism-shaped display elements 49 are arranged in a regular triangular filled form instead of the display element array 11 in the configuration of FIG. FIG. 56 is a three-dimensional perspective view of a regular triangular prism display element 49 of Modification 6 according to the embodiment of the present invention. Referring to FIG. 56, the equilateral triangular prism-shaped display element 49 includes movable parts 1a to 1c which are inner side parts arranged side by side on the substantially equilateral triangles, and each of the substantially equilateral triangles which are one round surrounding them. Hinges 8a to 8c are provided that are surrounded by first fixed electrodes 2a to 2c, which are outer side portions arranged side by side, and are connected to the side edges of the movable portions 1a to 1c in the image display side direction. Yes. The regular triangular prism display element 49 has a substantially triangular plate-like fixed insulating portion 51 made of a substantially triangular plate-like transparent insulating material at the bottom on the image display side, and a substantially triangular shape on the further image display side of the substantially triangular plate-like fixed insulating portion 51. A substantially triangular plate-like fixed electrode 52 made of a plate-like transparent conductive material is provided.

Next, an operation example of Modification 6 according to the present embodiment will be mainly described.

As described above, since the movable insulating portions 1a2 to 1c2 are made of a transparent insulating material of cyan, magenta, and yellow, the backlight 9 emits light when it is at the first tilt angle, thereby displaying a color as a light emitting display. In addition, two colors are stacked and the backlight 9 emits light to display red, green, and blue, and three colors are stacked to display black.

That is, when all the movable parts 1a to 1c are at the first tilt angle, the backlight is emitted, and white light emitting display can be performed. When the movable portion 1a is at the second tilt angle and the movable portions 1b and 1c are at the first tilt angle, the backlight 9 is caused to emit light so that a cyan light emitting display can be performed. When the movable portions 1a and 1b are at the second tilt angle and the movable portion 1c is at the first tilt angle, the backlight 9 is caused to emit light and blue light emitting display can be performed. When all the movable parts 1a to 1c are at the second tilt angle, black display can be performed. When the movable portions 1a and 1c are at the second tilt angle and the movable portion 1b is at the first tilt angle, the backlight 9 is caused to emit light and a green light emitting display can be performed. When the movable portion 1b is at the second tilt angle and the movable portions 1a and 1c are at the first tilt angle, the backlight 9 is caused to emit light so that magenta light-emitting display can be performed. When the movable portions 1b and 1c are at the second tilt angle and the movable portion 1a is at the first tilt angle, the backlight 9 is caused to emit light and a red light emitting display can be performed. When the movable portion 1c is at the second tilt angle and the movable portions 1a, 1b are at the first tilt angle, the backlight 9 is caused to emit light and yellow light-emitting display can be performed.

Next, elements and effects of Modification 6 according to the present embodiment will be mainly described.

In the modification 6 which concerns on this embodiment, the movable parts 1a-1c are equipped along with each side of a substantially equilateral triangle. Therefore, for example, it is not necessary to provide the movable part 1d and the hinge 8d, and the cost can be reduced.

[Modification 7]
Next, a configuration of Modification Example 7 according to the present embodiment will be mainly described with reference to the drawings.

FIG. 57 is a cross-sectional view of the display element 10 of Modification 7 and the substrate group 7 provided around the display element 10 according to the embodiment of the present invention. 57 includes mechanical hinges 53a to 53d made of a conductive material instead of the hinges 8a to 8d in the configuration of FIG. FIG. 58 is a three-dimensional perspective view of the mechanical hinges 53a to 53d, the movable portions 1a to 1d, and the second substrates 6a to 6d of Modification 7 according to the embodiment of the present invention. Referring to FIG. 58, the mechanical hinges 53a to 53d have shaft holes and are separated from the fixed portions 53a1 to 53d1 connected to the second substrates 6a to 6d and the fixed portions 53a1 to 53d1, and are rotatable in the shaft holes. Shaft bars 53a2 to 53d2 inserted and connected to the movable parts 1a to 1d are provided.

  Next, an operation example of Modification 7 according to the present embodiment will be mainly described.

When a rotational force is applied to the movable parts 1a to 1d of the mechanical hinges 53a to 53d, the shaft rods 53a2 to 53d2 rotate together with the movable parts 1a to 1d, thereby achieving a hinge effect by a so-called mechanical structure. The movable parts 1a to 1d are rotatable about the mechanical hinges 53a to 53d, respectively.

Next, elements and effects of Modification Example 7 according to the present embodiment will be mainly described.

In the modification 7 which concerns on this embodiment, the display element 10 has mechanical hinges 53a-53d. For this reason, for example, the mechanical hinges 53a to 53d have a mechanical structure, so that the elasticity is very small, and the force that cancels the holding of the tilt angles of the movable parts 1a to 1d can be made difficult.

In addition, this invention is not limited to the above embodiment, It can implement similarly also as follows.

Any part of the movable part may be colored, and for example, it may be replaced with a colored movable electrode and a transparent movable insulating part. The color may be any color, and may be replaced with, for example, purple, pink, fluorescent, metallic gloss, structural color, or any other suitable color. Further, the area where the display light is incident may be increased by changing the tilt angle rotating in any direction. For example, the area where the display light is incident is changed at least by changing the tilt angle rotating in the direction opposite to the image display side direction. It may be replaced by an increase.
Further, it may be provided at any position, and for example, it may be replaced by one provided on each side of a substantially hexagonal shape or any other appropriate position. Further, it may be any shape, and may be replaced with, for example, a substantially circular plate shape, a substantially octagonal plate shape, or any other appropriate shape. It may be anything, and may be replaced by, for example, a mirror, a dichroic mirror, a beam splitter, a long pass filter, a short pass filter, a band pass filter, or any other appropriate one. Further, any number, any combination, any number, and any number may be used.

The driving means may be any one, and may be replaced with one driven by, for example, a piezoelectric effect, compressed gas, shape memory alloy, or the like, or may be combined in whole or in part.

The first fixed electrode may be of any type, and may be replaced with, for example, a conductive material plated on the surface of an insulating material such as a resist, or any other appropriate one.

The hinge may be anything, such as a non-elastic hinge, a hinge made of an insulating material with a built-in or surface-mounted wiring, etc., or any other suitable one. .

The backlight may be any type, for example, one or more display elements that are divided into individual display elements that can be individually turned on / off or modulated in light intensity, or any other suitable one. May be.

The substrate group and the transparent substrate are optional elements and are not essential elements, and thus may not be provided, or may be anything.

DESCRIPTION OF SYMBOLS 1a: Movable part 1a1: Movable electrode 1a2: Movable insulating part 1b: Movable part 1b1: Movable electrode 1b2: Movable insulating part 1c: Movable part 1c1: Movable electrode 1c2: Movable insulating part 1d: Movable part 1d1: Movable electrode 1d2: Movable Insulating part 2a: first fixed electrode (driving means)
2b: First fixed electrode (driving means)
2c: first fixed electrode (driving means)
2d: first fixed electrode (driving means)
3: Fixed insulation part 4: 2nd fixed electrode (drive means)
5: 1st board | substrate 6a: 2nd board | substrate 6b: 2nd board | substrate 6c: 2nd board | substrate 6d: 2nd board | substrate 7: Board | substrate group 8a: Hinge 8b: Hinge 8c: Hinge 8d: Hinge 9: Backlight 10: Display element 11 : Display element array 12: transparent substrate 13: first transparent conductive layer 14: first transparent insulating layer 15: first etching mask 16: first lift-off mask 17: second transparent conductive layer 18: second transparent insulating layer 19: 1st vapor deposition mask 20: 1st conductive elastomer layer 21: 2nd etching mask 22: 2nd lift-off mask 23: 2nd conductive elastomer layer 24: 2nd vapor deposition mask 25: 1st sacrificial layer 26: 3rd transparent conductive Layer 27: first cyan transparent insulating layer 28: third etching mask 29: second sacrificial layer 30: third lift-off mask 31: fourth transparent conductive layer 32: second cyan color Transparent insulating layer 33: third sacrificial layer 34: third deposition mask 35: thick film resist layer 36: photomask 37a: movable color transparent electrode 37b: movable color transparent electrode 37c: movable color transparent electrode 37d: movable white opaque electrode 38a : Movable insulation stopper 38b: Movable insulation stopper 38c: Movable insulation stopper 38d: Movable insulation stopper 39a: Movable electromagnet 39b: Movable electromagnet 39c: Movable electromagnet 39d: Movable electromagnet 40a: First fixed permanent magnet (drive means)
40b: First fixed permanent magnet (driving means)
40c: 1st fixed permanent magnet (drive means)
40d: First fixed permanent magnet (driving means)
41: Second fixed permanent magnet (driving means)
42a: Movable permanent magnet 42b: Movable permanent magnet 42c: Movable permanent magnet 42d: Movable permanent magnet 43a: Movable color transparent part 43b: Movable color transparent part 43c: Movable color transparent part 43d: Movable white opaque part 44: Fixed transparent part 45a : Bimetal (drive means)
45b: Bimetal (driving means)
45c: Bimetal (driving means)
45d: Bimetal (driving means)
46: Fixed transparent electret (driving means)
47a: Movable color reflection insulating part 47b: Movable color reflection insulating part 47c: Movable color reflection insulating part 48: Black plate 49: Regular triangular columnar display element 50: Regular triangular filled display element array 51: Triangular plate fixed insulating part 52: Triangular plate fixed electrode 53a: mechanical hinge 53a1: fixed part 53a2: shaft bar 53b: mechanical hinge 53b1: fixed part 53b2: shaft bar 53c: mechanical hinge 53c1: fixed part 53c2: shaft bar 53d: mechanical hinge 53d1: Fixed portion 53d2: Shaft bar 100: Display device

  The present invention relates to a display device and a method for manufacturing the display device.

Conventionally, transmissive liquid crystal displays, CRT displays, FEDs, plasma displays, organic EL displays and the like are known as color light emitting display devices. A transmissive liquid crystal display mainly has a structure for modulating the presence or absence of light incident on a color filter having a fixed color. Both the CRT display and the FED have a structure that modulates whether or not electrons are incident on a phosphor having a fixed color. The plasma display mainly has a structure that modulates the presence or absence of the incidence of ultraviolet rays on a phosphor having a fixed color. An organic EL display mainly has a structure for modulating the presence or absence of light emission of a light emitting layer having a fixed color.

Therefore, both of these can display only two colors of black or other one color in the smallest one display element. For example, when three types of display elements of red, green, and blue are prepared for one pixel, for example, when expressing red, red is emitted and the other two display elements are made black to express red with one pixel. Therefore, luminance, aperture ratio, and color reproduction ability are low. The same applies to the other colors. In addition, for example, since all red, green, and blue are emitted to express white, the brightness of white is low and the contrast is low. In addition, since the three display elements are combined to form one pixel, display is performed with pixels that are three times as large as the display elements, and the resolution is low. Further, in the transmissive liquid crystal display, since a polarizing plate having a light transmittance of about 40% is used, the light utilization efficiency is low, so that the luminance is low and the number of parts is large. These display a light-emitting display.

Recently, research on color reflective display devices that perform reflective display with high visibility and low power consumption has been actively conducted. Electrophoresis method, toner migration method, twist ball method, bistable nematic liquid crystal method Etc. are known. All of these are structures that modulate the presence or absence of incident reflected light to color particles with fixed colors or color filters with fixed colors in color display.

Accordingly, both of these can display only two colors of black or another color, or white or another color in the smallest one display element. For example, when three types of display elements of red / black, green / black, and blue / black are prepared for one pixel, for example, when expressing red, red is reflected and the other two display elements are made black. Since one pixel represents red, the reflectance, aperture ratio, and color reproduction ability are low. The same applies to the other colors. In addition, for example, since all red, green, and blue are reflected to express white, the reflectance of white is low and the contrast is low. In addition, since the three display elements are combined to form one pixel, display is performed with pixels that are three times as large as the display elements, and the resolution is low. Further, in the bistable nematic liquid crystal system, since a polarizing plate having a light transmittance of about 40% is used, the light utilization rate is low, so that the reflectance is further low and the number of parts is large.

An optical interference system is also known as a color reflection type display device. This is mainly because, in color display, the reflected light is reflected by the distance between a thin film that can be modulated to a binary value with a minimum one display element fixed and the reflection film. Is a structure that modulates the light into two colors of white and color or black.

Since the wavelength of the reflected light that expresses the color is amplified, the reflectance is better than when color particles or color filters are used, but only the black or the other one color can be displayed on the smallest display element. For example, when three types of display elements of red, green, and blue are prepared for one pixel, for example, when expressing red, red is reflected and the other two display elements are made black to express red with one pixel. To do. Even if 100% reflectivity is achieved with only the red display element, the red display element has an area of only one third and a low aperture ratio, so the reflectivity is higher than one third per pixel. Cannot be achieved. Naturally the color reproduction ability is also low. The same applies to the other colors. In addition, since the three display elements are combined to form one pixel, display is performed with pixels that are three times as large as the display elements, and the resolution is low. In the reflective display device, the reflectance is substantially proportional to the area of incident external light on the display element. Therefore, the color reflective display device described above has a single color reflectance of 3 because the color of the display element is divided into three. It is limited to less than 1 / minute.

Cholesteric liquid crystal type, guest-host type liquid crystal type, ECB type liquid crystal type and the like are known as color reflection type display devices capable of displaying three or more colors in one minimum display element. These cholesteric liquid crystal systems have a helical structure composed of rod-like molecules, and modulate the display using cholesteric liquid crystals that selectively reflect visible light near a specific wavelength when the helical pitch is in the optical wavelength order. Structure. In the guest-host type liquid crystal system, the dichroic dye is dissolved in the liquid crystal that is the solvent, the liquid crystal molecular orientation is controlled by the electric field, and the orientation direction of the dye molecules is changed at the same time, and the anisotropy of the extinction coefficient in the dichroic dye This is a structure that modulates the display by using. The ECB type liquid crystal system has a structure in which the retardation is changed by a voltage applied to liquid crystal molecules and the display color is modulated by a birefringence effect in combination with a retardation film.

However, in the cholesteric liquid crystal type and the guest-host type liquid crystal type, in order to display full color, it is necessary to laminate three monochromatic liquid crystal layers, resulting in low reflectance. In addition, since the ECB type liquid crystal system uses a polarizing plate having a light transmittance of about 40%, the reflectance is low and the number of parts is large. In the reflective display device, since the display light amount depends on the external light amount, the low reflectance as described above is a very big problem.

On the other hand, a mechanical matrix system is known as a color reflection type display device that can display three or more colors in one minimum display element and has a high reflectance. This is a structure in which one pixel is mainly composed of a cube having a side of several centimeters, and four colors are given to the four surfaces, and the other two surfaces are rotated as axes. In addition, the method disclosed in Japanese Patent Laid-Open No. 56-150786 (erasure of rights) is also known, in which pixels are formed in pellets (plates) instead of cubes, a plurality of pellets of multiple colors are stacked, and these are stepped. It is a structure that displays four or more colors by making the screen overlapped. However, these are all said to be unsuitable for downsizing due to their complicated structures, and are mainly intended for large display boards such as billboards and bulletin boards in plazas.

A movable film system shown in Patent Document 1 is known as a reflective display device that can be miniaturized and can display three or more colors in one minimum display element and has high reflectance. This mainly has a white fixing part, a cyan, magenta, and yellow color film that can be inserted into and withdrawn from the white fixing part, and a support in a cantilever state that supports the color film perpendicular to the surface of the color film. The color film is driven so as to be exposed or hidden from the white fixing portion by bending the support.

The movable film system can be miniaturized and can display white, black, cyan, magenta, yellow, red, blue, and green on the smallest single display element, and reflectivity, aperture ratio, and color reproduction in white and color. High ability and high contrast. In addition, the resolution may be higher than that of a single pixel composed of a plurality of display elements. However, in order to bend the support to facilitate driving the film, it is necessary to make the support 10 to 100 times as long as one display element. As a result, the support becomes thicker perpendicular to the display screen, making it difficult to reduce the thickness. is there. Therefore, it does not have a flat shape and is difficult to be integrated and manufactured.

