JPWO2021145034A1 - - Google Patents

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Publication number
JPWO2021145034A1
JPWO2021145034A1 JP2021570646A JP2021570646A JPWO2021145034A1 JP WO2021145034 A1 JPWO2021145034 A1 JP WO2021145034A1 JP 2021570646 A JP2021570646 A JP 2021570646A JP 2021570646 A JP2021570646 A JP 2021570646A JP WO2021145034 A1 JPWO2021145034 A1 JP WO2021145034A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021570646A
Other versions
JP7371700B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of JPWO2021145034A1 publication Critical patent/JPWO2021145034A1/ja
Application granted granted Critical
Publication of JP7371700B2 publication Critical patent/JP7371700B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
    • G01B9/02095—Speckle interferometers, i.e. for detecting changes in speckle pattern detecting deformation from original shape
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G01B9/02098—Shearing interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/041—Analysing solids on the surface of the material, e.g. using Lamb, Rayleigh or shear waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/043—Analysing solids in the interior, e.g. by shear waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/12—Analysing solids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/34—Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
    • G01N29/348—Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor with frequency characteristics, e.g. single frequency signals, chirp signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/4454—Signal recognition, e.g. specific values or portions, signal events, signatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/023—Solids
    • G01N2291/0234—Metals, e.g. steel
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/0289—Internal structure, e.g. defects, grain size, texture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/262—Linear objects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP2021570646A 2020-01-17 2020-10-12 欠陥検査装置および欠陥検査方法 Active JP7371700B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020005696 2020-01-17
JP2020005696 2020-01-17
PCT/JP2020/038469 WO2021145034A1 (ja) 2020-01-17 2020-10-12 欠陥検査装置および欠陥検査方法

Publications (2)

Publication Number Publication Date
JPWO2021145034A1 true JPWO2021145034A1 (ja) 2021-07-22
JP7371700B2 JP7371700B2 (ja) 2023-10-31

Family

ID=76864127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021570646A Active JP7371700B2 (ja) 2020-01-17 2020-10-12 欠陥検査装置および欠陥検査方法

Country Status (4)

Country Link
US (1) US20230062821A1 (ja)
JP (1) JP7371700B2 (ja)
CN (1) CN114930168A (ja)
WO (1) WO2021145034A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020129209A1 (ja) * 2018-12-20 2020-06-25 株式会社島津製作所 欠陥検査装置および欠陥検査方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07243846A (ja) * 1994-01-11 1995-09-19 Nikon Corp 変位測定プローブ
JP2000088815A (ja) * 1998-09-16 2000-03-31 Nkk Corp 非導電性材料の超音波探傷方法
JP2002055092A (ja) * 2000-08-10 2002-02-20 Mitsubishi Electric Corp 構造物診断方法および構造物診断装置
JP2014226318A (ja) * 2013-05-22 2014-12-08 オリンパス株式会社 超音波治療装置
WO2015122308A1 (ja) * 2014-02-17 2015-08-20 オリンパス株式会社 超音波処置装置
WO2017221324A1 (ja) * 2016-06-21 2017-12-28 株式会社島津製作所 音波伝搬映像化装置及び方法
US20190383774A1 (en) * 2017-01-13 2019-12-19 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Method of and system for performing detection on or characterization of a sample

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04323553A (ja) * 1991-04-23 1992-11-12 Nippon Steel Corp 超音波共振探傷方法および装置
JP2001280943A (ja) * 2000-03-29 2001-10-10 Osaka Gas Co Ltd 管路検査方法
JP4065937B2 (ja) * 2002-01-11 2008-03-26 ソニックス株式会社 固体の共振モード検出方法および装置、並びに固体の弾性定数測定方法および装置
JP6451695B2 (ja) * 2016-06-02 2019-01-16 株式会社島津製作所 欠陥検査方法及び欠陥検査装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07243846A (ja) * 1994-01-11 1995-09-19 Nikon Corp 変位測定プローブ
JP2000088815A (ja) * 1998-09-16 2000-03-31 Nkk Corp 非導電性材料の超音波探傷方法
JP2002055092A (ja) * 2000-08-10 2002-02-20 Mitsubishi Electric Corp 構造物診断方法および構造物診断装置
JP2014226318A (ja) * 2013-05-22 2014-12-08 オリンパス株式会社 超音波治療装置
WO2015122308A1 (ja) * 2014-02-17 2015-08-20 オリンパス株式会社 超音波処置装置
WO2017221324A1 (ja) * 2016-06-21 2017-12-28 株式会社島津製作所 音波伝搬映像化装置及び方法
US20190383774A1 (en) * 2017-01-13 2019-12-19 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Method of and system for performing detection on or characterization of a sample

Also Published As

Publication number Publication date
WO2021145034A1 (ja) 2021-07-22
US20230062821A1 (en) 2023-03-02
CN114930168A (zh) 2022-08-19
JP7371700B2 (ja) 2023-10-31

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