On the other hand, the method shown in Patent Document 1 (14th and 15th paragraphs, FIG. 32) can be thinned. In this method, a movable part with electrodes is moved between a fixed electrode and an electrostatic force by an electrostatic force so that two colors can be displayed. In other words, different colors are applied to the front and back of the movable part, and colors are also applied to the fixed electrodes, and two colors are displayed by moving the movable part. One side of the movable part and one of the fixed electrodes may be mirrored with an aluminum thin film.

With this method, only the length of the fixed electrode or the movable portion of one display element becomes thicker perpendicular to the display screen, so that the thickness can be reduced. However, this method can display only three colors by using two colors or two movable parts in one minimum display element. For example, when one type of display element capable of displaying three colors of red / green / blue is prepared, white and black cannot be displayed and the contrast is extremely low.

As another example, when three types of display elements capable of displaying three colors of red / white / black, green / white / black, and blue / white / black are prepared in one pixel, red, green, and blue are displayed. Although it is possible to express, for example, when expressing red, the red is reflected and the other two display elements are made white or black to express red with one pixel, so the aperture ratio and the color reproduction ability are low. The same applies to green and blue. Further, when displaying the above color, one pixel is formed by combining the three display elements, so that the display is performed with pixels three times as large as the display elements, and the resolution is low. In this case, since three types of display elements are prepared, the manufacturing process is complicated accordingly.

JP-A-8-271933 (14th and 15th paragraphs, FIG. 32)

Sort out the above problems. Conventional color light emitting display devices have low luminance, aperture ratio, color reproduction capability, contrast, and resolution. In the case of a transmissive liquid crystal display, since the light use efficiency is low, the luminance is low and the number of parts is large. In a color reflective display device, a method using color particles or a color filter has low reflectance, aperture ratio, color reproduction capability, contrast, and resolution. The bistable nematic liquid crystal system has a lower reflectivity and a higher number of parts due to its lower light utilization efficiency. The light interference method has low reflectivity, aperture ratio, color reproduction capability, and resolution. In the cholesteric liquid crystal system, guest-host liquid crystal system, and ECB liquid crystal system, the reflectance is low. Further, the ECB type liquid crystal system has a lower light utilization rate and a larger number of parts.
The mechanical matrix method and the method disclosed in Japanese Patent Application Laid-Open No. 56-150786 are not suitable for downsizing. In the movable film system, it is difficult to reduce the thickness, and it is difficult to integrate and manufacture. In the method of Patent Document 1 (14th, 15th paragraph, FIG. 32), one display element cannot display four or more colors, and white and black cannot be displayed, and the contrast is extremely low, or the aperture ratio or color Either the reproducibility or resolution is low and the manufacturing process is complicated.

The present invention has been devised in view of the above-described problems, and is a color light emitting display with high luminance, aperture ratio, color reproduction capability, contrast, resolution, and light utilization efficiency, or reflectance, aperture. High color rate, color reproducibility, contrast, resolution, light utilization efficiency, and any color reflective display that can display 4 colors or more on a single display element is possible. An object of the present invention is to provide a display device that can be easily manufactured, integrated and manufactured, and has a simple manufacturing process.

Still another object of the present invention is to provide a display device with simple wiring.

In order to achieve the above object, the present invention is a display device including a display screen in which a plurality of display elements are arranged, and each display element modulates an area on which display light is incident according to a change in tilt angle. A plurality of movable parts each having movable electrodes that reflect or absorb the display light in different wavelength bands provided in at least three directions parallel to the display screen, and are arranged in different layers at least parallel to the display screen. A plurality of first fixed electrodes each provided in three or more directions parallel to the display screen, at least a transparent second fixed electrode provided at least in the image display side direction, and the movable Driving means capable of modulating the tilt angle by rotating the part, and modulating the area where the display light is incident on the movable part by the driving means to the movable part Morphism or a wavelength band of the absorbed causes the display light is modulated, characterized in that to modulate the display.

Further, the present invention is characterized in that the movable part is formed by etching, lift-off or mask vapor deposition.

Here, display light means light for display. For example, it includes outside light and backlight light.

Therefore, according to the first aspect of the present invention, since the display device can perform display by the light reflected from the display light or the light not absorbed in the display light, the driving means is movable. The display can be modulated by modulating the wavelength band of the display light reflected or absorbed by the part.

At this time, since the area where the display light is incident on the movable part is modulated by modulating the tilt angle, for example, the incidence of the display light on the movable part is decreased to increase the incidence of the display light on another movable part. Since it is possible to select which movable portion the display light is incident on, it is possible to provide a configuration in which many colors can be displayed with the smallest one display element.

Moreover, since each said display element has the said movable part prepared in three or more directions, the said movable part can be provided on the edge | side of the two-dimensional figure of phase dimension 2, for example, and space can be used efficiently. Since many movable parts can be provided, a configuration capable of displaying many colors in the smallest one display element can be obtained. Further, for example, since the smallest one display element can be provided with three or more movable parts, it is possible to provide a configuration capable of displaying many colors in the smallest one display element.

Further, since the driving means can modulate the tilt angle by rotating the movable part, for example, the movable part can be provided in a small space, and a large number of the movable parts can be provided in one minimum display element. Since it can be provided, a structure capable of displaying many colors in the smallest one display element can be obtained. For example, since the movable part can be provided in a small space, it can be configured so as not to be thickly perpendicular to the display screen. Further, for example, since it is rotated, a simple configuration can be achieved.

In addition, since the first fixed electrode is connected to wiring disposed at a different layer parallel to at least the display screen, the first fixed electrode can include at least wiring disposed at a different layer parallel to the display screen.

As described above, the display device according to the present invention can be configured to display a large number of colors with a minimum of one display element, so that luminance, aperture ratio, color reproduction capability, contrast, resolution, and light utilization efficiency are achieved. High color light emitting display or high reflectance, aperture ratio, color reproducibility, contrast, resolution, light use efficiency, and color reflective display that can display 4 colors or more in one display element. Thus, the number of parts is small and the manufacturing process can be simplified. In addition, since the configuration can be simple, the configuration can be easily reduced in size. In addition, since it can be configured so as not to be thick perpendicular to the display screen, it can be easily reduced in thickness and can be easily integrated and manufactured. In addition, since the wiring includes at least wirings that are parallel to the display screen and arranged in different layers, the wirings can be made simple.

3 is a three-dimensional perspective view of the display element 10. FIG. FIG. 3 is a three-dimensional perspective separation perspective view of the display element 10. 4 is a front perspective view of the display element 10 and the substrate group 7 provided around the display element 10 from the image display side direction. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 1 is a schematic overall layout diagram of a display device 100 according to an embodiment of the present invention. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 4 is a cross-sectional view of the display element 10 and a substrate group 7 provided around the display element 10. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. 3 is a three-dimensional perspective view of movable parts 1a to 1d, first fixed electrodes 2a to 2d, fixed insulating part 3 and second fixed electrode 4. FIG. It is sectional drawing which showed the process of manufacturing the fixed insulation part 3 and the 2nd fixed electrode 4 by an etching. It is sectional drawing which showed the process of manufacturing the fixed insulation part 3 and the 2nd fixed electrode 4 by lift-off. It is sectional drawing which showed the process of manufacturing the fixed insulation part 3 and the 2nd fixed electrode 4 by mask vapor deposition. It is sectional drawing which showed the process of manufacturing hinge 8a by an etching. It is sectional drawing which showed the process of manufacturing hinge 8a by lift-off. It is sectional drawing which showed the process of manufacturing hinge 8a by mask vapor deposition. It is sectional drawing which showed the process of manufacturing movable electrode 1a1 and movable insulation part 1a2 by an etching. It is sectional drawing which showed the process of manufacturing movable electrode 1a1 and movable insulation part 1a2 by lift-off. It is sectional drawing which showed the process of manufacturing movable electrode 1a1 and movable insulation part 1a2 by mask vapor deposition. It is sectional drawing which showed the process of manufacturing a casting_mold | template with a photoresist. It is sectional drawing which showed the process of manufacturing 1st fixed electrode 2a-2d by plating. It is a three-dimensional perspective separation perspective view of the display element 10 of Modification 1 according to the embodiment of the present invention. It is sectional drawing of the board | substrate group provided around the display element 10 of the modification 1 which concerns on embodiment of this invention, and the display element 10. FIG. It is sectional drawing of the board | substrate group provided around the display element 10 of the modification 1 which concerns on embodiment of this invention, and the display element 10. FIG. It is a three-dimensional perspective separation perspective view of the display element 10 of Modification 2 according to the embodiment of the present invention. It is sectional drawing of the board | substrate group 7 with which the display element 10 of the modification 2 which concerns on embodiment of this invention, and the display element 10 was equipped. It is sectional drawing of the board | substrate group 7 with which the display element 10 of the modification 3 which concerns on embodiment of this invention, and the display element 10 was equipped. It is sectional drawing of the board | substrate group 7 with which the display element 10 of the modification 4 which concerns on embodiment of this invention, and the display element 10 was equipped. It is a general | schematic whole layout figure of the display apparatus 100 in the modification 5 which concerns on embodiment of this invention. It is sectional drawing of the board | substrate group 7 with which the display element 10 of the modification 5 which concerns on embodiment of this invention, and the display element 10 was equipped. It is a schematic whole layout figure of the display apparatus 100 in the modification 6 which concerns on embodiment of this invention. It is a three-dimensional perspective view of a regular triangular prism display element 49 of Modification 6 according to the embodiment of the present invention. It is sectional drawing of the board | substrate group 7 with which the display element 10 of the modification 7 which concerns on embodiment of this invention, and the display element 10 was equipped. It is a three-dimensional see-through perspective view of hinge mechanisms 53a to 53d, movable parts 1a to 1d, and second substrates 6a to 6d of Modification 7 according to the embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to the following description, and it will be easily understood by those skilled in the art that modes and details can be variously changed without departing from the spirit and scope of the present invention. Therefore, the present invention should not be construed as being limited to the description of the embodiments below. Note that in the structure of the present invention described below, the same portions or portions having similar functions are denoted by the same reference numerals in different drawings, and description thereof is not repeated. In all of the drawings, the solid arrow indicates the image display side of the display device according to the present invention.

Hereinafter, the configuration of the present embodiment will be described with reference to FIGS.

FIG. 5 is a schematic overall layout diagram of the display device 100 according to the embodiment of the present invention. Referring to FIG. 5, the display device 100 according to the present invention includes a transparent substrate 12 and a display in which a plurality of substantially square columnar display elements 10 formed on the opposite side of the image display side of the transparent substrate 12 are arranged in a matrix. The element array 11, the substrate group 7 that is stacked on the image display side to fill the gap between the display elements 10, and the light intensity that emits white light formed on the opposite side of the image display side of the display element array 11 can be modulated. And a backlight 9.

FIG. 1 is a three-dimensional perspective view of the display element 10. FIG. 2 is a three-dimensional perspective separation perspective view of the display element 10. Referring to FIGS. 1 and 2, the display element 10 includes movable portions 1a to 1d which are inner side portions arranged side by side on substantially square sides, and each side of a substantially square that is slightly larger than the movable portions 1a to 1d. The outer side portion arranged side by side is surrounded by first fixed electrodes 2a to 2d made of a conductive material, and is made of an elastomer material connected to the side edges of the movable portions 1a to 1d in the image display side direction. The hinges 8a to 8d are provided. The hinges 8a to 8d may be made of either a conductive elastomer material or an insulating elastomer material. The display element 10 includes a fixed insulating portion 3 made of a substantially square plate-like transparent insulating material at the bottom on the image display side, and a substantially square plate-like transparent conductive material on the image display side of the fixed insulating portion 3. The second fixed electrode 4 is provided.

FIG. 3 is a front perspective view of the display element 10 and the substrate group 7 provided around the display element 10 from the image display side direction. FIG. 4 is a cross-sectional view of the display element 10 and the substrate group 7 provided around the display element 10. 4 is a cross-sectional view as viewed from the direction of the arrow of dashed-dotted line I to I in FIG. 3, and FIG. 4 of FIG. 4 is a cross-sectional view as viewed from the direction of the arrow of dashed-dotted line II to II in FIG. Yes. Referring to FIG. 4, the substrate group 7 includes a first substrate 5 and second substrates 6a to 6d that are sequentially stacked from the image display side. The fixed insulating portion 3 and the second fixed electrode 4 are connected to the first substrate 5, and the second fixed electrode 4 is powered by a wiring (not shown) built in the first substrate 5 or disposed on the surface. (Not shown). The movable parts 1a to 1d are transparent electrodes of cyan, magenta and yellow which are provided on the movable electrodes 1a1 to 1d1 made of a transparent conductive material and the first fixed electrodes 2a to 2d of the movable electrodes 1a1 to 1d1. Movable insulating portions 1a2 to 1d2 made of a conductive material and a white opaque insulating material. The movable electrodes 1a1 to 1d1 and the movable insulating portions 1a2 to 1d2 are connected to the second substrates 6a to 6d by hinges 8a to 8d. The movable electrodes 1a1 to 1d1 are embedded in hinges 8a to 8d made of a conductive elastomer material or hinges 8a to 8d made of an insulating elastomer material (not shown) and arranged on the surface, and second substrates 6a to 6d. 6d is electrically connected to a power source by wiring (not shown) built in or disposed on the surface. The first fixed electrodes 2a to 2d are electrically connected to a power source by wiring (not shown) built in the second substrates 6a to 6d or disposed on the surface.

The movable portions 1a to 1d are in a so-called cantilever state that can rotate at least perpendicularly or at least parallel to the display screen with the hinges 8a to 8d, which are fixed bases, as rotation axes. The movable portions 1a to 1d are provided on at least four sides parallel to the display screen of the display element 10, and the wide area surface is rotatable to an inclination angle perpendicular to the display screen. This is expressed as the inclination angle of. Further, the movable portions 1a to 1d rotate in the image display side direction from the first tilt angle, so that the wide surface provided on the bottom of the image display side of the display element 10 can be rotated to an tilt angle parallel to the display screen. This inclination angle is expressed as a second inclination angle. In the movable portions 1a to 1d, the display light incident area decreases at the first tilt angle, and the display light incident area increases at the second tilt angle.

The first fixed electrodes 2a to 2d, the second fixed electrode 4 and the like correspond to the driving means in the embodiment of the present invention.

Hereinafter, the operation of this embodiment configured as described above will be described with reference to FIGS. 1 and 6 to 34.

First, an operation example of the movable parts 1a to 1d of the present embodiment will be described with reference to the drawings.

21, 22, and 23 are three-dimensional perspective views of the movable portions 1 a to 1 d and the first fixed electrodes 2 a to 2 d, the fixed insulating portion 3, and the second fixed electrode 4. 9 and 6 are sectional views of the display element 10 and the substrate group 7 provided around the display element 10. FIG. 9, FIG. Ia, FIG. Iab, FIG. Iabc and FIG. 6 are cut planes as viewed from the direction of the arrows of the dashed line I to I in FIG. The cut surface seen from the direction of the arrow of dashed-dotted line II to II in FIG. 3 is shown.

First, as an example, an operation for holding the movable portion 1a at the first tilt angle will be described. 1, FIG. I, and FIG. II show when all the movable parts 1a to 1d are at the first tilt angle. At this time, for example, if a voltage of opposite polarity is continuously applied sufficiently to the movable electrode 1a1 and the first fixed electrode 2a, the capacitor is interposed between the movable electrode 1a1 and the first fixed electrode 2a with the movable insulating portion 1a2 interposed therebetween. Therefore, the movable portion 1a can maintain the first tilt angle even if the application of the voltage is stopped thereafter.

Here believed movable electrode 1a1 faces the first fixed electrodes 2a length c, the width l, the thickness of the movable insulating portion 1a2 a, the voltage of the movable electrode 1a1 _{v 1,} the first fixed electrode 2a When the voltage is v ₂ and the dielectric constant of the movable insulating portion 1a2 is ε ₁ , the holding force F ₁ by the capacitor at this time can be obtained by Equation 1.

Next, the operation | movement which rotates the movable part 1a from a 1st inclination angle to a 2nd inclination angle as an example is demonstrated. At this time, for example, if a voltage having the same polarity is applied from the power source to the movable electrode 1a1 and the first fixed electrode 2a and a voltage having the opposite polarity to the movable electrode 1a1 is applied to the second fixed electrode 4, the movable portion 1a is A repulsive force is generated in the first fixed electrode 2a, and an attractive force is generated in the movable portion 1a and the second fixed electrode 4. Then, the hinge 8a is bent by elastic deformation, and the movable portion 1a can rotate toward the image display side with the hinge 8a as a rotation axis, approach the second fixed electrode 4, and rotate to the second tilt angle.

FIG. 6 shows the time when the movable portion 1a is in the middle of the first tilt angle and the second tilt angle. Here, a capacitor formed by the movable electrode 1a1 and the second fixed electrode 4 is considered. Here, the distance from the hinge 8a of the movable electrode 1a1 facing the second fixed electrode 4 is x, the width is l, the thickness of the fixed insulating part 3 is b, the dielectric constant in air is ε ₀ , and the fixed insulating part 3 Is the dielectric constant ε ₂ , the angle between the movable portion 1a and the first fixed electrode 2a is θ, the deflection amount of the hinge 8a bent by elastic deformation, that is, the shortest distance between the movable electrode 1a1 and the fixed insulating portion 3 is d ₁ . To do. Here, if dx is a minute distance, the capacitance C ₁ (x) dx of the minute capacitor from x to x + dx is obtained by Equation 2.

Here, assuming that the movable electrode 1a1 has a length c and is opposed to the second fixed electrode 4, the voltage of the movable electrode 1a1 is v ₃ , and the voltage of the second fixed electrode 4 is v ₄ . 2 The electrostatic energy W ₁ of the capacitor formed by the fixed electrode 4 is obtained by Equation 3.

Therefore, the torque T ₁ (θ) per θ of the movable portion 1a generated by the capacitor formed by the movable electrode 1a1 and the second fixed electrode 4 is obtained by Equation 4.

Next, the operation | movement which hold | maintains the movable part 1a to a 2nd inclination angle as an example is demonstrated. FIGS. 21, Ia, and IIa illustrate the case where the movable portion 1a is at the second inclination angle and the movable portions 1b, 1c, and 1d are at the first inclination angle. At this time, for example, if a voltage having a reverse polarity is continuously applied to the movable electrode 1a1 and the second fixed electrode 4, the capacitor is interposed between the movable electrode 1a1 and the second fixed electrode 4 with the fixed insulating portion 3 interposed therebetween. Therefore, the movable portion 1a can maintain the second tilt angle even if the application of the voltage is stopped thereafter.

Here, assuming that the movable electrode 1a1 has a length c and a width l and is opposed to the second fixed electrode 4, the voltage of the movable electrode 1a1 is v ₅ , and the voltage of the second fixed electrode 4 is v _{6. 5} and the voltage v ₃ are preferably of the same polarity, and the holding force F ₂ by the capacitor at this time is obtained by Equation 5.

Next, as an example, an operation for rotating the movable portion 1a from the second tilt angle to the first tilt angle will be described. At this time, for example, if a voltage having the opposite polarity is applied from the power source to the movable electrode 1a1 and the first fixed electrode 2a and a voltage having the same polarity as the movable electrode 1a1 is applied to the second fixed electrode 4, the movable portion 1a is An attractive force is generated in the first fixed electrode 2a, and a repulsive force is generated in the movable portion 1a and the second fixed electrode 4. Then, the hinge 8a bends due to elastic deformation, and the movable portion 1a can rotate in the direction parallel to the display screen with the hinge 8a as a rotation axis to approach the first fixed electrode 2a and rotate to the first tilt angle. .

Here, a capacitor formed by the movable electrode 1a1 and the first fixed electrode 2a is considered. Here, the distance from the hinge 8a of the movable electrode 1a1 facing the second fixed electrode 4 is x, the width is 1, and the deflection amount of the hinge 8a bent by elastic deformation, that is, the first fixed electrode 2a and the movable insulating portion 1a2. And d ₂ is the shortest distance between and. Here, if dx is a minute distance, the capacitance C ₂ (x) dx of the minute capacitor from x to x + dx is obtained by Equation 6.

Here, assuming that the movable electrode 1a1 has a length c and is opposed to the first fixed electrode 2a, and the voltage of the movable electrode 1a1 is v ₇ and the voltage of the first fixed electrode 2a is v ₈ , the movable electrode 1a1 and the first fixed electrode 2a The electrostatic energy W ₂ of the capacitor formed by one fixed electrode 2 a is obtained by Equation 7.

Therefore, the torque T ₂ (θ) per θ of the movable portion 1a generated by the capacitor formed by the movable electrode 1a1 and the first fixed electrode 2a is obtained by Expression 8.

Next, as an example, the operation of laminating the movable portion 1b to the second tilt angle when the movable portion 1a is already at the second tilt angle will be described. FIGS. 21, Ia, and IIa illustrate the case where the movable portion 1a is at the second inclination angle and the movable portions 1b, 1c, and 1d are at the first inclination angle. At this time, for example, if a voltage having the same polarity is applied from the power source to the movable electrode 1b1 and the first fixed electrode 2b and a voltage having a polarity opposite to that of the movable electrode 1b1 is applied to the movable electrode 1a1, A repulsive force is generated in the fixed electrode 2b, and an attractive force is generated in the movable portion 1b and the movable electrode 1a1. Then, the hinge 8b is bent due to elastic deformation, and the movable portion 1b can rotate toward the image display side with the hinge 8b as a rotation axis to approach the movable portion 1a and rotate to the second tilt angle. In this case it is desirable that the voltage v ₁ applied to the movable electrode 1a1 in order to hold the voltage and the movable portion 1a to be applied to the movable electrode 1b1 to second inclination angle was in the opposite polarity.

Next, as an example, an operation will be described in which the movable portion 1b also holds the stack at the second tilt angle when the movable portion 1a is already at the second tilt angle. FIGS. 22, Iab, and IIab show the cases where the movable parts 1a and 1b are at the second inclination angle and the movable parts 1c and 1d are at the first inclination angle. At this time, for example, if a voltage of opposite polarity is continuously applied sufficiently to the movable electrode 1b1 and the movable electrode 1a1, a capacitor is formed between the movable electrode 1b1 and the movable electrode 1a1 with the movable insulating portion 1a2 interposed therebetween. After that, even if the voltage application is stopped, the movable portion 1b can maintain the second tilt angle. At this time, it is desirable that the voltage applied to the movable electrode 1b1 and the voltage applied to the movable electrode 1b1 to rotate and move the movable portion 1b to the second tilt angle have the same polarity.

Next, an operation for resetting the stacking of the movable part 1b from the second inclination angle to the first inclination angle when the movable part 1a is already at the second inclination angle will be described as an example. At this time, for example, if a voltage having the opposite polarity is applied from the power source to the movable electrode 1b1 and the first fixed electrode 2b and a voltage having the same polarity as the movable electrode 1b1 is applied to the movable electrode 1a1, An attractive force is generated in the fixed electrode 2b, and a repulsive force is generated in the movable portion 1b and the movable electrode 1a1. Then, the hinge 8b bends due to elastic deformation, and the movable portion 1b can rotate in the direction parallel to the display screen with the hinge 8b as a rotation axis to approach the first fixed electrode 2b and rotate to the first tilt angle. . At this time, it is desirable that the voltage applied to the movable electrode 1b1 and the voltage applied to the movable electrode 1b1 in order to hold the stack of the movable portion 1b at the second tilt angle are opposite in polarity.

Next, as an example, the operation of laminating the movable part 1c to the second tilt angle when the movable part 1a and the movable part 1b are already at the second tilt angle will be described. FIGS. 22, Iab, and IIab show the cases where the movable parts 1a and 1b are at the second inclination angle and the movable parts 1c and 1d are at the first inclination angle. At this time, for example, if a voltage having the same polarity is applied from the power source to the movable electrode 1c1 and the first fixed electrode 2c and a voltage having a polarity opposite to that of the movable electrode 1c1 is applied to the movable electrode 1b1, A repulsive force is generated in the fixed electrode 2c, and an attractive force is generated in the movable portion 1c and the movable electrode 1b1. Then, the hinge 8c bends due to elastic deformation, and the movable portion 1c can rotate toward the image display side with the hinge 8c as a rotation axis to approach the movable portion 1b and rotate to the second tilt angle. At this time, it is desirable that the voltage applied to the movable electrode 1c1 and the voltage applied to the movable electrode 1b1 in order to hold the stack of the movable portion 1b at the second tilt angle are opposite in polarity.

Next, as an example, an operation will be described in which the movable portion 1c also holds the stack at the second tilt angle when the movable portion 1a and the movable portion 1b are already at the second tilt angle. 23, Iabc, and IIabc illustrate the cases where the movable portions 1a, 1b, and 1c are at the second tilt angle and the movable portion 1d is at the first tilt angle. At this time, for example, if a voltage of opposite polarity is continuously applied to the movable electrode 1c1 and the movable electrode 1b1, a capacitor is formed between the movable electrode 1c1 and the movable electrode 1b1 across the movable insulating portion 1b2. After that, even if the voltage application is stopped, the movable portion 1c can maintain the second tilt angle. At this time, it is desirable that the voltage applied to the movable electrode 1c1 and the voltage applied to the movable electrode 1c1 to rotate and move the movable portion 1c to the second tilt angle have the same polarity.

Next, an operation for resetting the stacking of the movable portion 1c from the second inclination angle to the first inclination angle when the movable portion 1a and the movable portion 1b are already at the second inclination angle will be described as an example. At this time, for example, if a voltage having opposite polarity is applied from the power source to the movable electrode 1c1 and the first fixed electrode 2c and a voltage having the same polarity as that of the movable electrode 1c1 is applied to the movable electrode 1b1, the movable portion 1c and the first An attractive force is generated in the fixed electrode 2c, and a repulsive force is generated in the movable portion 1c and the movable electrode 1b1. Then, the hinge 8c bends due to elastic deformation, and the movable portion 1c can rotate in the direction parallel to the display screen with the hinge 8c as a rotation axis to approach the first fixed electrode 2c and rotate to the first tilt angle. . At this time, it is desirable that the voltage applied to the movable electrode 1c1 and the voltage applied to the movable electrode 1c1 in order to keep the movable portion 1c stacked at the second tilt angle are opposite in polarity.

That is, when the movable parts 1a to 1d are at the first inclination angle, the movable parts 1a to 1d are sufficiently applied if voltages having opposite polarities are continuously applied to the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d. Can hold the first tilt angle. When the movable portions 1a to 1d are at the first tilt angle, voltages having the same polarity are applied to the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d, and the electrodes on the image display side are opposite to the movable electrodes 1a1 to 1d1. If the voltage of the polarity of is applied, the movable parts 1a to 1d can rotate to the second tilt angle. Further, when the movable parts 1a to 1d are at the second inclination angle, the movable parts 1a to 1d are in the first state if a voltage having the opposite polarity is continuously applied to the movable electrodes 1a1 to 1d1 and the electrode on the image display side. 2 tilt angles can be maintained. In addition, when the movable portions 1a to 1d are at the second tilt angle, voltages having the same polarity are applied to the movable electrodes 1a1 to 1d1 and the electrodes on the image display side, and the first fixed electrodes 2a to 2d have opposite polarities to the movable electrodes. When a voltage is applied, the movable parts 1a to 1d can rotate to the first tilt angle.

That is, the movable portion 1a can be rotated to the first or second inclination angle by the change of the electrostatic force by changing the polarity of the voltage applied to the movable electrode 1a1, the first fixed electrode 2a, and the second fixed electrode 4, and held. The movable electrodes 1a1 to 1d1, the first fixed electrodes 2a to 2d, and the movable portions 1a to 1d having the same structure can be shared in common.

The operation of rotating to the first tilt angle and the operation of resetting the stacking are desirably performed after resetting the stacking of the movable portions 1b to 1d stacked later.

In the above holding operation, when the holding power is weakened due to the electrical energy loss of the capacitor over time, an additional voltage may be applied.

24 to 34 are three-dimensional perspective views of the movable parts 1a to 1d, the first fixed electrodes 2a to 2d, the fixed insulating part 3, and the second fixed electrode 4. FIG. 7 to 8 and FIGS. 10 to 20 are sectional views of the display element 10 and the substrate group 7 provided around the display element 10. 10 to 20, Iabd, Iac, Iacd, Iad, Ib, Ibc, Ibcd, Ibd, Ic, Icd, and Id are the directions of the dashed line I to I in FIG. The cut surface seen from FIG. 7 to 8 and FIGS. 10 to 20 are taken along the alternate long and short dash line in FIG. 3. FIG. IIabd, FIG. IIac, FIG. IIacd, FIG. IIad, IIb, IIbc, IIbcd, IIbd, IIc, IIcd, and IId The cut surface seen from the arrow direction from II to II is shown. 7 to 20 sequentially show how the movable parts 1a to 1d are rotated or stacked at the second tilt angle, and the same reference numerals indicate the same state.

The display element 10 can achieve the following states by way of example in the same manner as the above operation. FIGS. 24, Iabd, and IIabd show the cases where the movable portions 1a, 1b, and 1d are at the second tilt angle and the movable portion 1c is at the first tilt angle. 25, Iac, and IIac show the cases where the movable parts 1a and 1c are at the second inclination angle and the movable parts 1b and 1d are at the first inclination angle. 26, Iacd, and IIacd show the movable portions 1a, 1c, and 1d at the second tilt angle and the movable portion 1b at the first tilt angle. 27, Iad, and IIad show the cases where the movable parts 1a and 1d are at the second inclination angle and the movable parts 1b and 1c are at the first inclination angle. 28, Ib, and IIb show the case where the movable portion 1b is at the second inclination angle and the movable portions 1a, 1c, and 1d are at the first inclination angle. 29, Ibc, and IIbc show the cases where the movable portions 1b and 1c are at the second inclination angle and the movable portions 1a and 1d are at the first inclination angle. FIGS. 30, Ibcd, and IIbcd show the movable portions 1b, 1c, and 1d at the second tilt angle and the movable portion 1a at the first tilt angle. FIG. 31, FIG. Ibd, and FIG. IIbd show the cases where the movable parts 1b and 1d are at the second inclination angle and the movable parts 1a and 1c are at the first inclination angle. 32, Ic, and IIc show the case where the movable portion 1c is at the second inclination angle and the movable portions 1a, 1b, and 1d are at the first inclination angle. FIGS. 33, Icd, and IIcd show the movable portions 1c and 1d at the second tilt angle and the movable portions 1a and 1b at the first tilt angle. 34, Id, and IId show the case where the movable portion 1d is at the second inclination angle and the movable portions 1a, 1b, and 1c are at the first inclination angle.

Next, an example of the optical operation of this embodiment will be mainly described.

As described above, since the movable insulating portions 1a2 to 1c2 are made of a transparent insulating material of cyan, magenta, and yellow, the color can be displayed when the second inclination angle is reached, and the red color is obtained by stacking the two colors. Green blue can be displayed, and black can be displayed by stacking three colors. Further, in a display other than black, a light-emitting display can be performed by causing the backlight 9 to emit light, and a reflective display can be performed when the movable insulating portion 1d2 is made of a white opaque insulating material at a second tilt angle.

That is, when all the movable parts 1a to 1d are at the first tilt angle, the backlight is caused to emit light and white light emitting display can be performed. When the movable portion 1a is at the second tilt angle and the movable portions 1b, 1c, and 1d are at the first tilt angle, the backlight 9 is caused to emit light so that a cyan light emitting display can be performed. When the movable portions 1a and 1b are at the second tilt angle and the movable portions 1c and 1d are at the first tilt angle, the backlight 9 is caused to emit light and blue light emitting display can be performed. When the movable parts 1a, 1b and 1c are at the second inclination angle and the movable part 1d is at the first inclination angle, black display can be performed. When the movable portions 1a, 1b, and 1d are at the second tilt angle and the movable portion 1c is at the first tilt angle, blue reflective display can be performed. When the movable portions 1a and 1c are at the second tilt angle and the movable portions 1b and 1d are at the first tilt angle, the backlight 9 is caused to emit light and a green light emitting display can be performed. When the movable portions 1a, 1c, and 1d are at the second tilt angle and the movable portion 1b is at the first tilt angle, green reflective display can be performed. When the movable parts 1a and 1d are at the second inclination angle and the movable parts 1b and 1c are at the first inclination angle, cyan reflective display can be performed. When the movable portion 1b is at the second tilt angle and the movable portions 1a, 1c, and 1d are at the first tilt angle, the backlight 9 is caused to emit light so that a magenta light-emitting display can be performed. When the movable portions 1b and 1c are at the second tilt angle and the movable portions 1a and 1d are at the first tilt angle, the backlight 9 is caused to emit light and a red light emitting display can be performed. When the movable portions 1b, 1c, and 1d are at the second tilt angle and the movable portion 1a is at the first tilt angle, a red reflective display can be performed. When the movable portions 1b and 1d are at the second tilt angle and the movable portions 1a and 1c are at the first tilt angle, a magenta reflective display can be performed. When the movable portion 1c is at the second tilt angle and the movable portions 1a, 1b, and 1d are at the first tilt angle, the backlight 9 is caused to emit light and a yellow light emitting display can be performed. When the movable portions 1c and 1d are at the second tilt angle and the movable portions 1a and 1b are at the first tilt angle, a yellow reflective display can be performed. When the movable portion 1d is at the second tilt angle and the movable portions 1a, 1b, and 1c are at the first tilt angle, white reflective display can be performed.

In all the above light emitting displays, the light intensity can be modulated by modulating the light intensity of the backlight 9.

Hereinafter, the example of the material of this embodiment is demonstrated.

Examples of transparent conductive materials such as the movable electrodes 1a1 to 1d1 and the second fixed electrode 4 include Sn such as In oxide (ITO) doped with Sn oxide, Sn oxide (FTO) doped with F, etc. In view of low resistance, Zn oxide doped with Al oxide (AZO) or the like can easily form a transparent conductive film with good optical characteristics and electrical characteristics by a vacuum film forming method. Preferably, other materials include Zn oxide doped with Ga (GZO), oxides of Ti, Mo, W, Ce, Zr, Mg hydroxide, conductive polymers, etc., or modifications of these materials or these materials. Although the material which combined 1 type or multiple types can also be used, it is not limited to these.

Examples of conductive materials that do not need to be transparent, such as the first fixed electrodes 2a to 2d, include simple metals such as Al, Cu, Au, Ag, Ni, Cr, Fe, Mo, Ti, W, Ta, or alloys. Are preferable from the viewpoint of electrical conductivity, workability, etc., and other materials include Sn, Pd, Co, Pt, ITO, Si, Ru, Rh, Re, Os, Hf, Ir, Nb, other metals, alloys, Phosphorus alloy, SnAg, SnAgCu, CoWP, CoWB, CoWBP, NiP, AuCu, silicide, graphite, stainless steel, conductive polymer, solder material, conductive oxide or semiconductor oxide or Ru oxide, Ir oxide, Rh oxidation Conductive materials or semiconductor materials selected from the group consisting of mixed oxides such as oxides, Ti oxides, or mixtures of the above metal oxides such as Ta oxides, or Serial material combining one or more of the transparent conductive material like materials, etc., or these variants or these materials can also be used but not limited thereto.

When an insulating elastomer material is used as the elastomer material such as the hinges 8a to 8d, for example, polyester resin, polyamide resin, acrylic resin, polyurethane resin, ethylene-vinyl acetate resin, ethylene-ethyl acrylate resin, polyimide resin, bismalimide resin , Styrene resin, polyvinyl chloride resin, polyisobutylene resin, polyethylene resin, polypropylene resin, epoxy silicone resin, epoxy resin, silicone resin, fluororesin, fluorosilicone resin, or butadiene rubber, butyl rubber, styrene butadiene rubber, nitrile Synthetic rubber such as rubber, isoprene rubber, chloroprene rubber, ethylene propylene rubber, silicone rubber, etc., natural rubber, etc., or a variant thereof or one of these materials Materials combining several, but can also be used these materials by adding a plasticizer to adjust the elastic modulus, and the like.

When a conductive elastomer material is used as the elastomer material such as the hinges 8a to 8d, for example, a conductive polymer, or conductive particles using the insulating elastomer material as a binder, a wire mesh, a conductive woven fabric, or a non-woven material. Or a conductive polymer can be mixed. Specific examples of the conductive particles include carbon, Cu, Cu alloy, Ni, Ti, Au, Ag and the like processed into particles, or alloys thereof, and inorganic particles or polymer particles such as core material or glass beads. A conductive particle having a metal conductive layer formed on the surface thereof by plating, vapor deposition, or the like, or a deformed body thereof or a material combining one or more of these materials can also be used, but is not limited thereto.

Transparent insulating materials such as the movable insulating portions 1a2 to 1d2 and the fixed insulating portion 3 include polyester resins such as polyethylene terephthalate (PET), polyamide resins, polyimide resins, styrene resins, polycarbonate resins, and polymethyl methacrylate resins. , Polyethylene resins, polypropylene resins, polyethersulfone resins, polytetrafluoroethylene resins, polyphenylsulfite resins, and other organic polymers and copolymers thereof, or glass, carbon fiber, mica, Si oxide, Si nitride, Inorganic materials such as Al nitride are preferable in terms of processability, heat resistance, transparency, or the like, or a deformed body or a material combining one or more of these materials can be used, but is not limited thereto. Not.

Hereinafter, an example of the manufacturing method of the present embodiment will be described with reference to the drawings with reference to FIGS.

First, an example of a manufacturing method by etching, lift-off, and mask deposition of the fixed insulating portion 3 and the second fixed electrode 4 will be described separately with reference to the drawings.

FIG. 35 is a cross-sectional view showing a process of manufacturing the fixed insulating portion 3 and the second fixed electrode 4 by etching. FIGS. Ie to Ii show cut surfaces as viewed from the direction of the arrows of dashed-dotted lines I to I in FIG. 3, and FIGS. IIe to IIi show the cut surfaces as viewed from the direction of the arrows of dashed-dotted lines II to II in FIG.

Referring to FIG. Ie and FIG. IIe, the transparent substrate 12 and the first substrate 5 having the opening and the wiring electrically connected to the portion facing the opening are laminated on the transparent substrate 12 and the whole is transparent. A conductive material is deposited, the second fixed electrode 4 is formed in the opening, and the first transparent conductive layer 13 is formed on the first substrate 5.

Referring to FIGS. If and IIf, a transparent insulating material is deposited on the entire surface, the fixed insulating portion 3 is formed on the second fixed electrode 4, and the first transparent insulating layer 14 is formed on the first transparent conductive layer 13. It is formed.

Referring to FIGS. Ig and IIg, the first etching mask 15 is selectively formed only on the opening, that is, the fixed insulating portion 3.

Referring to FIGS. Ih and IIh, the first transparent conductive layer 13 and the first transparent insulating layer 14 are selectively etched except for the second fixed electrode 4 and the fixed insulating portion 3 protected by the first etching mask 15. And removed.

Referring to FIGS. Ii and IIi, the first etching mask 15 is removed, and the second fixed electrode 4 and the fixed insulating part 3 remain.

FIG. 36 is a cross-sectional view showing a process of manufacturing the fixed insulating portion 3 and the second fixed electrode 4 by lift-off. FIGS. Ij to Im show cut surfaces as viewed from the direction of the arrows of dashed-dotted lines I to I in FIG. 3, and FIGS. IIj to IIm show the cut surfaces as viewed from the direction of the arrows of dashed-dotted lines II to II in FIG.

Referring to FIG. Ij and FIG. IIj, the opening is formed in the transparent substrate 12 and the first substrate 5 provided thereon with the opening and the wiring electrically connected to the portion facing the opening. A first lift-off mask 16 is selectively deposited only on the first substrate 5 except for. The first lift-off mask 16 preferably has a reverse taper at the portion facing the opening to facilitate lift-off in a later process.

Referring to FIGS. Ik and IIk, a transparent conductive material is deposited on the entire surface, the second fixed electrode 4 is formed in the opening, and the second transparent conductive layer 17 is formed on the first lift-off mask 16. It is desirable that the portion facing the opening of the first lift-off mask 16 is not covered.

Referring to FIGS. 11 and II, a transparent insulating material is deposited on the entire surface, and the fixed insulating portion 3 is formed on the second fixed electrode 4 and the second transparent insulating layer 18 is formed on the second transparent conductive layer 17. It is formed. It is desirable that the portion facing the opening of the first lift-off mask 16 is not covered.

Referring to FIGS. Im and IIm, the first lift-off mask 16 is removed, and at the same time, the second transparent conductive layer 17 and the second transparent insulating layer 18 are simultaneously removed, leaving the second fixed electrode 4 and the fixed insulating portion 3. .

FIG. 37 is a cross-sectional view showing a process of manufacturing the fixed insulating portion 3 and the second fixed electrode 4 by mask vapor deposition. FIGS. In to Ip show cut planes as viewed from the direction of the arrows of dashed-dotted lines I to I in FIG. 3, and FIGS. IIn to IIp show the cut planes as viewed from the directions of the dashed-dotted lines II to II in FIG.

Referring to FIG. In and FIG. IIn, an opening is formed in the transparent substrate 12 and the first substrate 5 provided thereon with the opening and the wiring electrically connected to the portion facing the opening. The first vapor deposition mask 19 is selectively prepared except for the portion, that is, only on the first substrate 5.

Referring to FIGS. Io and IIo, a transparent conductive material and a transparent insulating material are vapor-deposited through a first vapor deposition mask 19, and the second fixed electrode 4 and the fixed electrode 4 are selectively fixed only to the opening except for the first substrate 5. The insulating part 3 is formed by being laminated.

Referring to FIGS. Ip and IIp, the first deposition mask 19 is removed, and the second fixed electrode 4 and the fixed insulating part 3 remain.

Next, an example of a manufacturing method in the etching of the hinge 8a, lift-off, and mask deposition will be described separately with reference to the drawings.

FIG. 38 is a cross-sectional view showing a process of manufacturing the hinge 8a by etching. FIGS. Iq to It show cutting planes as viewed from the direction of the arrows of dashed-dotted lines I to I in FIG. 3, and FIGS. IIq to IIt show cutting planes as viewed from the direction of the arrows of dashed-dotted lines II to II in FIG.

Referring to FIGS. Iq and IIq, a conductive elastomer material is deposited on the second substrate 6a having an opening and a wiring electrically connected to a portion facing the opening, and the hinge 8a and the hinge 8a. The first conductive elastomer layer 20 is formed on the entire surface except for a certain place.

Referring to FIGS. Ir and IIr, the second etching mask 21 is selectively formed only on the hinge 8a.

Referring to FIGS. Is and IIs, the first conductive elastomer layer 20 is selectively etched and removed except for the hinge 8 a protected by the second etching mask 21.

Referring to FIGS. It and IIt, the second etching mask 21 is removed and the hinge 8a remains.

FIG. 39 is a cross-sectional view showing a process of manufacturing the hinge 8a by lift-off. FIGS. Iu to Iw show cut surfaces as viewed from the direction of the arrows of dashed-dotted lines I to I in FIG. 3, and FIGS. IIu to IIw show the cut surfaces as viewed from the direction of the arrows of dashed-dotted lines II to II in FIG.

Referring to FIGS. Iu and IIu, the second substrate 6a having the opening and the wiring electrically connected to the portion facing the opening is selectively selected as a whole except where the hinge 8a should be. A second lift-off mask 22 is deposited. The second lift-off mask 22 preferably has a reverse tapered shape at the portion facing the hinge 8a so that the lift-off mask 22 is easily lifted off in a later process.

Referring to FIGS. Iv and IIv, a conductive elastomer material is deposited on the entire surface, and a second conductive elastomer layer 23 is formed on the hinge 8 a and the second lift-off mask 22. It is desirable that the portion of the second lift-off mask 22 that faces the hinge 8a is not covered.

Referring to FIGS. Iw and IIw, the second lift-off mask 22 is removed, and at the same time, the second conductive elastomer layer 23 is simultaneously removed, leaving the hinge 8a.

FIG. 40 is a cross-sectional view showing a process of manufacturing the hinge 8a by mask vapor deposition. FIGS. Ix to Iz show cut surfaces as viewed from the direction of the arrows of dashed-dotted lines I to I in FIG. 3, and FIGS. IIx to IIz show the cut surfaces as viewed from the direction of the arrows of dashed-dotted lines II to II in FIG.

Referring to FIGS. Ix and IIx, only on the second substrate 6a having the opening and the wiring electrically connected to the portion facing the opening, except where the hinge 8a should be. A second vapor deposition mask 24 is selectively prepared.

Referring to FIGS. Iy and IIy, the conductive elastomer material is deposited through the second deposition mask 24, and only the hinge 8a is selectively formed.

Referring to FIGS. Iz and IIz, the second deposition mask 24 is removed and the hinge 8a remains.

Next, an example of a manufacturing method in sacrificial layer etching and etching, sacrificial layer etching and lift-off, sacrificial layer etching and mask deposition of the movable electrode 1a1 and the movable insulating portion 1a2 will be described separately with reference to the drawings.

FIG. 41 is a cross-sectional view showing a process of manufacturing the movable electrode 1a1 and the movable insulating portion 1a2 by sacrificial layer etching and etching. FIGS. Ief to Iek show cut surfaces as viewed from the direction of the dashed line I to I in FIG. 3, and FIGS. IIef to IIek show the cut surfaces as viewed from the direction of the dashed line II to II in FIG.

Referring to FIG. Ief and FIG. IIef, the opening, the hinge 8a, and the portion of the hinge 8a that faces the opening are provided on the second substrate 6a that is electrically connected to the portion that faces the hinge 8a. A first sacrificial layer 25 is selectively deposited on the entire surface except for.

Referring to FIGS. Ieg and IIeg, a transparent conductive material and a cyan transparent insulating material are deposited on the entire surface, and the movable electrode 1a1 and the movable insulating portion 1a2 are formed on the first sacrificial layer 25 in the opening. A third transparent conductive layer 26 and a first cyan transparent insulating layer 27 are stacked on the substrate 6a and the first sacrificial layer 25 on the hinge 8a.

Referring to FIGS. Ieh and IIeh, the third etching mask 28 is selectively formed only on the movable insulating portion 1a2.

Referring to FIGS. Iei and IIei, the third transparent conductive layer 26 and the first cyan transparent insulating layer 27 are selectively etched except for the movable electrode 1a1 and the movable insulating portion 1a2 protected by the third etching mask 28. And removed.

Referring to FIGS. Iej and IIej, the third etching mask 28 is removed, and the movable electrode 1a1, the movable insulating portion 1a2, and the first sacrificial layer 25 remain.

Referring to FIGS. Iek and IIek, the first sacrificial layer 25 is removed, and the movable electrode 1a1 and the movable insulating portion 1a2 are separated from the portion other than the portion connected to the hinge 8a, and are rotatable about the hinge 8a. .

FIG. 42 is a cross-sectional view illustrating a process of manufacturing the movable electrode 1a1 and the movable insulating portion 1a2 by sacrificial layer etching and lift-off. FIGS. Iel to Ieo show cut planes as viewed from the direction of the dashed line I to I in FIG. 3, and FIGS. IIel to IIeo show the cut planes as viewed from the direction of the dashed line II to II in FIG.

Referring to FIG. Iel and FIG. IIel, the opening, the hinge 8a, and the portion of the hinge 8a that faces the opening are provided in the second substrate 6a that is electrically connected to the portion that faces the hinge 8a. A second sacrificial layer 29 is selectively deposited on the entire surface except for.

Referring to FIGS. Iem and IIem, a third lift-off mask 30 is selectively deposited only on the second sacrificial layer 29 on the second substrate 6a and the hinge 8a. The third lift-off mask 30 preferably has a reverse taper at the portion facing the opening to facilitate lift-off in a later process.

Referring to FIGS. Ien and IIen, a transparent conductive material and a cyan transparent insulating material are deposited on the entire surface, and the movable electrode 1a1 and the movable insulating portion 1a2 are formed on the second sacrificial layer 29 in the opening. A fourth transparent conductive layer 31 and a second cyan transparent insulating layer 32 are stacked on the lift-off mask 30. It is desirable that the portion where the third lift-off mask 30 faces the movable insulating portion 1a2 is not covered.

Referring to FIGS. Ieo and IIeo, the second sacrificial layer 29 and the third lift-off mask 30 are removed, and at the same time, the fourth transparent conductive layer 31 and the second cyan transparent insulating layer 32 are also removed, and the movable electrode 1a1 and the movable electrode 1a1 are movable. The insulating portion 1a2 remains, and at the same time, the movable electrode 1a1 and the movable insulating portion 1a2 are separated from portions other than the portion connected to the hinge 8a, and are rotatable about the hinge 8a as a rotation axis.

FIG. 43 is a cross-sectional view showing a process of manufacturing the movable electrode 1a1 and the movable insulating portion 1a2 by sacrificial layer etching and mask vapor deposition. FIGS. Iep to Iet show cut planes as viewed from the direction of the arrows of dashed-dotted lines I to I in FIG. 3, and FIGS. IIep to IIet show the cut planes as viewed from the directions of the dashed-dotted lines II to II in FIG.

Referring to FIGS. Iep and IIep, the opening, the hinge 8a, and the portion of the hinge 8a that faces the opening are provided on the second substrate 6a that is electrically connected to the portion that faces the hinge 8a. A third sacrificial layer 33 is selectively deposited on the entire surface except for.

Referring to FIGS. Ieq and IIeq, the third deposition mask 34 is selectively prepared except for the opening, that is, only on the third sacrificial layer 33 on the second substrate 6a and the hinge 8a.

Referring to FIGS. Ier and IIer, a transparent conductive material and a cyan transparent insulating material are deposited through a third deposition mask 34, and the movable electrodes 1a1 and 1a are selectively deposited only on the third sacrificial layer 33 in the opening. The movable insulating portion 1a2 is formed by being laminated.

Referring to FIGS. Ies and IIes, the third deposition mask 34 is removed.

Referring to FIGS. Iet and IIet, the third sacrificial layer 33 is removed, the movable electrode 1a1 and the movable insulating portion 1a2 remain, and at the same time, the movable electrode 1a1 and the movable insulating portion 1a2 are from other than the portion connected to the hinge 8a. It is separated and becomes rotatable about the hinge 8a as a rotation axis.

The transparent conductive material constituting the second fixed electrode 4 and the first transparent conductive layer 13, the hinge 8 a and the first conductive elastomer layer 20, the movable electrode 1 a 1, and the third transparent conductive layer 26 when made of a conductive elastomer material. For example, PVD (physical vapor deposition) such as sputtering and vacuum deposition, CVD (chemical vapor deposition) such as PECVD (plasma chemical vapor deposition), spray coating, etc. Method, powder coating method, dip coating method, spin coating method, roller coating method, die coating method, blade coating method, bar coating method, LPD (liquid phase growth method) such as electrolytic plating, electroless plating and sol-gel method, ALD (Atomic Layer Growth Method) or the like may be used, but is not limited thereto.

The fixed insulating portion 3 and the first transparent insulating layer 14, the hinge 8a made of an insulating elastomer material, the movable insulating portion 1a2 and the transparent insulating material or insulating elastomer material constituting the first cyan transparent insulating layer 27, For example, PVD such as sputtering and vacuum deposition, CVD such as PECVD, spray coating method, powder coating method, dip coating method, spin coating method, roller coating method, die coating method, blade coating, etc. Although not limited to these methods, LPD such as a bar coating method, sol-gel method, thermal oxidation, FHD (flame hydrolysis deposition), or the like may be used.

As the first etching mask 15, the second etching mask 21, and the third etching mask 28, for example, a resist formed by photolithography, SiO ₂ formed by thermal oxidation of patterned polysilicon, sputtering, vacuum deposition, or the like. of PVD, CVD, such as PECVD, _SiN patterning with such a film to photolithography and etching, etc. FHD, SiC, SiO 2, Pt , Ti, TiW, TiN, Al, Cr, Au, Ni, and other hard material such as Or you may use the material which combined these deformation bodies or 1 or multiple types of these materials, but it is not limited to these.

As a method of etching and removing the first transparent conductive layer 13 and the first transparent insulating layer 14, the first conductive elastomer layer 20, the third transparent conductive layer 26 and the first cyan transparent insulating layer 27, for example, wet etching, Dry etching such as plasma etching or RIE (reactive ion etching) may be used, but is not limited thereto. As an etchant for wet etching, for example, an organic solvent is used when etching an organic polymer, and an acidic aqueous solution such as ferric chloride aqueous solution, iodic acid aqueous solution, aqua regia, or oxalic acid aqueous solution is used when etching ITO or the like. However, it is not limited to these.

As a method for removing the first etching mask 15, the second etching mask 21, and the third etching mask 28, for example, wet etching, dry etching such as plasma etching or RIE, etching such as physical etching, mechanical polishing, chemical polishing, CMP (chemical mechanical polishing), CP (contact planarization), polishing such as laser polishing, or FIB (focused ion beam method) may be used, but is not limited thereto. For example, when wet etching is performed on SiO ₂ or the like, for example, hydrofluoric acid or the like may be used as an etchant, but is not limited thereto.

The first lift-off mask 16, the second lift-off mask 22, and the third lift-off mask 30 may be, for example, a resist formed by photolithography, but are not limited thereto. As a method for removing these, for example, wet etching, dry etching such as plasma etching or RIE, etching such as physical etching, mechanical polishing, chemical polishing, CMP (chemical mechanical polishing), CP (contact flattening), laser polishing, etc. Polishing such as FIB (focused ion beam method) or the like may be used, but is not limited thereto. In order to avoid lift-off of other parts as an etchant for wet etching, it is desirable to have a sufficiently weak action. For example, when etching an organic polymer, an organic solvent such as diluted acetone may be used. It is not limited.

In order to facilitate lift-off, the portion facing the opening of the first lift-off mask 16, the portion facing the hinge 8a of the second lift-off mask 22, and the portion facing the opening of the third lift-off mask 30 are not coated. It is desirable. Such second fixed electrode 4 and second transparent conductive layer 17, fixed insulating portion 3 and second transparent insulating layer 18, hinge 8a and second conductive elastomer layer 23, movable electrode 1a1 and fourth transparent conductive layer 31, As a method for depositing the transparent conductive material, transparent insulating material, conductive elastomer material, and cyan transparent insulating material constituting the movable insulating portion 1a2 and the second cyan transparent insulating layer 32, for example, PVD such as sputtering or vacuum evaporation Spray coating method, powder coating method, dip coating method, spin coating method, roller coating method, die coating method, blade coating method, bar coating method and the like may be used, but are not limited thereto.

In addition, as the 1st vapor deposition mask 19, the 2nd vapor deposition mask 24, and the 3rd vapor deposition mask 34, although the thing containing a metal etc. may be used, for example, it is not limited to these.

As a method of depositing a transparent conductive material, a transparent insulating material, a conductive elastomer material, or a cyan transparent insulating material through the first vapor deposition mask 19, the second vapor deposition mask 24, or the third vapor deposition mask 34, for example, sputtering or vacuum Although PVD etc., such as vapor deposition, may be used, it is not limited to these.

As the first sacrificial layer 25, the second sacrificial layer 29, and the third sacrificial layer 33, any material may be used depending on the application as long as it can be removed faster than other portions. For example, poly Si, Al, AlSi, AlCu, AlSiCu, amorphous Si, polycrystalline Si, porous Si, Si dioxide, etc. that can be removed with a strong alkaline solution such as TMAH, hydrogen fluoride vapor or mixed aqueous solution with ammonium fluoride Diluted with acetic acid, such as PSG, BPSG, etc., which can be removed with hydrofluoric acid or hydrofluoric acid buffer solution, Ti, etc., which can be removed with a mixed solution of hydrofluoric acid and hydrogen peroxide, etc. SiGe that can be removed with hydrofluoric acid, etc., Si nitride that can be removed with hot phosphoric acid, etc., resist that can be removed with ozone ashing, plasma ashing, etc., polyvinyl alcohol, cellulose, pullulan, polyvinyl that can be removed with water or hot water, etc. Pyrrolidone homopolymers and copolymers, water-soluble resins such as gelatin, polyhydrostyrene, or alkali Metal oxides, carbonates, sulfates or hydroxides, alkaline earth metal oxides, carbonates, sulfates or hydroxides, etc., or variants or one or more of these materials A combination of materials may be used, but is not limited thereto.

Moreover, in the said manufacturing process, although the transparent substrate 12, the 1st board | substrate 5, and the 2nd board | substrate 6a are manufactured and arrange | positioned before each said manufacturing process, this 2nd board | substrate 6a is each said manufacturing process before each said manufacturing process. It may be arranged in any position after each manufacturing process, and may be manufactured before each manufacturing process, during each manufacturing process, or after each manufacturing process.

The hinges 8b to 8d, the movable electrodes 1b1 to 1d1, and the movable insulating parts 1b2 to 1d2 are similarly laminated and manufactured by applying the manufacturing process of the hinge 8a, the movable electrode 1a1, and the movable insulating part 1a2. At this time, the sacrificial layer may be removed once as described above, and the next step may be performed. However, in the stage of manufacturing the movable electrodes 1a1 to 1c1 and the movable insulating portions 1a2 to 1c2, the step of removing the sacrificial layer is performed. It is possible to omit all the sacrificial layers at the same time after manufacturing the hinges 8a to 8d, the movable electrodes 1a1 to 1d1, and the movable insulating portions 1a2 to 1d2 all at the same time.

Next, an example of a method for manufacturing the first fixed electrodes 2a to 2d by electroforming will be described with reference to the drawings.

FIG. 44 is a cross-sectional view showing a process of manufacturing a mold using a photoresist. FIGS. Ieu to Iew show cut surfaces as viewed from the direction of the dashed line I to I in FIG. 3, and FIGS. IIeu to IIew show the cut surfaces as viewed from the direction of the dashed line II to II in FIG.

Referring to FIGS. Ieu and IIeu, the second substrate 6a having a movable portion 1d, hinges 8a to 8d, and wiring electrically connected to a portion facing the place where the first fixed electrodes 2a to 2d should be. A thick film resist layer 35 is deposited at ˜6d.

Referring to FIGS. Iev and IIev, a photomask 36 in which a light shielding film is selectively formed on a place where the first fixed electrodes 2a to 2d should be prepared. Thereafter, the thick film resist layer 35 excluding the place where the first fixed electrodes 2a to 2d should be located is selectively exposed from above.

  Referring to FIG. Iew and FIG. IIew, the thick resist layer 35 is developed, the unexposed thick resist layer 35 is removed, and the thick resist layer 35 other than the place where the first fixed electrodes 2a to 2d should be is used as a template. Remain as.

FIG. 45 is a cross-sectional view illustrating a process of manufacturing the first fixed electrodes 2a to 2d by plating. FIGS. Iex to Iey show cut surfaces as viewed from the direction of the dashed line I to I in FIG. 3, and FIGS. IIex to IIey show the cut surfaces as viewed from the direction of the dashed line II to II in FIG.

Referring to FIG. Iex and FIG. IIex, the thick film resist layer 35 other than the place where the first fixed electrodes 2a to 2d, which are the templates, should be plated, and only the first fixed electrodes 2a to 2d are selectively formed. .

Referring to FIGS. Iey and IIey, the thick resist layer 35 is removed, and the first fixed electrodes 2a to 2d remain.

The thick resist layer 35 may be, for example, a photosensitive thick film resist made of epoxy resin such as SU8, acrylic resin, novolac resin, dry film, or the like, or may be a chemically amplified type. Alternatively, a material obtained by combining these deformation bodies or one or more of these materials may be used, but the present invention is not limited thereto.

The thick resist layer 35 may be deposited by, for example, a spin coating method, a spray coating method, or the like. The spin coating method may be repeated several times to obtain a thick film, but is not limited thereto.

In addition, as the photomask 36, for example, a transparent substrate such as glass and quartz formed with a light-shielding film such as Cr, CrO, CrF, or an emulsion mask, or a modification thereof or a combination of one or more of these materials However, it is not limited to these.

The exposure method for the thick resist layer 35 is shown as exposing without projection using an optical system such as a contact / proximity method, but a projection exposure method such as a lens projection method or a mirror projection method. However, it is not limited to these. Further, a direct drawing method may be used, and in this case, the photomask 36 can be omitted. In addition, ultraviolet rays, X-rays, electron beams, ion beams, laser beams, and the like may be used for exposure, but are not limited thereto.

As a method of leaving the thick film resist layer 35 other than the place where the first fixed electrodes 2a to 2d should be as a template, a method of deep RIE with polyimide using O ₂ or the like may be used. The phenomenon process can be omitted.

In addition, as a method for forming the first fixed electrodes 2a to 2d by plating, for example, electrolytic plating capable of high-speed thick film plating may be used, but the method is not limited thereto. In addition, in order to perform electroplating on a non-metallic mold such as a resist, it is necessary to attach a conductive seed layer to the surface, and the second substrates 6a to 6d can be used as the conductive seed layer, sputtering, vapor deposition, CVD, etc. A conductive seed layer formed by ion plating, electroless plating, SAM (self-assembled monomolecular film) formation, or the like may be used, but is not limited thereto.

For example, ozone ashing or plasma ashing may be used as a method for removing the thick resist layer 35, but is not limited thereto.

In addition, the fixed insulating part 3 and the second fixed electrode 4, the hinges 8a to 2d, the movable electrodes 1a1 to 1d1, the movable insulating parts 1a2 to 1d2, and the first fixed electrodes 2a to 2d are limited to the above manufacturing method because there are various manufacturing methods. Not. For example, it may be selectively produced by a printing method such as photolithography or an inkjet method, a nozzle printing method, or the like. In this case, etching, lift-off, mask vapor deposition, and electroforming can be omitted. Moreover, you may combine at least one part of the said manufacturing method. The order of manufacturing is not limited to the above description. For example, the manufacturing order may be reversed or in any order. Further, each of them may not be laminated and manufactured as described above, but may be manufactured in separate layers and then bonded by wafer bonding or the like.

Hereinafter, the effect of this embodiment which operates as described above will be described in general.

In the present embodiment, since the display light includes both external light and backlight light, both display of reflection type display and light emission type display are possible. In addition, since the rotating operation and the holding operation are performed by the electrostatic force acting on the same electrode, the circuit is simple. The movable parts 1a to 1d are respectively connected to the second substrates 6a to 6d, the first fixed electrodes 2a to 2d are respectively connected to the second substrates 6a to 6d, and the second fixed electrode 4 is connected to the first substrate 5. Since they are electrically connected, it is not necessary to provide more than two types of wiring on one second substrate 6a to 6d and first substrate 5, and the wiring is simple.

Hereinafter, each element and effect of this embodiment will be described individually.

In the present embodiment, the display light includes outside light. Therefore, for example, it is possible to obtain a reflective display with good visibility and low power consumption by external light.

In the present embodiment, the backlight 9 is provided in a direction opposite to the image display side direction of the display element 10, and the display light includes backlight light. Therefore, for example, a configuration in which light-emitting display can be performed by backlight light can be achieved.

In the present embodiment, the backlight 9 can modulate the light intensity. Therefore, for example, the light intensity can be modulated in the light emitting display.

In the present embodiment, the movable parts 1a to 1d rotate at least perpendicularly to the display screen. Therefore, for example, the movable parts 1a to 1d can be provided in a smaller space. For example, a simpler configuration can be achieved.

In the present embodiment, the movable portions 1a to 1d increase the area on which the display light is incident due to a change in the tilt angle that rotates at least in the image display side direction. Therefore, for example, the movable parts 1a to 1d can be configured to have a wide viewing angle without obstructing the field of view at an inclination angle at which the area on which the display light is incident is reduced.

In the present embodiment, the movable parts 1a to 1d include a color transparent part. Therefore, for example, when the movable parts 1a to 1d are stacked, a configuration capable of displaying more colors can be provided. Further, for example, when the backlight 9 is provided, it is possible to have a configuration capable of absorbing a backlight of a specific wavelength band and transmitting a backlight light of another specific wavelength band to enable color light emission type display.

In the present embodiment, the movable portions 1a to 1d include cyan, magenta, and yellow portions. For this reason, for example, the three primary colors of cyan, magenta, and yellow can be displayed. In addition, for example, when the movable parts 1a to 1d include a color transparent part, the two primary parts of red, green, and blue light can be displayed by stacking two movable parts 1a to 1d. A configuration with high reproducibility can be achieved. In addition, for example, when the movable parts 1a to 1d include a color transparent part, it is possible to display a color close to black by stacking three movable parts 1a to 1d, and to have a structure with higher contrast. be able to.

In the present embodiment, the movable parts 1a to 1d include a white part. Therefore, for example, the white portions of the movable portions 1a to 1d reflect outside light, so that a reflective display with good visibility and low power consumption can be achieved. Further, for example, a configuration capable of displaying paper white can be achieved, and a configuration with higher contrast can be achieved. Further, for example, when the movable portions 1a to 1d including the color transparent portion are stacked in the image display side direction of the movable portions 1a to 1d including the white portion, a configuration capable of color reflection display is provided without the color reflection portion. Can be.

In the present embodiment, a plurality of movable parts 1a to 1d are stacked perpendicular to the display screen. Therefore, for example, when the movable parts 1a to 1d include a color transparent part, a configuration capable of displaying more colors can be provided. In addition, for example, when the movable parts 1a to 1d include a white part and a color transparent part, the color reflection type display can be achieved without stacking by providing the color reflection part.

In the present embodiment, the movable parts 1a to 1d are cantilever beams. Therefore, for example, the movable parts 1a to 1d can be configured to be rotatable with a simple structure.

In the present embodiment, the display element 10 has hinges 8a to 8d. Therefore, for example, the movable portions 1a to 1d can be configured to be rotatable repeatedly with the hinges 8a to 8d as the rotation axis.

In the present embodiment, the movable parts 1a to 1d are provided on the sides of a two-dimensional figure of phase dimension 2 filled in a plane. Therefore, for example, it can be set as the structure which can use a space efficiently by plane filling.

In the present embodiment, each of the movable parts 1a to 1d is provided in at least four directions parallel to the display screen. Therefore, for example, the movable parts 1a to 1d can be provided on the sides of the quadrangle, and since the smallest one display element 10 can be provided with the many movable parts 1a to 1d, the smallest one display element 10 can further include A configuration capable of displaying many colors can be obtained.

In the present embodiment, the movable parts 1a to 1d are provided side by side on each side of a substantially square shape. Therefore, for example, when the area where the display light is incident increases, the movable parts 1a to 1d can cover the substantially square without a substantial gap, and have a configuration with higher luminance or reflectance, aperture ratio, color reproduction capability, and contrast. be able to.

In the present embodiment, the first fixed electrodes 2a to 2d are provided on the sides of a two-dimensional figure having a phase dimension of 2 filled in a plane.

In the present embodiment, the first fixed electrodes 2a to 2d are provided side by side on the substantially square sides.

In the present embodiment, the driving means can modulate the tilt angle by rotating the movable parts 1a to 1d by electrostatic force. Therefore, for example, the size can be reduced, and the smaller the size, the stronger the force and the faster the modulation speed.

In the present embodiment, the inclination angles of the movable parts 1a to 1d can be held by electrostatic attraction by a capacitor. Therefore, for example, since the electrostatic attraction force by the capacitor is proportional to the facing area, a configuration having a strong holding force can be achieved. Further, for example, since the holding force is an electrostatic attraction force by a capacitor, it can be configured to be turned on and off.

In the present embodiment, it is possible to form a capacitor between the movable parts 1a to 1d and the first fixed electrodes 2a to 2d and hold the inclination angles of the movable parts 1a to 1d by electrostatic attraction force.

In the present embodiment, the movable portions 1a to 1d have movable insulating portions 1a2 to 1d2 in the direction opposite to the rotation direction of the movable electrodes 1a1 to 1d1 in the image display side direction. Therefore, for example, the movable insulating portions 1a2 to 1d2 can be colored.

In the present embodiment, it is possible to form a capacitor between the movable parts 1a to 1d and the second fixed electrode 4 and maintain the inclination angles of the movable parts 1a to 1d by electrostatic attraction force.

In the present embodiment, the display element 10 includes the fixed insulating portion 3 that is at least transparent in the direction opposite to the image display side direction of the second fixed electrode 4.

In the manufacturing method of the present embodiment, the movable parts 1a to 1d are formed by etching, lift-off, or mask vapor deposition. Therefore, for example, it can be manufactured more compactly.

In the manufacturing method of the present embodiment, the movable parts 1a to 1d are formed in a state where a plurality of the movable parts 1a to 1d are stacked vertically to the display screen. Therefore, for example, it can be manufactured by a simple process.

In the manufacturing method of the present embodiment, the movable parts 1a to 1d are separated from parts other than the connected parts by sacrificial layer etching.

Hereinafter, with reference to FIGS. 46 to 58, Modifications 1 to 7 according to the present embodiment will be described.

[Modification 1]
First, the configuration of Modification 1 according to the present embodiment will be described with reference to the drawings.

FIG. 46 is a three-dimensional perspective separation perspective view of the display element 10 of Modification 1 according to the embodiment of the present invention. FIG. 47 is a cross-sectional view of the display element 10 of Modification 1 and the substrate group 7 provided around the display element 10 according to the embodiment of the present invention. FIG. 48 is a cross-sectional view of the display element 10 of Modification 1 and the substrate group 7 provided around the display element 10 according to the embodiment of the present invention. 46 is FIG. 2, FIG. 47 is FIG. 4, FIG. 48 is Iez to Iezabc, and FIGS. IIez to IIezabc are instead of the movable electrodes 1 a 1 to 1 d 1 in the configurations of FIGS. I to Iabc and II to IIabc of FIG. The following are provided. A movable color transparent electrode and a movable color opaque electrode 37a made of a transparent conductive material of cyan, magenta and yellow, and a white opaque conductive material, except for the side end opposite to the side of the hinges 8a to 8d. ~ 37d. Also, at the side edge opposite to the hinge 8a-8d side direction, the cyan, magenta, yellow, thicker than the movable color transparent electrode and the movable color opaque electrode 37a-37d perpendicular to the hinge 8a-8d direction. Movable insulating stoppers 38a to 38d made of a transparent insulating material of color and an opaque insulating material of white are provided. Further, the movable insulating portions 1a2 to 1d2 and the fixed insulating portion 3 are not provided. In addition, the movable color transparent electrode and the movable color opaque electrode 37a to 37d are built in the hinges 8a to 8d or disposed on the surface (not shown), and are disposed in the second substrates 6a to 6d or disposed on the surface ( (Not shown) is electrically connected to the power source.

At this time, the movable portions 1a to 1d are rotatable about the hinges 8a to 8d as rotation axes at the first or second inclination angle, respectively. When the movable parts 1a to 1d are at the first or second inclination angle, the movable insulating stoppers 38a to 38d are kept in contact with each other and supported, and the movable color transparent electrode and the movable color are removed except for the movable insulating stoppers 38a to 38d. The opaque electrodes 37a to 37d and the second fixed electrodes 4 are not in contact with each other.

Next, an operation example of Modification 1 according to the present embodiment will be mainly described.

Referring to FIG. 48 as an example, when the movable portions 1a to 1d are at the first or second tilt angle in the holding operation, the movable color transparent electrodes and the movable color opaque electrodes 37a to 37d and the second fixed electrodes 4 are connected to each other. The voltage of the opposite polarity is continuously applied sufficiently. Then, except for the movable insulating stoppers 38a to 38d, in order to form a non-contact capacitor in which the insulating portion is not inserted between the electrodes, the movable portions 1a to 1d have the first or second tilt angle even if the voltage application is stopped thereafter. Can hold. That is, the movable parts 1a to 1d can be held by a non-contact capacitor in which no insulating part is inserted between the electrodes at the first or second tilt angle.

In order to increase the insulation resistance of the capacitor, the inside of the display element 10 may be evacuated or filled with gas.

Next, elements and effects of the first modification according to the present embodiment will be mainly described.

In Modification 1 according to the present embodiment, the movable portions 1a to 1d have movable insulating stoppers 38a to 38d, and the movable insulating stoppers 38a to 38d are in contact with each other and supported by a capacitor with a distance between the electrodes. The inclination angle of the movable parts 1a to 1d can be held by the suction force. Therefore, for example, since the movable insulating stoppers 38a to 38d are provided, it is possible to reduce the cost by using less material than using the movable insulating portions 1a2 to 1d2 and the fixed insulating portion 3. In addition, since the movable parts 1a to 1d can be held freely by a non-contact capacitor in which the insulating part is not inserted between the electrodes, the surface of the insulating part is charged and the holding power is reduced as compared with the state in which the movable part is in contact with the insulating part. It can be configured to prevent.

[Modification 2]
First, a configuration of Modification 2 according to the present embodiment will be described with reference to the drawings.

FIG. 49 is a three-dimensional perspective separation perspective view of the display element 10 of Modification 2 according to the embodiment of the present invention. FIG. 50 is a cross-sectional view of the display element 10 of Modification 2 and the substrate group 7 provided around the display element 10 according to the embodiment of the present invention. 49 is provided in FIG. 2, and FIG. 50 is provided with the following at the center and side edges instead of the movable electrodes 1a1 to 1d1 and the movable insulating portions 1a2 to 1d2 in the configuration of FIG. The central portion includes movable color transparent portions 43a to 43c and a movable white opaque portion 43d made of a transparent material of cyan, magenta, and yellow and a white opaque material. At the side end, there are movable electromagnets 39a-39d whose magnetic pole faces are parallel to the directions of the hinges 8a-8d on the opposite side to the directions of the hinges 8a-8d, and magnetic poles on the three sides without the movable electromagnets 39a-39d Movable permanent magnets 42a to 42d whose surfaces are parallel to the directions of the hinges 8a to 8d are provided. Further, instead of the first fixed electrodes 2a to 2d, first fixed permanent magnets 40a to 40d having magnetic pole faces in the direction of the movable parts 1a to 1d are provided. Further, instead of the fixed insulating portion 3 and the second fixed electrode 4, a fixed transparent portion 44 made of a transparent material provided at the center portion and a magnetic pole surface provided at four side edges perpendicular to the image display side direction are displayed. A second fixed permanent magnet 41 is provided in the direction opposite to the side direction. The movable electromagnets 39a to 39d are built in the movable color transparent portions 43a to 43c and the movable white opaque portion 43d, or are arranged on the surface and the hinges 8a to 8d or the hinges 8a to 8d. It is electrically connected to the power source by the arranged wiring (not shown) and the wiring (not shown) built in or on the surface of the second substrates 6a to 6d.

At this time, the movable portions 1a to 1d are rotatable about the hinges 8a to 8d as rotation axes at the first or second inclination angle, respectively. When the movable portions 1a to 1d are at the first tilt angle, the movable electromagnets 39a to 39d and the movable permanent magnets 42a to 42d and the first fixed permanent magnets 40a to 40d are brought closer to each other. Further, when only one of the movable portions 1a to 1d is at the second tilt angle, the movable electromagnets 39a to 39d and the movable permanent magnets 42a to 42d and the second fixed permanent magnet 41 are brought closer to each other. Further, when two or more of the movable parts 1a to 1d are stacked at the second inclination angle, the movable electromagnets 39a to 39c of the movable parts 1a to 1c close to the image display side direction and the movable parts 1b to far from the image display side direction. The 1d movable permanent magnets 42b to 42d are movable permanent magnets 42a to 42c of the movable parts 1a to 1c close to the image display side direction, and the movable electromagnets 39b to 39d and the movable permanent magnets of the movable parts 1b to 1d far from the image display side direction. 42b-42d approaches.

The first fixed permanent magnets 40a to 40d have a magnetic pole surface facing the movable electromagnets 39a to 39d and the movable permanent magnets 42a to 42d, a magnetic pole surface facing the image display side of the second fixed permanent magnet 41, and the movable permanent magnet. It is desirable that the polarities of the magnetic pole faces in the direction opposite to the direction of the first fixed permanent magnets 40a to 40d in 42a to 42d are the same.

The first fixed permanent magnets 40a to 40d, the second fixed permanent magnet 41, and the like correspond to the driving means of the second modification according to the present embodiment of the present invention.

Next, an operation example of Modification 2 according to the present embodiment will be mainly described.

First, as an example, an operation of holding only one of the movable parts 1a to 1d at the first tilt angle will be described. When the movable parts 1a to 1d are at the first inclination angle, the first inclination angle can be maintained by the attractive force generated by the magnetic force between the movable permanent magnets 42a to 42d and the first fixed permanent magnets 40a to 40d.

Next, the operation | movement which rotates only one movable part 1a-1d from a 1st inclination angle to a 2nd inclination angle as an example is demonstrated. At this time, for example, a voltage is applied to each of the movable electromagnets 39a to 39d so that the magnetic pole surfaces of the opposed movable electromagnets 39a to 39d and the first fixed permanent magnets 40a to 40d have the same polarity. Then, the repulsive force due to the magnetic force of the movable electromagnets 39a to 39d and the first fixed permanent magnets 40a to 40d and the resultant force of the attractive force due to the magnetic force of the movable electromagnets 39a to 39d and the second fixed permanent magnet 41 are the same as the movable permanent magnets 42a to 42d. When the movable parts 1a to 1d such as attractive force due to the magnetic force with the fixed permanent magnets 40a to 40d become larger than the force that holds the movable parts 1a to 1d at the first inclination angle, the movable parts 1a to 1d can rotate to the second inclination angle.

Next, the operation | movement which hold | maintains only one of movable part 1a-1d to a 2nd inclination angle as an example is demonstrated. For example, when the movable parts 1a to 1d are at the second inclination angle, the second inclination angle can be maintained by the attractive force generated by the magnetic force between the second fixed permanent magnet 41 and the movable permanent magnets 42a to 42d.

Next, as an example, an operation of rotating only one of the movable parts 1a to 1d from the second tilt angle to the first tilt angle will be described. At this time, for example, a reverse voltage is applied to each of the movable electromagnets 39a to 39d. Then, the repulsive force due to the magnetic force between the movable electromagnets 39a to 39d and the second fixed permanent magnet 41 and the resultant force of the attractive force due to the magnetic force between the movable electromagnets 39a to 39d and the first fixed permanent magnets 40a to 40d are combined with the second fixed permanent magnet 41 and the movable permanent magnet. When the force of holding the movable parts 1a to 1d, such as the attractive force due to the magnetic force with the magnets 42a to 42d, becomes larger than the force that holds the second inclination angle, the movable parts 1a to 1d can rotate to the first inclination angle.

Next, as an example, the operation of rotating and laminating the movable parts 1b to 1d to the second inclination angle when any of the movable parts 1a to 1c is already at the second inclination angle will be described. For example, a voltage is applied to the movable electromagnets 39b to 39d to be stacked later so that the magnetic pole surfaces of the movable electromagnets 39b to 39d and the first fixed permanent magnets 40b to 40d facing each other have the same polarity. Then, a repulsive force is generated by the magnetic force between the first fixed permanent magnets 40b to 40d, and an attractive force is generated between the movable permanent magnets 42a to 42c that are already at the second tilt angle, so that the movable layering is performed later. The parts 1b to 1d can be stacked at the second tilt angle.

Next, as an example, when any one of the movable parts 1a to 1c is already at the second inclination angle, the operation for holding the laminated parts at the second inclination angle for the movable parts 1b to 1d laminated later will be described. At this time, for example, the movable permanent magnets 42a to 42c of the movable parts 1a to 1c that are already at the second inclination angle and the movable permanent magnets 42b to 42d of the movable parts 1b to 1d that are laminated later are laminated later. The movable parts 1b to 1d can hold the stack at the second tilt angle.

Next, as an example, when any one of the movable parts 1a to 1c is already at the second tilt angle, the stacking of the movable parts 1b to 1d stacked later is reset from the second tilt angle to the first tilt angle. Will be described. At this time, for example, a reverse voltage is applied to the movable electromagnets 39b to 39d of the movable portions 1b to 1d stacked later. Then, repulsive force due to magnetic force is generated between the movable permanent magnets 42a to 42c of the movable portions 1a to 1c that are already at the second inclination angle, and attractive force due to magnetic force is generated between the first fixed permanent magnets 40b to 40d. The movable parts 1b to 1d stacked later can reset the stacking to an inclination angle of 1.

That is, the movable parts 1a to 1d are changed by the electromagnetic force change by changing the magnetic force of the permanent magnets of the movable permanent magnets 42a to 42c and the first fixed permanent magnets 40b to 40d and the polarity of the voltage applied to the movable electromagnets 39a to 39d. It can be rotated to the first or second tilt angle, can be held, and can be stacked.

Next, elements and effects of Modification 2 according to the present embodiment will be mainly described.

In the second modification according to the present embodiment, the driving means can modulate the tilt angle by rotating the movable parts 1a to 1d by electromagnetic force. Moreover, the modification 2 which concerns on this embodiment can hold | maintain the inclination angle of movable part 1a-1d with a magnetic force. Therefore, for example, the movable color transparent portions 43a to 43c and the movable white opaque portion 43d are the central portions, and the movable electromagnets 39a to 39d and the movable permanent magnets 42a to 42d are provided at the edges, and the fixed transparent portion 44 is the center. In the case where the second fixed permanent magnet 41 is provided at the side edge as a part, the movable color transparent parts 43a to 43c, the movable white opaque part 43d, and the fixed transparent part 44 do not need to use transparent electrodes, and the cost is low. be able to. Moreover, since the movable parts 1a to 1d can be rotated and stacked by electromagnetic force, it is sufficient to apply a voltage to the movable electromagnets 39a to 39d, the electric circuit is simple, the repulsive force is strong, the drive voltage is low, and the output is linear and strong. Can be configured. Moreover, since it is possible to hold | maintain movable part 1a-1d with magnetic force, it can be set as the structure by which the fall by the passage of time of holding force is very small.

[Modification 3]
Next, a configuration of Modification 3 according to the present embodiment will be mainly described with reference to the drawings.

51 is a cross-sectional view of the display element 10 and the substrate group 7 provided around the display element 10 in Modification 3 according to the embodiment of the present invention. In FIG. 51, instead of the hinges 8a to 8d in the configuration of FIG. 4, a high expansion coefficient layer having a high thermal expansion coefficient and a low expansion coefficient layer having a lower thermal expansion coefficient than the high expansion coefficient layer are stacked. Bimetals 45a to 45d that connect the second substrates 6a to 6d and the movable portions 1a to 1d perpendicularly to the side direction are provided. In addition, if the high expansion coefficient layers in the bimetals 45a to 45d are provided in the image display side direction, it is desirable that the movable parts 1a to 1d be at the second inclination angle in a state where no current flows through the high expansion coefficient layer. If the rate layer is provided in the direction opposite to the image display side direction, it is desirable that the movable portions 1a to 1d be at the first tilt angle in a state where no current is passed through the high expansion rate layer. In addition, the high expansion coefficient layers of the bimetals 45a to 45d are electrically connected to a power source by wiring (not shown) built in the second substrates 6a to 6d or disposed on the surface.

At this time, the movable parts 1a to 1d are rotatable at the first or second tilt angle with the bimetals 45a to 45d as the rotation axis, respectively.

The bimetals 45a to 45d and the like correspond to the driving means of the third modification according to the present embodiment of the present invention.

Next, an operation example of Modification 3 according to the present embodiment will be mainly described.

First, as an example, an operation for holding only one of the movable parts 1a to 1d at an inclination angle in a state where no current is passed through the high expansion coefficient layer will be described. For example, when a high expansion coefficient layer in which no current flows is provided in the image display side direction and the movable portions 1a to 1d are at the second inclination angle, voltages having opposite polarities are applied to the movable electrodes 1a1 to 1d1 and the second fixed electrode 4. Is continuously applied sufficiently. Then, since the capacitor is formed between the movable electrodes 1a1 to 1d1 and the second fixed electrode 4 with the fixed insulating portion 3 interposed therebetween, the movable portions 1a to 1d can hold the second inclination angle thereafter. Further, when the high expansion coefficient layer in which no current flows is provided in the direction opposite to the image display side direction and the movable portions 1a to 1d are at the first inclination angle, the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d are provided. The reverse polarity voltage is continuously applied sufficiently. Then, since the capacitor is formed between the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d with the movable insulating portions 1a2 to 1d2 interposed therebetween, the movable portions 1a to 1d can thereafter maintain the first inclination angle.

Next, as an example, an operation of rotating only one of the movable parts 1a to 1d to an inclination angle in a state where a current is passed through the high expansion coefficient layer will be described. When a current flows from the power source to the high expansion coefficient layers of the bimetals 45a to 45d, the high expansion coefficient layers thermally expand due to Joule heat, and the movable parts 1a to 1d can rotate to the low expansion coefficient layer side. For example, if the high expansion coefficient layer is provided in the image display side direction, the movable parts 1a to 1d can approach the first fixed electrodes 2a to 2d and rotate to the first inclination angle with the bimetals 45a to 45d as the rotation axis. If the high expansion coefficient layer is provided in the direction opposite to the image display side direction, the movable parts 1a to 1d can approach the second fixed electrode 4 and rotate to the second inclination angle with the bimetals 45a to 45d as the rotation axis.

Next, as an example, an operation of holding only one of the movable parts 1a to 1d at an inclination angle in a state where a current is passed through the high expansion coefficient layer will be described. For example, when a high expansion coefficient layer through which an electric current is applied is provided in the image display side direction and the movable parts 1a to 1d are at the first inclination angle, the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d are opposite to each other. Polarity voltage is continuously applied sufficiently. Then, a capacitor is formed between the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d with the movable insulating portions 1a2 to 1d2 sandwiched therebetween. 1a to 1d can hold the first tilt angle. In addition, when the high expansion coefficient layer through which an electric current is applied is provided in the direction opposite to the image display side direction and the movable portions 1a to 1d are at the second inclination angle, the movable electrodes 1a1 to 1d1 and the second fixed electrode 4 are reversed. The voltage of the polarity is continuously applied sufficiently. Then, in order to form a capacitor between the movable electrodes 1a1 to 1d1 and the second fixed electrode 4 with the fixed insulating part 3 interposed therebetween, even if the heat of the high expansion coefficient layer is subsequently cooled and cold contracted, the movable parts 1a to 1d The second tilt angle can be maintained.

Next, as an example, an operation of rotating only one of the movable parts 1a to 1d to an inclination angle in a state where no current is passed through the high expansion coefficient layer will be described. For example, when the high expansion coefficient layer is provided in the image display side direction and the movable parts 1a to 1d are at the first inclination angle and the heat of the high expansion coefficient is cooled, the high expansion coefficient layer is cold contracted. When the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d are grounded, the holding force by the capacitor is lost, so the movable parts 1a to 1d approach the second fixed electrode 4 with the bimetals 45a to 45d as the rotation axis. However, it can rotate to the second tilt angle. Further, when the high expansion coefficient layer is provided in the direction opposite to the image display side direction and the movable parts 1a to 1d are at the second inclination angle and the heat of the high expansion coefficient is cooled, the high expansion coefficient layer is cold-contracted. . When the movable electrodes 1a1 to 1d1 and the second fixed electrode 4 are grounded, since the holding force by the capacitor is lost, the movable parts 1a to 1d approach the first fixed electrodes 2a to 2d with the bimetal 45a to 45d as the rotation axis. However, it can rotate to the first tilt angle.

Next, as an example, the operation of rotating and laminating the movable parts 1b to 1d to the second inclination angle when any of the movable parts 1a to 1c is already at the second inclination angle will be described. For example, in the same manner as described above, when the high expansion coefficient layers of the movable portions 1b to 1d to be stacked later are provided in the image display side direction, the movable electrodes 1b1 to 1d1 and the first fixed electrodes 2b to 2d are grounded. Alternatively, when the high expansion coefficient layers of the movable parts 1b to 1d to be stacked later are provided in the direction opposite to the image display side direction, when a current is passed through the high expansion coefficient layer, the movable parts 1b to 1 to be stacked later 1d can be stacked at the second tilt angle.

Next, as an example, when any one of the movable parts 1a to 1c is already at the second inclination angle, the operation of causing the movable parts 1b to 1d to hold the stack at the second inclination angle will be described. For example, voltages having opposite polarities are continuously applied sufficiently to the movable electrodes 1a1 to 1c1 of the movable parts 1a to 1c that are already at the second inclination angle and the movable electrodes 1b1 to 1d1 of the movable parts 1b to 1d that are stacked later. Is done. Then, since the capacitor is formed by sandwiching the movable insulating portions 1a2 to 1c2 of the movable portions 1a to 1c at the second inclination angle, even if the heat of the high expansion coefficient layer is cooled and then cold contracted, the high expansion coefficient layer Even in a state where no current is passed through, the movable portions 1b to 1d to be stacked later can hold the stack at the second tilt angle.

Next, as an example, the operation of resetting the stacking of the movable parts 1b to 1d from the second inclination angle to the first inclination angle when any of the movable parts 1a to 1c is already at the second inclination angle will be described. . For example, when the high expansion coefficient layers of the movable parts 1b to 1d that are stacked later are provided in the image display side direction, thermal expansion occurs when a current is passed through the high expansion coefficient layer. Alternatively, when the high expansion coefficient layers of the movable portions 1b to 1d laminated later are provided in the direction opposite to the image display side direction, the high expansion coefficient layer is cold-shrinked when the heat of the high expansion coefficient layer is cooled. If a voltage having the same polarity as that of the movable portions 1a to 1c already at the second inclination angle is applied to the movable electrodes 1b1 to 1d1 of the movable portions 1b to 1d stacked later, the holding force by the capacitor is lost. The movable parts 1b to 1d laminated from the above can reset the lamination to the first tilt angle.

That is, the movable parts 1a to 1d can be rotated to the first or second inclination angle by the thermal expansion force or the cold contraction force caused by current flowing or not flowing through the high expansion coefficient layers of the bimetals 45a to 45d. It can be freely held and can be held by electrostatic force.

Next, elements and effects of Modification 3 according to the present embodiment will be mainly described.

In the third modification according to the present embodiment, the drive unit can modulate the tilt angle by rotating the movable parts 1a to 1d by the thermal expansion force or the cold contraction force. Therefore, for example, it can be set as a structure with a strong repulsive force and a large change amount.

[Modification 4]
Next, a configuration of Modification 4 according to the present embodiment will be mainly described with reference to the drawings.

FIG. 52 is a cross-sectional view of the display element 10 of Modification 4 and the substrate group 7 provided around the display element 10 according to the embodiment of the present invention. FIG. 52 is provided with a fixed transparent electret 46 having a semi-permanently charged surface directed in the direction opposite to the image display side direction instead of the second fixed electrode 4 in the configuration of FIG.

The first fixed electrodes 2a to 2d, the fixed transparent electret 46, and the like correspond to the driving means of the fourth modification according to this embodiment of the present invention.

Next, an operation example of Modification 4 according to the present embodiment will be mainly described.

First, as an example, an operation of holding only one of the movable parts 1a to 1d at the first tilt angle will be described. For example, if a voltage having a reverse polarity is continuously applied sufficiently to the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d, the movable insulating portion 1a2 between the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d. Since the capacitor is formed across ˜1d2, the movable portions 1a to 1d can maintain the first tilt angle even if the application of the voltage is stopped thereafter.

Next, the operation | movement which rotates only one movable part 1a-1d from a 1st inclination angle to a 2nd inclination angle as an example is demonstrated. At this time, for example, if a voltage having a polarity opposite to the polarity of the charge-carrying surface of the fixed transparent electret 46 is applied to the movable electrodes 1a1 to 1d1 and the first fixed electrodes 2a to 2d from the power source, the movable part 1a is caused by electrostatic force. ˜1d and the first fixed electrodes 2a to 2d generate repulsive force, and the movable parts 1a to 1d and the fixed transparent electret 46 generate attractive force. Then, the movable parts 1a to 1d can approach the fixed transparent electret 46 and rotate to the second inclination angle.

Next, the operation | movement which hold | maintains only one of movable part 1a-1d to a 2nd inclination angle as an example is demonstrated. At this time, for example, if a voltage having a polarity opposite to the polarity of the charged surface of the fixed transparent electret 46 is continuously applied to the movable electrodes 1a1 to 1d1, the gap between the movable electrodes 1a1 to 1d1 and the fixed transparent electret 46 is sufficient. Since the capacitor is formed across the fixed insulating portion 3, the movable portions 1a to 1d can maintain the second tilt angle even if the application of voltage is stopped thereafter.

Next, as an example, an operation of rotating only one of the movable parts 1a to 1d from the second tilt angle to the first tilt angle will be described. At this time, for example, if a voltage having the same polarity as that of the charged surface of the fixed transparent electret 46 is applied from the power source to the movable electrodes 1a1 to 1d1, and a voltage having the opposite polarity is applied to the first fixed electrodes 2a to 2d. An attractive force is generated in the movable parts 1 a to 1 d and the first fixed electrodes 2 a to 2 d by electrostatic force, and a repulsive force is generated in the movable parts 1 a to 1 d and the fixed transparent electret 46. Then, the movable parts 1a to 1d can approach the first fixed electrodes 2a to 2d and rotate to the first inclination angle.

Next, as an example, the operation of laminating the movable parts 1b to 1d to the second inclination angle when the movable parts 1a to 1c are already at the second inclination angle will be described. For example, if a voltage having a polarity opposite to that of the movable electrodes 1a1 to 1c1 having the second inclination angle is applied to the movable electrodes 1b1 to 1d1 and the first fixed electrodes 2b to 2d to be stacked later from the power source, the electrostatic force Can rotate to the second tilt angle.

Next, as an example, an operation will be described in which when the movable parts 1a to 1c are already at the second inclination angle, the movable parts 1b to 1d also hold the stack at the second inclination angle. At this time, for example, if a voltage having a polarity opposite to that of the movable electrodes 1a1 to 1c1 already at the second inclination angle is continuously applied to the movable electrodes 1b1 to 1d1 stacked later, the movable insulating portions 1b2 to 1d2 Therefore, the second tilt angle can be maintained even if the voltage application is stopped thereafter.

Next, an operation for resetting the stacking of the movable parts 1b to 1d from the second inclination angle to the first inclination angle when the movable parts 1a to 1c are already at the second inclination angle will be described as an example. At this time, for example, a voltage having the same polarity as that of the movable electrodes 1a1 to 1c1 already at the second inclination angle is applied from the power source to the movable electrodes 1b1 to 1d1 stacked later, and the first fixed electrodes 2b to 2d have the opposite polarity. If a voltage is applied, it can rotate to the first tilt angle by electrostatic force.

That is, the movable portions 1a to 1d are changed to the first or second by the change in electrostatic force by changing the charge applied to the fixed transparent electret 46 and the polarity of the voltage applied to the movable electrodes 1a1 to 1c1 and the first fixed electrodes 2b to 2d. It is possible to rotate at an inclination angle of, and it is possible to hold it and to stack it.

Next, elements and effects of Modification 4 according to the present embodiment will be mainly described.

In the modified example 4 according to the present embodiment, the driving unit can modulate the tilt angle by rotating the movable parts 1a to 1d by the electrostatic attraction force by the electret. Moreover, the modification 4 which concerns on this embodiment can hold | maintain the inclination angle of movable part 1a-1d with the electrostatic attraction force by an electret. Therefore, for example, since the fixed transparent electret 46 having a semi-permanent charge is responsible for the rotation and holding of the movable portions 1a to 1d, it is sufficient to apply a voltage only to the movable electrodes 1a1 to 1c1 and the first fixed electrodes 2b to 2d. It is simple and can be configured to save power. In addition, since the movable parts 1a to 1d can be held by the electric charge of the fixed transparent electret 46, it is possible to make a configuration in which a decrease in holding force with time is small.

[Modification 5]
Next, a configuration of Modification Example 5 according to the present embodiment will be mainly described with reference to the drawings.

FIG. 53 is a schematic overall layout diagram of the display device 100 in Modification 5 according to the embodiment of the present invention. 53 includes a black plate 48 instead of the backlight 9 in the configuration of FIG. FIG. 54 is a cross-sectional view of the display element 10 of Modification 5 and the substrate group 7 provided around the display element 10 according to the embodiment of the present invention. 54 is provided with movable color reflective insulating portions 47a to 47c made of opaque insulating materials of red, green and blue instead of the movable insulating portions 1a2 to 1c2 in the configuration of FIG.

Next, an operation example of Modification 5 according to the present embodiment will be mainly described.

The movable color reflective insulating portions 47a to 47c and the movable insulating portion 1d2 are made of opaque insulating materials of red, green, blue and white, so that only one of them has a reflective color and white color when they are at the first tilt angle. Can be displayed. Further, when all the movable parts 1a to 1d are at the first tilt angle, the black plate 48 can be seen from the image display side direction, and black can be displayed.

That is, when all the movable parts 1a to 1d are at the first tilt angle, black display can be performed. When the movable portion 1a is at the second tilt angle and the movable portions 1b, 1c, 1d are at the first tilt angle, red reflective display can be performed. When the movable portion 1b is at the second tilt angle and the movable portions 1a, 1c, and 1d are at the first tilt angle, green reflective display can be performed. When the movable portion 1c is at the second tilt angle and the movable portions 1a, 1b, and 1d are at the first tilt angle, blue reflective display can be performed. When the movable portion 1d is at the second tilt angle and the movable portions 1a, 1b, and 1c are at the first tilt angle, white reflective display can be performed.

Next, elements and effects of Modification 5 according to the present embodiment will be mainly described.

In the modification 5 which concerns on this embodiment, the movable parts 1a-1d have a color reflection part. Moreover, in the modification 5 which concerns on this embodiment, the movable parts 1a-1d contain a red, green, and blue part. Moreover, the modification 5 which concerns on this embodiment is provided with a black part in the reverse direction to the image display side direction of the display element 10. FIG. Therefore, for example, if only one movable part 1a to 1c is at the first tilt angle, a configuration in which the three primary colors of reflective light can be displayed without stacking can be achieved. Moreover, it can be set as the structure which can express black, without laminating | stacking three movable parts 1a-1c.

[Modification 6]
Next, a configuration of Modification 6 according to the present embodiment will be mainly described with reference to the drawings.

FIG. 55 is a schematic overall layout diagram of the display device 100 in Modification 6 according to the embodiment of the present invention. FIG. 55 includes a regular triangular filled display element array 50 in which a plurality of regular triangular prism-shaped display elements 49 are arranged in a regular triangular filled form instead of the display element array 11 in the configuration of FIG. FIG. 56 is a three-dimensional perspective view of a regular triangular prism display element 49 of Modification 6 according to the embodiment of the present invention. Referring to FIG. 56, the equilateral triangular prism-shaped display element 49 includes movable parts 1a to 1c which are inner side parts arranged side by side on the substantially equilateral triangles, and each of the substantially equilateral triangles which are one round surrounding them. Hinges 8a to 8c are provided that are surrounded by first fixed electrodes 2a to 2c, which are outer side portions arranged side by side, and are connected to the side edges of the movable portions 1a to 1c in the image display side direction. Yes. The regular triangular prism display element 49 has a substantially triangular plate-like fixed insulating portion 51 made of a substantially triangular plate-like transparent insulating material at the bottom on the image display side, and a substantially triangular shape on the further image display side of the substantially triangular plate-like fixed insulating portion 51. A substantially triangular plate-like fixed electrode 52 made of a plate-like transparent conductive material is provided.

Next, an operation example of Modification 6 according to the present embodiment will be mainly described.

As described above, since the movable insulating portions 1a2 to 1c2 are made of a transparent insulating material of cyan, magenta, and yellow, the backlight 9 emits light when it is at the first tilt angle, thereby displaying a color as a light emitting display. In addition, two colors are stacked and the backlight 9 emits light to display red, green, and blue, and three colors are stacked to display black.

That is, when all the movable parts 1a to 1c are at the first tilt angle, the backlight is emitted, and white light emitting display can be performed. When the movable portion 1a is at the second tilt angle and the movable portions 1b and 1c are at the first tilt angle, the backlight 9 is caused to emit light so that a cyan light emitting display can be performed. When the movable portions 1a and 1b are at the second tilt angle and the movable portion 1c is at the first tilt angle, the backlight 9 is caused to emit light and blue light emitting display can be performed. When all the movable parts 1a to 1c are at the second tilt angle, black display can be performed. When the movable portions 1a and 1c are at the second tilt angle and the movable portion 1b is at the first tilt angle, the backlight 9 is caused to emit light and a green light emitting display can be performed. When the movable portion 1b is at the second tilt angle and the movable portions 1a and 1c are at the first tilt angle, the backlight 9 is caused to emit light so that magenta light-emitting display can be performed. When the movable portions 1b and 1c are at the second tilt angle and the movable portion 1a is at the first tilt angle, the backlight 9 is caused to emit light and a red light emitting display can be performed. When the movable portion 1c is at the second tilt angle and the movable portions 1a, 1b are at the first tilt angle, the backlight 9 is caused to emit light and yellow light-emitting display can be performed.

Next, elements and effects of Modification 6 according to the present embodiment will be mainly described.

In the modification 6 which concerns on this embodiment, the movable parts 1a-1c are equipped along with each side of a substantially equilateral triangle. Therefore, for example, it is not necessary to provide the movable part 1d and the hinge 8d, and the cost can be reduced.

[Modification 7]
Next, a configuration of Modification Example 7 according to the present embodiment will be mainly described with reference to the drawings.

FIG. 57 is a cross-sectional view of the display element 10 of Modification 7 and the substrate group 7 provided around the display element 10 according to the embodiment of the present invention. 57 includes hinge mechanisms 53a to 53d made of a conductive material instead of the hinges 8a to 8d in the configuration of FIG. FIG. 58 is a three-dimensional perspective view of the hinge mechanisms 53a to 53d, the movable portions 1a to 1d, and the second substrates 6a to 6d of Modification 7 according to the embodiment of the present invention. Referring to FIG. 58, the hinge mechanisms 53a to 53d have shaft holes and are separated from the fixing parts 53a1 to 53d1 connected to the second substrates 6a to 6d and the fixing parts 53a1 to 53d1, and are rotatably inserted into the shaft holes. And shaft rods 53a2 to 53d2 connected to the movable portions 1a to 1d.

  Next, an operation example of Modification 7 according to the present embodiment will be mainly described.

When the rotating force is applied to the movable parts 1a to 1d, the hinge mechanisms 53a to 53d rotate the shaft bars 53a2 to 53d2 together with the movable parts 1a to 1d, thereby achieving a hinge effect by a so-called mechanical structure. The movable parts 1a to 1d are rotatable about the hinge mechanisms 53a to 53d, respectively.

Next, elements and effects of Modification Example 7 according to the present embodiment will be mainly described.

In Modification Example 7 according to this embodiment, the display element 10 includes hinge mechanisms 53a to 53d. Therefore, for example, since the hinge mechanisms 53a to 53d have a mechanical structure, the elasticity is very small, and the force that cancels the holding of the tilt angles of the movable parts 1a to 1d can be made difficult.

In addition, this invention is not limited to the above embodiment, It can implement similarly also as follows.

Any part of the movable part may be colored, and for example, it may be replaced with a colored movable electrode and a transparent movable insulating part. The color may be any color, and may be replaced with, for example, purple, pink, fluorescent, metallic gloss, structural color, or any other suitable color. Further, the area where the display light is incident may be increased by changing the tilt angle rotating in any direction. For example, the area where the display light is incident is changed at least by changing the tilt angle rotating in the direction opposite to the image display side direction. It may be replaced by an increase.
Further, it may be provided at any position, and for example, it may be replaced by one provided on each side of a substantially hexagonal shape or any other appropriate position. Further, it may be any shape, and may be replaced with, for example, a substantially circular plate shape, a substantially octagonal plate shape, or any other appropriate shape. It may be anything, and may be replaced by, for example, a mirror, a dichroic mirror, a beam splitter, a long pass filter, a short pass filter, a band pass filter, or any other appropriate one. Further, any number, any combination, any number, and any number may be used.

The driving means may be any one, and may be replaced with one driven by, for example, a piezoelectric effect, compressed gas, shape memory alloy, or the like, or may be combined in whole or in part.

The first fixed electrode may be of any type, and may be replaced with, for example, a conductive material plated on the surface of an insulating material such as a resist, or any other appropriate one.

The hinge may be anything, such as a non-elastic hinge, a hinge made of an insulating material with a built-in or surface-mounted wiring, etc., or any other suitable one. .

The backlight may be any type, for example, one or more display elements that are divided into individual display elements that can be individually turned on / off or modulated in light intensity, or any other suitable one. May be.

The substrate group and the transparent substrate are optional elements and are not essential elements, and thus may not be provided, or may be anything.

DESCRIPTION OF SYMBOLS 1a: Movable part 1a1: Movable electrode 1a2: Movable insulating part 1b: Movable part 1b1: Movable electrode 1b2: Movable insulating part 1c: Movable part 1c1: Movable electrode 1c2: Movable insulating part 1d: Movable part 1d1: Movable electrode 1d2: Movable Insulating part 2a: first fixed electrode (driving means)
2b: First fixed electrode (driving means)
2c: first fixed electrode (driving means)
2d: first fixed electrode (driving means)
3: Fixed insulation part 4: 2nd fixed electrode (drive means)
5: 1st board | substrate 6a: 2nd board | substrate 6b: 2nd board | substrate 6c: 2nd board | substrate 6d: 2nd board | substrate 7: Board | substrate group 8a: Hinge 8b: Hinge 8c: Hinge 8d: Hinge 9: Backlight 10: Display element 11 : Display element array 12: transparent substrate 13: first transparent conductive layer 14: first transparent insulating layer 15: first etching mask 16: first lift-off mask 17: second transparent conductive layer 18: second transparent insulating layer 19: 1st vapor deposition mask 20: 1st conductive elastomer layer 21: 2nd etching mask 22: 2nd lift-off mask 23: 2nd conductive elastomer layer 24: 2nd vapor deposition mask 25: 1st sacrificial layer 26: 3rd transparent conductive Layer 27: first cyan transparent insulating layer 28: third etching mask 29: second sacrificial layer 30: third lift-off mask 31: fourth transparent conductive layer 32: second cyan color Transparent insulating layer 33: third sacrificial layer 34: third deposition mask 35: thick film resist layer 36: photomask 37a: movable color transparent electrode 37b: movable color transparent electrode 37c: movable color transparent electrode 37d: movable white opaque electrode 38a : Movable insulation stopper 38b: Movable insulation stopper 38c: Movable insulation stopper 38d: Movable insulation stopper 39a: Movable electromagnet 39b: Movable electromagnet 39c: Movable electromagnet 39d: Movable electromagnet 40a: First fixed permanent magnet (drive means)
40b: First fixed permanent magnet (driving means)
40c: 1st fixed permanent magnet (drive means)
40d: First fixed permanent magnet (driving means)
41: Second fixed permanent magnet (driving means)
42a: Movable permanent magnet 42b: Movable permanent magnet 42c: Movable permanent magnet 42d: Movable permanent magnet 43a: Movable color transparent part 43b: Movable color transparent part 43c: Movable color transparent part 43d: Movable white opaque part 44: Fixed transparent part 45a : Bimetal (drive means)
45b: Bimetal (driving means)
45c: Bimetal (driving means)
45d: Bimetal (driving means)
46: Fixed transparent electret (driving means)
47a: Movable color reflection insulating part 47b: Movable color reflection insulating part 47c: Movable color reflection insulating part 48: Black plate 49: Regular triangular columnar display element 50: Regular triangular filled display element array 51: Triangular plate fixed insulating part 52: Triangular plate-shaped fixed electrode 53a: hinge mechanism 53a1: fixed portion 53a2: shaft bar 53b: hinge mechanism 53b1: fixed portion 53b2: shaft bar 53c: hinge mechanism 53c1: fixed portion 53c2: shaft bar 53d: hinge mechanism 53d1: fixed portion 53d2: Shaft bar 100: Display device

Claims (38)

A display device having a display screen in which a plurality of display elements are arranged, wherein each display element modulates an area on which display light is incident due to a change in an inclination angle, each of which is at least parallel to the display screen. A plurality of movable parts provided in the above directions for reflecting or absorbing the display light having different wavelength bands; and a driving means capable of modulating the tilt angle by rotating the movable parts. A display device that modulates a display by modulating an area of the display light incident on the movable portion and modulating a wavelength band of the display light reflected or absorbed by the movable portion. The display device according to claim 1, wherein the display light includes external light. The display device according to claim 1, wherein a backlight is provided in a direction opposite to the image display side direction of the display element, and the display light includes backlight light. The display device according to claim 3, wherein light intensity of the backlight can be modulated. The display device according to claim 1, wherein the movable portion rotates at least perpendicularly to the display screen. 6. The display device according to claim 1, wherein an area on which the display light is incident is increased by a change in an inclination angle of the movable portion rotating at least in an image display side direction. . The display device according to claim 1, wherein the movable portion includes a color transparent portion. The display device according to claim 1, wherein the movable portion includes cyan, magenta, and yellow portions. The display device according to claim 1, wherein the movable portion includes a white portion. The display device according to claim 1, wherein a plurality of the movable parts are stacked perpendicular to the display screen. The display device according to claim 1, wherein the movable portion is a cantilever beam. The display device according to claim 1, wherein the display element includes a hinge. 13. The display device according to claim 1, wherein each of the movable parts is provided in at least four directions parallel to the display screen. The display device according to claim 1, wherein the movable portion is provided side by side on each side of a substantially square. The display device according to claim 1, wherein the movable portion is provided on a side of a two-dimensional figure of phase dimension 2 filled in a plane. The display device according to claim 1, wherein the driving unit is capable of modulating the tilt angle by rotating the movable portion by electrostatic force. The movable part has a movable electrode, and the display element has a plurality of first fixed electrodes each provided in at least three directions parallel to the display screen, and the display element is at least in the image display side direction, The display device according to claim 16, comprising at least a transparent second fixed electrode. The display device according to claim 17, wherein the first fixed electrode is provided on a side of a two-dimensional figure of phase dimension 2 filled in a plane. The display device according to claim 18, wherein the first fixed electrodes are arranged side by side on substantially square sides. 20. The display device according to claim 1, wherein an inclination angle of the movable portion can be held by an electrostatic attraction force by a capacitor. 21. The display device according to claim 20, wherein a capacitor is formed between the movable part and the first fixed electrode, and an inclination angle of the movable part can be held by an electrostatic attraction force. . The display device according to claim 21, wherein the movable portion has a movable insulating portion in a direction opposite to a rotation direction of the movable electrode in the image display side direction. 23. The tilt angle of the movable part can be maintained by an electrostatic attraction force by forming a capacitor between the movable part and the second fixed electrode. The display apparatus of any one of them. 24. The display device according to claim 23, wherein the display element includes a fixed insulating portion that is at least transparent in a direction opposite to an image display side direction of the second fixed electrode. The movable part has a movable insulating stopper, and the movable insulating stopper is in contact with and supported, so that the tilt angle of the movable part can be held by an electrostatic attraction force by a capacitor in which the electrodes are kept at a distance. The display device according to any one of claims 1 to 24, wherein: The display device according to any one of claims 1 to 25, wherein the driving unit is capable of modulating the tilt angle by rotating the movable portion by electromagnetic force. 27. The display device according to claim 1, wherein an inclination angle of the movable part can be held by a magnetic force. The said drive means can rotate the said movable part with a thermal expansion force or a cold contraction force, and can modulate an inclination angle, The any one of Claims 1 thru | or 27 characterized by the above-mentioned. Display device. The display according to any one of claims 1 to 28, wherein the driving means is capable of modulating the tilt angle by rotating the movable portion by an electrostatic attraction force by an electret. apparatus. 30. The display device according to claim 1, wherein an inclination angle of the movable portion can be held by an electrostatic attraction force by an electret. The display device according to any one of claims 1 to 30, wherein the movable portion includes a color reflection portion. 32. The display device according to claim 1, wherein the movable portion includes red, green, and blue portions. The display device according to claim 1, further comprising a black portion in a direction opposite to the image display side direction of the display element. The display device according to any one of claims 1 to 33, wherein the movable portion is provided side by side on each side of a substantially equilateral triangle. The display device according to claim 1, wherein the display element has a mechanical hinge. A method of manufacturing a display device, wherein the movable portion is formed by etching, lift-off, or mask vapor deposition. 37. The method of manufacturing a display device according to claim 36, wherein the movable portion is formed in a state where a plurality of the movable portions are stacked vertically with respect to the display screen. 38. The method of manufacturing a display device according to claim 36, wherein the movable portion is separated from a portion other than the connected portion by sacrificial layer etching.

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